Oerlikon Rogers LEAK
Oerlikon Rogers LEAK
Oerlikon Rogers LEAK
Dr Graham Rogers
Marketing advantage
Medicine technology
IT
Mass spectrometer
systems
Electron beam
microscopes
Transfer chambers
Load looks
Tubing
Automotive
Power engineering
Vacuum equipment
Power turbine
Power condenser
High voltage components
R&D
Process industry
Furnaces
Soldering ovens
High pressure valves
AC
Brake tubing
Heat exchanger
Fuel tanks
Compressors
Evaporators
Valves
Thermostat
Pacemaker
Electron microscope
X-ray tubes
Ampulla
He bath cooler
3He cooler
Lon beam accelerators
UHV ^/XHV systems
He transfer lines
p
Q
.V
t
Q = Troughput
1mbar . I . s
V = Volume
p = pressure difference
t = time difference
Volume of 1 liter
time /s
1,7x10-1 mbarl/s
1x10-2 mbarl/s
4x10-5 mbarl/s
Medium
Limit of leak
rate mbarl/s
Pressure
range
Rise pressure
10-4 Vacuum
Limited
Pressure drop
10-4 Overpressure
Limited
Foaming agent
10-5 Overpressure
No
Bubble test
10-4 Overpressure
Limited
Supersonic
10-2 Overpressure/
Low pressure
No
Thermal conductivity
10-5 Overpressure/
Low pressure
No
Mass spectrometer
quadruppole
Refrigerents;
gases
10-7 Overpressure
Yes
Mass spectrometer
magnet sector field
Helium
Hydrogen
<10-7 Overpressure
Yes
Mass spectrometer
magnet sector field
Helium
Hydrogen
Quantifiable
Yes
c) Leak + Desorbtion
Time : t = 5 min
QL = ??
v
Q .p[mbar I s 1 ]
t
1000 I
7 103 mbar
300S
Air leak rate
2,33.102 mbar.I .s 1
p p2 p1 8.103 1.103 7.103 mbar
1
3 Leak detector
Test unit
Helium
(under vacuum)
2
4 Helium
5 Auxiliary Pump System
4
3
1 Vacuum chamber
2 Test body
3 Leak detector
4 Helium
4
3
1 Spray gun
2 Test body
3 Leak detector
4 Helium
5 Auxiliary Pump System (for large vessels)
4
3
1 Sniffer probe
2 Test vessel
3 Leak detector
4 Helium
2
kgh-1
(0 C)
Cm3/h
(NTP)
Cm3/s
(NTP)
Torr. l/s
g/a
(F12.20C)
g/a
(F12.25C
)
m.cfm
lusec
Pa.1/s
slpm
4.28.10-3
4.59.10-3
3554
0.987
0.75
1.56.105
1.54.105
1593
7.52.102
100
59.2.10-3
Kg.h-1(20c)
234
1.073
8.31.105
231
175
37.2.104
1.75.105
23.4.103
13.86
Kg.h-1 (0c)
218
0.932
7.74.105
215
163
34.6.104
1.63 105
21.8 103
12.91
2.81 10-4
1.20 10-6
1.29 10-6
2.78 10-
2.11 10-4
44
44.7 10-2
2.11 10-1
2.81 10-2
1.66 10-5
1.013
4.33.10-3
4.65.10-3
3600
0.760
1.58.105
1611
760
101
6.10-2
1.33
5.70.10-3
6.12.10-3
4727
1.32
2.08.105
2.05.105
2119
1.103
133
78.8.10-3
g/a
(F12.20C)
6.39.10-6
2.27.10-2
6.31.10-6
4.80.10-6
10.2.10-3
4.8.10-3
6.39.10-4
37.9.10-8
g/a
(F12.25C)
6.50.10-6
4.88.10-6
10.4.10-3
4.89.10-3
6.5.10-4
38.5.10-8
m.cfm
6.28.10-4
2.69.10-6
2.89 . 10-6
2.24
6.21.10-4
4.72.10-4
98.16
96.58
0.472
6.28.10-2
37.2.10-6
Lusec
1.33.10-3
5.70.10-6
6.12.10-6
4.737
1.32.10-3
1.10-3
208
205
2.12
13.3.10-2
78.8.10-6
Pa.l/s
1.10-2
4.28.10-5
4.59.10-5
35.54
9.87.10-3
7.5.10-3
1.56.103
1.54.103
15.93
7.50
59.2.10-5
slpm
16.88
72.15.10-3
77.45.10-3
60.08.103
16.67
12.69
2.64.106
2.60.106
26.9.103
12.7.103
16.9.102
mbar.I/s
Cm3/h
(NTP)
cm3/s (NTP)
Torr.1/s
kgh-1
(20 C)
mbar l/s
cm3 (NTP)=1
cm3 under
1
normal condition (T=273.15K; P=1013.25 mbar)
NTP=Normal temperature and pressure (1atm; 0 C) R=83.14 mbar.1.mol-1. K-1
1cm3 (NTP) h-1 = 1 atm. cm3. h-1 = Ncm3. h-1 = 1 std cch
1sccm=10-3 slpm=10-3 N.I.min-1=60sccs
SI-System kohrent: 1 pa.m3. s-1 = 10 mbar.1.s-1; R=8.314 pa.m3.mol-1.K-1 ;M in kg / mol
1 cm3 (NTP) . s-1= 1 sccs = 60cm3 (NTP). Min-1 60 SCCM =60 Std ccm = 60 Ncm 3. min-1
1 lusec =1 l..s.-1 1.=1 micron =10-3 Torr 1 lusec = 10-3 Torr.I.s-1
Freon F 12 (CC12FC) M=120.92 g.mol-1; Luft M=28.96g. Mol-1
Achtung: Anglo-amerikanische Einheiten werden uneinheitlich abgekrzt! Beispiel: Standard cubic centimeter per minute sccm = sccpm = std ccm = std ccpm