Non-Traditional Micromachining Processes: Golam Kibria B. Bhattacharyya J. Paulo Davim Editors

Materials Forming, Machining and Tribology
Golam Kibria
B. Bhattacharyya
J. Paulo Davim Editors
Non-traditional
Micromachining
Processes
Fundamentals and Applications
Series editor
J. Paulo Davim, Aveiro, Portugal
More information about this series at http://www.springer.com/series/11181
Golam Kibria B. Bhattacharyya
•
J. Paulo Davim
Editors
Non-traditional
Micromachining Processes
123
Editors
Golam Kibria J. Paulo Davim
Department of Mechanical Engineering Department of Mechanical Engineering
Aliah University University of Aveiro
Kolkata Aveiro
India Portugal
B. Bhattacharyya
Department of Production Engineering
Jadavpur University
Kolkata
India
ISSN 2195-0911 ISSN 2195-092X (electronic)

ISBN 978-3-319-52008-7 ISBN 978-3-319-52009-4 (eBook)
DOI 10.1007/978-3-319-52009-4
Library of Congress Control Number: 2016963424
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Preface
Since the last decade, the major research challenges and developments around the
globe are to manufacture microcomponents with high accurate of microfeatures
which have geometrical dimensions even less than tens of microns. It is obvious
that the demand of microcomponents is diversely increasing day by day in the field
of aviation, automotive, biomedical, optical, electronics, and energy sectors. This
wide range of applications of microcomponents brings the necessity to develop
promising micromachining technologies which can yield high degree of precision,
improved machining rate with accurate geometrical dimensions, reliability, flexi-
bility, and after all environment friendly. Moreover, the developments of material
science provide materials which have enormous material properties especially in
their machinability and hardness. In this situation, it is the task of manufacturer
engineers to develop micromachining processes, both traditional and non-
traditional, which can fulfill the demands of microproduct having several micro-
and nanofeatures.
In the area of non-traditional micromachining processes, few books are avail-
able. These books mostly describe numerical and experimental research details at
different stages. However, it is the most important task at this stage to gain the
fundamental knowledge about different non-traditional micromachining processes.
Not only that, but it is also important to be acquainted with the capabilities and
applications of these micromachining processes in various product manufacturing.
Moreover, several hybrid micromachining processes have also been developed to
improve the surface integrity, geometrical accuracy, and machining efficiency. The
present book entitled “Non-traditional Micromachining Processes—Fundamentals
and Applications” will definitely fulfill the gap between the demand of microfea-
tured components and successful micromachining of these products.
This book starts with introduction of various micromachining processes, espe-
cially, non-traditional, with recent research and developments in each processes.
Further, mechanical type micromachining process such as micro-USM is presented
with mechanism of material removal, types and technologies of micro-USM and
recent research advancements. Then, electro-thermal processes such as
micro-EDM, wire-EDM, micromachining using laser beam (micro-turning,
v
vi Preface
micro-cutting, etc) were discussed. Further, electrochemical micromachining pro-

cess was discussed for micromachining and micro fabrication of various complex
and high accuracy profiles. Then, hybrid type micromachining such as micro
electrochemical discharge machining processes were presented. Chapter 1 gives an
overview of various micromachining processes including various hybrid and
nanofinishing processes with their applications, working principles, challenges in
scaling down a macro machining process to a micromachining process, and some
recent developments in each category of process. Chapter 2 describes the overview
of microultrasonic machining process with brief description of process parameters,
system details, and recent development and research challenges for micromachining
of intricate parts with high degree of accuracy and surface profile. Chapter 3
describes the overview of EDM and micro-EDM process with details of significant
process parameters and experimental investigation with analysis of microhole
machining process utilizing some novel machining strategies such as microtool
rotation, polarity changing, utilization of deionized water as dielectric, implemen-
tation of boron carbide additives into dielectrics. In Chap. 4, a brief introduction of
microwire electrical discharge machining (MWEDM) is presented with details of
micromachining system, wire failure prevention, detailed analysis of charging and
discharging circuits, and details of wire lag and vibration phenomena during
micromachining of complex geometrical components. Chapter 5 deals with the
experimental investigation and analysis on pulsed Nd:YAG laser microturning
process of aluminum oxide ceramics. This process is new in the category of laser
micromachining process, and a lot of research and developments are still needed for
exploring the capabilities of pulsed Nd:YAG laser for obtaining high precision
microparts with required surface finish. In Chap. 6, the overall concept of fiber laser
micromachining and influence of machining process parameters on geometrical
accuracy of microparts is presented. The chapter also describes various microma-
chining processes such as microcutting, microdrilling, engraving, and marking
using fiber laser systems on wide range of materials from polymer to ceramics. In
Chap. 7, in-depth experimental study and analysis are carried out during laser beam
cutting of Inconel 625 superalloy at dry condition to explore the influence of
various process parameters on kerf width utilizing pulsed Nd:YAG laser micro-
machining system. In Chap. 8, fundamental of anodic dissolution of microelec-
trochemical machining is presented with brief overview of significant process
parameters and important techniques for improving the machining accuracy and
reliability by implementing novel geometry of microtool and its insulation during
microchannel formation using EMM process. Chapter 9 presents a detailed over-
view of electrochemical micromachining of titanium and its alloy and the effect of
process parameters on feature profile during maskless and through mask EMM.
Chapter 10 provides the fundamental aspect of microelectrochemical discharge
machining process and description of machining system and process parameters.
The chapter also describes the research and development carried out around the
globe in microdrilling and microcutting using micro-ECDM. Chapter 11 presents
the overview of travel wire electrochemical spark machining (TWECSM), the
development of micromachining setup, brief discussion of process parameters, and
Preface vii
parametric effect on machining rate and spark gap width during machining of glass
fiber epoxy composite.
This book offers a comprehensive treatment of various non-traditional micro-
machining techniques and future directions representing a valuable reference to
engineers and R&D researchers involved in micromachining. The present book can
also be used as a research book for final undergraduate engineering course or as a
topic on micromachining processes at the postgraduate level. Also, this book can
serve as a useful reference for academics, researchers, mechanical, manufacturers,
industrial and materials engineers, professionals in micromachining processes and
related industries. The scientific interest in this book is evident from many
important centers of the research, laboratories, universities as well as industries.
Therefore, it is hoped that this book will inspire and enthuse others to undertake
research in non-traditional micromachining processes.
The editors acknowledge Springer for this opportunity and for their enthusiastic
and professional support. Finally, we would like to thank all the chapter authors for
their availability for this work.
Kolkata, India Golam Kibria

Kolkata, India B. Bhattacharyya
Aveiro, Portugal J. Paulo Davim
Acknowledgements
This book has become a reality due to the constant inspirations and encouragement
received from the senior professors and colleagues like Dr. B. Doloi, Dr. D. Banerjee,
and Dr. B.R. Sarkar of Production Engineering Department, Jadavpur University,
Kolkata; Dr. B.B. Pradhan and Mr. I. Shivakoti of Sikkim Manipal Institute of
Technology, Sikkim, India. The editors would like to convey warm regards to
Dr. A. Manna, Dr. S. Dhobe, Dr. V.U. Rathod, Dr. Sandip S. Anasane, Dr. Josephine
Peter, Dr. Mukandar Sekh, Dr. Shamim Haider, and Mr. Omar Faruk Biswas for
constant support and active participation in preparing the manuscripts of this book.
Financial support from the University Grants Commission (UGC), All India
Council for Technical Education (AICTE), Department of Science and Technology
(DST), and Council of Scientific and Industrial Research (CSIR) for carrying out
research in this area has proved to be useful for utilizing research outcomes to
enrich this book.
The editors acknowledge Springer for this opportunity and for their enthusiastic
and professional support. The team members of Springer like Guido Zosimo
Landolfo, Editorial Director; Dr. Dieter Merkle, Springer International Publishing
(Physical Sciences and Engineering); and Dr. Mayra Castro, Applied Sciences
Editorial and Senior Publishing Editor of Springer have put their constant effort in
transforming this book into its final shape. Finally, I would like to thank all the
chapter authors for their availability for this work.
Kolkata, India Golam Kibria

Kolkata, India B. Bhattacharyya
Aveiro, Portugal J. Paulo Davim
January 2017
ix
Contents
1 Non-traditional Micromachining Processes: Opportunities

and Challenges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
S. Debnath, S. Kunar, S.S. Anasane and B. Bhattacharyya
2 Recent Advancement on Ultrasonic Micro Machining
(USMM) Process . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61
S. Das, B. Doloi and B. Bhattacharyya
3 Electrical Discharge Micro-hole Machining Process
of Ti–6Al–4V: Improvement of Accuracy and Performance . . . . . . 93
Golam Kibria, I. Shivakoti, B.B. Pradhan and B. Bhattacharyya
4 Advancements in Micro Wire-cut Electrical Discharge
Machining . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 145
Asit Baran Puri
5 Laser Micro-turning Process of Aluminium Oxide Ceramic
Using Pulsed Nd:YAG Laser . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 179
Golam Kibria, B. Doloi and B. Bhattacharyya
6 Fiber Laser Micro-machining of Engineering Materials. . . . . . . . . . 227
A. Sen, B. Doloi and B. Bhattacharyya
7 Laser Beam Micro-cutting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 253
N. Roy, A.S. Kuar and S. Mitra
8 Electrochemical Micromachining (EMM): Fundamentals
and Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 275
V. Rathod, B. Doloi and B. Bhattacharyya
9 Electrochemical Micromachining of Titanium
and Its Alloys. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 337
Sandip S. Anasane and B. Bhattacharyya
xi
xii Contents
10 Electrochemical Discharge Micro-machining of Engineering

Materials . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 367
B.R. Sarkar, B. Doloi and B. Bhattacharyya
11 Travelling Wire Electrochemical Spark Machining:
An Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 393
Anup Malik and Alakesh Manna
Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 413
Editors and Contributors
About the Editors

Dr. Golam Kibria is an assistant professor in the Department of Mechanical Engineering in Aliah
University, Kolkata, India. He completed his M.Tech. in Production Engineering from Jadavpur
University, Kolkata in 2008 and Ph.D. from Jadavpur University, Kolkata, in 2014. He has worked
as a senior research fellow (SRF) in Council of Scientific and Industrial Research (CSIR)-spon-
sored project from 2008 to 2011. His research interests include non-conventional machining
processes, micromachining, and advanced manufacturing and forming technology. He is a life
member of The Institution of Engineers (IEI), India. He is the author of several chapters on
internationally recognized book publishers such as Elsevier, Springer, and Nova Publishers. He
has also published 26 International and national research papers in various reputed journals and 37
research papers in reputed national and international conference proceedings. He is an editorial
board member as well as a reviewer of a number of reputed international journals, namely Optics
and Laser Technology, International Journal of Advanced Manufacturing Technology,
Manufacturing Review, and International Journal of Physical Sciences. In his credit, he has
received I.S.T.E. National Award for Best M.Tech. Thesis in Mechanical Engineering in 2008. He
also received the Institution Prize (Gold Medal) of 2008–2009 from The Institution of Engineers
(India) for the best paper.
B. Bhattacharyya is a professor and ex-head of the Production Engineering Department and

coordinator of Center of Advance Study Programme under University Grants Commission and
Quality Improvement Programme under AICTE of Jadavpur University. His research areas include
non-traditional machining, micromachining, and advanced manufacturing systems. He has pub-
lished 108 research papers in National and International Journals and 271 research papers in National
and International Conferences. He has published several chapters and conference proceedings.
Recently, he has published one book titled “Electrochemical Micromachining for Nanofabrication,
MEMS and Nanotechnology,” William Andrew Applied Science Publishers, Micro and Nano
Technologies Series, Elsevier Inc, USA. Several Ph.D. theses have been completed under his
guidance. He has completed several research projects. He is recipient of various awards, e.g., Gold
Medal and Certificate of Achievements for research papers and thesis as well as the Career Award
of the UGC, New Delhi.
J. Paulo Davim received his Ph.D. in Mechanical Engineering in 1997, M.Sc. degree in
Mechanical Engineering (materials and manufacturing processes) in 1991, Licentiate degree (5
years) in Mechanical Engineering in 1986, from the University of Porto (FEUP), the Aggregate
title from the University of Coimbra in 2005, and a D.Sc. from London Metropolitan University in
2013. He is Eur Ing and Senior Chartered Engineer by the Portuguese Institution of Engineers with
xiii
xiv Editors and Contributors
a MBA and Specialist title in Engineering and Industrial Management. Currently, he is a professor
at the Department of Mechanical Engineering of the University of Aveiro. He has more than 30
years of teaching and research experience in Manufacturing, Materials, and Mechanical
Engineering with special emphasis in Machining and Tribology. Recently, he has also interest in
Management/Industrial Engineering and Higher Education for Sustainability/Engineering
Education. He has received several scientific awards. He has worked as a evaluator of projects
for international research agencies as well as an examiner of Ph.D. thesis for many universities. He
is the editor in chief of several international journals, guest editor of journals, books editor, book
series editor, and scientific advisory for many international journals and conferences. Presently, he
is an editorial board member of 30 international journals and acts as a reviewer for more than 80
prestigious Web of Science journals. In addition, he has also published as editor (and co-editor)
more than 80 books and as author (and co-author) more than 10 books, 60 chapters, and 350
articles in journals and conferences (more than 200 articles in journals indexed in Web of
Science/h-index 35+ and SCOPUS/h-index 44+).
Contributors
Sandip S. Anasane Department of Production Engineering and Industrial
Management, College of Engineering Pune, Pune, India
B. Bhattacharyya Production Engineering Department, Jadavpur University,
Kolkata, India
S. Das Production Engineering Department, Jadavpur University, Kolkata, India
S. Debnath Production Engineering Department, Jadavpur University, Kolkata,
India
B. Doloi Production Engineering Department, Jadavpur University, Kolkata, India
Golam Kibria Mechanical Engineering Department, Aliah University, Kolkata,
India
A.S. Kuar Production Engineering Department, Jadavpur University, Kolkata,
India
S. Kunar Production Engineering Department, Jadavpur University, Kolkata,
India
Anup Malik Department of Mechanical Engineering, PEC University of
Technology, Chandigarh, India
Alakesh Manna Department of Mechanical Engineering, PEC University of
Technology, Chandigarh, India
S. Mitra Production Engineering Department, Jadavpur University, Kolkata, India
B.B. Pradhan Mechanical Engineering Department, Sikkim Manipal Institute of
Technology, Sikkim, India
Asit Baran Puri Mechanical Engineering Department, National Institute of
Technology Durgapur, Durgapur, West Bengal, India
Editors and Contributors xv
V. Rathod Department of Mechanical Engineering, Government Polytechnic

Ratnagiri, Maharashtra, India
N. Roy Production Engineering Department, Jadavpur University, Kolkata, India
B.R. Sarkar Production Engineering Department, Jadavpur University, Kolkata,
India
A. Sen Production Engineering Department, Jadavpur University, Kolkata, India
I. Shivakoti Mechanical Engineering Department, Sikkim Manipal Institute of
Technology, Sikkim, India
Chapter 1
Non-traditional Micromachining
Processes: Opportunities and Challenges
S. Debnath, S. Kunar, S.S. Anasane and B. Bhattacharyya
Abstract The high demand and stringent design requirements in developing fields
of microengineering as well as various needs of society and nation require the
utilization of suitable techniques of non-traditional machining processes on dif-
ferent existing and newly developed metals, non metals, alloys, polymers, ceramics,
rubber and composites, etc. Presently, nontraditional machining techniques have
expanded their applicability in the field of micromachining and offer better
opportunities with several inherent advantages that make these processes superior
as well as more efficient than conventional one. Non-traditional mechanical
micromachining processes include abrasive jet machining (AJM), water jet
machining (WJM), ultrasonic machining (USM), ion beam machining (IBM), etc.
Non-traditional thermal micromachining processes include micromachining by
electro discharge machining (EDM), laser beam machining (LBM), electron beam
machining (EBM), etc. Non-traditional chemical and electrochemical microma-
chining processes have been used successfully to generate micro features of high
quality. Hybrid micromachining can also be utilized effectively for generating more
intricate shapes and complex parts. Advanced finishing processes using
non-traditional machining like abrasive flow finishing (AFF), magnetic abrasive
finishing (MAF), etc. are also gaining popularity to cope up the steep demand in
finishing intricate, complex, durable and sophisticated shapes that are highly eco-
nomical and posses better surface quality and property. The opportunities and
challenges of each non-traditional micromachining and finishing processes are to be
S. Debnath S. Kunar B. Bhattacharyya (&)

Production Engineering Department, Jadavpur University, Kolkata 700032, India
e-mail: [email protected]
S. Debnath
S. Kunar
S.S. Anasane
Department of Production Engineering and Industrial Management,
College of Engineering Pune, Pune 411005, India
© Springer International Publishing AG 2017 1

G. Kibria et al. (eds.), Non-traditional Micromachining Processes,
Materials Forming, Machining and Tribology,
DOI 10.1007/978-3-319-52009-4_1
2 S. Debnath et al.
investigated considering various practical applications in different micro engi-

neering fields. These non-traditional micromachining techniques as well as
advanced finishing processes can be improved further and utilized more success-
fully in the near future for numerous microengineering applications.
1.1 Introduction
Recent advancement in technology has created a distinctive opportunity in the

fabrication of desired products with specific criteria. This available as well as
developing technology is being used to produce various parts, structures, compo-
nents, shapes etc. on different materials with required geometrical and dimensional
characteristics. With the increasing use of different new materials and alloys having
superior mechanical properties like higher strength, increased hardness, better
corrosion resistance as well as temperature resistance, the need for components of
these high performing materials and alloys are continuously increasing in various
sectors like thermal, energy, medical, space, avionics, automobile, textile, food,
material processing, etc. [1].
To meet this high demand and stringent requirements in such developing fields
of modern fabrication industries as well as to satisfy various needs of society and
nation, various traditional manufacturing techniques have been utilized such as
forming, casting, machining, deposition, joining as well as different non-traditional
processes on different existing and newly developed metals, non metals, alloys,
polymers, ceramics, rubber and composites etc. Among the mentioned methods,
non-traditional machining techniques have expanded their applicability and offer
better opportunities with several inherent advantages that make these processes
superior as well as more efficient than conventional one. Both traditional and
non-traditional machining processes can further be divided into two domains:
macro machining and micro machining. Macro machining deals with the machining
of structures or parts which can easily be viewed by naked eye and can be measured
by simple techniques as well as machines that are usual and readily available. On
the other hand, micro machining involves those machining techniques and material
removal mechanisms where the produced parts cannot be observed clearly by naked
eye and have dimensions within micron (1–999 µm) ranges. Such micro features,
after fabrication, need sophisticated techniques and instruments for their
measurements.
1.1.1 Overview of Non-traditional Machining Processes
Non-traditional machining (NTM) processes can be defined as a group of processes

that remove excess material from workpiece by various techniques constituting
mechanical, thermal, electrical, chemical energies or combinations of these energies
1 Non-traditional Micromachining Processes … 3
without the involvement of sharp cutting tools which are used for traditional
manufacturing techniques [2]. The traditional machining methods such as milling,
drilling, shaping etc. are not suitable for the machining of tremendously hard and
brittle materials. But, the non-conventional machining methods are utilized for the
machining of complex and intricate 3D shapes on harder materials as well as
thinner materials, where usual machining processes are neither feasible nor satis-
factory due to various unavoidable reasons like difficulties in clamping very delicate
materials and machining of very flexible workpiece with complex shapes.
Various types of non-traditional machining processes have been developed for
specific requirements to fabricate desired complex features. The material removal
mechanisms of non-traditional machining processes are basically different than
those in the traditional processes that involves different form of energies, other than
the excessive forces exercised by a cutting tool, (which is in physical contact with
the work piece) that are applied to remove the excess material from the work
surface to generate desired shape. Non-traditional machining processes which are
extensively exercised now-a-days can be characterized by material removal
mechanism, type of energy involved in removal of material, forms of material
removal, type and material of tooling, etc. Moreover, different aspects which are
responsible for the correct selection of non-traditional machining methods include
physical parameters of the processes, capability of the processes in machining
desired material and product with required geometry, dimension and size of product
to be machined, process applicability, feasibility, operational characteristics as well
as economics of the process involved. Physical parameters of the processes involve
machining voltage, current, power, machining gap, work medium and other various
specific parameters for specific techniques. For example, Electrochemical
Machining (ECM) requires power as high as 100 kW, Electron Beam Machining
(EBM) and Laser Beam Machining (LBM) require high voltages in the order of 150
and 5 kV respectively and require careful handling, Electro Discharge Machining
(EDM) and Ultrasonic Machining (USM) require medium power whereas, EBM
and Ion Beam Machining (IBM) require vacuum, etc. NTM processes involve
generation of various shapes on work material. For example, EBM and LBM are
used for micro drilling and cutting of parts having slenderness ratio, l/D < 20. USM
and EDM are useful for sinking cavities and standard hole drilling. ECM is useful
for fine hole drilling and contour machining. Both EDM and ECM processes have
good capability to make shallow and deep pockets as well as contoured surfaces
whereas, AJM is useful for shallow pocketing. As discussed earlier, applicability
and usability of any machining process are other aspects which need to be taken
care of. For example, to machine electrically non-conducting materials, both ECM
and EDM are unsuitable, whereas other various mechanical methods can achieve
the desired results. LBM is not suitable for machining of reflective surfaces
whereas, USM is suitable for machining of refractory ceramic material and AJM
can be used for super alloys also.
The machining characteristics of different non-conventional processes can be
analyzed with respect to material removal rate, tolerance achieved, surface finish
4 S. Debnath et al.
obtained, depth of machined surface, etc. Economics of the processes is another

important factor for their end use in fabrication industries. This includes capital
cost, efficiency of material removal, cost for tooling, cost for power, etc. ECM has
no tool wear but the capital cost of ECM is very high when compared with tra-
ditional mechanical contour grinding and other non-conventional machining pro-
cesses whereas, capital cost for AJM is comparatively low. EDM has higher tooling
cost than other machining processes.
In contrast to conventional processes, NTM processes have lower feed rates and
require systematic approach for implementation. However, some processes permit
batch processing which increases the overall output. NTM processes are used to
machine hard and tough materials and these processes have capability to machine
the materials with good surface finish and machining accuracy where, some pro-
cesses have the ability to machine larger feature sizes at lower capital cost com-
pared to conventional approaches. For example, Abrasive Jet Machining (AJM)
uses high velocity stream of gases with added abrasives to remove material by
brittle fracture from the workpiece. Water Jet Cutting (WJC) removes the material
using high-velocity fluid jet impinging on the workpiece during slitting operation.
In Ultrasonic Machining (USM), vibrating tool is used to propel the abrasives in
slurry at high velocity against workpiece. In ECM, the material is removed by
anodic dissolution where tool and workpiece are dipped in electrolyte solution.
EDM process removes material by electric discharge from a pulsating DC power
supply across narrow machining gap between the tool and the workpiece separated
by a dielectric fluid. Electron Beam Machining (EBM) is a thermal process that uses
a beam of high-energy electrons focused on the workpiece to melt and vaporize the
metal. Laser Beam Machining (LBM) uses laser that is intensely focused and
coherent stream of light for vaporizing and thermally ablate the materials. Lasers
are also used for joining and heat treating of materials. Chemical Machining (CHM)
process is a controlled chemical dissolution (CD) of a workpiece material with the
application of strong reagent (etchant). Special coatings called maskants protect the
areas in which the machining is not desired.
1.1.2 Need of Micromachining
The demand of miniaturized parts is increasing day by day in modern world.

Micromachining utilizes miniature milling, drilling, cutting, turning, controlled
dissolution, polishing and other various operations to produce three dimensional
features and formed surfaces in micron and submicron ranges. This scaling down of
processes from macro to micro regime also requires lowering down of magnitudes
of involving operating parameters. Also, functional requirements of many devices
demand very tight tolerances and the use of a wide variety of engineering materials.
Although geometric and material capabilities of micromachining have been
demonstrated [3], industrial application of micromachining has been hindered by

the lack of experience and knowledge on the micro-machinability of materials [4].
But, emerging miniaturization technologies have been perceived by many potential
key technologies of the future that will reveal completely different ways how people
and machines interact with the physical world. Various existing miniaturized parts
that can be produced by micromachining processes include micro-electromechanical
systems (MEMS), micro-sensors, micro fuel cells, micro channels, micro holes,
micro grooves, micro pump, micro valves, medical implants and devices,
micro-actuators and various other different micron sized features. Another applica-
tion of micromachining process involves fabrication of integrated circuits (IC) for
electronic devices. These ICs have also large scale use in CD players, computer
components, etc. Relays and switches are required to be assembled to produce
functional micro sized mechanical parts. For making of lighter aircrafts and satel-
lites, miniaturized components are necessary. These type of aircrafts poses
increasing demand in this rapidly changing world.
In this new era, the miniaturization in medical fields is another effective
approach for health inspection and microsurgery without pain. Micromachining is
the key technology which facilitates the above all and different other requirements
of microproducts to keep pace with the rapidly growing needs. Various advantages
of microproducts offer less consumption of energy for their actuation; they need
lesser places, lesser requirement of materials etc. To cope up with the huge demand
in miniaturized parts for modern fabrication industries, scientists and engineers are
concentrated towards development of suitable micromachining processes for fab-
rication of required microproducts. Hence, as per requirement of product minia-
turization and manufacturing of the miniaturized products, emphasis should be
placed on advanced micromachining processes in addition to the accompanying
research trends in miniaturization of equipments and metrology systems.
1.1.2.1 Condition of Micromachining
Micromachining generally adopts a top down approach, which may involve various
conventional as well as non-conventional machining techniques [5].
Micromachining can easily generate various microfeatures such as microholes,
microslots, microchannels, etc. as well as microproducts like micro sensors, micro
thermal devices and computer chips even down to nano regime. Approaches
towards micromachining need to be specific and systematic for various methods.
However, these approaches can be correlated and directed towards micromachining
by following two guidelines: (i) concept of unit removal (UR) which is defined as
the material removal per pulse or per unit time for generating the smallest adjustable
dimensions of the micro-product and (ii) requirement of precise machining
equipments to obtain the desired microproduct with higher accuracy by reducing
the dimensional error in proportion to the size of the micro-products.
6 S. Debnath et al.
1.1.2.2 Application Opportunities
In recent years, manufacturing industries have observed the rapid increase in

demand for micro-products and micro-components in various emerging and
developing fields including electronics, optics, biomedical, medical,
opto-electronics, thermal, power, semiconductor, biotechnology, automotive,
aerospace, communication, etc. For example, micro-EDM is used for the produc-
tion of micro gears, nozzles of diesel fuel injectors, etc. Micro-EDM milling can be
used for production of miniature three dimensional gas turbine impeller on
Si3N4-TiN ceramic composite which serves as a key component for micro power
generation system. Moreover, electroformed nozzles are presently used in number
of commercially produced ink-jet printers. The electroformed nozzles are formed by
plating nickel on a mandrel (mould), which defines the pattern of the nozzle, and
after that the finished product is removed. Also, the pulsating current/voltage gives
better control over micro-ECM for fabrication of microgrooves for self-acting fluid
film bearings and complex shapes in thin films and foils. Another potential appli-
cation is fabrication of cooling holes in turbine blades. The main objective of
cooling blade in turbine is usually to achieve maximum heat transfer coefficients
while minimizing the coolant flow rate. Usually the turbine blades are made of a
super alloy with a very high melting temperature. By using the lost wax method,
these cavities are cast. With this technique, it is possible to produce cavities with a
serpentine shape. But, other micromachining processes can be easily employed for
drilling of those cooling holes in the blades that are positioned along the span of the
turbine blades.
1.1.3 Importance of Non-traditional Machining

in Micromachining Domain
The development of miniaturized products in large number has inevitably intended

a revolution in the field of micro-manufacturing technologies. This applies both to
the development and application of new non-conventional technologies i.e. EDM,
laser, EBM, PAM, ECM and so on, as well as the adaptation and optimization of
conventional machining technologies of milling, turning, etc., in order to comply
with the dimensional exigencies of precise micro parts with good surface quality. In
this aspect, non-conventional machining methods offer greater flexibility, precision,
rapidity and quality in producing micro-three-dimensional complex features on a
wide range of materials, in contrast to the limitations offered by more conventional
techniques.
In the last few years, the interest in micromachining technology has increased in
the various industrial sectors. The potential of miniaturized products persists to
grow numerous technical challenges gradually. With continuous miniaturization,
companies are developing new and appropriate machining technologies to meet the
unique challenges and to keep pace with the rising demand. The fabrication of
miniature parts is not new. Many companies have used various machining tech-
nologies such as EDM and laser to produce micro shapes for many years. Today the
difference lies in the sheer volume of products that require micro machining. Many
manufacturers are developing micro machining technologies and techniques to
minimize this gap. Companies are looking for parts having feature sizes of less than
100 microns, or somewhat larger than a human hair. At this dimensional regime, the
slightest variation in the manufacturing process caused by material or cutting tool,
temperature variations in the machine, vibration and any other phenomenon will
have direct impact on the ability to produce features in micron and submicron
ranges on a large scale. With this continued miniaturization, companies are
developing new products and technologies where the limit of tolerances are mind
boggling and would have been unthinkable just a few years ago. For example, using
end mills of 50 µm diameter and EDM wire of diameter 20 µm or electrodes
smaller than a few tenths micron are becoming more common. The applications
related to micro-meso machining technologies are being employed in the manu-
facture of wide variety of products and devices. The trend is growing continuously
in ultra precision and micromachining domain that still requires a fresh look at new
machining technologies and process mechanics.
1.2 Classification of Non-traditional Micromachining

Processes
From the ancient times people are using tools driven by necessary energy sources to
meet the daily needs and to make the life more comfortable and enjoyable. In the
prehistoric ages tools were made of stones for the item being made. Later, the
invention of iron tools and its implementation lead to the fabrication of more
sophisticated articles of required metals. But with further progress in the field of
sophistication, recent twentieth century products need to be made of most durable
and unmachinable materials. To overcome the difficulties created by these harder
materials, tools are now made of alloy steel, carbide, diamond and ceramics, etc.
where different, newer and more advanced methods are utilized for powering up
these tools.
Each time tools with new material and power sources are used, the effectiveness
and capability of fabricators greatly increase. Since 1940’s, a revolution in fabri-
cation industries has been going on allowing fabricators to cope up high demand for
complicated designs of products made up of tougher and difficult-to-cut materials.
This revolution is centered primarily on implementation of numerous new tools and
types of energy which lead to the introduction of various non-traditional manu-
facturing processes for joining, forming as well as removal of materials. Apart from
this, the conventional techniques of machining depends on electric motors and
harder tool materials for carrying out operations like drilling, sawing, broaching,
8 S. Debnath et al.
Fig. 1.1 Classification of non-traditional micromachining processes
etc. Conventional process like forming depends on energy from electrical motor as
well as hydraulics and gravitational forces. Moreover, removal of material can now
be done with electrochemical reaction, high temperature plasmas and high-velocity
jets of liquids and abrasives. Different harder materials can be easily formed with
magnetic fields, explosives and the shock waves from powerful electric sparks.
The non-traditional micromachining processes are not affected by mechanical
properties of material and can generate complex shapes by controlling different
physical parameters of the processes. Based on the type of energy required, medium
of energy transfer, inherent mechanism and basic requirements, non-traditional
micromachining processes can be classified as mechanical micromachining, thermal
micromachining, chemical and electrochemical micromachining, hybrid microma-
chining. Various types of non-traditional micromachining processes have been
shown in Fig. 1.1.
1.2.1 Mechanical Micromachining
Mechanical Micromachining process includes abrasive jet machining (AJM), water

jet machining (WJM), ultrasonic machining (USM), abrasive flow finishing (AFF),
magnetic abrasive finishing (MAF), etc. The process mechanics and mechanism of
material removal of these micromachining techniques have been stated briefly here
under.
AJM uses kinetic energy of loose abrasives to remove material from workpiece.
Before operation, the workpiece surface is covered with wear resistant mask leaving
the portions on to which machining needs to be carried out. Hence, mask also
determines the geometric and dimensional accuracy of the micro feature to be
produced. During operation the entire workpiece surface remains exposed to par-
ticle beam and gas or air jet containing microscopic loose abrasive particles of
around 50 µm grit size impinges the work material in the unmasked area with high
velocity (typically between 150 and 400 m/s) leading to removal of material by
brittle fracture and formation of desired patterns. Material removal rate during
machining depends on other parameters like the size of abrasive particles, type of
abrasives, abrasive flow rate, pressure of gas, type of work material, etc. which can
also be controlled more effectively than standard sand blasting. Popular abrasives
for AJM include aluminum oxide, silicon carbide, etc. and the erosion action of
AJM can especially be applied for cleaning, cutting, etching, deburring or polishing
of various brittle materials such as glass and ceramics where very fine intricate
features can also be generated [6]. Machining of ceramics by other traditional
process like wet chemical etching is relatively expensive for which AJM is being
used. Furthermore, researchers have fabricated channels and holes on polymer like
polymethyl methacrylate (PMMA) [7, 8] by AJM. Other existing applications of
AJM include machining of devices used in micro-electromechanical-systems
(MEMS) [9] and opto-electronics, fabrication of complex 3D and free standing
micro features on glass [10], marking on rubber stencils and electronic equipments,
frosting glass surfaces, engraving codes, numbers on car windows, etc.
Unlike AJM, WJM uses kinetic energy of water to remove material from the
target workpiece. Here, water jet of high velocity (up to 900 m/s) strikes the
workpiece surface which, upon impact, converts to pressure energy. The magnitude
of the pressure generated reaches up to three times than that of normal stagnant
pressure. When the generated pressure is higher enough than the binding force of
the material making up the workpiece, erosion occurs and the material removal
takes place. A typical WJM setup consists of pumping unit for generating high
pressure of water, high pressure hydraulic accumulator to store pressure energy
during idle periods and to provide smoother flow during operations, various types
of nozzles, tube fittings, valves, etc. WJM is not thermally activated and is highly
economical and eco friendly process for cutting porous materials like corrugated
boards, woods, and soft materials like rubber, lead, asbestos, etc. with high surface
finish and straightness. Also, the process is applicable for rock excavation [11],
cutting features on sandstones, cutting fibers and polyethylene for automotive
industries, hydraulic mining and drilling of coals, cleaning and descaling in oil
refineries, chemical plants, etc. Moreover, micro features of higher thickness can be
produced by multi pass cutting whereas, various products of metals like aluminum,
copper and alloys like brass, steel, etc. can be machined, although for such case
very high jet pressure is required which limits its uses for commercial intensifiers.
10 S. Debnath et al.
USM is another process especially for fabricating micro structures of both

electrically conductive and non conductive materials, semi conductive, hard and
brittle materials like ceramics, glass, etc. Here, co-axial microtool is primarily
produced of ductile and tougher materials and then implemented for machining.
The tool vibrates at ultrasonic frequency and the tiny cutting gap between microtool
and workpiece is filled up with constantly flowing abrasive slurry. The repetitive
linear mechanical motion of microtool from very high frequency drives the abrasive
particles towards the workpiece. With each downward motion, thousands of
abrasive particles accelerate and strike simultaneously resulting in removal of
millions of chips in the form of craters within that time. USM for micromachining is
a combined machining technique for fabricating intricate 3D micro features on
almost any type of material. Hence, the process is capable to fabricate micro devices
used in MEMS [12], inclined and square holes, trenches [13], micro structures on
quartz and synthetic ruby and other features, to be used in the fields of medical,
aerospace, electronics, etc.
FIB uses beam of ions with specific diameter and intensity for removing work
material atom by atom. Whole process is carried out in a vacuum chamber to avoid
interaction of ions with surrounding gas molecules. Of the several ion sources,
liquid metal consisting of gallium is used widely. Machining occurs when gallium
ion strikes the work surface with high potential. The sputtered and accelerated ions
dislocate the atoms, positive ions and secondary electrons forming the workpiece
surface. The dislodged atom on the workpiece transfers its momentum to sur-
rounding atoms and material removal continues. The material removal rate of the
process is highly dependent on sputtering yield which is influenced by several other
parameters like types of substrate atom and ions, energy of accelerated ions, their
direction of impingement and density [14]. FIB has negligible thermal effects but
the process is not at all economical. However, the process is applicable for pro-
ducing parts in micro and even in nano ranges like tools and dies for micro EDM,
micro forming, nano machining, fabrication of end mill cutters for micromachining,
diamond micro indenters, surgical micro tool, tissue stabilizer [15] and other var-
ious micro and nano components used in bio-technology.
AFF involves final and fine machining of metallic as well as non metallic parts
or micro parts produced leading to higher surface quality and lower surface
roughness achievable in the range of 0.05–1.0 µm [16] for improved performance,
closer tolerance, greater life span and durability of the product. In AFF, materials in
terms of very small quantities are removed by forceful moving of semisolid abra-
sive media over the workpiece through a passage by extruding them from a
cylinder. The applied force is driven hydraulically or mechanically and the flow of
media is directed to desired work surfaces by proper tooling. The velocity by which
the media can be moved over the work surface depends upon the complexity, type,
geometry and cross sectional area of passage where higher amount of force is
required if restrictions are too many. The large number of abrasive particles in the
media acts as a multi point cutting tool leading to slower removal of material during
finishing process. Also, other factors like type and geometry of work material, type
of media, abrasive grit size, etc. greatly influence the material removal rate during
operations. AFF is more economical, offers better efficiency, flexibility as well as

accuracy and is capable enough for machining complex internal surfaces which are
inaccessible by other conventional finishing techniques.
MAF constitutes finishing of ferromagnetic as well as non ferromagnetic flat and
cylindrical work surfaces by the help of magnetic force. Here, magnetic abrasive
particles act as a cutting tool which constitutes ferromagnetic components such as
iron particles and abrasive grains such as silicon carbide, alumina, diamond, etc.
The magnetic abrasive particles remain stick together in the line of magnetic force
due to the application of electromagnetic field forming flexible magnetic abrasive
brushes. The necessary finishing force is generated and maintained by electro-
magnetic field and finishing occurs when magnetic abrasive brushes are rotated and
are made to contact with vibratory or moving work surface. The finishing efficiency
and the quality of surface finish obtained are greatly influenced by the type, size and
shape of work material, strength of the magnetic field, diameter of the magnetic
abrasive particle, size and type of abrasive grains, mixing proportion of ferro-
magnetic components with abrasive grains, relative motion and speed of magnetic
abrasive particles with work surface, etc. Finishing with MAF can achieve surface
roughness in the range of 0.04–1.0 µm [16], where the process is also capable of
polishing internal cylindrical surfaces, deburring and chamfering of edges [17].
1.2.2 Thermal Micromachining
Various micromachining processes involve the application of intense localized

heating for machining of workpiece and producing intricate micro features. These
processes remove material by melting and vaporization. Different operating prin-
ciples of these processes include micromachining by electro discharge machining
(EDM), laser beam machining (LBM), electron beam machining (EBM), etc. which
have been discussed briefly as follows.
EDM removes material by electrical discharge or sparks. During the operation,
cathode and anode are separated by a tiny gap of few microns and are immersed in
dielectric fluid like kerosene, deionized water, air, etc. When DC pulse power is
applied between cathode and anode, plasma channel forms due to very high electric
field gradient resulting in formation of electrical discharge or microspark. This
microspark melts and vaporizes the workpiece as well as tool material from where
some of the molten material is flushed away and removed by flowing dielectric and
the remaining part resolidifies and forms recast layer. The tool is gradually fed
forward into workpiece by maintaining a suitable discharge gap; as a result thermal
erosive action continues and machining occurs. In contrast to macro counterpart,
micro EDM has become a popular process for precise machining of intricate micro
features of various geometries on various difficult-to-cut but electrically conductive
materials with better accuracy and surface finish by decreasing the size of the spark,
increasing the sparking frequency and maintaining as well as controlling other

operating parameters. The process is quiet capable of fabricating micro nozzles,
drilling high aspect ratio holes [18], making high precision metal masking and other
numerous micro components required in automobile and electronics industries.
However, the process suffers from thermal effects which may deteriorate the surface
integrity, quality and property of the produced micro feature. Also, after each
discharge, EDM removes a small crater on the tool electrode which may degrade
the final machined shape and decrease the accuracy.
LBM is another process for machining complex patterns and intricate micro
features where pulsating laser is irradiated and the target work material residing in
the focal region absorbs laser energy and heats up to its melting temperature. The
net result is the melting and vaporizing of work material at that focal point and
material removal takes place via ablation process. The melting and vaporization of
work material greatly depends on the intensity of laser as well as properties of
workpiece and duration of pulses. LBM is a thermally induced process which
generates heat affected zone (HAZ) in the peripheral area of the machining zone
resulting in generation of thermal stress and surface as well as subsurface cracking
leading to minimizing the life span of the micro product. Though commercial uses
comprise of long pulse laser, but ultra fast or short pulse laser is very much effective
to machine features within micro ranges. Other applications of this process include
machining of printer and hard disk drive heads, different types of micro holes and
channels, grating on optical fiber [19], different micro components for microfluidics
[20], engraving, marking, etc.
EBM uses kinetic energy of electrons for removing material from the work
surface. Here, very high potential gradient is applied to the cathode which emits the
electron. The ejected electrons are further accelerated by the potential of anode. The
beam of electrons strikes the workpiece surface converting its kinetic energy into
very high heat energy upon impact. This localized heating causes melting and
vaporization at the beam area causing removal of material. This melting and
vaporization as well as material removal rate depends upon beam energy, beam
width, thermal property as well as thickness of workpiece material, etc. Alike FIB,
EBM is carried out in vacuum chamber to avoid collision of electron beam with air
and other airborne particles. Though the process is thermal induced, but still the
smaller beam area restricts the span of heat affected zone resulting in minimized
detrimental effects on the final product. EBM is a faster material removal technique
for producing micro slots, micro holes of different shapes and contoured internal
profiles and various other complex micro features applicable in thermal and nuclear
sectors, aerospace and automotive industries, etc.
1.2.3 Chemical and Electrochemical Micromachining
Chemical micro machining (CMM) includes chemical reactions required to oxidize

and remove work piece material where the oxidization products are carried away
from the surface by suitable medium. Here no external power is used and anode and
cathode, separated by proper medium, are placed in such a way that the rate of
removal of material by oxidation equals to the rate of reduction of the etchant
species. Material removal by CMM involves sequential steps where very accurate
control of process parameters like composition, temperature and type of solution are
required to enhance the mass transfer.
CMM is highly applicable for fabricating metallic parts such as mask, recording
heads, instrument panels, enclosure screens, etc., printed circuit boards (PCB),
semiconductor device, integrated circuit (IC) and other microcircuit devices to be
used in electronics industry in addition with photosensitive resist. But, further
in-depth research work is needed to be carried out to minimize the limitations of
CMM caused from lower material removal rate, lower accuracy of parts being
produced, inability in machining chemically resistive materials, use of hazardous
materials like highly corrosive electrolyte that may cause a risk to environmental
safety, etc.
Electrochemical micromachining (EMM) is an electrochemical material removal
process that implements the method of anodic dissolution and can easily fabricate
metallic features in micron and submicron ranges by offering enhanced process
control. On the other hand, most of the non-conventional machining processes are
thermally activated; examples include Electron Beam Machining (EBM), Laser
Beam Machining (LBM), etc. Hence, thermal distortion, deterioration of surface
and material property, formation of heat affected zone are of prime concern that
need to be taken care of [21]. CMM and EMM are thermal free processes. But, alike
EMM, CMM cannot be controlled adequately in micromachining domain.
However, accuracy of EMM can be highly improved by controlling required pro-
cess parameter settings and maintaining very narrow gap in the order of less than
fifty microns between microtool and workpiece resulting in generation of ultra
precision micro features with desired dimensions. EMM is a very promising micro
manufacturing process that offers several advantages like higher material removal
rate, greater surface finish, better precision and control, flexibility, reliability,
environment acceptability and can even machine chemically resistive materials and
alloys like titanium and titanium alloys, stainless steel, copper alloys and super
alloys, etc. [22] which have wide use in biomedical, optics, electronics, and MEMS.
EMM can be also used as a cost effective manufacturing process for fabricating
micro parts that were previously produced by CMM.
1.2.4 Hybrid Micromachining
Hybrid micromachining denotes combination and application of two micro

machining techniques simultaneously, thereby utilizing the merits of both processes
for generating more intricate shapes and complex parts with better material removal
rate, surface quality and integrity, dimensional accuracy and with shorter
production time. As an example, conventional grinding offers better surface quality,

better dimensional accuracy with lower tolerance values but the process suffers
from formation of burrs, residual stresses and various other thermal effects like
generation of heat affected zone after machining that may lead to degradation of
product durability. On the other hand, electrochemical material removal technique
does not have the detrimental effects of high heat generation. Hence, a combined
electrochemical grinding (ECG) process has been introduced for utilizing the
advantages of both constituent processes as well as avoiding their inherent limi-
tations for generation of micro product. Although primary research in hybrid micro
machining techniques was focused on the implementation of electrical and elec-
trochemical phenomena and processes like electro chemical discharge machining
(ECDM) is used to fabricate micro features of non conductive and ceramic mate-
rials like quartz, glass, etc.; but research is still needed for generating more complex
and intricate 3D micro shapes. Some of the other hybrid processes which are
applied for machining of desired micro features include ultrasonic, laser and
abrasive assisted micromachining. ECDM milling is used in Pyrex glass, glass etc.
to fabricate fine 3D microstructures of non conductive materials. Simultaneous
ED-EC milling is suitable to acquire better surface finish of about 22 nm on SS304
material. ECM grinding is also applicable for SS321 material to achieve surface
roughness of about 0.21 lm. EDM-electro rheological fluid assisted hybrid
micromachining is used on aluminum alloy, SUS 304 etc. to obtain fine surface
finish in the range of 0.06–0.08 lm. Also, laser drilling Jet-ECM is able to reduce
formation of recast layer more than 90% in SS321.
1.3 Introduction to Different Non-traditional

Micromachining Processes
Now-a-days non-traditional micromachining techniques are being used for the

fabrication of ultra precise parts i.e. micro slots, grooves, intricate 3D shapes, etc.
for large scale production. As, conventional machining techniques to be used in
micro domain encounter various problems like requirement of high cutting force,
tool wear, heat generation between tool and workpiece, less machining accuracy
etc.; various non-traditional micromachining techniques are gaining popularity due
to particular advantages and have been used extensively by modern fabricators [23].
Numerous types of micromachining techniques are available today which have their
own merits and limitations and can be implemented based on specific requirements
of the part to be produced. Various types of micromachining processes are used for
milling microgrooves, drilling microholes, etc. [24] and to obtain a more clear idea
of the processes involved, some of them have been discussed briefly in the fol-
lowing sub sections.
1.3.1 Micro Ultrasonic Machining (USM)
Micro ultrasonic machining (USM) is one of the important micromachining tech-

niques for fabricating high aspect ratio 3D micro features on harder and stronger
materials like titanium and its alloys, nickel alloys, etc. and brittle materials like
ceramics, glass, quartz, composites, precious stones, etc. [5]. Micro USM can be
utilized even on silicon for fabricating micro holes of diameter as small as 5 µm
[25] to be used in circuit board with integrated circuits. Moreover, fabricating micro
holes not only facilitate the electronic industries, but these types of holes are also
well suited to be used in biomedical filters, grids, fluidic filters, fuel injection
nozzles, ink-jet printer nozzles, optical apertures, micropipettes, high pressure
orifices, manipulators, pneumatic sensors, etc.
1.3.1.1 Mechanism of Material Removal
The process of micro USM combines consecutive application of processes for

carrying out machining operations right from production of micro tool to fabrica-
tion of final micro product. As discussed earlier, the main difference between micro
USM process from usual USM is in the application of micro tool, means for
attaching it with tool holder or horn and fabrication of precise micro features in
micron or submicron ranges that are not possible in conventional USM. In macro or
conventional USM, the tool is fabricated on another system and is then attached by
brazing, soldering or screwing but these processes cannot guarantee the concen-
tricity or the accuracy with which tool approaches if the same processes are used for
mounting micro tool in micro USM. Hence, for micro USM, the coaxial microtool
of various shapes like polygonal, spiral or cylindrical is first prepared by wire
electro discharge grinding(WEDG)/wire electro discharge machining (WEDM)
on-machine and is then used directly for carrying out required machining opera-
tions. Besides, the combination of WEDG with EDM can fabricate 3D micro tools
whereas, micro tool with diameter as low as 3 µm can also be fabricated [26].
However, micro tools can also be fabricated like electrochemical micromachining
or chemical micromachining.
Micro USM process starts with converting low frequency signal to high fre-
quency. This high frequency signal is then converted to high frequency linear
motion or vibration in ultrasonic range (equal or beyond 20 kHz) via piezoelectric
or magnetostrictive transducer. The transducer then feeds this ultrasonic vibration to
tool holder and tool or sonotrode which is the mirror image of the micro feature to
be generated and has the required design criteria for generating resonance to
achieve greater machining efficiency and constant wave with high amplitude.
Before starting the operation, a narrow machining gap is set between the micro tool
and work surface. Moreover, during machining this narrow gap is flooded with
abrasive slurry consisting of loose abrasive particles like silicon carbide, boron
carbide, alumina, diamond dust, etc. suspended in oils but mainly in water due to its
Fig. 1.2 Schematic of micro USM system
good property of transferring ultrasonic wave. The cyclic and ultrasonic linear
vibration of microtool gives downward stroke to the abrasive particles. The tiny
abrasive particles accelerate and simultaneously strike the work surface resulting in
removal of tiny chips from the work material in the form of craters. The tool is then
moved into the workpiece with constant force for continuation of machining
operations and generation of required micro feature. A schematic diagram of micro
USM setup has been shown in Fig. 1.2.
However, micro USM can be done in two ways; one is by vibrating the micro
tool and another is by vibrating the workpiece itself which has been introduced
recently. In workpiece vibration method the tool is not vibrated, rather piezoelectric
vibrations are provided on the workpiece. Here, no horn is needed to amplify
vibrations during machining which makes the setup simple and compact. Moreover,
the process eradicates the problem like tool wear which is frequent in first method.
The principle operating parameters that need to be maintained for achieving better
material removal rate, dimensional accuracy and surface finish during micro USM
include frequency and amplitude of vibration, load, rotary motion if it has been
implemented on tool head or workpiece, type of abrasive particles and liquid
component, size of abrasive particles, concentration and flow rate of slurry, type,
geometry and thickness of work material, etc.
1.3.1.2 Opportunities
Micro USM can fabricate micro features both on electrically conductive and non
conductive materials and posses numerous applications in the fields of medical,
electronics, aerospace, etc. The geometric capabilities of micro USM for producing
micro slots, holes and 3D cavities can be enhanced by fabricating in situ micro tool
followed by machining by it in the same setup. With this process, researchers have
developed micro holes as small as 20 µm diameter and 50 µm depth on silicon and
quartz [27]. Moreover, rotary micro tool can be introduced which is one of the cost
effective process for fabricating micro holes. Here the tool is given ultrasonic
vibrations as well as rotation. The combination of this grinding mechanism and
rotation leads to sliding and rolling of abrasive grains. As a result, impact and
indentation increase that give better material removal rate [28]. In addition, USM
can be assisted with turning for strain hardening, reducing residual stress of work
material, minimizing machining time, improving surface quality of workpiece,
increment of tool life, etc. [29]. Moreover, researchers have fabricated multi micro
tool and used this tool for drilling micro holes having 20 µm diameter on soda lime
glass by micro USM. For this, a tungsten micro tool was fabricated by wire electro
discharge grinding. With this tungsten micro tool array of microholes was fabri-
cated on copper foil by EDM which was later used for fabricating multi micro tool
for USM by reverse EDM [30]. In addition, the capability of micro USM can be
extended more considering its implementation in the emerging area like micro-
fluidics. Microfluidics extensively uses micro channels and micro cavities for
delivering and storing liquid or gas. Also micro channels are used for micro heat
exchanger applications and for micro sensors. These micro channels and micro
cavities can effectively be produced by micro USM. Micro USM has enough
potential for producing 3D micro channels or 3D micro features on silicon and on
other various newer materials like different types of polymers, ceramics and glass
that can readily be applied for micro-electromechanical system (MEMS).
1.3.1.3 Challenges
Micro USM is well established and promising micromachining technique for

generating intricate microfeatures in non conductive brittle and harder materials.
However, various challenges still exhibit in feasibility and geometrical ability of
machining. Micro USM does not only refer to generation of micro features, but the
size of the tool should be made small as well. Microtools suffer from complex
fabrication, improper handling and fixing to the tool holder, etc. which may dete-
riorate the accuracy and performance of the process. Moreover, the alignment of the
tool should be accurate enough for confirming the dimensional accuracy of features.
Making a micro tool with traditional process such as micro milling and then fixing
it to the tool holder with silver brazing or soft soldering does not confirm its
alignment because the tool is tiny enough for producing and assembling with
traditional methods. Hence, in situ micro tool is first prepared by WEDG/WEDM
and then micro USM is carried by the developed micro tool in the same setup.
Micro USM process also suffers from tool wear which leads to gradual short-
ening of tool tip resulting in inconsistent vibration amplitude, change in tool
position and deterioration of geometric accuracy of the produced micro feature. For
this, implementation of ultrasonic vibration on workpiece rather than tool has been
found to be advantageous. Further, workpiece vibration helps in better removal of
machining products by enhancing flushing of slurry and produces better stirring

leading to increase in machining efficiency. But this process also restricts the size of
workpiece which may influence the vibration amplitude and accuracy.
In addition, various other research issues concerning better online monitoring
and controlling, proper tooling technology, measurement accuracy, surface integ-
rity, extended process capability, etc. are there, which need to be strengthened
further. Another concerned area of micro USM is interaction between abrasive
particles with workpiece for which a well formulated study for understanding and
analyzing the material removal mechanism needs to be carried out and phe-
nomenon like cavitation, chemical reaction, micro chipping, etc. during micro
machining need to be investigated. In the situations like micro cutting, localized
temperature may play a significant role. All the issues need to be resolved in the
context of high frequency low amplitude vibration as well as noise reduction that
call for further research.
1.3.1.4 Micro Engineering Applications
Micro USM has extensively been used for different applications like making small
holes in helicopter power transmission shafts and gears, fabrication of 3D micro-air
turbines, machining of watch bearings and jewels, generation of high aspect
ratio micro holes on silicon and glass wafers for pressure and flow sensors [31] and
numerous other micro features which are required in MEMS. Moreover, micro-
features can be generated on the micro tool tip to be used for micro USM.
Researchers have fabricated 3D micro gear which acts as a micro tool during USM
[32]. The patterned surface on the tool replicates itself when fed towards the
workpiece leading to parallel production of identical micro features with lower
machining time. Also, researchers have fabricated high aspect ratio micro pillars on
Lead Zirconate Titanate PZT [33], spiral groove, contoured 3D micro cavity with
tool path designed using CAD/CAM [34], micro feature in alumina to transfer this
pattern for generating intricate shaped micro tool [35], wafers in borosilicate glass,
etc. Micro USM can effectively machine and polish steel tool surface [36], micro
channels for bio-MEMS, whereas semiconductor industries greatly rely on
Micro USM as the industry needs like slicing of semiconductor components and
processing of various characteristically brittle materials. Also, Micro USM can be
utilized on relatively ductile metal-based materials with appropriate alteration,
which is a sheer need in microfluidics and heat transfer industries.
1.3.2 Micro Electro-Discharge Machining (EDM)
Micro electro-discharge machining (EDM) is one of the promising and

cost-effective methods of machining high strength conductive and brittle materials.
In comparison to other methods this micromachining process is relatively new.
Fig. 1.3 Basic arrangements

and setup of micro
electro-discharge machining
process
Here, a conductive tool and workpiece are submerged in dielectric medium and are
separated by a small gap. The tool is made cathode and workpiece is made anode
that are connected to a resistance capacitance (RC) circuit. When the tool moves
toward the workpiece, discharge occurs resulting in the formation of plasma col-
umn. The flux of electron generates ample amount of heat which melts the work-
piece material. With the feed of the tool, discharge continues making a replica of
the electrode on the work surface. Micro EDM has similar characteristics as EDM
except that the energy range is lower and size of the tool, discharge energy and
resolution of axis movement are in micron ranges. Micro electro-discharge
machining is an efficient process for producing micron sized shapes even on
extremely hard tungsten carbide and stainless steel as no cutting force is involved
during operation. But as the process is thermally activated, hence it suffers from
limitations like formation of heat affected zones, change in material property and
formation of micro cracks on the workpiece surface. Moreover, during each dis-
charge the tool material also melts which limits its use for further applications.
Figure 1.3 shows basic arrangement and setup of the Micro electro-discharge
machining process.
As discussed earlier, micro electro-discharge machining is a thermoelectric process

that melts and removes the workpiece material from various extremely hard
and conductive materials by applying and maintaining controlled discharges or
sparks between cathode tool and anode workpiece that are separated by tiny spark
gap and are dipped in suitable dielectric medium [37] like kerosene, deionized
water, air, etc. When machining starts, due to the application of voltage from
suitable DC pulse power source, high electric field generates at the points where the
tool and workpiece are closest. As a result, electrons start moving from cathode to
anode and collide with the neutral molecules of dielectric during this movement.
This collision results in formation of more free electrons that get loose from neutral
molecules. The ionization gradually increases to such extent that a narrow channel
of constant conductivity or plasma channel creates leading to continuous flow of
electrons towards anode and ions towards cathode. Upon striking the anode and
cathode surfaces their kinetic energy changes to intense heat energy resulting in
generation of momentarily current impulse forming discharge or spark. These
discharges or sparks generate intense heat leading to melting and evaporation of
workpiece as well as tool material.
Actually, during pulse on time the pressure in the plasma channel gets very high
that restricts the evacuation of molten metal. During pulse off time this pressure
drops instantly leading to evaporation of molten metal from the work surface. The
rate of metal removal from both workpiece and tool is highly dependent on the
kinetic energy of electrons and ions respectively. But, as electrons are lighter in
weight than that of ions; it has been seen that anode workpiece corrodes at faster
rate than cathode if both are made up of same material. Hence, workpiece is always
chosen as anode. As the material is removed from that machining zone; the spark
gap between tool as well as workpiece increases resulting in formation of next spark
at next closest points between tool and workpiece. Thus, the discharges travel all
over the tool surface leading to uniform material removal and generation of
approximate mirror image on the work surface. This phenomenon continues when
the tool is fed into the workpiece leading to formation of required feature on work
surface.
Both straight and reverse polarities can be used during micro EDM, where, in
straight polarity workpiece is made positive and tool is negative which is simply
opposite in reverse polarity. During machining the sparking frequency is very high
whereas, spark radius is small and temperature is very high. As a result, small
amount of material melts and evaporates where a portion of this is removed by
dielectric medium and the remaining portion gets solidified on the workpiece
surface forming recast layer. This thermally activated micro electrical discharge
machining process also forms and leaves small amount of crater on both workpiece
and tool surface which hinders further use of same tool and destroys surface
integrity of the produced micro shapes [38].
The operating principle of micro EDM is almost similar to conventional EDM
process. In micro EDM, for maintaining the tiny spark gap of as small as 1–5 µm
[39], servo controlled feed mechanism of enhanced positional accuracy and supe-
rior sensitivity is used that can be used both for conventional precision manufac-
turing as well as fabrication of various micro features like micro inserts, micro
moulds, etc. in micron and submicron ranges [40]. But the main difference between
macro and micro EDM lies in the process of eroding the material. In macro EDM
the motto is to maximize the erosion and minimize the machining time by setting
the pulse and current parameters accordingly where in micro EDM efforts are made
to increase the erosion efficiency required for micromachining by minimizing the
energy of electro-spark and erosion through single capacitor discharge that also
make the power circuitry of this process different.
Micro EDM is a popular and efficient process for fabricating various complex micro
features. The setup is simple and the process has added flexibility which can be
modified further with ease in the context of specific requirements and applications.
For fabricating and sharpening of tiny tool electrode in single discharge, researchers
have developed micro EDM setup with two drives of different response frequencies,
one is lower response stepper motor controlled for coarser movement of workpiece
and positioning while another has piezoelectric transducer having higher response
for finer movement of electrode [41]. Moreover, researchers have developed micro
EDM setup with two types of local actuator module. The first module consists of
two electromagnetic actuators for holding the electrode, controlling the thrust and
better positioning, whereas the second module consists of eight electromagnetic
actuators for motion in radial direction for smoother, accurate and stable machining
and minimization of tool wear [42]. In addition, micro EDM has been combined
with other processes like micro USM and micro punching for fabricating micro
holes for MEMS in borosilicate glass and on stainless steel sheet [43, 44].
Newer methods of fabrication by micro EDM involve use of variable capacitance
for minimizing electrode wear, implementation of sequential machining like wire
EDG for in situ fabrication of electrode and generate microfeature with same
electrode in micro EDM followed by electrochemical polishing to enhance geo-
metric accuracy and surface quality, etc. [45]. Furthermore, the efficiency, process
stability, material removal rate, flushing and surface quality of micro EDM can be
enhanced by rotating the electrode, rotating the workpiece, etc. Moreover, micro
EDM, as a potential process for fabricating micro shapes of stronger and wear
resistant tungsten carbide, will aid to modern fabricators in their respective areas
and will be of immense help in understanding the basics and fundamental science of
the process, thereby enlarging its implementation field. But further research work is
still needed to cope up with the challenges that are encountered frequently. For
example, development and implementation of new pulse generator is needed that
can produce lower discharge energy suitable for micro scale productions.
Moreover, micro EDM milling can be automated to cope up the steep needs in
producing micro-molds and dies. But superior control of operating parameters with
involvement of proper optimization technique is required to achieve quality
machining with required dimensions, accuracy and surface finish. Also,
multi-purpose and miniature sized machine tool can be fabricated by micro EDM
which will disclose more advanced research areas in the concerned field.
1.3.2.3 Challenges
More recent advancements in the field of sophistication and miniaturization lead to

increased demand where micro EDM has been playing an important role in fab-
ricating micron sized products. Though some research challenges in the area of
micro EDM are still prevalent and need more concentration such as lower material
removal rate found in machining of tungsten carbide micro-structures which make it
time-consuming and difficult to be applied for mass scale production. The diffi-
culties are also there in the circulation of dielectric medium and proper removal of
machining products, particularly when the spark gap is in the order of few microns
during machining a complex shaped micro hole or micro cavity with high aspect
ratio. Such improper flushing will eventually degrade the micro machining effi-
ciency and will restrict the formation of high aspect ratio micro holes.
Wear of micro tool is another problem in micro EDM that can stop the
machining process at the middle, if not taken care of at the first time. For machining
square, rectangular, triangular and specific shaped micro features as well as com-
plex shaped 3D micro mould, rotating electrode cannot be used in die sinking micro
EDM. As a result, the machining products deposit and stick between tool and
workpiece that effect badly on the circulation of dielectric and deteriorate quality of
the machined shapes. Other disadvantage of micro EDM includes formation of
relatively poorer and imperfect surface after machining. The surface roughness
increases with increase in machining current, pulse on time and voltage [46]. The
thermal actions during machining also give rise to micro cracks, residual stress; it
changes the microstructure as well as microhardness of surface and subsurface
layers that leads to hydrogen and carbon diffusion. Moreover, each machining
leaves a crater on microtool as well as on work surface which is influenced by pulse
energy. Furthermore, the generated recast layer on the workpiece after machining
needs additional operations like precision grinding for removal. Due to such
research challenges, micro EDM parameters require to be carefully selected [47]
and further attention and investigations are needed for successful utilization of
micro EDM for fabrication of micro features.
Micro EDM is extensively applied for the fabrication of inject nozzle for bubble jet
color printer, micro-slots, high aspect ratio micro-holes, dies for precision blanking,
micro-gear wheels with complex shape, miniature neurosurgical instruments like
micro-forceps made up of nickel-titanium wire, etc. and several other micro com-
ponents for aerospace industries. Moreover, researchers have fabricated micro-
electrode by block-micro EDM process [48], high aspect ratio WC–Co
micro-structures with gear pattern by combining LIGA with micro EDM [49],
micro compressor and micro turbine impeller by micro EDM milling [50], high
aspect ratio micro array with reverse micro EDM [51], micro ball joint of bio
compatible magnesium alloy for use in medical devices [52], micro electrode by
single spark during micro EDM [53], etc. Presently, micro-EDM is a readily used
technique in industries for high-precision machining and generating micro shapes
with higher accuracy on various types of conductive metals and alloys, graphite and
different harder ceramic materials.
1.3.3 Micro Laser Beam Machining (LBM)
In modern days, micro machining using laser radiation has become very popular
and is acting as a versatile fabrication process by means of its different superb
features like contact and wear less machining, better flexibility and possibility for
high degree of automation, etc. As a result, micro laser beam machining is being
widely used for fabricating micro components on various metals, ceramics and
polymer to be applied in medical industries, automobile sectors, etc. Micro laser
beam machining process is also being used for producing semiconductors and solar
cell. Laser for micro machining attributes wide range of pulse duration from
femto-second to microsecond, variety of wavelengths and different pulse repetition
rates from single to megahertz allowing the process to fabricate complex machined
micro parts with high aspect ratio. Various micromanufacturing domains like cut-
ting, drilling, welding, surface texturing also use micro laser beam machining
process for removing the material by rapid heating, melting and evaporation. Also,
the detrimental effects of high heat generation like burr formation, melting, etc.
during micromachining can be minimized to some extent by using lasers of
extremely short pulse duration. Figure 1.4 shows the schematic of laser microma-
chining system.
Micro LBM uses thermal ablation technique to remove material from the workpiece
[54]. Typical laser micromachining setup consists of several features like a CNC
machine tool. It has a central computer for controlling and moving the stages and
positioning the workpiece at exact focal point. Moreover, the controller can halt the
laser pulses as per requirement, adjust the pulse and change the pulse repetition rate
Fig. 1.4 Schematic of laser

micromachining system
during machining. Video monitoring system is implemented during operations

whereas power monitor adjusts optical attenuation for minimizing or maximizing
the power of the focused beam. When laser beam is focused on the work surface,
the energy is absorbed and generates heat. The penetration depth of laser increases
with increase in absorptivity whereas the absorptivity of any material depends upon
its optical property. Upon interaction with metal, light couples with the free elec-
trons of the workpiece which depends on the transfer of photonic energy to electron
vibrational energy. The electrons get excited and start colliding with other atoms in
their vicinity, thus knocking them out. The knocked off atoms repeat the same
procedure resulting in extreme raise in temperature which conducts and produces a
temperature distribution. If the material is strong absorber, high temperature will
cause in melting and vaporization leading to thermal ablation. If the absorptivity of
material is low, the coupling will be very low and temperature will not rise to the
extent of removal of material. The power density during machining greatly affects
the vaporization rate. If the vaporization rate is high enough, it causes a shockwave.
The pressure of this shockwave ejects the molten metal at high speed after the laser
pulse.
The mechanism of material removal during laser micromachining can be
achieved by three ways: direct writing, mask projection technique, interference
technique. In direct writing manner desired micro features are generated by moving
the workpiece with respect to fixed laser beam or by scanning the laser beam by
keeping the workpiece fixed. In mask projection technique a mask is patterned with
the desired shape of the workpiece and is illuminated by laser which is shaped and
homogenized for uniform intensity distribution across the uncovered region of
mask. The pattern is then projected on the work surface using projection lens. In
interference technique laser beam is split and super-positioned with beam splitter
for producing interference patterns. These interference patterns have unique
intensity variation that enables periodic micromachining over work surface.
Material removal by thermal ablation is very useful method for machining metal as
well as ceramics where smaller thermal diffusivity and higher value of absorption
coefficient is required to maintain for achieving better ablation efficiency.
Pulsed laser micromachining can be carried out in two time regions, one is long
pulse and another one is ultra fast or ultra short pulse. In long pulse laser, time
required for heat diffusion is shorter than pulse duration. This results in easy heat
diffusion in the surrounding leading to decrease in overall machining efficiency.
Also, the boiling of work material in the machining zone drives the molten metal
away in the form of droplets which fall back on the work surface and form debris
that are very difficult to remove and need additional machining operations.
Moreover, heat diffusion results in formation of heat affected zone near the
peripheral area of the machining zone and subsequent heating and cooling waves
propagate through it leading to formation of thermal stress and micro cracks. On the
other hand, machining efficiency in short pulse laser like nano second, pico second
and femto second is higher and better ablation occurs as the time interval between
two subsequent pulses is very short which entraps the laser energy. The heat
generation instantaneously goes past to melting and evaporation point leading to
machining of various refractory materials like rhenium, molybdenum, etc.

Moreover, there is no debris or droplets on the work surface, negligible heat
affected zone and no surface or subsurface damage after machining. Other
parameters like ablation threshold and reflectivity of workpiece material, wave-
length, pulse duration as well as pulse repetition rate greatly influence the process of
ablation during machining.
Micro LBM is a versatile process for fabricating various simple as well as intricate
micro features in metal, glass, plastic, as well as machining very thin and delicate
foils with desired precision and dimensional accuracy. The process includes
machining of required micro shapes by drilling, cutting, marking, and even involves
operations like threading, turning, grooving by utilizing multiple laser beams. The
process can be utilized for controlled fracture of delicate items. Laser drilling of
high aspect ratio micro holes can be enhanced further by implementing newer
techniques like helical drilling that removes work material in helical pass splitting
the total machining depth into multiple single steps; trepanning that uses moving
laser spot in circular orientation and polarization control that can be achieved by
changing linear laser polarization into circular one [55, 56]. Additionally, helical
drilling can be combined with polarization control for fabricating high quality and
high aspect ratio precise micro holes. Laser cutting can be done by trepanning.
Trepanning is done by optomechanically moving the laser on the work surface in a
predefined path which helps in machining larger sized holes even on ceramics.
CNC cutting is used for machining nonlinear micro holes with programmable shape
whereas laser marking is used to machine very low depth grooves to form desired
patterns.
Micro LBM is well known and flexible process to fabricate microfeatures in
submicron or even in nano ranges where possibilities are still there to carry out
further research works by using fiber laser and also by using very smaller pulse
duration in nano, pico and femto second ranges on different materials. Nano second
laser can further be used for excimer laser, CO2 laser, copper vapor laser, diode
pumped solid state laser, etc. [57]. Other research scopes include study of change in
surface morphology due to heating, successful implementation of lasers for
obtaining high resolution, intricate 3D and high aspect ratio micro features on
numerous materials, generation of micro textured surfaces to be used in micro
fluidics and micro mechanics. Micro LBM is also utilized in areas like biomedical
and processing materials for semiconductor, photovoltaic cell, etc.
1.3.3.3 Challenges
Micro LBM is a thermally activated process. Hence, during machining it generates

machining debris which require involvement of further machining techniques for
removal. Moreover, some amount of molten material resolidifies and forms recast
layer around the machined feature. Formation of heat effected zone and modifi-
cation of grain structure is prominent in laser machining. Also, the work surface
after machining undergoes thermal and mechanical stress as well as surface and
subsurface cracking. All the above mentioned problems can be encountered by
using ultra short pulse laser. However, formation of recast layer does not disappear
completely even for femto second lasers. But these techniques are not at all eco-
nomical and give rise to optical problems. On the other hand, ultra high laser
intensity generates which leads to strong deformation of laser light in the focal
plane that may affect the machining accuracy [58].
Furthermore, newer techniques like underwater laser machining have been
introduced which need extensive research for confirming its feasibility in encoun-
tering several thermal related issues. Another key problem in laser machining is
fabrication of micro features on reflective surfaces that restricts its application in
fabricating features of copper, aluminum, etc. for which further research works are
needed. Other research issues of micro LBM include engraving lines for larger
areas, minimizing machine-to-machine variation and generation of fumes and
odors, decreasing longer machining time needed by pulsed laser systems, charac-
terizing the ablation behavior and heat conductibility of various fiber reinforced
composites, etc.
Micro LBM processes are being used for micro-texturing as well as machining of
silicon wafers, thin glass sheet [59, 60], micromachining of optical material like
lithium niobate, Gallium Arsenide and lithium tantalite, accurate machining of
fluoropolymers to be used for miniature sized lab-on-chip technologies, drilling tiny
holes in chip packages and polymers used for microcircuit boards, micro-texturing
of magnetic hard disk drives, video heads, scribing, patterning, dicing of developed
optical wafer as well as substrates and other numerous micro as well as nano range
applications like smoothing of synthetic CVD diamond for optical applications like
thermal as well as infrared sensors and detectors, etc. [61]. Micro LBM is also used
in various biomedical applications like fabrication of stents, micro holes in patient
monitoring probes, various micro components in MEMS, rapid prototyping of
micro fluidic channels with optical waveguides, micro-textured surfaces for cell
adhesion [62], etc. Further applications involve texturing of magnetic disk and
diamond films, fabrication of various polymeric micro structures for transferring
these patterns on metallic substrate, patterning and repairing of electronic circuits
and devices, fabricating micro patterns of inorganic, organic and biological mate-
rials, fabricating bio sensors, thin film transistors, OLED display [63] as well as
drilling of meshes in metallic foils, trimming of machined devices, percussion
drilling and underwater ablation of silicon [64, 65], fabrication of nickel intravas-
cular rotor micro turbine [66], mold inserts for photo molding, etc. [67].
1.3.4 Micro Ion Beam Machining (IBM)
Micro Ion Beam Machining is another atom by atom material removal technique
for fabricating precise parts in micro as well as nano ranges. In this machining
process, ions of inert gas such as argon are bombarded with very high kinetic
energy of about 10 keV on the workpiece surface resulting in ejection of atoms by
elastic collision. A schematic diagram denoting the micro IBM setup has been
shown in Fig. 1.5. Due to rising demand in fabricating micro and nano components,
micro IBM is gaining popularity in manufacturing semiconductor devices, maskless
implantation as well as failure analysis and other respective fields [68]. Apart from
traditional techniques like X-ray or UV lithography that are used as intermediate
process for primarily producing micro and nano scale features, micro ion beam can
efficiently generate high resolution structures on any conductive component by
direct writing manner. This micromachining process is also helpful to fabricate
microtools, etching of IC-patterns, generation of micro and nano features on silicon
substrates, sharpening of diamond cutting tools, etc.
In micro IBM, ion with specific intensity is moved towards work surface for
fabricating required micro feature. The operation of IBM is carried out in vacuum
by using vacuum pump for avoiding collision with surrounding air molecules and
airborne particles. Other accessories of IBM setup includes stage, detectors, ion
column, liquid metal ion source for providing ion, inlet and containment for gas
Fig. 1.5 Schematic of micro IBM setup

[69] as well as controlling and monitoring unit. Among several species, Ga is

primarily used for liquid metal ion source due to its several advantages like low
volatility, low melting point, low surface energy, etc. [70]. Liquid metal ion source
again consists of extraction electrode, capillary tube with tungsten needle, shield-
ing, etc. The electrical coil melts the gallium which wets the tungsten tip. When
very high electric field with voltage of about 7 kV is applied in extraction electrode,
molten Ga deforms and forms a cone like shape which is known as Taylor cone.
Moreover, the strong electric field pulls out the positively charged ions and
accelerates them through the ion column with voltages ranging from 5 to 50 keV,
whereas continue supply of ions are there as molten Ga constantly flows to the
Taylor cone. The ions form parallel ion beams with the help of probe forming lens
and is made to pass through mass separator which maintains mass-charge ratio.
A drift tube is positioned following the mass separator that removes the ions which
are not directed vertically. The lens focuses this beam on the work surface which is
also accompanied by an electrostatic beam deflector for controlling the striking
direction and position of beam on the work surface. The generated ion beam
collides as well as impinges with high kinetic energy and controlled manner that
dislocates the atoms, positive ion and secondary electrons in work surface and
subsurface. The energy of this ion sputtering ranges from 10 to 100 keV and if this
energy is higher than the binding energy of workpiece atom, dislodging of substrate
atom occurs. The procedure repeats itself and the dislodged atoms contribute to
further removal resulting in eroding of work material. The number of atoms ejected
per ion is known as sputtering yield that depends upon types of ion and atoms in
work surface, ion energy and density, incident angle, etc.
Various types of interaction occurs when an accelerated ion strikes the work-
piece. These are swelling, backscattering, implantation, redeposition, etc. With the
increase in ion energy, sputtering yield increases, however, the work surface may
swell. Further increase in ion energy leads to undesirable effects like ion implan-
tation. Back scattering is the removal of incident atom either by direct or multiple
collisions where the back scattered atom are available for redeposition. The
parameters that defines the characteristic of ion beam include ion flux, which is flow
of energy or particles passing through a specific area per unit time; fluence, that can
be defined as the number of incident particles on a defined cross sectional area for a
certain time interval; dose, which denotes the amount of particles absorbed after
collision in the work surface, beam current; current density, dwell time, beam spot
size, incidence angle, etc.
IBM is a popular process for precise and accurate fabrication of micro as well as
nano features. In contrast to highly precise and conventional lithography for
machining micro/nano features, IBM, as a maskless process [71], offers several
advantages like finer focusing of ion beam, availability of various ion masses, better
energy density, etc. which make the process appropriate even for accurate
nanoscale patterning and fabrication of intricate 3D micro/nano features. IBM

constitutes various techniques for material removal like milling, which involves
sputtering and etching, implantation, deposition, imaging, etc. Ion beam milling
involves sputtering and removal of work material by scanning the work piece
leading to maskless patterning and formation of any predefined shaped micro/nano
feature. The process of milling, chemical reaction, machining rate and efficiency
can be enhanced further by using suitable precursor gas like xenon difluoride which
is fed into the work chamber. Moreover, ion beam milling with precursor gas like
SiO2 and nitride for aluminum, phenanthrene for carbon materials can be used in
additive manufacturing where the gas contains the material required to be deposited
is injected by capillary gas feeding nozzle. The process can be used for micro/nano
surface slotting, hole drilling, ring core milling, h bar milling, etc. As a supple-
mentary of ion milling, ion implantation can modify work surface in which specific
mass of ions are accelerated with high kinetic energy that bombards the work
surface and are implanted [72].
Moreover, the process can be combined with other processes like deep reactive
ion etching, wet etching, [73] etc. Similar to chemical vapor deposition, ion beam
deposition can contribute to maskless deposition of metals like Pt and W as well as
insulators like SiO2 on various surfaces, where better resolution can be obtained but
the deposition rate is slower. Ion beam imaging does not involves deposition or
removal of material but alike scanning electron microscope, ion beam can be
scanned over a sample surface for producing images and revealing surface
topography that further unbound wide applicability and research opportunity for the
process. Additionally, IBM is a potential process which can effectively be utilized
for nano scale production that discloses its superior usability in micro as well as
nano regime. In thin films, single-crystal whiskers and in layered structured thin
graphite flake which also poses superior electronic and electrical properties, IBM
can easily produce perfect nano stacks along the c-axis [74] by 3D etching. Also,
this process has become popular for precision fabrication of ultra fine devices in
submicron as well as nano ranges; thus enabling IBM for further investigation and
extending research scope and opportunity.
1.3.4.3 Challenges
The major challenge in micro IBM relies in minimizing the damage caused by ion
beam on the wokpiece surface. With the increase in ion implantation, individual
disordered cascade regions get overlap forming a damaged layer over the surface
that generates residual stress in the component. The ion beam can also amorphize
the workpiece surface by creating point defects, dislocations, phase transformation
and grain size modification; thus requiring further study, extensive research and
systematic investigation in this area. Moreover, samples prepared for characteri-
zation and produced by IBM contains impurities like oxygen, galium, carbon, etc.,
where during machining, oxygen can get into vacuum chamber due to its relatively
poor build quality. Several other problems concerning IBM include ion-beam
induced grain growth in fine-grained Ni as well as in Ni alloys [75], formation of

Ga containing surface phases [76], change in chemical properties of work surface in
ion beam milling, etc. that requires systematic research.
Though the process is being utilized for fabricating micro components and other
micro-nano applications, the cost of micro ion beam machine is very high and
requires skilled operators for carrying out machining operations. Apart from the
ability in fabrication of precise parts, micro IBM suffers from spreading radiation
from propagating ions that requires added protection for fabricators during opera-
tion, formation of void, bubble, etc. in the final machined shape. Moreover, getting
exposed to radiation in the machining zone for prolonged duration can change the
material property of the workpiece that should be taken care of.
Micro IBM has lots of applications in the fields of micro as well as nano manu-
facturing and can even develop feature of about 5 nm size. IBM is very popular in
semi conductor industries for failure analysis and modification of electronic circuits,
debugging ICs, repairing mask, preparing samples for TEM, rapid prototyping of
micro/nano features to be used in MEMS, sensors [77], fabrication of nano pillars,
AFM and SPM tips [78], micro tools [79], fabrication of nano patterns [80], and
several trenches [81], micro gear by FIB-LIGA, etc. Furthermore, researchers have
fabricated nano-hand [82], 3D honey comb structure [83], lens moulds [84], stamps
[85], different types of manipulator like as two pillar, nano actuator with coil
structure, 3D nano rotors [86], nano tools, bio nano tools, various bio metric
structures like glass capillary for bio medical treatment, neural interface for con-
necting nervous system with external devices [87], nano structured thin film
magnetic head, nano cup [88] and other various 3D curved nano structure [89], etc.
Moreover, the process can be used for machining micro cutting tools made up of
diamond, tungsten carbide, high-speed steel and various other harder materials
where cutting dimensions within the range of 15–100 µm [90] can easily be
achieved and other complex geometric features like tool nose radius, rake and relief
angles can also be made within micron range by micro IBM process.
1.3.5 Micro Electron Beam Machining (EBM)
Micro EBM is a thermal activated micro machining process where electrons with
high speed strike the workpiece surface, thereby transferring the kinetic energy into
heat energy that melts and vaporizes the workpiece material. During micro EBM
process, very high velocity (228,478 km/s) of electron beam is achieved by using
voltage of about 150 kV and is focused over a point of 10–200 lm diameter that
results in very high power density in the order of 7000 billion W/sq.mm. This high
power density is enough to vaporize any type of material instantaneously.
Fig. 1.6 Schematic of micro EBM setup
Whole micro EBM process is conducted in vacuum chamber without any contam-
ination to evade any possible collision of accelerated electrons with air molecules.
This restricts the process to be used over large work pieces as the vacuum chamber is
very confined. But the process has advantages in having very less thermal effects on
the workpiece because the machining zone is very small, typically in the order of
only 25–50 µm. Furthermore, the process is able to generate different intricate
shapes and contours by directing the electron beam using magnetic deflection coil.
A schematic diagram of the micro EBM setup has been shown in Fig. 1.6.
In micro EBM process, high velocity of electron beam is generated from an electron
beam gun which consists of tungsten or tantalum cathode filament. When large
potential difference is applied between cathode and anode, cathode gets heated up
to around 2500 °C and thermo ionic emission of free electron occurs that is further
facilitated by maintaining vacuum inside the beam gun chamber. The negative
biased cathode repels the electrons causing them to move towards annular cathode
grid. The cathode grid is also made negative so that the electrons can approach to
annular anode. Due to the application of potential field and attraction of annular
anode the stream of electrons gets accelerated leaving the anode with very high
velocity that is about half the velocity of light. The cathode grid is made concave
for easy concentration of beam. The beam is then made to pass through a series of
magnetic lenses and apertures that shapes the beam, reduce divergence and
improves the quality of that beam. The beam then comes to electromagnetic lens
and deflection coil. The electromagnetic lens is used to focus the electron beam over
a very tiny spot whereas the deflection coil can maneuver and move this beam in
desired direction. A valve is also situated in the electron beam machine for con-
trolling the beam duration.
The entire EBM process needs to be carried out in a vacuum chamber [91] as
electrons travelling at very high velocity may collide with air molecules in the way
and may lose their energy. Moreover, the beam will get disturbed which will make
the control of required operating parameters difficult and will adversely affect the
machining quality. During machining, the electron beam is focused on the work-
piece. The beam interacts with the work surface and the electrons impinge into the
work material. This penetration depth is highly dependent upon work material
properties like melting temperature, thermal conductivity, vaporization temperature,
etc. and the characteristics of the converging beams [92]. Upon striking the work
surface, the kinetic energy of electron coverts to tremendous heat energy that melts
and vaporizes the localized area of the workpiece in the focal region. Finally the
molten material is wiped off from the machining zone by using high pressure of gas
formed by the reaction of beam and backing material that is applied at the underside
of workpiece. However, if some molten metal is left, it will form a recast layer but
this will not oxidize as the process is carried out in vacuum. The electron beam gun
has the facility to even operate in pulse mode during machining where single pulse
is used to drill holes on thin sheets and multiple pulses are used to drill hole on
thicker plates. Other than the pulse duration, control of various process parameters
is necessary for satisfactory machining which include beam current, working dis-
tance, beam shape and size, incident angle etc.
Micro EBM can drill very high aspect ratio (25:1) micro holes on various low
strength materials with very high drilling rates leading to minimization of pro-
duction cost. Moreover, tapered, reverse tapered and barrel shaped holes can also be
fabricated be maneuvering the deflection coil and introducing CNC system [93].
The process is suitable for machining wide range of electrically conductive and
non conductive materials like Ni, Ti and other super alloys, stainless steel, plastic,
aluminum, leathers, ceramics, etc. Also, the detrimental thermal effect like forma-
tion of heat affected zone expands over only few microns due to the application of
shorter pulses. Moreover, in general performance of the machining does not depend
on physical, mechanical or metallurgical property of the work material and requires
very simple work holding due to the absence of any cutting force. As a result,
the fixturing and holding cost is lower and the process can be used for machining of
very brittle and fragile materials. The process also offers several opportunities that
can be extended further by applying it in fabricating complex micro components.
1.3.5.3 Challenges
Alike other discussed micro machining techniques, micro EBM process is not
devoid of any difficulties or problems. Though no mechanical distortion is there, but
generation of very high thermal energy in a confined zone may introduce residual
thermal stresses and the quality of the edges may be influenced by thermal property
of the workpiece as well as pulse energy. Moreover, the process is not at all
economical, requires high operating cost, initial investment, regular maintenance
and involvement of skilled operators. Additionally, for creating vacuum the time
required is much more, resulting in increase of non productive idle periods and
overall machining time. However, the influence of this incidence can be minimized
to some extent by introducing vacuum load locks. Though the formation of heat
affected zone is negligible, the formation of recast layer cannot be avoided. Hence,
further research is still necessary in order to encounter various challenges and to
enhance the process feasibility as well as applicability.
Micro EBM has diverse application field starting from the fabrication of bi-metal
saw blades to transmission assemblies. On flat as well as contoured surfaces, CNC
EBM drilling is used for rapid fabrication of large number of holes that are faster
than other processes. Moreover, the technique is capable of drilling micro holes by
single millisecond pulse of electron beam making the total process much faster [94].
Various types and shapes of precise slots and holes like tapered, bowed wall,
straight wall with various contoured internal profiles can be produced by micro
EBM. Moreover, holes can be drilled on workpiece of thickness 9.5 mm and on
harder metals like titanium and its alloy [95] by precisely controlling the beam
energy which can be used extensively in aerospace application. Electron beam
milling can be used for cutting of different shaped apertures in thin foils and wafers.
Also, the process is used for selective etching of thin films on glass or ceramics.
Electron beam drilling can contribute ultrafine filter production for numerous
purposes. Moreover, the holes can be fabricated on different ceramic materials.
Micro EBM can be used for making holes in wire drawing dies, fuel injector
nozzles and fabrication of fine gas orifices in nuclear space reactors, etc. Also,
micro EBM can be used in pattern generation for IC fabrication, polishing of metal
mold [96], repairing of defects in masks [97] and fabricating various other micro
features in chemical, textile, food processing and semiconductor industries [98].
1.3.6 Micro Chemical Machining (CM)
Micro Chemical Machining (CM) or Chemical Micro Machining is a popular

process where material from the workpiece is removed by chemical reactions from
strong acidic or alkaline chemical reagent. The process involves precise and
accurate contouring of any shape and size of metals where material removal occurs
by the action of chemical cell. In ancient days, chemical machining was used by
artisans to engrave metals. But in recent years, the applicability of CM has largely
increased where it can be used for milling of pockets and can generate complex
geometric and delicate features as no cutting forces and thermal distortion is
involved here. The machining depth in micro CM process ranges from 2.54 to
12.27 mm.
Micro chemical machining refers removal of material over selected areas of

workpiece by controlled chemical reaction where the workpiece material is dipped
inside strong chemical reagent or etchant such as HF, HNO3, FeCl3, etc. and
different other acids and alkaline solutions. Etchant reacts with the work metal and
produces metallic salt that dissolves in the solution. The selection of suitable
etchant depends upon various factors like type, surface finish of work material and
its interaction with etchant, type of maskant to be used, material removal rate during
machining and required depth of penetration, etc. Prior to machining the workpiece
is covered in chemically resistive maskant excluding the areas on to where the
machining is supposed to occur. Maskants restrict the etchants in penetrating and
dissolving the undesired area. The etchant removes the material by controlled
chemical reaction from all the exposed areas of the workpiece where the material
removal rate may vary from 0.0025 to 0.1 mm/min.
Maskants are mainly three types, photoresist, screen print and cut and peel.
Photoresist maskant is used for photochemical machining where etching is carried
out by photosensitive resist and can produce complicate and accurate shapes. In
screen printing technique, a screen usually of stainless steel is used to press the work
surface. The screen has the openings on to which the etching is needed to be carried
out. Etching occurs in the exposed area when the maskant is rolled over. The process
is used for high volume production but the accuracy of the product is low. Cut and
peel maskants are primarily applied to the entire work surface by dipping the
workpiece, spraying or flow coating and then cut and peeled off from the areas
needed to be exposed for etching. The accuracy of the process is low but very deep
etching can be obtained. Chemical micro machining is a time consuming process,
but it can generate contours, pockets, etc. Various other forms of micro CM include
chemical blanking where etching is carried out through thin sheets; chemical or
electrochemical polishing, etc. The parameters that affect the performance of
chemical micromachining process include type and temperature of etchant, type and
Fig. 1.7 Schematic of

micro CM process
method of applying maskant, method for circulation of etchant, etc. A schematic

diagram of chemical micro machining process is shown in Fig. 1.7.
Uniform material removal can be achieved by chemical micro machining.

Moreover, highly skilled operators are not at all required during machining and the
process can even fabricate various tapered surfaces with good surface finish within
low tolerance limit. As discussed earlier, chemical micro machining process can
easily be utilized for blanking, milling, cleaning, etc. Chemical blanking refers to
fabrication of features that penetrates the entire work material like slots, holes, etc.
Chemical milling produces blind details like channels, pockets and also reduces
weight of work material whereas chemical cleaning ensures suitable adhesion of
maskant to work material. Additionally, chemical micro machining offers several
opportunities that can further be extended which involve removal of recast layer
from parts machined with EDM and sharp burrs of machined portions, removal of
decarburized layer from low alloy steel forgings, etc. Moreover, after machining by
other method, extruded and oversized parts can be machined by chemical micro
machining over selected and desired area and multiple designs on the same work
piece can be machined simultaneously.
1.3.6.3 Challenges
Alike other process, chemical micro machining is not devoid of limitations. This
process is limited to fewer metals as selection and finding of appropriate etchant
and maskant for a range of materials is difficult. In addition, the process is highly
dependent on the availability of required etchant and maskant. The gases produced
during machining may entrap under the masking leading to uneven etching,
decrease in etching efficiency and generation of shapes with poor surface quality.
Moreover, when such gases come out, they may spread and attack other equip-
ments. In chemical micro machining, material removal rate is very low which can
further deteriorate as it gets contaminated with machining products. Other chal-
lenges in micro CM include difficulties in machining sharp corners, thicker as well
as chemically resistive material, limitation in scribing accuracy, degradation of
dimensional accuracy in the final product, etc. The etchants used in chemical micro
machining are toxic and hazardous for environment that require expensive methods
for disposal. For machining of alloys, surface quality gets degraded due to differ-
ential etching that requires further study and research work.
Chemical micro machining is used to machine various types of metals like copper,
aluminum and its alloys, lead, steel, titanium, nickel as well as various types of non
metals like ceramics, glass, plastic, etc. [99]. It is used to produce shallow holes and
cavities over large surface area [100], contours, pockets, depression [101], parts
with stepped features, machining of edges of sheet metal, engraving on metal
workpiece, machining of huge work surfaces like airplane wing to tiny workpiece
like IC chips [102], fabrication of stainless steel edge filter by photochemical
machining [103], and batch size production of various other components in
chemical and missile industries. Other popular applications of chemical micro
machining involves minimizing thickness of walls, ribs, webs of components
produced by conventional process, narrow cuts in large thin sheets applicable in
aerospace industries, etc.
1.3.7 Micro Electrochemical Machining (ECM)
Micro Electrochemical Machining or Electrochemical Micromachining has become

more popular with recent advancements to fulfill the needs of the fabrication of
macro and micro components. With rapid developments in the fields of automotive,
aerospace, electronics, optics, medical devices and much more, this process finds
wide applications in the machining of titanium and titanium alloys, super alloys and
stainless steel structures which are difficult to machine and pose many challenges
for conventional machining processes. This process provides added advantages in
the shaping of complex features with no thermal stress, burr formation and tool
wear and can be implemented on metals regardless of their hardness which facil-
itates it to execute precision jobs with accuracy in the order of ±1 lm on 50 lm
[104]. Governed by the laws of electrolysis of Michael Faraday, this process
removes material by the mechanism of anodic dissolution during electrolysis where
it is possible to achieve unit material removal as the size of ions that makes the
process extremely useful for machining delicate and complex micro features. But
still, research is needed to explore further opportunities and overcome the
Fig. 1.8 Schematic diagram of EMM
challenges in machining different newer materials with greater accuracy for suc-
cessful generation of more intricate micro features. A schematic diagram of
Electrochemical Micromachining setup is shown in Fig. 1.8.
As discussed earlier, Electrochemical Micromachining is an electrochemical

material dissolution process where both cathode microtool and anode workpiece
remains submerged in proper electrolytic solution separated by narrow
inter-electrode gap (IEG). IEG controls the dimensional accuracy as well as reso-
lution of the micro feature to be produced and the lower will be the IEG, the better
will be the localization of anodic dissolution. There are two types of electrolyte
available for EMM, one is passivating that contains oxidizing anions which give
better accuracy such as sodium nitrate [105], sodium chlorate, etc. and other one is
non-passivating such as sodium chloride which contains aggressive anions. Also,
different acid electrolytes such as sulfuric acid, hydrochloric acid, etc. are preferable
which does not produces any insoluble reaction products. The electrolyte needs to
be in static condition during operation as introducing high electrolyte flow like
conventional ECM may vibrate the micro tool tip and deteriorate the machining
accuracy and stability. During machining, for achieving instantaneous high current
density in the order of 75–100 A/cm2 as well as high mass transport and to confine
the dissolution process with in micron or sub-micron ranges, for enhancing the
machining accuracy and for reducing the IEG in the range of 5–20 lm, low voltage
in the range of 1–10 V with ultra short D.C pulse current is applied that also ensures
effective removal of machined products like sludge and hydrogen bubbles from the
IEG during pulse off time [106]. For machining to occur, the micrometer scale tool
electrode is then feed forward or feed toward the workpiece by maintaining a
predefined IEG. From the anodic workpiece, surface metal starts dissolving into
metallic ions generating an approximate mirror image of the tool by corresponding
electrochemical reactions. The corrupting position of the workpiece varies with the
location of tool electrode and anodic dissolution continues during whole the time
resulting in generation of desired feature on the workpiece.
Throughout the material removal process, for maintaining uniform current flow
as well as removal of material and to achieve better machining stability, the feed of
tool is kept balance with the rate of dissolution where increase in gap will hinder the
machining process by increasing electrolyte resistance and decrease in gap will
result in improper flushing and coagulation of reaction products leading to occur-
rence of frequent short circuits in the machining zone. However, still during
machining, machining products like gas bubbles, sludge, etc. resulting from
ongoing electrochemical reactions may stick between the microtool and the
workpiece which can clog the small IEG that may lead to formation of micro sparks
and deterioration of machining quality and accuracy. For such cases, to remove the
electrolysis products from the IEG and to supply more fresh electrolytes, use of
rotary electrodes and vibrations by piezoelectric transducer (PZT) [107] may be
used either in tool or in workpiece which generates pressure waves that can clean
the machining gap and maintain machining efficiency. Other parameters which
effect the dissolution process involve concentration of electrolyte, duration of each
pulse as well as pulse on time [108], applied frequency, temperature of electrolyte,
etc.
Electrochemical Micromachining is very economical and eco friendly process for

machining micro shapes effectively. Moreover, the process offers higher precision,
control and burr free machining, flexibility, reliability and machining of different
chemically resistive harder materials like titanium and its alloys, stainless steel,
various super alloys, etc. Furthermore, as EMM is not thermally activated process
hence, the process involves no adverse thermal effects like formation of heat
effected zone in the machined surface, wearing out of microtools, generation of
thermal stress and distortion, formation of surface as well as subsurface cracks and
deterioration of surface property, quality as well as integrity. Additionally, EMM is
a versatile process and involves different techniques for generating desired micro
features which involve jet EMM, capillary EMM, 3D EMM, through mask EMM,
etc. Furthermore, various types of precise and high aspect ratio micro tool having
good surface finish and with different tip shapes like conical, cylindrical, spherical,
disk shape [109], wedge-shape [110], etc. for EMM can be in situ fabricated as per
micro product requirement by reverse EMM process which can later be used for
machining of micro features in same setup that leads in reducing the tool handling
and fixing issues. Another advantage of EMM is the use of multi micro tool which
can machine arrays of micro feature simultaneously and decreases the production
time. But, this material removal process offers several opportunities which are still
unexplored and require extensive research, further investigation and detailed study
[24]. Hence, researchers are concentrating towards appropriate designing and
development of various types of microtools, proper selection of suitable electrolyte,
improvement of micro tool feeding system, proper control and monitoring of IEG
during machining and achieving better material removal rate, elimination of micro
spark generated in IEG, achieving better surface finish and dimensional accuracy,
etc.
1.3.7.3 Challenges
Electrochemical Micromachining process takes higher processing time for fabri-

cation of micro features. Moreover, the inherent feature of this micro machining
process restricts its application for electrically conductive materials only. Except
this, there are other research scopes that need particular attention like achieving
better machining performance, machining smaller and high aspect ratio 3D micro
features as well as nano components, better optimization of operating parameters as
well as achieving proper control and stability during micromachining.
As discussed earlier, electrochemical micromachining is an effective and versatile

process for generating microfeatures applicable in electronics, optoelectronics,
medical, biomedical, optics, semiconductor, aerospace and different other ultra
precision industries [111]. The process is applied for fabricating micro components
for MEMS, micro nozzles, plate for ink-jet printer head, finishing of print bands for
high-speed impact printers [112], mask less metal cutting by electrochemical saw,
deburring of micro parts, fabrication of diaphragm for electro optical systems,
various complex, high aspect ratio, intricate and contoured 3D micro components,
structure, profiles and shapes, different high aspect ratio micro structures on silicon
[113] for MEMS and on different composite materials [114], etc. Moreover,
researchers have fabricated single as well as arrays of micro grooves, holes and
slots with complex geometry and internal features [115–117], different micro milled
[118], micro turned structures [119], micro reactor, micro gear [120], square helix,
micro patterns in flat as well as on cylindrical surfaces [121], sub micrometer cavity
with controlled roughness at two different scales [122], nano structured electrode
surface with the help of STM tip [123], different 3D nano structures in nickel [124]
and various other micro/nano features.
1.4 Introduction to Various Hybrid Micromachining

Processes
Hybrid micromachining processes are combination of two or more machining

processes and these processes are becoming more and more attractive for fabrica-
tors as well as researchers. The development of hybrid micromachining processes
improves the advantages of characteristic features of constituent processes while
reducing their disadvantages [125]. The CNC machining and additive process
propose more benefits due to more accurate machining features in contrast to the
limitations of every other process. The addition of ultrasonic vibration and drilling
decreases the tool wear rate and cutting force [126]. The recast layer and heating
zone are removed by the integration of laser drilling and electrochemical machining
process. The hybrid micromachining processes have enormous potentials because
these processes produce more intricate parts with good dimensional features, higher
machining accuracy, lower machining time, etc. These processes have huge
research potential for improving machining characteristics, enlarging the applica-
tion areas, enhancing the process characteristics, etc.
1.4.1 Electrochemical Grinding (ECG)
Electrochemical grinding (ECG) is one of the micromachining techniques, in which

electrolyte solution and mechanical grinding process are combined to remove the
material from the machining zone with concurrent action of electrochemical reac-
tion and mechanical abrasive action for providing burr free and stress free machined
surface with good machining quality [127, 128]. ECG eradicates a separate
deburring operation due to electrolyte circulation. In ECG process, the shape of
workpiece is formed with analogous shape of grinding wheel. The schematic dia-
gram of electrochemical grinding is shown in Fig. 1.9. The main characteristic of
ECG is that the insulating abrasive particles are inserted into metallic grinding
wheel. For instance, the diamond abrasive particles are non conductive materials
which are embedded into conductive grinding wheel. The embedded carbon brush
with electrolyte commutator spindle grips the grinding wheel which is connected
with negative terminal of DC power supply and workpiece is connected with
positive terminal of DC power supply. During machining the electrolyte is supplied
to the grinding wheel near the work piece. The nozzle is used to supply the flow of
electrolyte into the machining zone and the grinding wheel carries the electrolyte
during machining.
The material is removed by electrochemical dissolution. The oxide layer is
formed on the workpiece during machining. The grinding wheel removes the fresh
metal with oxide layer. Major material removal takes place due to electrochemical
action and rest of materials is removed by the mechanical grinding action. It
eliminates the metallurgical damage of the machined surface which is involved in
Fig. 1.9 Schematic diagram

of electrochemical grinding
conventional grinding process that includes cracking and heat distortion. ECG can
produce sharp edges within the range of 0.001–0.005 lm radius by varying the
power settings. The process can machine thin and delicate metal sheets with better
machining accuracy and feature characteristics. Very less tolerance can be acquired
in the order of 0.005 mm by controlling the micro ECG characteristics such as type
of material being cut, its size and depth of cut. But, this process is applied only for
conductive materials i.e. stainless steel, aluminum, hastelloy, inconel, etc.
Presently, researchers are concentrating to increase the machining rate, machining
accuracy, wheel life, etc. with the development of proper ECG set up. Lower pulsed
voltage and lower duty ratio are more suitable for enhancing the machining
accuracy while the grit size has no effect during machining [129].
1.4.2 Electrochemical Discharge Micromachining
Electrochemical discharge micromachining (ECDM) process is a hybrid machining

process, in which the mechanisms of electrochemical machining (ECM) and
electro-discharge machining (EDM) are combined to obtain good quality features
particularly on electrically non conducting materials. In ECDM thermal erosive
effect of electro-discharge action (ED) follows the electrochemical (EC) reaction
and electrochemical action that help in the generation of positively charged ionic
gas bubbles. During machining, DC or pulsed DC voltage is applied between
cathode tool and auxiliary electrode which are immersed in suitable electrolyte
solution of KOH, NaOH, etc. As a result, hydrogen bubbles form on the tool
surface and oxygen bubbles generate on the counter electrode due to electrolysis.
With increase in machining voltage, current density increases. The increased cur-
rent density increases the quantity as well as size of these bubbles leading to
generation of a layer of gas bubbles surrounding the tool electrode. These evolved
gas bubbles gradually combine with each other and form a gas film which serves as
an insulating media and generate enough resistance creating higher potential dif-
ference between these two electrodes. When the voltage becomes high enough and
exceeds a critical value, electrical discharges occur between the tool electrode and
the upper layer of electrolyte. If the workpiece is placed in the discharge zone,
machining does take place in the form of melting, vaporization and thermal erosion
due to the heat generated by the discharges. The material is eroded by electro
chemical dissolution as well as electro-discharging between two electrodes [130].
The combined material removal mechanism facilitates higher material removal rate
in ECDM than ECM or EDM process. The schematic diagram of electrochemical
discharge machining is shown in Fig. 1.10. It is mostly used for micromachining
and scribing out hard and brittle materials, conductive, non conductive materials,
etc. This hybrid process is successfully used in non conductive materials such as
ceramics and glass for drilling of micro holes and slots by smaller electrodes
efficiently and economically. Machining of complex microfeatures is not possible
by ECDM process with better accuracy and surface finish on harder materials. So,
more systematic investigation is necessary for machining non conductive materials
because of their key applications in MEMS field. For example, semiconductor
materials can be bonded with quartz or glass because of their transparent property.
Also, the process is utilized for machining ceramic materials that are used in
high-tech apparatus [131]. ECDM is utilized to machine fine 3D micro-structures
on glass and to obtain good surface finish with better machining accuracy in drilling
and milling operations. In ECDM, micro structures with higher depth are
fabricated using high aspect ratio micro tool in lower electrolyte concentration.
Fig. 1.10 Schematic diagram of electrochemical discharge machining

ECDM process is well familiar in several names such as electrochemical discharge

machining [132], spark assisted chemical engraving [133], electrochemical spark
machining [134], micro electrochemical discharge machining [135], electrochem-
ical arc machining [136], discharge machining of non conductors [137] and electro
erosion dissolution machining [138]. ECDM process has numerous advantages that
make it able to drill glass substrates, ceramics, composites and stainless steel
materials. Other various applications of ECDM involve fabrication of complex
micro profiles [139], micro dies [138], deep drilling [140], machining of cylindrical
parts [141], dressing of micro-grinding tools [142], slicing of glass rods [143], etc.
1.4.3 Abrasive Assisted Micromachining
Abrasive assisted micromachining (AM) is an effective hybrid micromachining

process in which the material is removed through the injection of jet of small
particles for the fabrications of microsized features such as micro-channels, holes,
etc. These types of fabricated microfeatures are used in micro-fluidic devices,
micro-electro-mechanical-systems (MEMS) and optoelectronic components [144,
145]. A pressurized and high speed air jet containing abrasive particles wears away
the materials from the workpiece through the mask and obtains the desired shape of
the feature. Abrasive assisted micromachining machines the hard and brittle
materials such as glass and ceramics [146, 147] with desired shape and size of
microfeatures. The microfeatures of such materials are more important in elec-
tronics industry. This hybrid micromachining is also more important in case of
polymer materials because these materials offer a wide range of physical and
chemical properties. These materials have also other advantages such as low cost,
physically robust, good processibility for mass production [148], etc. This process
of hybrid micromachining machines easily with desired shape in acrylic polymers
such as polymethyl methacrylate (PMMA) [149, 150] which has most valuable
application in micro-fluidic devices and micro-electro-mechanical-systems such as
those in lab on chip, biomedical devices, heat sinks of electrical devices, capillary
electrophoresis chips, etc.
Different types of abrasive assisted micromachining are centrifugal force assisted
abrasive flow machining (CFAAFM), abrasive slurry jet micro-machining (ASJM),
abrasive enhanced electrochemical slurry jet machining (ESJM), abrasive water jet
machining (AWJM), etc. In centrifugal force assisted abrasive flow machining
(CFAAFM) process, the machining rate and surface quality increase with lesser
number of cycles compared to the capabilities of conventional abrasive flow
machining (AFM) [151, 152]. In abrasive slurry jet micro-machining (ASJM), the
slurry medium fabricates good microfeatures with relatively high resolution in a
variety of brittle and ductile materials and the effects of ASJM operating parameters
can be controlled easily on the minimum size of microgrooves [153]. Abrasive
enhanced electrochemical slurry jet machining (ESJM) is a new approach in which
abrasive slurry-jet machining (ASJM) and electrochemical jet machining (ECJM)

are combined for the micromachining of metals with higher material removal rate
and good machined surface quality, particularly those that are difficult to machine
using ASJM alone, such as titanium, stellite and tungsten carbide [154]. Abrasive
water jet machining (AWJM) process offers a high-quality cutting with a good
surface finish and the machined components can be used in automotive, aerospace,
surgical equipments and defense sector industries owing to its good machining
characteristics. AWJM process utilizes the mixture of water and abrasive to erode
material from the target surface. The effects of AWJM process parameters, i.e.,
water pressure, transverse speed, abrasive flow rate, standoff distance, abrasive grit
size, etc. can be controlled easily on performance parameters i.e., surface quality,
kerf top width, taper angle and material removal rate [155]. In abrasive assisted
electro discharge machining (AEDM), thermal interaction is added with
abrasion-mechanical action and energy is carried by plasma and also by abrasive
grains. Mixing silicon powder into dielectric reduces electrical capacitance across
the discharge gap by increasing the gap size. This result in more sparking intensity
and improvement in the discharge characteristic, especially in the machining of
large workpiece area. Application of powder-mixed working media allows AEDM
to obtain crackless affected layer, uniform and mirror finishing of complex shape,
etc.
1.4.4 Ultrasonic Assisted Micromachining
Ultrasonic assisted micromachining is another hybrid micromachining technique

for machining of brittle materials like, composites, glass, ceramics and graphite
with higher machining rate. The workpiece is kept on the fixture and is vibrated in
ultrasonic frequency range during micro USM. Abrasive slurry is flowed on the
workpiece and the ultrasonic tool strikes the abrasives and removes the material
away from the machining zone. The continuous flow of fresh abrasive slurry on
vibrated workpiece removes the debris from the tool and the gap between tool
and workpiece [156, 157]. During ultrasonic assisted micromachining, the fine
abrasive particles used are not safe for human being. Hence, chemically inert
common abrasive particles such as boron carbide, silicon carbide, etc. are used in
this process. These types of abrasive particles have no toxicity effect on human
health during handling. Microtools are necessary to fabricate fine microfeatures on
workpiece. These microtools are fabricated by micro electro discharge machining,
electrochemical micromachining, etc. But, it is difficult to produce by ultrasonic
assisted micromachining as ultrasonic vibration looses the griping of tools in the
precise mechanical chuck and the natural frequency of chuck may not be matched
with oscillator frequency. The fabricated microtools generate various machined
microfeatures i.e. blind or through holes, slots, 3D cavities, etc. using ultrasonic
assisted micromachining. This process also fabricates fine micro holes, generates
surface textures, micro channels, etc. which are used in ink-jet printer nozzles,
biomedical filters, integrated circuit boards, pneumatic sensors, fluidic filters, grids,
fuel injection nozzles, high-pressure orifices, optical apertures and manipulators.
Ultrasonic assisted mechanical micromachining is an important hybrid
machining in which the material is removed by the simultaneous action of
mechanically rotating spindle and higher axial ultrasonic oscillation of workpiece or
tool [158]. One of the important ultrasonic assisted mechanical micromachining is
ultrasonic assisted grinding where the oscillation of the grinding tool by piezo-
electric oscillators is used for achieving better surface integrity of machined
products. In ultrasonic assisted EDM, the cavitation and acoustic wave enhance the
material removal and flushing condition for microgrooves, slots and micro drilling.
The better ejection of molten metal from craters increases due to the slurry circu-
lation. This fact increases the material removal rate as well as generates good
surface quality. Ultrasonic assisted abrasive slurry jet micromachining (UAASJM)
improves the machining efficiency and quality of the ductile and brittle materials
due to the assistance of ultrasonic vibration. Due to ultrasonic vibration the alu-
minum nitride is polished by the abrasive water jet to get the better polishing
efficiency and quality [159].
1.4.5 Laser Assisted Micromachining
Laser can be effectively combined with other micromachining processes to be used

as hybrid machining process for obtaining several advantages such as faster
machining with improved accuracy and surface quality to generate micro/nano
features. Laser assisted micromachining may include laser assisted chemical
machining, laser assisted lithography, laser assisted electrochemical microma-
chining, etc. Laser assisted chemical machining utilizes a maskless photoreactive or
thermal reactive process where laser beam enhances the etching of semiconductor,
ceramic materials, metals and polymers in an etchant. By directing the path of
focused laser beam on the workpiece, the process helps in obtaining maskless
patterns in the form of material deposition or dissolution. In Oxide Film Laser
Lithography the use of photoresist can be entirely eliminated as because, well
focused laser beam (10 µm) forms a pattern of oxide film (200–300 nm) on tita-
nium which acts as a mask and the dissolution is localised only at the irradiated
areas. After machining, the freestanding oxide film can easily be removed by
ultrasonic cleaning from the edge of machined cavities.
In case of electrochemical micromachining (EMM) or deposition (electroform-
ing)with laser assistance, the localized anodic dissolution or deposition of the
process enhances due to laser radiation resulting in better machining accuracy on
micromachining zone. The acceleration of electrochemical reactions increases due
to laser assistance. The laser radiation boosts this electrochemical process by ten
times and localization increases in the micromachining zone. Moreover, in laser
assisted electrochemical micromachining, low energy defocused laser beam is
applied in the narrow machining zone which does not melt and vaporize the
workpiece, but helps in proper circulation of electrolyte in very small IEG by

increasing the electrolyte temperature and generating suitable temperature gradient.
High temperature increases the electrolyte conductivity. As a result, current density
increases that enhances the dissolution rate. Also, by increasing the temperature of
the work surface, laser beam helps in reducing the chemical reaction needed for
generation of passive metal oxide layer that can minimize the rate of current flow.
Hence, due to the application of laser during EMM with non passivating elec-
trolytes, formation of oxide layer gets reduced and material removal rate increases.
Furthermore, utilization of laser beam during EMM increases ionic movements and
accelerates electrochemical reactions that results in better productivity. Also, laser
beam confines the machining in very narrow area and improves the localization that
leads to better accuracy and precision.
1.5 Advanced Finishing Processes utilizing

Non-traditional Machining
Advanced finishing processes using non-traditional machining is gaining popularity

to cope up the steep demand in finishing intricate, complex, durable and sophisti-
cated shapes of various super-alloys, metal-matrix composites, ceramics, polymers,
aluminates, etc. that are highly economical and posses better surface quality and
property. In advanced finishing process, the type of energies involved and uti-
lization of that energy varies from than that in conventional finishing processes.
Where, conventional finishing processes depend on the physical contact between
tool and work piece by using the energy from electric motors, hydraulic equip-
ments, etc.; advanced finishing processes implements various non traditional
approaches and uses energies from high temperature plasma, electrochemical
reactions, jets with high velocity and with abrasives, etc. Hence, advanced finishing
processes have wide range of applications particularly in aerospace industries where
achieving ultra finished surfaces over various harder and tougher alloys are nec-
essary. Some of the major advanced finishing processes are described in the fol-
lowing sub sections.
1.5.1 Abrasive Flow Finishing (AFF)
Abrasive flow finishing process is one of the super finishing processes in which
workpiece and tool moves relatively for accurate finishing of internal shapes of
components and complex geometries. The basic arrangements of AFF have been
shown in Fig. 1.11. In AFF, the surface is super-finished by the flow of abrasive
laden polymer media in single or two-way direction. The abrasive media is passed
in one way direction and it comes back from the other end. In two-way process, two
Fig. 1.11 Basic

arrangements of abrasive flow
finishing
vertically opposite hydraulic cylinders push the abrasive media to and fro. The
process is used for complex cavities, edges, etc. At a given time, this process
finishes a number of parts or different areas of the same work piece. The atomized
AFM systems are capable for handling thousands of parts per day for finishing
operation reducing the labor costs and monotonous physical work. Through proper
control of the process parameters, this process can be used for variety of
super-finishing operations achieving very uniform and precise results.
The significance of all AFF parameters used in process i.e. media, tooling,
machine, etc. can be evaluated properly for wide range of applications in finishing
process [160]. For instance, the temperature effect on viscosity of AFF medium and
rheological properties of grit mixtures are two important factors for finishing of
mild steel dies [161]. AFF is also suitable for finishing of inner surface of spher-
oidal graphite cast iron [162]. The influence of various AFF process parameters i.e.,
number of AFF cycles, abrasive mesh size, extrusion pressure on the output
parameters i.e. surface finish and material removal rate can be controlled properly
during finishing of brass and aluminum workpieces [163]. However, the surface
finish depends upon the types of materials which should be taken care of before
operation [164].
1.5.2 Chemo Mechanical Polishing (CMP)
Chemo mechanical polishing (CMP) is another promising machining technology

for the super fishing operation of the integrated circuits (ICs) [165]. The starting
wafers for ICs are polished by the CMP process. The schematic diagram of typical
CMP setup is shown in Fig. 1.12. In CMP, the abrasive and corrosive chemical

of chemo mechanical
polishing
slurry are combined with polishing pad where the ring diameter is greater than
wafer. The dynamic polishing head holds the pad and wafer and these combined
parts are kept on a plastic retaining ring. The dynamic polishing head forms the
smooth surface where wafer surface is also flat and smooth during operation.
Sometimes, this wafer is also used in additional circuit elements. In some cases,
CMP mechanisms are used for finishing operation using chemical and mechanical
based abrasion. For instance, CMP is able to remove the material from the selective
position for any photolithographic system. In some cases, machining by CMP can
achieve machining depths as low as few angstrom to 22 nm. CMP is widely used
for fine finishing of glass and ceramic surfaces and semiconductor wafers. This
process facilitates the control and optimization of the polishing operation for
microelectronic devices and can cope up with huge demands of global wise at
different levels. Evidently, the process has enough capability in micro and nano
ranges and can reduce the difficulties in polishing operation where improvement is
still going on in the field of etching and lithography after its introduction in early
80s.
1.5.3 Elastic Emission Machining (EEM)
Elastic emission machining (EEM) is an ultra-precision finishing process for cre-

ating smooth flat surfaces as it has the capability to remove material at atomic level
by mechanical methods [166]. The finished surface gets completely mirrored and
remains crystallographically and physically undisturbed. The system has a rotating
tool, slurry and workpiece. The rotating tool and workpiece are immerged in a pool
of slurry. Soft material i.e. polyurethane rubber is used as a tool in EEM. The slurry
medium contains water and very fine abrasive particles. EEM process uses the
hydrodynamic effect to generate the lubrication film between tool and workpiece.
The thickness of lubrication film is 1 lm. The size of abrasive particle is much
smaller than the film thickness. Material removal occurs at atomic level due to

of elastic emission machining
contact of particles in machining zone. The schematic diagram of elastic emission

machining is shown in Fig. 1.13.
Due to the collision between ultra fine particles and workpiece, the workpiece
gets finished by atomic level elastic fracture without any plastic deformation [167].
The process finishes the surface with 0.1 nm accuracy without causing any crys-
tallographic damage [168]. This method is successfully used to generate smooth
surfaces like mirror finished with surface roughness, Ra of 2 nm for synchrotron
radiation optics [169]. The process has capability to perform the surface finishing as
well as precision shaping due to its linear relationship between machining volume
and machining time. This method has some advantages over traditional precision
machining methods such as precision grinding or diamond turning i.e. less
requirement of rigidity in machine structure, less sensitivity to temperature variation
or system vibration during machining, etc.
1.5.4 Magnetic Abrasive Finishing (MAF)
Magnetic abrasive finishing (MAF) is an efficient method to remove irregular

topographies of the surface using both magnetic and abrasive properties. The
magnetic particles with abrasive mixture are regarded as magnetic brush. The
magnetic field in MAF attracts the magnetic abrasive particles to the inner wall of
workpiece. So, concentrated mixture of magnetic abrasive particles increases near
the wall of workpiece than the rest of medium. This concentrated mixture increases
the radial force acting on magnetic abrasive particles leading to higher depth of cut,
better material removal rate and surface finish compared to normal abrasive flow
finishing.
During finishing operation this process does not generate vibration or chatter and
has no limitations for any type of workpieces. It has also the ability to reduce
Fig. 1.14 Basic

arrangements of magnetic
abrasive finishing
surface roughness from few microns to nano levels in just few minutes [170, 171].
Moreover, various complex surfaces can easily be finished by this process [172–
175]. The schematic diagram of MAF is shown in Fig. 1.14. The process has
capability to produce smoother external surfaces on optics, turbine blades, cutting
tools, etc. and internal surfaces on capillary tubes, biopsy needles, curved pipes, etc.
Also the process can polish various magnetic materials like iron, cobalt, nickel, etc.
as well as non-magnetic materials like glass, ceramic, stainless steel, copper, etc.
with economically and effectively. This process is proper combination of homo-
geneous mixture of abrasive particles and magnetic particles in a magnetic field
with machining force for finishing operation. It has numerous advantages such as
controllability, self-adaptability, etc. Presently, magnetic field-assisted finishing
processes are becoming more attractive for its huge applications in the fields of
medical components and optical parts. However, MAF has still some problems in
fine finishing in nanometer level of flat and micro-complex surface of harder work
materials.
1.6 Conclusions
Latest advancement of micro/nano fabrication techniques is leading to generation

of unique features in nm–lm range for their use in many advance fields. The micro
and nanometer dimensional spans are used in mechanical, chemical, medical
devices, etc. The micromachining technologies have numerous utilities and dif-
ferent applications for human beings. The demands of microproducts are increasing
continuously with precise manufactured features ranging between few nanometer to
few microns. Micromachining techniques have been developed for the fabrications
of miniaturized parts which have numerous applications in our practical lives.

Non-traditional machining methods are utilized for the machining of complex and
intricate 3D shapes where conventional machining processes are neither feasible
nor satisfactory due to various unavoidable reasons.
The above overview of non-traditional micromachining processes will help in
conceptual understanding about the physics and chemistry involved. The impor-
tance of each technique used and mechanisms of various techniques of
non-traditional micromachining, hybrid machining as well as advanced finishing
processes have been discussed in the context of feature generation and enhancement
of surface quality. The opportunities and challenges of each non-traditional
micromachining process have been highlighted considering various practical
applications in different micro engineering fields. These non-traditional microma-
chining techniques as well as advanced finishing processes can be improved further
concerning their increasing applications in MEMS where functional requirements
of many devices demand very tight tolerances and the use of a wide variety of
engineering materials including stainless steel, titanium, brass, aluminum, platinum,
iridium, plastics, ceramics and composites, etc.
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Chapter 2
Recent Advancement on Ultrasonic Micro
Machining (USMM) Process
S. Das, B. Doloi and B. Bhattacharyya
Abstract There are a lot of developments in the micro manufacturing methods for
the production of the three-dimensional miniaturized products made up of different
advanced materials. Ultrasonic micro machining is an essential technique for the
fabrication of micro parts on the hard, brittle and non-conductive materials like
glass, ceramics and silicon with high aspect ratio. Ultrasonic micro machining is the
mechanical type non conventional micro machining process. Material removal
mechanism of USMM is similar to macro ultrasonic machining process. Adequate
surface finish with stiff tolerances and dimensions can be achieved by ultrasonic
micro machining (USMM) on hard and brittle materials. During the last decades, a
number of researchers have explored experimentally and theoretically this ultra-
sonic micro machining (USMM) process technique with different materials. Recent
development on ultrasonic micro machining (USMM) process has been highlighted
and discussed in details with different types of ultrasonic micro machining (USMM)
set up and material removal mechanism. Design and developments of micro-tools
for USMM process have also been discussed. Influences of different process
parameters on various responses of USMM have been discussed here.
S. Das (&) B. Doloi B. Bhattacharyya

B. Doloi
B. Bhattacharyya

DOI 10.1007/978-3-319-52009-4_2
62 S. Das et al.
2.1 Introduction
Fabrication of the miniaturized products with multi functions are the urgent need of
manufacturing industry. Micro-parts are required to meet the increasing demands in
various areas like electronics, aerospace, automotive, medical devices, etc. The
main advantage of those miniaturized products are small space requirement, less
energy and material consumption, easiness in delivery and less price of the product.
Now the products with the extraordinary characteristic of materials such as high
hardness, strength, corrosion resistant and heat resistant etc. are machined at the
micron range of dimensions. Production of complex 3D miniature components such
as fabrication of micro holes in thousand numbers on filters for processing food and
textile industries, which are not possible by any conventional machining methods.
Such features on those components can get only through the non-conventional
micro machining process.
The generation of micro machining features on ceramics, glass, carbides and
metallic alloys, etc. by traditional machining method is tremendously difficult and it
also takes more time. Adequate surface finish with stiff tolerances and dimensions
can be achieved by ultrasonic micro machining (USMM) on hard and brittle
materials. Other Non Traditional machining process like µEDM, µECM, and LBM
etc. can’t machine those materials in proper shape and size [1]. Using other
non-traditional machining process it is difficult to machine square, irregular and
complex shaped holes and surface impressions. Ultrasonic micro machining
(USMM) can be used for those purposes. Any hard and fragile material can be
machined using USMM. The main advantage of ultrasonic micro machining pro-
cess is that it can machine any electrical conductive and non-conductive materials
[2]. Micro tool development and fixing on the USMM system is the very much
problematic area. This problem can be eliminated by micro tool development with
the help of wire electro-discharged grinding (WEDG) method and the same tool can
be utilized to make micro-holes 5–20 µm in diameter on a silicon plate [3, 4].
A number of research works have been reported in micro-USM processes.
Recent advancement on ultrasonic micro machining (USMM) process has been
highlighted and discussed in details with different types of ultrasonic micro
machining (USMM) set up and material removal mechanism. Design and devel-
opments of micro-tools for USMM process have also been discussed. Influences of
different process parameters on various responses of USMM have been dis-
cussed in this chapter.
2.2 Fundamentals of Ultrasonic Machining (USM) Process
Ultrasonic Machining (USM) is a mechanical type non-conventional machining

method used for machining both electrically conductive and non conductive
materials, which have low ductility and a high hardness above 40 HRC such as
2 Recent Advancement on Ultrasonic Micro Machining (USMM) Process 63
ceramics, inorganic glasses, and quartz etc. The ultrasonic frequency of the tool is
above 20 kHz with amplitude of 8–30 lm. Water based abrasive particles are
supplied through the machining zone by a recirculation pump. The tool is pressed
on the workpiece with fixed static load and the workpiece material is nonstop
hammered by numerous abrasive particles with high kinetic energy imparted by the
vibrated tool. Flushing of abrasive slurry refreshes the machining area and also
removes the debris from the machining zone.
2.2.1 Background of USM
In 1927, R.W. Wood and A.L Loomis observed the drilling and cutting action with
the help of ultrasonic vibration. After a long interval L. Balamuth proposed ultra-
sonic machining in 1942, while he was investigated the dispersion of solid in liquid
by means of a magnetostrictively vibrating nickel tube. Several types of ultrasonic
machine tool have been developed in recent year. The first communication on
equipment and techniques for ultrasonic cutting appeared in 1953–54 [5].
Originally USM used to be a finishing operation for the component processed by
the electro spark machines. However, this use becomes less important because of
the development in electric discharge machining. But then with the boom in solid
state electronics, the machining of electrically non-conducting, semi conductive,
and brittle material become more and more important. For this reason, ultrasonic
machining again gained importance and prominence. Through research and
development on ultrasonic machining technology, different types of ultrasonic
machining systems have been developed.
2.2.2 Process Development of USM
The material removal mechanism of ultrasonic machining process is purely

mechanical. Figure 2.1 shows the various process equipments of ultrasonic
machining process. In this process water based abrasive particles are presented to
the machining zone.
Workpiece material does not depend on electrically conductive or chemically
reactive in this machining process. Cutting, drilling and engraving is easily done by
this machining method. The range of vibration of the tool is of 18–40 kHz and
amplitude of 10–50 µm. Water based abrasive slurry is continuously supplied into
the gap between the bottom area of the tool and the top surface of stationary
workpiece. The tool is pressed with a static pressure depending on the size of the
tool tip. The abrasive particles are hammered by the tool into the top surface of the
workpiece, and as a result the particles abrade the workpiece material into a
64 S. Das et al.
Fig. 2.1 Schematic diagram of ultrasonic machining set-up with process equipments
conjugate image of the tool form. Due to the fact USM is not restricted to the
manufacture of circular holes. The tool can be prepared to the required shape, and
therefore extremely complex shapes can be created on hard and brittle materials.
Any damaging or thermal effects on the metallic structure of the workpiece does not
found in this machining process.
2.2.3 Types of Machining Operation
Depending on the machining condition different types of ultrasonic machining is

shown. The different types of machining configuration are discussed here.
i. Stationary ultrasonic machining (USM) is a non traditional machining
process that removes material from the workpiece surface through high fre-
quency with low amplitude vibrations of a tool against the material surface in
the presence of water based abrasive particles. The low-frequency electrical
signal is applied to the transducer for converting the electrical energy into
high-frequency (above 20 kHz) mechanical vibration. This mechanical
vibration is transmitted to the horn and tool assembly. The tool movements are
vertically or orthogonal to the top of the workpiece surface. The abrasive
grains are mixed with water is distributed across the tip of the tool. The
abrasive particles are mixed with water and are hammered by the tool into the
workpiece surface. Then the material is removed from the workpiece and the
conjugate images of the tool form are produced [6].
ii. Rotary ultrasonic machining (RUM) is a hybrid machining process that
combines the rotating diamond grinding tool with ultrasonic machining
(USM). Higher material removal rates (MRR) are found using rotary ultra-
sonic machining. In this machine set up, a rotary core drill with metal bonded
diamond abrasives tool is ultrasonically vibrated in the axial direction and the
tool is fed toward the workpiece at a constant pressure. Coolant is pumped
through the machining zone to prevent jamming of the tool and keeps it cool.
RUM provides a fast, high-quality material removal process for a variety of
glass and ceramic applications using abrasives bonded tools with combining
rotation and vibration [7].
iii. USM combined with electric discharge machining [8].
iv. Ultrasonic supported cutting or grinding. Ultrasonic assisted turning is the
most familiar process and is claimed to reduce machining time, residual
stresses of the working zone and improve surface quality and tool life com-
pared to conventional turning [9, 10].
2.3 Fundamentals of Ultrasonic Micro Machining

(USMM) Process
The ultrasonic micro machining (USMM) process is copied from macro ultrasonic
machining (USM) for micro machining on any hard and fragile materials. The tool
frequency of USMM is above 20 kHz and lower amplitude of 0.5–5 µm. The
abrasive particles size of USMM is few microns of 0.5–15 lm. The material
removal mechanism is same as conventional USM.
2.3.1 Background of USMM
Masuzawa of Tokyo University in the mid 1990s was first attempted of downsizing
macro-USM for micromachining [11]. The ultrasonic micro machining is used for
producing micro feature on any hard and brittle materials such as any bio ceramic
materials, glass and silicon etc. [12]. Ultrasonic micro machining has similar pro-
cess parameters as macro-USM. However, the micromachining process requires a
micro-sized tool with smaller amplitude, and micro-sized abrasive particles [13].
66 S. Das et al.
Table 2.1 Comparison of ultrasonic micro machining (USMM) and macro USM
Parameters Ultrasonic micro machining (USMM) MACRO-USM
Vibration frequency, kHz Usually >20 Usually >20
Vibrated component Tool or workpiece Tool
Amplitude, lm 0.5–5 lm 8–30 lm
Abrasive particle size, lm 0.5–15 lm 50–300 lm
Static load Gram force Kilogram force
Tool diameter <500 µm >500 µm
Thickness of workpiece maximum 3 mm Maximum 50 mm
Tool material Tungsten carbide (preferred) Stainless steel (preferred)
2.3.2 Process Development of USMM
Ultrasonic micro machining (USMM) is a very essential micromachining method to

generate micro features with high aspect ratio. Due to technological development,
lot of improvements were done in the macro USM. Then the macro USM is
converted into micro USM. A comparison of the Ultrasonic micro machining
(USMM) and macro USM parameters are presented in Table 2.1.
2.3.3 Types of Ultrasonic Micro Machining Operation
Ultrasonic Vibration can be provided either in tool or in workpiece. There are three
types of machining setup.
i. µ-USM setup with Tool vibration: Sun et al. developed µ-USM setup with
provision of tool making using Electric Discharge Machining (EDM) and
Wire electro Discharge Grinding (WEDG). In this µ-USM setup the tool is
vibrated with ultrasonic vibration. The WEDG unit is permanently fixed on the
machine body for grinding fine electrodes. Four axes X, Y, Z and C are
numerically controlled by the machine. The µ-USM unit consists of a high
frequency oscillation generator, transducer and horn-tool combination.
Computer control system is used to control the operation of µ-USM setup
[14]. Figure 2.2 shows the µ-USM setup with tool vibration.
ii. µ-USM setup with Workpiece vibration: The µ-USM setup with Workpiece
vibration as shown in Fig. 2.3. In this setup a micro tool is holed properly and
also rotated by a DC motor to move in X, Y and Z directions. Micro tools are
prepared by wire electrical discharge grinding (WEDG). Due to sensitiveness,
bending, vibration, and breakage of the micro tool, the controlled and limited
Fig. 2.2 Schematic diagram of µ-USM setup with tool vibration
1. Display unit
2. Computer
Control unit
3. Ultrasonic
generator
4. Data
Acquision
5. XYZ stage
6. Tool
7. Abrasive slurry
8. Workpiece
9. Ultrasonic
transducer
10. Load sensor
Fig. 2.3 Schematic diagram of µ-USM setup with workpiece vibration
contact force between tool and workpiece is required during machining.

A close-loop control system with force feedback from an electronic balance is
implemented in this machining set up, which is positioned near the vibrator.
The contact force between the tool and workpiece is regulated by this system
[15].
iii. µ-RUSM setup with Workpiece vibration: Micro rotary ultrasonic
machining (MRUM) experimental set up is discussed here. Figure 2.4 exhibits
the schematic diagram of micro rotary ultrasonic machining.
68 S. Das et al.
Fig. 2.4 Schematic diagram of micro rotary ultrasonic machining
The basic component of the micro rotary ultrasonic machine system is ultrasonic
vibration system (transducer and generator), positioning system (XYZ-stages),
cutting force feedback sensor, system controller, machine spindle, tool holder and
work piece holder. The system is an assembly of a piezoelectric ultrasonic trans-
ducer. A spindle for rotating tool and position of tool is controlled in X, Y and Z
axis by a precision motion controller with 25 nm resolution. The work piece is
vibrated ultrasonically at 39.5 kHz by mounting it on the free end of the transducer.
The abrasive slurry mixed with water is injected into the machining gap between
the work piece and tool [16, 17].
2.4 Principle of Material Removal in Ultrasonic Micro

Machining (USMM) Process
The mechanism of material removal of ultrasonic micro machining (USMM) pro-

cess is classified in two parts, one is ductile mode and another is brittle mode.
Elastic or plastic deformation in the surface of the workpiece is only responsible for
ductile mode. On the other hand, the mode of brittle mechanism is found due to
brittle fracture on the workpiece surface. It is extensively recognized that the
transition mode from ductile mode to brittle mode absolutely exists in the material
removal mechanism of brittle materials, if the depth of the cut is reduced [18].
Zarepour et al. investigated the mechanism of material removal and the relationship
between process parameters. They also investigated the analytical mode of material
removal mechanism in ultrasonic micro machining (USMM) process on silicon
material [19]. Yu et al. [20] studied the debris accumulation and reported an
explanation of the influences of abrasive particles on the surface roughness.
Guodong Lia et al. investigated the material removal mechanism on quartz crystals.
When the roughness value is very less, the machined surface by ultrasonic micro
machining (USMM) process is comparatively smooth. This was one of the proofs
of the existing of ductile machining [21]. Zarepour et al. [22] presented a new
method for the static force measuring and the workpiece clamping for the ultrasonic
micro machining (USMM) process. The proposed control system and force mea-
surement provide a compact arrangement and prevent the undesirable effects of
vibration of the horn.
In the ultrasonic micro machining (USMM) process, abrasive particles with
random shapes and sizes are supplied in the machining gap between the micro tool
and the workpiece. At each vibration cycle, each abrasive particle is interacted with
the workpiece in one of the following ways [23]:
i. Appling direct impact force on the workpiece surface by the abrasive particles:
this is common when the abrasive grain size is larger than the machining gap.
ii. Impact of free-moving abrasive particles on the workpiece surface: this is
common when the abrasive grain size is smaller than the machining gap.
iii. Cavitations effect erosion: the high frequency vibration power generates a high
frequency mechanical pressure in the slurry medium causing the abrasive
particles to impact the workpiece surface.
2.4.1 Mechanism of Material Removal
In USMM, the tool vibrates above 20 kHz, and water based abrasive slurry is
pumped to the small gap between the workpiece and the tool [2]. The removal of
material from the workpiece by USMM process is caused of micro-cracks by the
brittle fracturing of the workpiece. Understand crack generation in USMM in order
to improve machining efficiency and precision is investigated. The impact of a
single abrasive grain during USMM process can be very useful for understanding
crack generation of the workpiece. The main activities for removing material from
the workpiece have been described by some researchers as follows:
i. The hammering effect by abrasive particle is shown when the tool and
workpiece are in contact.
ii. The impact action is also shown by a free-moving abrasive particle in the
working gap.
iii. The cavitations erosion phenomenon is shown by abrasive particle in slurry
concentration [24–26].
70 S. Das et al.
Fig. 2.5 Schematic diagram of material removal in MUSM: a Hammering action, b Impacting
action
Generally, cavitations erosion is not significant for regular material removal

mechanism of USMM [27]. The whole mechanisms are schematically shown in
Fig. 2.5. The first two mechanisms are mainly responsible for material removal
mechanism due to micro cracks, which are generated due to the rapid striking of the
abrasive particles. The hammering action is broadly accepted as a major factor in
crack generation.
Fig. 2.6 Deformations and fracture of brittle material due to indentation
2.4.1.1 Formation of Cracks in Brittle Materials Due to Indentation
The material removes from the workpiece in the ultrasonic micro machining pro-
cess is very much depended by Initiation and propagation of median as well as
lateral cracks. Figure 2.6 shows that initiation of cracks and localized deformation
of a brittle material. This is generated by large or a small abrasive grain, which acts
as an indenter [28–30].
The abrasive particles act as indenter on the workpiece surface. The fracture is
started on the surface by impression of an indenter in the machining area. Many
authors have investigated in this area. It has been found that at first the sharp point
of the indenter produces an inelastic deformation zone during machining. Then
deformation is induced and suddenly develops into a small crack or median crack.
The median crack is increased progressively by increasing the load. The median
crack begins to close during unloading and inducing the formation of lateral vents.
The lateral vents are carried on their extension toward the workpiece surface upon
complete unloading and may lead to chipping. The sequence of crack procedures
that occur during the machining has been shown in Fig. 2.7.
+P means increasing load; −P means decreasing load. The sequence of vent
crack propagation is summarized as follows:
i. An inelastic deformation zone is produced by the sharp indenter.
ii. After that the deformation flow suddenly develops into a little crack. This is
known as median crack.
iii. Next the median cracks are developed gradually with increasing the load.
72 S. Das et al.
Fig. 2.7 Representation of vent-crack development under point indentation
iv. The median crack begins to close upon unloading.

v. The lateral vents are carried on their extension toward the workpiece surface
upon complete unloading and may lead to chipping.
vi. The propagation of these median and lateral cracks lead eventually to chipping
of the brittle material.
A critical load Pc for the beginning of a median crack is given by [31]:
K4
Pc ¼ a ð2:1Þ
H3v
where
a is a dimensionless feature which is related to the indenter geometry;
K is the fracture toughness of the workpiece; and
HV is the vickers diamond hardness of the workpiece.
For the size of the median or radial crack (CR) and lateral crack (CL), the
following equations have been derived [32]:
R ¼ n1 P
Cm ð2:2Þ
3=4
P
C L ¼ n2 ð2:3Þ
K
where, m = 1−1.5,
P is the applied load,
n1 and n2 are proportionality constants [33].
The depth of indentation is established by equating the mean static force. This
mean force comes from impacting the tool on the grains. Assume the number of
abrasive particles in the gap between tool and workpiece are inversely proportional
to the square of the diameter of each of the abrasive particles. The following
expression for machining depth h is described as follows [34]:
1=2
8FAd
h¼ ð2:4Þ
PK1 HV Cð1 þ qÞ
where
F is the applied static force,
A is the vibration amplitude of the tool,
HV is the hardness of the workpiece,
q is the hardness ratio of the workpiece to that of the tool,
d is average abrasive grain diameter,
C is the abrasive slurry concentration and
K1 is proportionality constant.
2.4.2 Models on Material Removal Mechanism
Based on previous research work various models on material removal mechanism

along with assumptions taken for developing the models are presented as follows:
74 S. Das et al.
Name of Mechanism of Assumptions

investigators material removal
Shaw [34] At first direct i. All abrasive grains are the same size, very stiff, and
hammering of sphere-shaped. Impact forces of all particles are identical.
abrasive particle. ii. The removal of material is comparative to volume of
After material is removed for each impact and it also depends on
that impacting number of particles impacting per cycle and frequency of
by free moving impacting.
particles. iii. Depth of cut for penetrating the material is inversely
proportional to hardness and flow stress of work material.
iv. A number of active grains are inversely proportional to
square off the mean diameter of all grains under the tool
face area.
Miller [35] Material is i. All abrasive particles are same size and cubical form. Plastic
removed by deformation is directly proportional to the applied stress.
chipping ii. Plastic flow stress equals burger vector times of shear
plastically modulus.
deformed and iii. Cross sectional area of the cut does not vary in the
work hardened machining time.
material. iv. Viscous effects in water of the abrasive slurry are almost
MRR also negligible.
depends upon
work hardening
while in brittle
material on size
and rate of chip
for ductile
material
formation.
Rozenberg et al. Brittle fracture. All abrasive particles are irregular shape and incompressible
[36] but can be considered as spherical shaped having projections
whose radius of curvature are proportional to the average
dimensions of particle.
From the experimental proof, the numerical distribution of
each abrasive grain size d is given by:
2 3
uðd Þ ¼ 1:095 dNm 1 ddm 1
where N is number of active abrasive grains, dm is the mean
diameter of grains.
Cook [37] Hemispherical i. All abrasive grains are uniform and spherical in form.
indentation ii. The tool and all abrasive particles are rigid.
fracture. iii. Viscous effects of the slurry concentration are negligible.
iv. A linear relationship between part of active grits and ratio
of indentation depth of radius of the each abrasive grit has
been assumed.
Kainth et al. [38] Indentation i. All abrasive grains are spherical in shape and followed by
fracture due to Rozenberg’s size distribution functions to take into account
direct particle size in homogeneity.
hammering ii. Motion of tool remains sinusoidal under loaded conditions.
action.
Nair and Ghosh Brittle fracture. i. All abrasive grains are rigid and spherical in shape.
[39] ii. No consideration for MRR for impacting the abrasive
particles, cavitations or chemical action of abrasive slurry.
iii. The movement of tool tip is simple harmonic motion.
(continued)
(continued)
Name of Mechanism of Assumptions
investigators material removal
Rajurkar et al. Combined effect i. Work-piece is considered as a semi-infinite solid.
[40] of impact ii. The movement of abrasive grit is perpendicular to the free
indentation and surface during machining.
fracture iii. Speed of abrasive is same as that of vibrating tool.
phenomenon.
Lee and Chan Brittle fracture. i. Pre-existing defect is considered in the workpiece material
[41] for the initiation of median or lateral cracks.
ii. Median or lateral crack size is related to pseudo pressure
between tool and work-piece.
Wiercigroch Micro-cracking i. MRR depends on the magnitude of impact force and its
et al. [42] due to impacts frequency.
of grains. ii. Diamond grain is equally distributed over the working part
of the tool with a uniform grain size.
iii. Ultrasonic amplitude of vibration, frequency and tool
geometry remain constant.
Nath et al. [43] The hole i. The effects of material removal phenomena from the
entrance workpiece on the hole integrity such as entrance chipping,
chipping, lateral wall roughness and subsurface damage are considered.
gap. ii. Material removal mechanism takes place in the gap between
the outer periphery of tool and the hole wall (called ‘lateral
gap’).
iii. The radial and the lateral cracks are founded due to
adjacent abrasives, which are under the tool face. It extends
towards radial direction of the hole resulting in entrance
chipping.
iv. The angle penetration and the rolling actions of the each
abrasive particle, which are at the edge of the cutting tool.
It contributes the entrance chipping. After that the lateral
gap of the sliding and the rolling mechanisms by the larger
abrasive particles take part of the material removal.
v. Unfavourably micro-cracks in the radial direction are
produced and cause subsurface damages, which are
ultimately responsible for rough surface.
vi. The size of micro-cracks in brittle materials is depended by
abrasive grain size.
vii. It is realized that such nature of the hole integrity during
USM can only be minimized by using smaller abrasive
grain size, but cannot fully be reduced.
Ichida et al. [44] liquid i. Non-contact ultrasonic abrasive machining (NUAM) method
cavitations, is introduced.
cavitations ii. Abrasive particles are excited by ultrasonic energy.
erosion. iii. Material is removed by the erosion due to liquid cavitations
collapse pressure or impact force.
iv. Material removal based on colliding or sliding of the
abrasive grains, which are accelerated by the impact force
due to cavitations collapse on the workpiece surface.
76 S. Das et al.
2.5 Basic Element of Ultrasonic Micro Machining Set up
The essential part of ultrasonic micro machining set up consists of ultrasonic power
supply, oscillating system, horn, coupler, the mechanism of tool feeding, and the
abrasive slurry supply system unit. Figure 2.8 shows the schematic diagram of
ultrasonic micro machining set up.
2.5.1 The Ultrasonic Power Supply
The power supply for an ultrasonic machine tool is characterized as a sine wave
generator that supplies the frequency and power of the generated signal. The output
power supply with internal or external power control is variable. Low frequency
(50 Hz) electrical power is converted high frequency (greater than 20 kHz) by this.
The power supply is capable of automatic frequency control and automatic load
compensation at optimum efficiency. It also provides constant output amplitude at
required setting during the operating cycle for meeting the different energy
requirement. One overload monitor system is incorporated to the power supply for
defending the system from any failure conditions. If any overload condition takes
place, the overload indicator lamp is indicated on monitor and the ultrasonic fre-
quency is closed for balancing the cycle. After that the monitor is automatically
come to the reset position itself for stopping the operation until the fault condition is
Transducer
Vibrating Unit
Horn
Tool
Controlling Unit Power Supply Unit
Fig. 2.8 Ultrasonic micro machining setup

eliminated. The monitor is reactivated on every operating cycle for avoiding the
damage to the transducer.
2.5.2 Oscillating System
Ultrasonic transducer is the main part of this machining setup. It generates the
ultrasonic frequency of vibration above 20 kHz and range of the amplitude of
0.8–5 µm for USMM. The electrical supply voltage provides 50 Hz electrical
energy, which is also applied to the transducer element. The converter transforms
the high frequency electrical vibrations into high frequency mechanical vibrations.
Lead zirconate is the heart of the converter. This is actually titanate electrostrictive
element. When alternating voltage is applied, it expands and contracts at the fre-
quency of the voltage. This electrostrictive converter is highly efficient for saving
energy.
i. Magnetostrictive Transducer
Joule was first discovered the magnetostriction effect in 1874. According to this
effect, ferromagnetic metals and alloys is changed in their length in the presence
of an applied magnetic field. The ferromagnetic material is only responsible for
positive or negative deformation. One coil is wrapped around a stack made of
magnetostrive material (iron–nickel alloy) and electric signal of ultrasonic
frequency is fed into this coil. This stack is fully laminated for minimizing eddy
current and hysteresis losses; moreover, it must be cooled to dissipate the
generated heat. The stack expands and contracts at the same frequency with the
help of the alternating magnetic field produced by the AC generator. The
maximum magnetostriction effect is achieved using the high frequency AC
current, which must be superimposed on appropriate DC pre-magnetizing
current. That must be exactly adjusted for getting optimum or working point.
When this point is accurately adjusted, the maximum magnetostriction effect
(maximum oscillating amplitude) is provided and it also prevents the frequency
doubling phenomenon.
If the frequency of the ac signal in the magnetic field is tuned by same value of
the natural frequency of the transducer and the whole oscillating system, so it
acts at mechanical resonance. This time oscillation amplitude becomes mod-
erately large and the exciting power reaches its smallest value.
ii. Piezoelectric Transducer
Piezoelectric transducer works with piezoelectric effect. When an electric
current is passed through the piezoelectric material, then it expands. But when
the current is removed the piezoelectric material reaches its original size. This
phenomenon actually is called piezoelectric effect. The voltage measuring
instrument shows the electric voltage produced by piezoelectric transducer,
which can be used to measure forces. The main drawback of magnetostrictive
transducers is the high power loss (η = 55%). The power loss is converted into
78 S. Das et al.
heat. For this reason piezoelectric transducers are used and the efficiency is
greater than 90%, even at higher frequencies (f = 25–40 kHz). Piezoelectric
transducers use crystals like quartz that undergoes the dimensional changing
proportional to the applied voltage.
2.5.3 Horn
The horn is also called mechanical amplifiers or concentrators. The functions of the
horn describes as follows:
i. The mechanical energy is transmitted to the tool by the horn.
ii. The horn amplifies the amplitudes of vibration.
iii. The horn concentrates the all power on the small machining zone.
The main acoustic horn head is supplied by the company as an essential part
with the machine. The required tool is fixed by silver brazing to the free end of the
by threading. The difference of amplitude of vibration between the primary horn
and secondary acoustic horn is small enough.
2.5.4 Coupler
The coupler attaches between the converter or transducer and horn. This allows for
clamping of the converter, coupler, and horn assembly and provides amplitude
choices for various applications.
2.5.5 The Mechanism of Tool Feeding
The mechanism of tool feeding should describe as follows:

i. The tool slowly comes to the workpiece.
ii. Sufficient static pressure is provided during machining.
iii. The pressure is decreased before the end of cut to remove fractures of the
lower part of the workpiece.
iv. Overrun a little distance for ensuring the desired hole size at the end surface of
the workpiece.
v. The tool is took out upward very quickly after machining.
The static pressure is zero, when the tool and the workpiece are not contact each
other. When the tool is first making contact with the workpiece during machining,
the spring of the machine spindle is expanded for giving the static pressure. The dial
gauge indicates the static force. The tool displacement is indicated by the dial
gauge.
2.5.6 The Abrasive Slurry Supply System Unit
Several abrasives are available in various sizes for ultrasonic machining. The cri-
teria for selection of an abrasive for a particular application include hardness, size of
the abrasive particle, cost of the particle and working life. In order of hardness,
aluminium oxide (Al2O3), silicon carbide (SiC) and boron carbide (B4C) are the
most commonly used abrasives. The abrasive particles are mixed with water with
proper ratio to from the slurry. Average particle size of 3–10 lm is selected and the
abrasive slurry is supplied by a recirculating pump into the machining zone. The
abrasive used for an application should be harder than the material being machined
otherwise the usable life time of the abrasive will be substantially shortened. Boron
carbide is selected when machining the hardest work piece materials or when the
highest material removal rates are desired. Although the cost is five to ten times
greater than the next hardest abrasive, silicon carbide, the usable life of boron
carbide is 200 machine operating hours before cutting effectiveness is lost and
disposal is necessary. This compares with a usable life time of approximately 60 h
for silicon carbide. The combination of high removal rates and extended life time
justify the higher cost of boron carbide. The abrasive particles size influences the
material removal rate and surface finish. Abrasive for USM are generally available
in grit sizes ranging from 240 to 800 while the coarser grit exhibit the highest
removal rates, they also result in the roughest surface finish and are therefore, used
only for roughing operation, conversely, 800 grit abrasives will result in fine surface
finishes but at a drastic reduction in metal removal rate. The most popular general
purpose abrasive is used, based on the above considerations is 320 grit of boron
carbide. The common abrasive slurry concentration is 50% by weight; however, the
concentration can vary from 30 to 60%. The thinner mixtures are used to promote
efficient flow when drilling deep holes or when forming complex cavities. The
abrasive particles are stored in a reservoir at the USM machine and pumped to the
tool work piece interface by recirculation pumps at rates up to 26.5 lit/min. higher
power ultrasonic machine require the addition of a light-duty cooling system to
remove waste heat from the abrasive slurry.
2.6 Design and Developments of Microtools for USMM
In ultrasonic micro machining (USMM), the shape and dimension of the final
products depends on the developed tool. The fabrication of micro tool is a really big
challenge. It is extremely not easy to hold the micro tool properly with good
accuracy of the job due the application of vibrations at the tool end. One method
80 S. Das et al.
was introduced to overcome this problem. The tool is prepared on the machining
time in this method. At first the macro size tool was fixed to the tool head. Wire
electro discharge grinding (WEDG) method was applied to fabricate micro tool and
machining was done on the same machine tool. Using wire electro discharge
grinding (WEDG) method micro tool of less than 20 µm can be achieved [3].
Another method was introduced in 1999, in which workpiece was vibrated ultra-
sonically. In this method, the better tool holding is possible and high precision can
be achieved [4]. Figure 2.9 exhibits the micro tool developed by WEDG method.
Tool wear also occurs during USMM process. To reduce tool wear in USMM,
micro tool should be fabricated from stainless steel, brass and mild steel etc.
Fig. 2.9 Micro tool

developed by WEDG
method [4]
Fig. 2.10 Image of micro tool [47]

More tool wear was found using very hard tool material due to material removal
from tool by abrasive particle in the machining zone [45]. The tool material should
have superior elastic strength, high wear resistance most favorable values of
hardness and toughness, high fatigue strength properties for the application of any
hard and brittle material [46]. Tungsten carbide (WC) and sintered diamond (SD)
alloy tools were introduced and up to 5 µm micro hole was produced by this tool
with good accuracy. With the help of SD tool, micro tool of 21 µm diameter and
150 µm depth on soda glass was generated and the aspect ratio of 7 could be
achieved [4, 19]. Figure 2.10 shows micro tool for USMM.
2.7 Parametric Influences of Various Responses

of Ultrasonic Micro Machining (USMM)
Very few research works have focussed on the various responses of ultrasonic
micro machining such as material removal rate (MRR), tool wear rate, geometrical
accuracy and quality of the machined surface etc. The main objective of ultrasonic
micro machining (USMM) is to fabricate a micro feature with desired quality of the
surface, negligible surface damage, good geometrical accuracy, and satisfactory
material removal rate very economically. The possible process parameters in
ultrasonic micro machining (USMM) is illustrated by cause effect diagram as
shown in Fig. 2.11.
Fig. 2.11 Cause effect diagram for process parameter selection of USMM
82 S. Das et al.
2.7.1 Influences of Process Parameters

on Material Removal Rate
The material removal rate significantly depends on the type and size of abrasive
particle in USMM. More material removal rate is found when the average grain
diameter of abrasives particle and hardness of the abrasive particles are increased
[3]. Extensively more materials are removed from the workpiece using coarser
abrasive particles. So that, material removal rate is increased [47]. The material
removal rate also depends on the average applied static load. However, MRR is
decreased beyond a certain value with increasing of the average static load. The
abrasive particles in the machining region are influenced by the static load. The
abrasive particles are striking and removing the more material from the workpiece
using high static load. As a result, MRR is increased [6, 48]. The vibration
amplitude is one of the major parameter. The material removal rate is increased with
increasing the amplitude of vibration [3].
2.7.2 Influences of Process Parameters on Tool Wear
The abrasive particles hit the workpiece and tool also into the machining zone
during machining. So that, the tool tendency to erode the materials due to abrasion
of those abrasive particles. Tool wear is an significant response of USMM process.
The more tool wear is found when coarser abrasive particles are used [3]. Tool wear
also depends on the vibration amplitude. Large amplitude of vibration provides
more kinetic energy of the abrasives particles under the bottom area of tool tip. At
this time the material from the tool tip also is removed and tool wear is shown [49].
Due to extreme tool wear, the stainless steel tool is not suitable in USMM process.
More tool wear is found, when the tool diameter is small [16]. The tool wear rate
depends on static load, amplitude of vibration also. The tool wear increases with
increasing the static load and amplitude of vibration. For achieving low tool wear
lower static load and lower amplitude of vibration are used [3].
2.7.3 Influences of Process Parameters on Surface Finish
Surface finish depends on the type and size of abrasive particle, concentration of
abrasive slurry. Good surface finished was achieved using fine and small abrasive
particles.
Egashira et al. [3] has investigated that most unpleasant surface finish was found
using tungsten carbide (WC) tool as compared to titanium carbide (TiC) tool. Less
material is removed when fine abrasive particle size of less than 10 µm is used and
as a result the smooth surface is generated [6]. The static load and vibration
amplitude are the important process parameters. The Ra value of the surface
increases with increasing the static load and vibration amplitude due to more
material removal from the workpiece [48].
2.8 Development of Micro Feature Using USMM
Ultrasonic micro machining has faced a problem which is proper fixing the micro
tools with high precision to the horn in this set up. One method was proposed for
USMM set up which was fabricating the micro tools by wire electro discharge
grinding (WEDG) procedure. Appling this method, micro holes on a silicon plate
and quartz of 20 lm in diameter and 50 lm in depth could be achieved [3, 4].
Figure 2.12 illustrates a micro-hole machining in Al2O3 ceramics, with an aspect
ratios of 10. Figures 2.13 and 2.14 shows the square, triangular, circular micro
holes on silicon and glass. Drilling multiple holes can be made by USMM process.
Figure 2.15 shows the array of microholes machined by USMM process.
Figure 2.16 shows micro cavity with 3D view, which was effectively fabricated
on silicon with a cylindrical-shaped micro tungsten tool [48]. Figure 2.17 shows
that machining of 48 holes with a single SD tool on Silicon, with 22 µm hole
diameter, and 20 µm tool diameter and 0.8 µm of amplitude [4].
84 S. Das et al.
Fig. 2.12 An example of micro-hole machining in Al2O3 ceramics, with an aspect ratios of 10
[47]
Fig. 2.13 Square and triangular micro hole on silicon [3]
Fig. 2.14 Micro holes on silicon and glass [4]

86 S. Das et al.
Fig. 2.15 Microholes 20 µm

in diameter [50]
Fig. 2.16 A typical 3D

cavity [48]
Fig. 2.17 Machining of 48 holes with a single SD tool [4]
2.9 Advantages, Limitations, and Applications of USMM
Advantages of ultrasonic micro machining process are discussed here:

i. The tool and workpiece are not contact together directly and the slurry is
used during machining. So that, it is a wet cutting process. No thermal
damage is found on the workpiece.
ii. The surfaces produced are free from stress and damages.
iii. It can produce good surface finish and structural integrity.
iv. It can produce burr-less surface.
v. It can machine any hard and brittle material regardless of conductivity.
vi. It does not produce electric, thermal or chemical defects at the surface.
vii. It can drill circular or non-circular holes on very hard and brittle materials,
such as glass, silicon, quartz crystal, sapphire, nitride, ferrite and optics.
viii. It produces no thermal stress because of its non-thermal nature.
ix. Micro-holes drilling (hole diameter 5–21 µm) is possible by USMM process.
Limitations of ultrasonic micro machining process:
i. Material removal rate (MRR) is very poor in this machining.
ii. Tool wear is found.
iii. Depth of hole is limited.
Applications of ultrasonic micro machining process:
i. This process is very much applicable on hard and brittle materials like as
alloys, glass, fiber material, ceramics, carbides etc.
ii. Engine parts can be machined by this process.
iii. Drilling micro holes in borosilicate glass for the sensors can be possible.
88 S. Das et al.
iv. Drilling very fine holes can be possible on shafts and gears which are used in
helicopter power transmission.
v. It can be used for producing round, square, irregular shaped holes and sur-
face impressions.
vi. Round through holes with tight-tolerance for processing semiconductor’s
equipment can be possible.
vii. Micro machining of micro-structured glass wafers is fabricated by USMM
process for micro electromechanical systems (MEMS) applications.
viii. High-aspect ratio, 25:1 can be possible in glass and advanced material.
ix. USMM process can be applied in aerospace, tool/mold/machine construc-
tion, pump and valve industry, time piece industry/precision mechanics etc.
2.10 Scope of Advanced Research on USMM
Process development for ultrasonic micro machining is one of the most significant
issues. In ultrasonic micro machining most difficult task is understanding of the
material removal mechanism. Few discussions are available till now but further
analysis of the material removal mechanism is necessary for this process. Micro
tool fabrication is one another aspect of this process. Preparation of micro tools,
handling of micro tools and fixing the micro tools with the tool holder are also the
challenging areas of research. The accuracy of micromachining processes depend
on these condition of the micro tools. In micromachining, there is reduction in size
of tool dimension, abrasive dimension and vibration amplitude etc.
Environmental aspects are one of the essential topics which have hardly been
reported. It is one of the important issues of modern manufacturing process.
The fabrication of components for micro fluidic application using USMM pro-
cess is one of the exploring areas. There is a scope of research in the area of
fabrication of micro channels on ceramics, silicon and glass for micro heat
exchanger and sensors applications by USMM process.
2.11 Summary
In this book chapter the important issues regarding different aspects of ultrasonic
micro machining (USMM) have been discussed. This chapter also focuses on the
process development of USMM, working principle and limitations of USMM.
Different types of USMM processes, micro tooling for USMM process, material
removal mechanism and influences of process parameters have been discussed.
Geometrical accuracy and capabilities of the USMM process have been reviewed.
Ultrasonic micromachining (USMM) is well-established process to machine
hard and brittle materials (like alumina, zirconia, silicon and glass etc.) The material
removal mechanisms in ultrasonic micromachining (USMM) are mechanical

abrasion and micro chipping by the abrasive particles against the workpiece surface,
cavitations erosion by ultrasonic vibration. In USMM process higher abrasive grain
sizes and higher concentrations of abrasive slurry provides higher MRR but poor
surface finish. In USMM process good surface finish can be achieved using finer
abrasives particles.
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Chapter 3
Electrical Discharge Micro-hole
Machining Process of Ti–6Al–4V:
Improvement of Accuracy
and Performance
Golam Kibria, I. Shivakoti, B.B. Pradhan and B. Bhattacharyya
Abstract Micro-electrical discharge machining (Micro-EDM) has become one of

the promising micromachining processes utilizing which high accurate intricate
micro-features can be machined efficiently in shop floor. In this chapter, an over-
view of micro-EDM process and its capabilities is presented for obtaining different
desired shape/profile utilizing various machining techniques. The chapter also deals
with differences between EDM and micro-EDM, details of system components and
micro-EDM process parameters. The significant performance characteristics of
micro-EDM process are also discussed. For improving the machining rate as well as
for producing high accurate micro-features in different engineering materials,
experimental investigation of micro-hole drilling process on Ti–6Al–4V material is
carried out implementing several innovative machining strategies such as com-
parative study of employing kerosene and de-ionized water as dielectrics, the effects
of mixing of boron carbide additive in kerosene and de-ionized water, effects of
polarity changing between the electrode and effects of rotating the micro-tool.
Detailed parametric analysis is carried out to explore the effects of process
parameters utilizing these novel machining strategies. Optical and SEM micro-
graphs taken at different parametric combinations have also been analyzed.
G. Kibria (&)
Mechanical Engineering Department, Aliah University, Kolkata 700156, India
I. Shivakoti B.B. Pradhan
Mechanical Engineering Department, Sikkim Manipal Institute of Technology,
Sikkim 737132, India
B.B. Pradhan
B. Bhattacharyya

DOI 10.1007/978-3-319-52009-4_3
94 G. Kibria et al.
3.1 Introduction
In the last several years, it has been seen that the demand of micromachining
technologies has increased in every shop floor and in wide range of industry seg-
ment from biomedical appliances to aerospace products or parts and automotive
world. Technocrats and manufacturing engineers are always seeking the challenges
to develop new micro manufacturing techniques to manufacture products from
hard-to-machine materials to meet the requirement of product miniaturization
considering numerous technical challenges. Therefore, to support the growth of
product miniaturization and to manufacture micro components effectively and
efficiently, it is the responsibility of manufacturing researchers to develop appro-
priate micro manufacturing processes which have the ability to meet the
above-mentioned challenges [1]. Micro-electrical discharge machining (µ-EDM) is
an cost-effective and widely utilized micromachining process for machining
materials which are difficult-to-machine in conventional methods. The inaccuracies
due to vibration of tool or workpiece can be eliminated in this process because the
machining method is non-contact and thermo-electric type [2]. Material erosion
using controlled spark discharges was first reported by B.R. and N.I. Lazarenko in
1940s in the Union Soviet Socialist Republics (USSR). After that, significant
progress and developments of EDM technologies has been carried out by
researchers worldwide to control the discharge phenomena, develop reliable
machine tools, implementing adaptive control mechanism, employ computer
numerical control (CNC), increase accuracy of geometrical features, high precision
micro-tool fabrication, tool wear compensations, etc.
3.2 Brief Overview of EDM and Micro-EDM
In Electrical Discharge Machining (EDM) process, controlled spatially and tem-

porally separated pulsed discharges is created between the tool and workpiece in a
very narrow inter electrode gap (IEG). The material removal from electrically
conductive material is irrespective of the thermal, physical, chemical and
mechanical properties [3]. During discharge between the tool tip and workpiece
surface, the machining zone must be immerged in dielectric fluid namely kerosene,
EDM oil, de-ionized water and paraffin oil etc. The schematic view of basic EDM
principle is depicted in Fig. 3.1. The discharge is produced at the location of IEG
where there is smallest gap underneath the tool tip surface. The succession phe-
nomena which occur during a typical discharge between the electrodes i.e. at IEG is
shown in Fig. 3.2. When a pulsed DC is applied between two electrodes kept at
very small electrode gap, strong electrical field is generated. Due to the electro-
magnetic field, the microscopic contaminants suspended in the dielectric fluid
3 Electrical Discharge Micro-hole Machining Process … 95
Fig. 3.1 Schematic representation of EDM process
Fig. 3.2 Representation of typical voltage and current trends with sequential phenomena
occurring due to single discharge
initiate to drift and they align at the strongest point of the field. These contaminants
along with other particles construct the conductive bridge across the IEG, typical
spark gap distance varies from 10 to 100 µm. As voltage between the electrode and
workpiece increases at the beginning of the pulse, the surface temperature of the
workpiece material increases. Some amount of the dielectric fluid and charged
particles of the conductive bridge vaporizes and ionizes thereby forming a plasma
channel. When the potential difference across the spark gap sharply falls, voltage
breakdown occurs. At this time, the plasma channel starts to conduct the applied
current whose magnitude rises instantaneously. The abrupt increase in current
creates instantaneous increase in localized temperature and pressure in the plasma
channel. During discharge between the tool and workpiece, when the local tem-
perature rises beyond the melting point of work material, material melted and
vaporized at the location of discharge and small tiny debri particles are ejected out
from material’s surface creating several number of craters [4]. The gaseous
bubbles in the plasma channel expand outward radially from the point of its origin.
96 G. Kibria et al.
At the end of the discharge, the supply of electrical pulse is terminated. This sudden
termination of the pulsed power results in collapse of plasma channel and conse-
quently the vapour bubble under the influence of pressure imposed by dielectric
fluid from surrounding. The violent in rush of relatively cool dielectric fluid creates
an explosive expulsion of molten materials both from the tool electrode. Due to
discharge, small amount of material from tool electrode is also removed creating
geometrical inaccuracies of shape and size of tool. The debri particles are removed
from the machining zone by fresh dielectric fluid supplied by the flushing jet.
The principle of material removal phenomena from workpiece in micro-EDM is
same as EDM process. However, the differences such as utilizing micro sized tool,
the amount of discharge energy and the X-Y-Z axes resolution make the
micro-EDM process more precise and reliable and capable of micro features gen-
eration [1, 5]. In micro-EDM, very high frequency pulses (>200 Hz), small dis-
charge energies (10−6–10−7 J) and applied potential difference (40–100 V) between
the electrodes are applied to achieve high accuracy features and surface finish
(roughness as much as 0.1 µm) [6]. Utilizing improved pulse generator and precise
servo feed system, the micro-tool electrode can be moved at micron rate to maintain
the required IEG and also to retract the micro tool if the servo feed senses any
short-circuit between the electrodes. In micro-EDM, the type of dielectric flushing
and the value of flushing pressure are important parameters as during machining,
micro-tool may vibrates at high dielectric pressure and deteriorate the accuracy of
micro features to be produced.
Micro-EDM is not only the scaled down version of EDM process, but also there
are significant differences of these two processes in terms of tool electrode type,
shape and dimensions, range of discharge energy, resolution of moving axis, inter
electrode gap control, type of dielectric flushing for debris removal, etc. The radius
of plasma channel in micro-EDM is comparable with tool dimension as
micro-EDM uses micro-tool electrode. However, in EDM, size of plasma channel is
much less compared to tool size [7]. As in micro-EDM, material removal per
discharge (unit removal, UR) should be less; therefore, the applied discharge energy
is limited. On the other hand, in EDM, unit removal is much higher. Further, to
avoid the micro-tool to be rupture or burnt due to excessive discharge energy, the
maximum applied energy in micro-EDM is limited. As in micro-EDM, small sized
(in micron dimensions) tool electrode is used and it has low electrode stiffness, thus,
during micro machining operation in micro-EDM, micro-tool may vibrate due to
flushing pressure and geometrical accuracy of micro features to be produced is
deteriorated. Therefore, the range of dielectric flushing pressure is kept in lower
settings. This problem is absent in EDM process. Further, in micro-EDM, the
amount of thermal load on micro-sized tool electrode is high and thus, the amount
of tool wear also high compared to conventional EDM. Thus, various tool wear
compensation strategies are considered for generating precise and accurate micro
features. Due to very low IEG in micro-EDM, short circuiting occurs frequently,
which renders machined surface uneven. Moreover, when the debris are ejecting
out from work material, secondary sparking occurs and geometry of micro-tool get
degenerated. These drawbacks are very less in conventional EDM.
3.3 Micro-EDM System Details
The micro EDM system typically consist of several sub-components such as servo
system, control unit, positioning system, dielectric circulating unit and the working
chamber. Figure 3.3 shows the schematic diagram of micro EDM system with
sub-systems. The servo system guides the micro electrode during the machining
and the feed movement of micro-electrode is controlled by the servo control unit.
The workpiece is firmly held in the working table and the positioning system
control the movement of work chamber in the X and Y axis. The constant feed of
the micro-tool is given by servo feed mechanism in Z axis direction. The dielectric
circulating system is another important component in micro-EDM in which con-
tinuous flow of fresh dielectric fluid is supplied to the machining chamber. The
servo control unit is one of the essential components of micro EDM as it controls
the movement of micro-tool and also it maintains the inter-electrode gap between
the micro-tool and the workpiece in micron range. In order to generate dimensional
accurate features, it is very important to keep constant inter electrode gap between
the electrodes [8]. The dielectric system serves an important role in micro-EDM as
the dielectric possesses a crucial role during machining. The dielectric tank contains
a dielectric which is pumped to the machining chamber. The pressure regulator
controls the flushing pressure of the dielectric jet onto the machining chamber. The
dielectric is continuously circulated for efficient machining and the used dielectric is
passed through the micro filters which captured the debris particle generated during
machining. The dielectric jet removes the debris from work material and also it
serves as insulation between the micro tool and the work material. Further, the
Fig. 3.3 Schematic diagram of a typical micro-EDM system showing different sub-systems
98 G. Kibria et al.
dielectric is required for the ionization and act as a medium to cool the micro-tool
and the workpiece.
3.4 Pulse Generators for Micro-EDM
The series of pulse has been generated for micro EDM with the help of pulse gen-
erator. The various type of pulse generator has been used for producing series of pulse
for micro-EDM process. In RC type capacitor, the charging time is more and due to
this, it cannot produce high frequency pulses and it also produces thermal damage of
the wok material. Sometimes, discharge current flows through the previous plasma
channel without recharging the series of capacitors [9]. Since the capacitor is absent in
the transistor type pulse generator as a result high discharge frequency pulses is
produced which enhances the material removal rate. Moreover, the transistor type
pulse generator is controlled easily as compared to RC type generator. The transistor
type pulse generator cannot be used when nanoseconds pulses are required for
machining as it is not capable of producing nanoseconds pulses. To reduce the delay
time of transistor-type pulse generator, the transistor-type isopulse generator was
developed and successfully employed for micro-EDM operation [10]. For rough and
semi finish machining, a field effect transistor is used to cut off the discharge current.
Instead of observing the gap voltage, the pulse current is observed for detecting the
discharge. As the current sensor provide an output less than 5 V and also it acts as
input to pulse control circuit, it eliminates the voltage attenuation circuit. In this way,
the delay time is shortened to significant amount and ultimately, about 80 ns pulse
duration was achieved. As in RC-type pulse generator, stray capacitance determines
the minimum discharge energy per pulse, therefore, it act as the limitation for gen-
erating micro-features on workpiece [11]. Due to difficulty in eliminating the stray
capacitance, crater diameter less than 2 µm cannot be achieved [12]. To avoid these
problems, a capacity coupling based pulse generator was developed. In this gener-
ator, the effect of the stray capacitance can be eliminated as electric feeding is done
without touching the micro-tool electrode. Thus, discharge crater dimension of
nanometer domain is realized.
3.5 Control Parameters of Micro-EDM
The micro EDM process parameters have significant effect on various process
performances. The proper selection of control parameters results in better
machining performance. Figure 3.4 shows the fish-bone diagram showing all pro-
cess parameters related to machining parameters, work material, tool-electrode,
polarity, flushing pressure, etc. The micro EDM control parameters are categorized
as follows: (a) electrical (b) non-electrical and (c) gap and motion control param-
eters. Brief discussions on these process parameters are given hereunder.
Fig. 3.4 Representation of process parameters in micro-EDM using fish-bone structure
3.5.1 Electrical Process Parameters
(a) Discharge energy: In micro-EDM, the most significant process parameter is

discharge energy. This parameter is a collection of other operating parameters
which are related to the energy of the discharge created between the electrodes
at inter electrode gap. For different type of pulse generator, the calculation for
discharge energy is different. The material removal rate is directly related to
discharge energy during micro-EDM operation. On the contrary, tool wear ratio
also increases, which deteriorate the surface finish and accuracy of micro
features generated.
(b) Gap voltage: Gap voltage is the voltage in the gap between the two electrodes.
The total energy of the spark is determined by applied voltage. Depending upon
the setting of voltage, the IEG is set by servo control. Larger value of IEG
improves the flushing of debris from machining zone and makes the next
discharge stable and ultimately improves material removal rate. However, the
surface finish deteriorated due to large size of crater dimension at high voltage
condition. The voltage of IEG at which discharge occurs between the micro tool
and workpiece is known as discharge voltage. The discharge voltage mainly
depends upon the breakdown strength of the dielectric and IEG.
(c) Peak current: The average current is the average of amperage in spark gap
measured over a complete cycle. This is read on the ammeter during the pro-
cess. The theoretical average current can be measured by multiplying the duty
cycle and the peak current i.e. maximum current available for each pulse from
the power supply. The amount of energy/power which is used for discharge is
mainly determined by peak current. Higher value to peak current signifies better
100 G. Kibria et al.
machining efficiency in terms of material removal rate. At the same time, the
surface finish is deteriorated and tool wear ratio increases.
(d) Duty factor: Duty factor is the ratio between the pulse duration to the total
cycle time. Mathematically, it is evaluated by using Eq. (3.1)
Pulse duration
Duty factor ðDF Þ% ¼ 100% ð3:1Þ
Cycle time
If the duty factor is high, the flushing time is very less and this might lead to the
short circuit condition and a small duty factor indicates a high pulse off time
and low machining rate.
(e) Pulse duration: Pulse duration or pulse-on-time is the time interval in which
the applied current is flowing through the IEG of two electrodes. In this time
period, breakdown of dielectric occurred and removal of material from work-
piece surface takes place. Large value of pulse duration means higher material
removal rate. Broader and deeper craters are achieved at longer the pulse
duration setting and consequently, rough machined surface is attained. On the
contrary, smaller craters which are obtained at low value of pulse duration
provides smoother surface finish.
(f) Polarity: Polarity refers to the electrical conditions determining the direction of
the current flow relative to the electrode. The polarity condition of electrodes is
of two type, (i) straight polarity and (ii) reverse polarity. Straight polarity is that
condition when the micro tool is connected to cathode (−), whereas, reverse
polarity is that condition in which tool electrode is connected to anode (+) and
workpiece to cathode (−). For achieving high material removal rate from
workpiece, tool electrode is used as cathode and workpiece as anode.
Depending on the application, some electrode/work material combinations
provide better results when the polarity is changed. Generally for graphite
electrode, a positive polarity gives better wear condition and negative polarity
gives better machining speed.
(g) Pulse frequency: It is the measure of number of cycle per second. Larger value
of pulse frequency decreases the pulse duration which results in minimum
thermal damage in the work piece during machining. However, at high value of
pulse frequency, the surface finish of the machined surface is improved.
3.5.2 Nonelectrical Process Parameters
(a) Micro-tool electrode: Tool electrode is an important part for achieving

effective and efficient machining condition. The thermal properties of tool
electrode material play a significant role during micro-EDM as it is a thermal
process. Materials of higher melting, boiling points and heat conductivity are
used to fabricate the micro-tool for micro-EDM process [13]. There are several
criteria to choose proper tool electrode materials such as (i) machinability,
(ii) electrical and thermal conductivity, (iii) density, (iv) Hardness and tough-
ness, (v) cost and availability, (vi) material removal rate and wear ratio, etc.
(b) Work materials: The micro EDM can only machine electrically conductive
materials. Moreover, for efficient machining, the thermal properties of the
material such as thermal conductivity, specific heat, melting point are the
important aspects need to be considered while selecting the work piece material
[14].
(c) Dielectric fluids: The dielectric fluid has significant role during micro-EDM
possess as without it, it is no longer possible to generate efficient discharge
between the micro-tool tip and workpiece surface. The quality of surface finish
and geometrical accuracy of machined parts depend on several properties of
dielectric such as viscosity, dielectric strength, cooling capability, chemical
compositions, etc. For safe machining operation and stable sparking condition,
the dielectric strength and flash point temperature of the dielectric fluid should
be higher. Furthermore, low value of viscosity and specific gravity are another
two desirable properties of dielectric fluid. These properties significantly affect
the machining efficiency and consequently improves material removal rate,
lowers tool wear rate and enhances the surface finish of machined features.
3.5.3 Gap Control and Motion Parameters
Electrode rotation: The rotation of micro-tool about its axis during the
micro-EDM enhances the machining performance as the rotation of micro-tool
enhances the flushing action of the debris formed during micro-EDM at inter
electrode gap. Due to rotation of micro-tool, a tangential force is produced at small
IEG and this leads to effective and efficient discharge by smooth removal of debris
through small gap of micro-tool surface and micro-hole wall [15]. Moreover,
electrode wear ratio also reduces due to micro-tool rotation.
Tool geometry and shape: The micro-feature generated in the workpiece during
micro-EDM is the replication of the micro-tool geometry. Moreover, the geometry
of micro-tool has significant effect on tool wear ratio. Depending upon the
requirement, the shape of micro-electrode can be circular, rectangular, cylindrical
etc. Vibration assisted micro-EDM has significant effect on machining rate and
taper during micro-hole drilling [16].
Servo feed: For properly maintaining the discharge gap width and to avoid
arcing and short-circuiting between the micro-tool and the workpiece, the servo
feed control system play vital role during micro-EDM process. As soon as the value
of average gap voltage approach more than preset threshold voltage of pulse
generator, the feed rate of servo increases and compensating the discharge gap
between the electrodes and vice versa [3].
Tool and workpiece vibration: The performance of the micro-EDM has been
improved by incorporating the vibration of micro-tool or workpiece at certain
frequency and amplitude. During vibration of micro-tool or workpiece, the forward
and backward motion of tool or workpiece changes the discharge gap and conse-
quently, dielectric fluid pressure in the IEG also changes constantly. When the
micro-tool is advancing towards the workpiece, the dielectric fluid is forced out
from the machining zone. Then after, when the micro-tool move away from
machine zone, fresh dielectric is taken by discharge gap and thus, overall flushing
efficiency increases.
Flushing techniques: Dielectric flushing has important role for removing the
debris from machining zone and consequently, it enables stable discharge condition
by supplying fresh dielectric fluid in the gap. In general, there are mainly two types
of flushing, pressure flushing and suction flushing. Depending upon the type of
flushing, the amount of flushing pressure is provided. In micro-EDM operation, for
effective generation of high aspect ratio micro-features such as micro-holes, jet
flushing is more effectively used. In other cases, side flushing is commonly used. If
the jet flushing is provided from one direction, there may be chances to accumulate
the debris in the downstream, which creates irregular gap width and as a result,
accuracy of micro-feature is deteriorated [17]. To avoid this, jet flushing from both
side and sweeping type flushing also sometime recommended. In Fig. 3.5, different
types of flushing for micro-EDM are illustrated.
Flushing pressure: For quick removal of the debris from the IEG during
micro-EDM, it is more important to flush out debris particles from very narrow
discharge gap. Higher value of flushing pressure is preferable for effective debris
removal, stable machining and high aspect ratio micro-feature generation. However,
as stiffness of micro-tool is low, high flushing pressure may deteriorate dimensional
accuracy due to micro-tool vibration or deflection.
Fig. 3.5 Schematic of a jet, b flushing through tube electrode and c flushing through workpiece in
micro-EDM process
3.6 Micro-EDM Performance Measurements
Material removal rate: The amount of material removed from the workpiece per
unit time is known as material removal rate (MRR). It is evaluated in terms of
volume of material removed from the workpiece or can be evaluated by differen-
tiating the weight of the workpiece taken before and after machining. It is calculated
using Eq. (3.2)
Material removal rate ðMRRÞ ¼

Weight of workpiece before machining Weight of workpiece after machining
Machining time
ð3:2Þ
The higher material removal depicts the increases the productivity and hence, the
material removal is always consider to be the higher the better type. Higher MRR
can be achieved at high discharge voltage, peak current, pulse duration and duty
cycle. However, other desirable process performances such as tool wear ratio,
surface finish and dimensional accuracy is also important aspects and taken into
account in micro-EDM.
Tool wear rate: The amount of material removed from the micro-tool during
machining is known as tool wear rate (TWR). The high electrode wear is not
desirable in micro-EDM as it changes the geometry of the tool which reduces
quality of the machined surface and inaccurate geometric features are achieved onto
the machined surface. The electrode wear is calculated by differentiating the weight
of the micro-tool before and after machining and is calculated by Eq. (3.3).
Tool wear rate ðTWRÞ ¼

Weight of microtool before machining Weight of microtool after machining
Machining time
ð3:3Þ
Surface roughness: Surface roughness of the machined features mainly depends

on the crater size (diameter and depth) that is formed by each discharge. In addition,
if the dielectric circulation in the discharge gap is not efficient, then some molten
material from tool and workpiece resolidifies on the micro-feature surface and
makes the surface rough. Thus, effective flushing technique has significant effect on
surface finish of the features. Crater dimensions also largely depend on pulse energy
of discharge and other process parameters such as peak current, pulse frequency and
pulse duration [18]. Required amount of flushing pressure can decrease the
roughness of machined surface. Moreover, the properties of material of the
micro-tool and the workpiece have considerable effects on surface finish.
Overcut: Overcut is the difference in diameter of the micro-hole at the entrance
and the diameter of the tip of the cylindrical shaped micro electrode. It produces
inaccuracy in the dimension of the machined features. For micro-hole drilling
process in micro-EDM, overcut is calculated using Eq. (3.4). The overcut occurs
mainly due to secondary sparking during material removal from sidewall of the
micro-feature surface while the debris try to ejecting out by flushing pressure from
the machining zone.
Diameter of entry hole diameter of microtool tip

Overcut ðOC Þ ¼ ð3:4Þ
2
Diameteral variance at entry and exit hole: This performance criterion is

related to through micro-hole drilling in micro-EDM. The diameteral variance of
entry and exit hole is measured by differentiating the micro-hole diameter at entry
and at exit side of from end to end hole on workpiece. During micro-drilling
operation of high aspect ratio hole, if the secondary sparking occurs for a long time,
then large amount of diameteral difference is realized. Dimeteral variance of entry
and exit hole is affected by a number of process parameters such as peak current,
pulse duration, duty cycle and flushing pressure.
Circularity: Circularity is the measure of roundness of micro-hole. The circu-
larity of micro-hole is calculated by Eq. (3.5). Due to high flushing pressure or
non-uniform discharge condition, the degree of roundness of micro-hole deterio-
rated and further reduces the circularity of the micro-hole.
Area of microhole
Circularity ¼ 4p ð3:5Þ
½Perimeter of microhole2
Machining time: The time during which the machining is performed in order to
produce micro-features on the workpiece. Due to inefficient discharge and various
unwanted phenomena, machining time increases for producing particular
micro-features on workpiece surface.
3.7 Varieties of Micro-EDM Processes
Depending upon the tool-work configuration and relative motion between the
micro-tool and workpiece to be machined, there are several varieties of micro-EDM
process. These machining varieties have been developed based upon the require-
ments of product intricacy and features.
3.7.1 Micro-EDM Drilling
The process in which deep micro-sized hole is generated by EDM process is termed
as micro-EDM drilling. In conventional EDM process, both tube and solid elec-
trodes can be used as tool material. However, for micro-EDM, as the geometrical
Fig. 3.6 Schematic

representation of micro-EDM
drilling process with enlarged
view of machining zone
dimensions of tool electrode is in micron range, therefore, only solid micro-rods can
be used. For efficient removal of eroded particles from the machining zone, it is
recommended to employ jet flushing in micro-EDM with low value of flushing
pressure to avoid vibration of micro-tool electrode. In Fig. 3.6, the schematic of
micro-EDM drilling process is depicted. When the debris particles try to eject out
from the IEG, due to secondary sparking between micro-tool and micro-hole walls,
material removal is more at entry side of hole and this result in taper in micro-hole
geometry. For high precision micro-hole drilling in EDM, sometimes, micro-tool
electrode is fabricated in the machine itself by wire-electrical discharge grinding
(wire-EDG) process to avoid tool deflection or breakage [19]. Different types of
micro-features (irregular, curved, inclined, tapered, etc) can be produced using
different alignment of micro-tool as well as tool feed mechanisms. Cooling holes in
turbine blades, nozzles for fuel injection system, parts for manufacturing of
micro-turbines and surgical instruments are the typical examples of micro-EDM
drilling.
3.7.2 Micro Wire-EDM
To cut conductive hard-to-machine materials like Ti-alloy, Ni-alloy, HSS, etc,

micro-wire EDM is employed. Micro-wire which is continuously travelling through
the upper and lower wire guide, is used here as tool electrode. According to the
profile of intricate cut, the machine axes moves in the direction of programmed path
and material is removed from workpiece by series of electrical discharges between
the micro-wire and workpiece as shown in Fig. 3.7. Since there are additional axes
U and V, therefore, taper cutting is possible efficiently by keeping the wire at some
angle with vertical by positioning the upper wire guide in respect of lower one [20].
Fig. 3.7 Schematic view of configuration of micro-wire EDM process

micro-EDM milling operation
3.7.3 Micro-EDM Milling
To produce high precision complex geometries, micro-EDM milling is used where

the elimination of complex die-sinking tool required for obtaining such profile is
possible. The process utilizes cylindrical solid micro-tool electrode to fabricate
desired three-dimensional complex structure by scanning the programmed path
layer-by-layer using CNC software as shown by schematic representation in
Fig. 3.8. Here, the rotation of micro electrode in its axis is a requirement while
scanning X-Y planes. Tool length compensation is very much important factor in
this process because during layer-by-layer scanning, due to wear of micro-tool, tool
length gradually reduced.
3.7.4 Dry and Near-Dry Micro-EDM
In conventional EDM and general micro-EDM processes, mainly hydrocarbon

dielectric fluid is used. However, during machining with hydrocarbon oil, harmful
vapors are produced which make the machine environment toxic. Thus, to reduce
the environmental pollution and also reduce the cost of waste management, dry and
near-dry micro-EDM process has been developed. Pure oxygen gas or air is used as
dielectric in dry micro-EDM process [21]. However, in near-dry micro-EDM
process, mixture of gas and liquid is used as dielectric [22]. The schematic view of
dry and near-dry micro-EDM process is depicted in Fig. 3.9. Tube type electrode is
used as tool electrode in dry micro-EDM in which air or gas in supplied to the IEG
to act as dielectric which ultimately act as cooling medium of micro-tool and
workpiece and remove the molten and vaporised material from narrow IEG.
3.7.5 Planetary or Orbital Micro-EDM
In micro-EDM drilling, especially for producing high aspect ratio micro-holes, a

common problem is the debris accumulation at machining zone. Due to this, sec-
ondary sparking and short-circuiting occur. To avoid this problem, a relative motion
(orbital or planetary type) is provided between the micro-tool electrode and
workpiece to be machined. The schematic representation of orbital or planetary
micro-EDM process is shown in Fig. 3.10. The planetary motion of micro-electrode
provides space for dielectric fluid circulation and thus, it helps to reduce the con-
centration of debris in IEG. It further helps to improve material removal rate,
increase the degree of accuracy of micro-structure and reduce tool wear ratio. One
of the important benefits of planetary micro-EDM is that in this process,
micro-holes of different diameters can be produced by just changing orbital radius
and using a single micro-electrode [23].
Fig. 3.9 Schematic of a dry micro-EDM and b near-dry micro-EDM

Fig. 3.10 Schematic representation of planetary micro-EDM for generation of a circular hole and
b non-circular hole
3.7.6 Reverse Micro-EDM
For fabrication of high aspect ratio micro-tool electrode, reverse micro-EDM is

employed. The process comprises of two steps. In first step, micro-EDM drilling
operation is carried out on low thickness material using normal polarity setting. In
next step, the material from which high aspect ratio micro-tool electrode is to be
fabricated is attached with z axis of machine and already fabricated micro-hole is
clamped with machining chamber. The polarity of electrodes is reversed and
material erosion takes place from workpiece material as shown in Fig. 3.11. For
generating array micro-electrodes on a single material, reverse micro-EDM is an
excellent method. The number of micro-electrodes and gap between the electrodes
depends upon the number of micro-holes on sacrificial electrode plate.
3.7.7 Micro Electro-discharge Grinding
For fabricating micro-electrode on the machine itself from an electrode material

which is larger than required dimensions, micro electro-discharge grinding
(micro-EDG) process is employed. The process is classified as (i) block
micro-EDG, (ii) moving block micro-EDG, and (iii) micro-wire EDG. In the first
type, a sacrificial block (rectangular) with perfectly vertical is used and it should
have high degree of wear resistance. If the degree of alignment of the sacrificial
block reduces, the geometrical accuracy of fabricated micro-tool by micro-EDG is
reduced. Due to wear from sacrificial block, the fabricated micro-electrode diameter
is not achieved as straight and wear compensation prediction is difficult to calculate.
To overcome this, on-machine dimension measuring instrument and high resolution
camera are installed for instantaneous measurement of micro-tool geometries.
Fig. 3.11 Sequential representation of reverse micro-EDM, a micro-hole generation in normal

micro-EDM and then b fabrication of high aspect ratio micro-electrode using micro-hole
Fig. 3.12 Methodology of stationary block micro-EDG process
The schematic view of block micro-EDG process is shown in Fig. 3.12. During
block micro-EDG process, cylindrical material is considered as workpiece and the
rectangular block is considered as electrode. During sparking between block surface
and rotating workpiece, it is very important factor to apply dielectric jet properly to
avoid deflection of material as well as uniformity of micro-tool geometry.
To avoid tapering of micro-electrode in block micro-EDG process, a new and

novel micro-EDG process is developed. In moving block micro-EDG, dimensional
accurate and high aspect ratio micro-electrode can be fabricated by simply moving
the sacrificial block in a direction perpendicular to cylindrical workpiece in addition
to rotary and feed movement. In micro-wire EDG process, the workpiece is rotated
at vertical axis and a travelling wire is fed towards the rotating workpiece using X
and Y axes controller. Due to discharge, material is eroded from travelling wire as
well as from workpiece. In Figs. 3.13 and 3.14, the schematic representation of
moving block micro-EDG and micro-wire EDG are viewed.
Fig. 3.13 Schematic illustration of moving block micro-EDG, a showing the movement of block
and macro-tool, b fabricated high aspect ratio micro-tool
Fig. 3.14 Representation of micro-wire EDG process

3.8 Applications of Titanium and Its Alloys
Titanium alloy was developed in the early 1950s for defence and aeronautic
applications due to its very high strength-to-weight ratio. The unique combination
of high strength, low weight, and excellent corrosion resistant property of titanium
alloy has made it suitable for a wide variety of industrial applications. Its corrosion
resistant results from a very thin (−10 nm), stable, continuous oxide layer that
regenerates instantaneously if any oxygen or moisture is present. Commercially
Pure (CP) Titanium is used primarily for its corrosion resistance. Further titanium
alloy can withstand pitting, crevice and cavitations, corrosion, erosion, and stress
corrosion cracking in salt water, marine atmospheres, and a broad range of acids,
alkalis, and industrial chemicals. This alpha-beta alloy is the workhorse alloy of the
titanium industry. The alloy is fully heat-treatable in section sizes up to one inch
and is used up to approximately 400 °C. Since it is the most commonly used alloy,
over 70% of all alloy grades melted are sub- grade of Ti–6Al–4V. Its uses arc not
only confined and concentrated in aerospace engine and airframe components but it
is widely uses in major non-aerospace applications in the marine offshore, power
generation industries and biomedical applications also. Ti–6Al–4V is the most
widely used titanium alloy, accounting for more than half of all titanium tonnage
worldwide.
Various excellent properties possessed by titanium super alloys have led to a
wide and diversified range of successful applications in medical science as well as
in automotive, aerospace, chemical plants, and other precision engineering fields.
The wide variety of applications of this exotic material in almost all the precision
engineering fields demand the huge need of micro-machining of Ti–6Al–4V. Thus,
in order to meet up the huge market demand of micro-products manufactured from
Commercially Pure (CP) Titanium and its alloy necessitated the need of
micro-machining using micro-EDM technology utilizing different novel machining
strategies.
3.9 Brief Background of Machining Ti–6Al–4V

in Micro-EDM
In last 15 years, a number of research and development activities have been carried
out around the globe for improving the machining performance as well as
dimensional accuracy of machined components in micro-EDM process. Moreover,
many researchers have utilized various statistical tools for finding out influencing
process parameters and optimization of the process for obtaining parametric con-
dition to achieve high performance machining and accurate geometrical features.
Micro-hole electro discharge machining has been carried out by Pradhan et al. on
Ti–6Al–4V alloy using 500 µm diameter brass micro-electrodes [24]. Four process
parameters such as peak current, pulse-on time, flushing pressure and duty ratio
were considered as varying parameters to investigate the process criteria i.e.

material removal rate, tool wear rate and overcut. The most influencing process
parameters were achieved as peak current and pulse-on time. Flushing pressure and
duty factor have no significant effect on material removal rate and tool wear rate.
However, overcut of micro-hole generated is mostly affected by peak current and
pulse-on-time. Using Response Surface Methodology (RSM) statistical tool,
Pradhan and Bhattacharyya investigated the parametric effect on machining per-
formance as well as optimized the process to achieve high MRR, low TWR as well
as least overcut during machining of Ti–6Al–4V material [25]. Combined
RSM-ANN based mathematic models were developed to correlate machining
performances and process parameters. Silicon carbide (SiC) powder additive mixed
dielectric was used to investigate and analysis of micro-EDM of Ti–6Al–4V alloy
by Ali et al. and the authors concluded that by employing SiC mixed dielectric,
material removal rate is enhanced when compared to machining with conventional
dielectric [26]. The experimental results revealed that optimization for MRR of
7.31 lg/min is achieved at powder concentration of 24.75 g/L and discharge
energy of 56.77 lJ.
Optimization of MRR, TWR and overcut during micro-EDM of Ti–6Al–4V
alloy considering voltage, pulse frequency, current and pulse width is achieved by
Meena and Azad utilizing combined approach of Taguchi Method and Grey rela-
tional analysis (GRA) [27]. Analysis of variance (ANOVA) of the test results have
been performed to in order to estimate the predictive accuracy of the developed
models and to determine the relative significance of considered process parameters.
Hole sinking electrical discharge micromachining (HS-EDMM) process of Ti–6Al–
4V thin sheet was carried out by Porwal et al. to develop predictive integrated
model (ANN-GRA-PCA) using single hidden layer BPNN [28]. The authors used
GRA coupled with PCA hybrid optimization strategy for achieving optimal MRR,
TWR and taper of micro-hole at parametric setting of gap voltage of 140 V and
capacitance of 100 nF. Experimental investigation and parametric study was carried
out by Tiwary et al. during micro-hole machining in micro-EDM of Ti–6Al–4V
material based using 1 mm thick titanium alloy material as workpiece and brass
electrode of diameter 300 µm as micro-tool on RSM approach considering pulse on
time, peak current, gap voltage and flushing pressure as process parameters [29].
Using various surface plots, influences of the process parameters on MRR, TWR,
overcut and taper of micro-hole were studied. A combined approach of RSM and
fuzzy-TOPSIS method is used to find out optimal parametric combination. The
effect of gap voltage, capacitance, rotational speed of electrode and feed rate on
MRR during micro-EDM milling operation of Ti–6Al–4V material was investi-
gated by Kuriachen and Mathew [30]. Based on RSM-Box Behnken experimental
design, quadratic regression model for MRR was developed and from the test
results, it was seen that capacitance and rotational speed of electrode has direct
effect on MRR. Study and analysis on the influence of micro-EDM parameters on
MRR, TWR, machining time and quality of micro-hole was carried out by Plaza
et al. during machining of Ti–6Al–4V [31]. The authors used a new strategy to use
helical-shaped micro-tool electrodes. The influences of helix angle and flute depth
of the helical micro-tool on process performances have also been studied. Blind and
through micro-holes and micro-slots were machined on brass and Ti–6Al–4V
materials by Moses and Jahan [32]. Dimensional accuracy, surface finish, and
profile accuracy of holes and slots were measured for analysis. Single through
micro-hole, single blind hole, letter H blind, three blind slots and three through slots
were machined also. The influence of various process parameters such as
pulse-on-time, peak current, gap voltage and flushing pressure on MRR, TWR,
overcut and taper of micro-hole during machining of Ti–6Al–4V were studied by
Tiwary et al. and empirical models were developed for to correlate the process
parameters and machining performances [33]. Multi performance optimization was
achieved as MRR of 0.0777 mg/min, TWR of 0.0088 mg/min, OC of 0.0765 mm
and taper of 0.0013 at parametric setting of pulse-on-time of 1 ls, peak current of
2.5 A, gap voltage of 50 V, and flushing pressure of 0.20 kgf/cm2.
Kuriachen and Mathew carried out investigation to machine Ti–6Al–4V with
tungsten carbide electrode employing SiC micro particle suspended dielectric
during micro-EDM milling operation [34]. The effects of various process param-
eters such as voltage, capacitance and powder concentration on MRR and TWR
was studied. The recommended process parametric setting was powder concen-
tration of 5 g/L, capacitance of 0.1 lF and voltage of 115 V for achieving high
material removal and low tool wear rate. Predictive thermal model was developed
by B. Kuriachen et al. for simulation of single-spark micro electric discharge
machining [35]. The crater geometry and temperature distribution in the workpiece
at various process parametric setting were predicted using Gaussian distribution of
heat flux, percentage distribution of energy among the workpiece, tool electrode
and dielectric. Mathematical model which predicts the radius of the single-spark
during micro-EDM process of Ti–6Al–4V was developed by Kuriachen and
Mathew [36]. The authors concluded that the spark radius increases proportionally
with in capacitance except in the higher energy levels where double sparking
phenomenon was observed.
It is observed from the literature review that most of the research investigation
and analysis is on investigating the effects of process parameters on machining
performances such as MRR, TWR, overcut, surface roughness, etc. Furthermore,
optimal parametric combination was also found utilizing several statistical tech-
niques as well as combined approach of different predictive tools for achieving high
machining rate, less tool wear rate and good geometrical micro-structures.
However, there are many issues which remained unsolved in micro-EDM. Such
issues are improving material removal rate, methodology for compensating the
micro-tool wear, improving the stability of discharge, improving the accuracy of
micro-feature implementing innovative ideas, etc. To solve these important issues
and to improve overall micro-EDM efficiency, several new micro-EDM machining
strategies have been developed and researchers already started to utilize these
innovative strategies during micro-EDM of Ti–6Al–4V material. In the following
sections, experimental investigation and analysis of micro-EDM process of Ti–
6Al–4V have been carried out extensively utilizing some innovative machining
strategies such as ultrasonic vibration assisted micro-ED machining, utilization of
non-hydrocarbon oil as dielectric, reversing the polarity between electrodes,

rotating the micro-tool electrode, utilizing powder mixed dielectric fluid, etc.
3.10 Innovative Machining Strategies for Improving

Micro-EDM
To achieve effective machining performance of micro-EDM for real time utilization

and also for obtaining high productivity with a higher degree of desired accuracy
and surface integrity, manufacturer engineers and research scientists are always
engaged to develop innovative machining techniques by considering various
innovative machining strategies during micro-EDM of various difficult-to-machine
materials. In this section, research investigation and analysis in the direction of
implementing such novel machining strategies during micro-EDM of Ti–6Al–4V
superalloy is discussed.
3.10.1 Ultrasonic Vibration Assisted Micro-EDM
The use of ultrasonic vibration during micro-EDM shows effectiveness for

improving machining time as well as geometrical accuracy of fabricated features of
micro components. During ultrasonic assisted micro-EDM, micro-tool or dielectric
fluid is vibrated ultrasonically. In micro-EDM, the debris particles which are
generated are difficult to remove from very small IEG. This phenomenon causes the
chance of short circuit between electrodes and creates the non-uniform discharge
during micro-EDM. With the implementation of ultrasonic vibration, the dielectric
can be circulated even in the narrow gap as the assisted ultrasonic vibration pro-
duces a pumping effect and enhances the circulation of dielectric at inter electrode
gap which reduces the machining time, reduces the amount of electrode wear,
improves the material removal rate and reduces the chances of micro-cracks gen-
eration on machined surface [37–39]. The ultrasonic vibration assisted micro-EDM
helps to produce high aspect ratio micro-holes efficiently compared to normal
micro-EDM without ultrasonic vibration. Moreover, the material removal rate
increases significantly with less electrode wear ratio and quality of machined sur-
face and dimensional accuracy has been improved [39]. The ultrasonic vibration of
work material in micro-EDM shows a drastic improvement. The machining effi-
ciency has been increased up to 8 times when compared to traditional micro-EDM
process during machining of stainless steel of thickness 0.5 mm and up to 60 times
during the machining of Nitinol [40, 41]. Figure 3.15 shows the ultrasonic vibration
assisted micro-EDM process along with different tool tip positions and IEG at
different positions of vibration. The powder mixed dielectric always contributes on
the performance of micro-EDM process. During vibration assisted powder mixed
Fig. 3.15 Schematic of ultrasonic vibration assisted micro-EDM process with amplitude of
vibration
micro-EDM, the adhesion of powder or abrasives in the narrow gap between the
micro tool and the work material occurs. Therefore, implementing ultrasonic
vibration during powder mixed micro-EDM, MRR increases significantly as it
enhances the dielectric circulation in the machining zone [42]. The drawbacks due
to arcing and short circuits in micro-EDM can be reduced substantially when
assisted with ultrasonic vibration as the number of normal pulses and the average
pulse energy increases [43, 44]. The machining time of micro-EDM can be reduced
significantly with increase in vibration frequency at constant amplitude which
significantly reduces the start-up process. The vibration between the micro-tool and
the work material obstructs the arc which ends the arcing state [45]. Thus, the total
duration of arcing event reduces and decreases with increase in vibration frequency.
Figure 3.16 shows the comparison of quality of blind micro holes produced with
and without ultrasonic vibration (frequency of 6 kHz and amplitude of 3 µm) [46].
The comparison shows the improvement in the dimensional accuracy by 10.5 µm.
Furthermore, the micro-hole produced without vibration is larger (diameter is
201.5 µm) than micro-hole generated with ultrasonic vibration (diameter is
191 µm) and this result indicates that the electrode wear is less in ultrasonic assisted
micro-EDM process. The recast layer formation has been always a drawback during
micro-EDM process. Due to better dielectric circulation in the machining zone, the
debris removal from narrow gap due to ultrasonic vibration is improved and results
in less re-solidification or recast layer [37]. Moreover, this leads to thinner
heat-affected zone produced around the machined cavities. The ultrasonic vibration
assisted micro-EDM machining not only shows the improvement in the process
performance when used with conventional and powder mixed dielectric, but it also
shows the tremendous contribution during dry EDM/micro-EDM. The improve-
ment in MRR has been reported when compared to gas based EDM and liquid
Fig. 3.16 SEM images of blind holes generated a without ultrasonic vibration and b with
vibration [46]
Fig. 3.17 SEM images of micro-hole of a entrance and b exit side machined with ultrasonic
vibration micro-EDM [48]
based EDM without vibration [47]. The reduction in taperness has been achieved
when micro-hole is machined with the aid of ultrasonic vibration. Figure 3.17
shows SEM images of micro-hole of entrance (diameter of 122 µm) and exit (di-
ameter of 106 µm) side when machined with ultrasonic assisted micro-EDM [48].
The difference in the diameter (16 µm) is due to secondary discharge and wear of
micro-tool.
3.10.2 Utilization of Non-hydrocarbon Dielectrics
In most of the conventional EDM systems, hydrocarbon oil kerosene is used.

However, during machining with kerosene dielectric, it creates several drawbacks
such as degradation of dielectric properties, pollution of air, and adhesion of carbon

particles on the work surface etc. Due to these, unstable machining operation takes
place and results in inefficient performance during micro-EDM. Thus, it is the task
of manufacturer engineers and research scientists to find out alternate dielectric
which can overcome the above-mentioned drawbacks. De-ionized water is one of
the non-hydrocarbon dielectric which can efficiently be used during micro-EDM
process. The use of de-ionized water as dielectric does not produce any toxic
vapours such as CO and CH4 as liberated in case of kerosene oil [49]. Compared to
kerosene, de-ionized water keeps the machining environment clean and safe.
Moreover, de-ionized water supplies oxygen in the machining zone and this pro-
motes stable discharges in IEG. Furthermore, the high degree of fluidity and high
cooling rate properties of de-ionized water encourages the debris particles to flush
out quickly from IEG and cool the discharge zone quickly and prepares for next
discharges.
From the exhaustive review of micro-EDM of Ti–6Al–4V, it is found that very
few research investigation were performed on implementing de-ionized water
dielectric during micro-hole machining. Further, comparative study on the perfor-
mance of pure kerosene and pure de-ionized water has not been performed during
machining of Ti–6Al–4V alloy. Keeping in view of the requirements and devel-
opmental research issue for improving the micro-EDM performance measures, a
well-planned research methodology has been designed to investigate the influence
of various dielectrics such as kerosene and de-ionized water on various micro-EDM
performances such as material removal rate, tool wear rate, overcut, diameteral
variance at entry and exit hole (DVEE) and machined surface topography through
various test results and scanning electron microscope (SEM) micrographs.
(a) Experimental details and machining conditions
The experiments are performed on a traditional die sinking EDM (model: series
2000, EMS-5535-R50, ZNC EDM machine, Manufacturer: Electronica Machine
Tools Pvt. Ltd., Pune, India). This EDM set up consists of (i) Spark generator unit,
(ii) Z axis unit with servo feed mechanism, (iii) X-Y table unit and (iv) Dielectric
pumping and filtering unit. Figure 3.18a, b shows the photographic view of the
main components of micro-EDM set up used in this experimental study. When
machining experiments were carried out using de-ionized water, a separate
dielectric chamber with separate pump, and pressure-regulating valve and filter
were used to circulate the dielectrics without affecting dielectric supply system of
the main machine. Figure 3.18c shows the developed external dielectric supply
system to circulate dielectrics during micro-EDM experiments. Through
micro-holes were machined on Ti–6Al–4V plates of size 13 15 1 mm.
Cylindrical shaped tungsten electrodes with flat front of diameter 300 lm were
used as tool. Tables 3.1 and 3.2 show the chemical compositions and physical as
well as mechanical properties of titanium alloy (Ti–6Al–4V), respectively.
Electrical resistivity of boron carbide is in the range of 0.1–10 X-cm. As the
micro-EDM performances are affected mostly by peak current (Ip) and
Fig. 3.18 Photographic views of a and b EMS-5535-R50, ZNC EDM machine c external
dielectric supply system for circulating de-ionized water
pulse-on-time (Ton) during machining of Ti–6Al–4V alloy [24, 50], so influence of

these two predominant process parameters were considered as the varying param-
eters keeping other process parameters like flushing pressure (Pr), duty factor (t) as
constant during machining with each dielectrics.
In this research investigation, experimentations have been carried out at various
peak current settings i.e. 0.5, 1, 1.5, 2 A employing kerosene and deionized water.
The details of the machining conditions and other parameter details are enlisted in
Table 3.3. In this research study, micro-EDM characteristics such as material
removal rate (MRR), tool wear rate (TWR), overcut (OC) and diameteral variance
Table 3.1 Compositions of Element Percentage

Ti–6Al–4V superalloy
Aluminium 5.5–6.75
Carbon 0.10
Iron 0.50
Hydrogen 0.015
Nitrogen 0.05
Oxygen 0.45
Other <0.4
Vanadium 3.5–4.5
Titanium Balance
Table 3.2 Physical and Property Typical value

mechanical properties of Ti–
6Al–4V Density (g/cm3) 4.42
Melting range (°C±15 °C) 1649
Specific heat (J/kg °C) 560
Thermal conductivity (W/m-K) 7.2
Tensile strength (Mpa) 897
Elastic modulus (GPa) 114
Hardness Rockwell C 36
in entry and exit (DVEE) were considered as the machining characteristics. Material
removal rate was calculated using Eq. (3.2). Similarly, tool wear rate is calculated
using Eq. (3.3). A high precision weighing machine (Manufacturer: Mettler Toledo,
Switzerland, Least measurable weight = 0.01 mg) is used to measure various
weights of workpiece and micro-tools. The overcut of micro-hole machined is
measured using Eq. (3.4). A high precision measuring microscope (Manufacturer:
OLYMPUS, Japan, Model: STM6, minimum measurable dimension = 0.5 lm) is
used to measure all the dimensions of micro-hole diameters as well as of micro-tool.
Experimentation were conducted at various micro-EDM parametric combinations,
measured and calculated the performance criteria. The discussion and analysis of
various test results are described in the following sections.
(b) Results and discussion
In this section, a detailed comparison of various machining performance charac-
teristics has been performed for the investigation of influence of dielectric liquid
with kerosene and de-ionized water in micro-EDM for micro machining of titanium
alloy (Ti–6Al–4V). Figure 3.19 depict the comparison of the material removal rate
(MRR) using two different dielectrics such as kerosene and de-ionized water
varying peak current (Ip) and pulse-on-time (Ton). The material removal rate
(MRR) is much more using de-ionized water than the kerosene throughout the
considered range of pulse duration and increase of peak current. When machining is
done with kerosene, as the dielectric fluid is kerosene which is a chemical com-
pound of carbon and hydrogen, decomposes and produces a layer of titanium
Table 3.3 Experimental condition for through micro-hole machining on Ti–6Al–4V alloy
Condition Description
Workpiece material (anode) Ti–6Al–4V plate of size 13 mm 15 mm and
thickness of 1 mm
Tool electrode (cathode) Solid tungsten micro-tool, diameter of 300 µm
Dielectric fluids Kerosene, de-ionized water
Peak current (A) 0.5, 1, 1.5, 2
Pulse-on-time (µs) 1, 2, 5, 10, 20
Duty factor (%) 95
Flushing pressure (kgf/cm2) 0.5
Resistivity of pure de-ionized water 4.2
(megohm-cm)
Fig. 3.19 Influence of different dielectrics on the material removal rate (MRR) with varying
pulse-on-time (Ton)
carbide (TiC) on the workpiece surface. But, when using de-ionized water, the
water decomposes and a layer of titanium oxide (TiO2) is produced on the
machined surface. Since, TiC has a higher melting temperature (3150 °C) than that
of TiO2 (1750 °C), a large discharge energy is required for improving the material
removal rate using kerosene. Also, the size of debris formed during machining with
kerosene is less compared to machining with de-ionized water, thus improving the
material removal rate.
Fig. 3.20 Influence of different dielectrics on the tool wear rate (TWR) with varying
pulse-on-time (Ton)
Figure 3.20 shows the comparison of the tool wear rate (TWR) using two dif-
ferent dielectrics such as kerosene and de-ionized water varying peak current
(Ip) and pulse-on-time (Ton). It is seen from the figure that the tool wear rate
(TWR) is high using de-ionized water compared to machining with kerosene. When
using kerosene as the dielectric, it decomposes in the high discharge energy and
produces carbon particles that stuck or adhere to the surface of the electrode. These
carbon particles restrict the rapid wear of the tool. So, the tool wear rate (TWR) is
less while using kerosene as dielectric. On the other hand, when using deionized
water, no carbon adhere to the tool electrode surface, thus TWR is higher enough
with de-ionized water.
Figure 3.21 shows the comparative study of the overcut (OC) using two different
dielectrics i.e. kerosene and de-ionized water with varying peak current (Ip) and
pulse-on-time (Ton). From the figures, it is clear that the overcut of the machined
micro-holes is larger when using de-ionized water for the pulse duration of 1 and
2 µs when machining is done by varying peak current. But at higher pulse duration
the overcut of the micro-holes is larger when using kerosene as the dielectric. When
deionized water is used, it releases oxygen decomposed from water. This oxygen
influences the machining stability and helps to form more debris. These debris
particles ejected through the short gap of tool surface and micro-hole walls. Thus
increasing secondary sparking, resulting in higher overcut compared to kerosene.
But at higher pulse duration, the machining stability and efficiency increases due to
more pulses per cycle, resulting higher overcut with kerosene compared to
Fig. 3.21 Influence of different dielectrics on the overcut (OC) with varying pulse-on-time (Ton)
de-ionized water. When the overcut is analyzed with the increase of peak current it
is found that a high peak current results higher overcut with de-ionized water
compared to kerosene.
Figure 3.22 shows the comparison of the diameteral variance in entry and exit
(DVEE) using two different dielectrics i.e. kerosene and de-ionized water with
varying peak current (Ip) and pulse-on-time (Ton), respectively. It can be observed
from the figures that DVEE of the micro-holes increases at low discharge duration
when varying peak current was employed using de-ionized water as dielectric fluid.
But further increase of pulse duration results the decrease of DVEE of the holes
with de-ionized water. A straight through micro-hole can be generated at pulse
duration of 5 µs and peak current of 1.5 A. On the other hand, DVEE is lower at
peak current 0.5 and 1 A employing deionized water compared to kerosene. But, as
the peak current increases, the diameter variance increases with de-ionized water.
Thus, a straight through micro-hole is not achieved.
After machining of micro-holes utilizing various type of dielectric fluids, the
workpiece were carefully polished, cleaned, and etched with a solution of 2.5 ml of
HF acid (40%), 5 ml concentration of HNO3 and 42.5 ml of de-ionized water for
examining the surface topography of micro-holes as well as the recast layer formed
on the machined micro-hole surfaces with the aid of optical and SEM micrographs.
Figure 3.23 shows some optical micrographs of machined micro-holes that were
taken using a 10X zoom lens in a precision optical microscope for both pure
dielectrics i.e. kerosene and de-ionized water at the machining condition of 1 A
Fig. 3.22 Influence of different dielectrics on the diameter variance between entry and exit
(DVEE) with varying pulse-on-time (Ton)
Entry side Exit side

Kerosene
De-ionized water
Fig. 3.23 Optical photographs of machined micro-holes with different dielectrics at 1 A/2 ls [51]
Fig. 3.24 SEM micrographs of white layer formed on micro-hole edge a and b machined at 0.5
A/1 ls and c, d machined at 1.5 A/10 ls [51]
peak current and 2 ls pulse duration. It is clear from these figures that kerosene
dielectric result in improved quality micro-hole than de-ionized water. In Fig. 3.24,
SEM micrographs of the micro-hole’s edges are shown to examine the white/recast
layer formation using kerosene and de-ionized water. The thickness of the white
layer is much lower using de-ionized water compared to kerosene. Moreover, with
increase of the pulse-on-time, the thickness of the white layer increases. As pulse
duration increases, the effective machining time also increases. Therefore, more
debris is generated and this debris adheres to the micro-hole surface and resolidified
as deionized water has high cooling rate than kerosene.
3.10.3 Abrasive Mixed Dielectric in Micro-EDM
In micro-EDM, debris in the inter electrode gap facilitates the ignition process and
further increases the gap size and overall flushing conditions [52]. Absence of
debris particles in the gap can results arcing between the electrodes and it further
results in lack of precise feeding mechanism. However, excess debris leads to
uneven discharge and short-circuiting. Some debris particles in the machining gap
provide better discharge transitivity, gap size, breakdown strength, and deionization
[53]. From the past research, it is revealed that most of the research has been
performed on EDM employing powder mixed dielectrics. However, no research
was reported to use powder mixed dielectric during micro-EDM of Ti–6Al–4V.
Thus, in the present experimental study, detailed analysis has been carried out to
investigate comparatively the influence of mixing boron carbide powder in kero-
sene and de-ionized water during micro-hole machining in micro-EDM on Ti–6Al–
4V material. This B4C powder has some excellent physical and chemical properties
such as high chemical resistance and hardness, excellent wear and abrasion resistant
etc. These exceptional characteristics of boron carbide may provide effective and
efficient discharge conditions at the machining zone and also enhancement in
above-mentioned machining performances. Electrical resistivity of boron carbide is
in the range of 0.1–10 X cm. As B4C abrasive lie in a transition zone between good
conductors and isolators, the potential difference as well as the plasma channel
produced in the micron sized inter electrode gap can make the abrasive to conduct
thermoelectric power in the machining zone [54, 55]. Boron carbide is characterized
by a relatively wide gap in its forbidden band, a low thermal conductivity, and a
high thermoelectric power. These properties make it a potentially useful material for
high-temperature thermoelectric energy conversion compared to silicon carbide as
well as tungsten carbide abrasives.
(a) Experimental details and machining conditions
As micro-EDM process uses discharge energy in the range of 5–150 µJ, so there is
a little chance to melt and evaporate the B4C particles due to discharge in the inter
electrode gap. It was observed in the optical measuring microscope that the powder
particles comprise of mixture of different shapes and sizes ranging from 8 to 20 µm.
When, Boron carbide (B4C) powder-mixed de-ionized water was applied in the
machining zone, most of the particles, which are more than 10 µm in size, get
accumulated at the base of machining zone because of self-weight of particles even
though a motor driven stirrer was applied to provide turbulence in powder mixed
dielectrics in the machining tank. Hence, the effective average particle size that may
involve in the machining phenomena at the micro-machining zone ranges from 8 to
10 µm during micro-EDM. Therefore, the average size of B4C particles which
actively take part in machining is in the range of 8–10 µm. The thermo-physical
properties of boron carbide powder are enlisted in Table 3.4. B4C powder additive
Table 3.4 Thermo-physical Property Typical value

properties of Boron carbide
(B4C) additives Density (g/cm3) 2.52
Melting point (°C) 2445
Electrical conductivity (at 25 °C) (S) 140
Thermal conductivity (at 25 °C) (W/m K) 30–42
Young’s modulus (GPa) 450–470
Hardness (Knoop 100 g) (kg mm−2) 2900–3580
Specific heat (J K−1 kg−1) (at 25 °C) 950
of size 8–10 lm and of concentration 4 g/l was added to pure kerosene and
deionized water when experimentations were performed with powder-mixed
dielectrics. This particular concentration of additive in dielectrics has been selected
based on past research studies on powder mixed dielectrics in EDM [56, 57]. The
same micro-EDM machine was utilized for this experimental investigation. When
experiments are done with powder mixed kerosene and powder mixed de-ionized
water, a separate dielectric chamber with separate pump, and pressure-regulating
valve and filter were used to circulate the dielectrics without affecting dielectric
supply system of the main machine. When machining was done with powder-mixed
dielectric, the external filter unit was removed, and a magnetic field was employed
to remove the machining debris from the dielectrics. In this research study,
micro-EDM characteristics such as material removal rate (MRR), tool wear rate
(TWR), overcut (OC), diameteral variance in entry and exit (DVEE) were con-
sidered as the machining characteristics. The discussion and analysis of various test
results are described in the following sections.
Figure 3.25 shows the comparative plots of the material removal rate (MRR) using
different dielectrics such as pure kerosene, pure de-ionized water and Boron
Carbide (B4C) mixed dielectrics powder for varying pulse-on-time (Ton) at dif-
ferent peak currents (Ip). This figure reveals that MRR is high with de-ionized water
Fig. 3.25 Variation of material removal rate (MRR) with pulse duration (Ton) at various fixed
peak current (Ip) for different dielectrics [51]
than kerosene for all considered settings of pulse duration and peak current during
experimentation. Additionally, when machining is done by mixing B4C powder
additives in kerosene dielectric it is clearly seen that MRR increases with the
increase of pulse duration at constant peak current of 1.5 and 2 A. Also the MRR
with powder mixed dielectrics is larger compared to machining with pure kerosene
and de-ionized water at higher pulse duration discharge settings. The increase of
MRR with the increase of pulse duration using B4C mixed kerosene is due to
increase of spark discharge time i.e. longer effective machining time per pulse. The
presence of boron carbide additive in kerosene further helps in uniform distribution
of discharge energy and better conduction of discharge current thereby enabling
better machining condition. When B4C powder was applied to de-ionized water, it
is seen that MRR is more using additive compared to pure deionized water at peak
current 1.5 and 2 A. The same reason is applicable here also for the increase of
MRR as of additive mixed kerosene. So, it is concluded that the addition of carbide
powder particles in dielectrics prevails better machining efficiency than the pure
dielectrics due to uniform distribution of discharge energy in the machining zone.
In Fig. 3.26 comparative results of tool wear rate (TWR) with pulse duration at
different pulse discharge with various constant peak current are shown employing
kerosene, de-ionized water and B4C powder mixed dielectrics. This figure reveals
that TWR is high using de-ionized water compared to machining with kerosene
dielectric. Furthermore, it is revealed from the same figure that tool wear rate
Fig. 3.26 Variation of tool wear rate (TWR) with pulse duration (Ton) at various fixed peak
current (Ip) for different dielectrics [51]
associated with B4C mixed kerosene is less compared to machining with pure
kerosene at peak current of 0.5 and 1 A. When machining is done with boron
carbide abrasive mixed kerosene dielectric, the tool wear is less due to the presence
of more number of carbon particles evolving from the decomposition of kerosene
dielectric as well as boron carbide abrasive in the machining zone. From the same
figure it is observed that at fixed 1 A peak current tool wear rate is lesser than at
fixed 0.5 A current setting using additive mixed kerosene. This is due to the fact
that the higher discharge energy results in more decomposition of kerosene and it
further generates more carbon which in turn adheres onto the tool surface pre-
venting secondary sparking. Although higher peak current i.e. 2 A produces more
discharge energy, but that results in more current density and subjects the tool
electrode under large thermal stresses. The powder mixed de-ionized water results
in less tool wear rate at 2 A compared to 1.5 A due to more deposition of carbon
particles from B4C additives. It is also found that machining combined with boron
carbide powder mixed deionized water results in less tool wear compared to pure
de-ionized water due to adhesion of carbon particles from boron carbide powder on
the tool surface, which restrict tool wear to certain extent.
The comparative plots of overcut (OC) of micro-holes on Ti–6Al–4V employing
kerosene, deionized water and B4C abrasive mixed with these dielectrics are shown
in Fig. 3.27 when pulse duration was varied for fixed different peak current. It is
observed from these figures that the overcut of the machined micro-holes is less
Fig. 3.27 Variation of overcut (OC) with pulse duration (Ton) at various fixed peak current
(Ip) for different dielectrics [51]
when dielectric was de-ionized water for peak current setting of 0.5 and 1 A.
However, at higher peak current i.e. 1.5 and 2 A, overcut is more in case of
de-ionized water compared to pure kerosene dielectric. In addition, when B4C
additive was used in dielectrics, it is found that OC is larger with both powder
mixed dielectrics compared to pure dielectrics. It is so because the suspended
additive particles remove the molten layer from the machining zone and further
reduce the formation of thick white layer, resulting larger OC. It is also revealed
that OC decreases with increase in pulse duration while using B4C suspended
kerosene as dielectric. It is due to decrease of overall machining time i.e. faster
machining. However, larger OC is found in case of B4C mixed deionized water as
dielectric because of secondary sparking.
Figure 3.28 shows the comparative outcomes of diameteral variance at entry and
exit (DVEE) using kerosene, de-ionized water and boron carbide powder mixed
with these dielectrics. It is found from this figure that DVEE of the micro-holes is
lower employing de-ionized water compared to kerosene as dielectric fluid at lower
peak current i.e. 0.5 and 1 A. However, at higher peak current i.e. 1.5 and 2 A,
DVEE is larger using de-ionized water. It is also found that boron carbide powder
mixed kerosene results in large DVEE compared to pure kerosene at low peak
current of 0.5 and 1 A. As the machining progresses, the additive boron carbide
particles creates more carbon adhesion on the work surface, that further results in
Fig. 3.28 Variation of diameteral variance at entry and exit (DVEE) with pulse duration (Ton) at
various fixed peak current (Ip) for different dielectrics [51]
Fig. 3.29 SEM micrographs of machined micro-holes using powder mixed dielectrics [51]
Fig. 3.30 SEM micrographs of white layer of machined micro-hole’s edges using powder mixed
dielectrics [51]
lower material removal at exit side of micro-hole and greater variance in entry and
exit diameters. But, when B4C additive mixed de-ionized water is used at higher
peak current of 1.5 and 2 A, the powder particles help in uniform distribution of
discharge energy which in turn leads to better dimensional accuracy micro-holes
compared to pure de-ionized water.
Figure 3.29 shows SEM micrographs of the inner surface of machined
micro-hole using powder mixed kerosene and de-ionized water at parametric
combinations of 1 A/5 ls and 2 A/10 ls of peak current and pulse-on-time. It is
revealed from these micrographs that with more discharge energy, inaccurate
micro-hole is generated using powder mixed de-ionized water due to more sec-
ondary sparking phenomena. However, smooth inner surface is produced using
powder mixed de-ionized water than powder mixed kerosene. In Fig. 3.30, SEM
micrographs of micro-hole’s edge are viewed for examining the recast/white layer
formation during micro-hole machining. It is revealed from these figures that the
recast layer formed on the edges is very less than using pure dielectrics. It is due to
the fact that the additive particles help to remove the molten debris and restrict to
form thick white layer on machined micro-hole edges.
3.10.4 Rotation of Micro-tool Electrode
During micro-EDM process, the machining performances can be enhanced by

implementing micro-tool electrode rotation about its axis. While rotating the
micro-tool, flushing out of debris particles from very narrow IEG occurs quickly
due to generation of tangential force in the machining zone. This leads to effective
and efficient discharge between the electrodes. In this section, the effects of peak
current (Ip), pulse-on-time (Ton) and rotational speed of the micro-tool electrode
are explored during micro-hole machining in micro-EDM process.
(a) Experimental method and machining conditions
The experiments were conducted using the same ZNC R50 EDM machine to
investigate the effects of rotation of electrode in respect of material removal rate
(MRR), tool wear rate (TWR), overcut (OC) and DVEE on Ti–6Al–4V workpiece
of 1 mm thickness with a brass electrode of 300 lm in diameter. During machining,
kerosene is used as dielectric fluid. For rotating the tool electrode, tool rotational
attachment has been used in which the rotational speed can be varied between 1 and
300 rpm in a resolution of 2 rpm. The range of peak current (Ip) and pulse-on-time
(Ton) selected were 0.5–2 A and 1–20 ls respectively. The experiments were
conducted in two stages: (i) varying only peak current from 0.5 to 2 A keeping
pulse-on-time, duty factor and flushing pressure as constant at 10 ls, 95%,
0.5 kgf cm−2 respectively and (ii) varying only pulse-on-time from 1 to 20 ls
keeping peak current, duty factor, flushing pressure constant at 1 A, 95% and
0.5 kgf cm−2 respectively with stationary and rotating electrode with a rotational
speed of 150 rpm in each case. The peak current has been fixed at 1 A because for
micro-machining, very low current density is not sufficient to melt and vaporize the
work material and very high current density leads to higher TWR and larger thermal
damage of the workpiece surface. On the other hand, pulse-on-time is fixed at 10 ls
because short duration is more beneficial for micromachining as it helps in reducing
the tool wear. A moderate rotational speed of the electrode has been selected i.e.
150 rpm after conducting trail runs of experiment, because this helps in easy
removal of debris from the machining zone and keeps the tool wear at minimum.
Utilizing the micro-tool electrode rotating facility with developed tool holder, the
experiments were conducted to study the effects of micro-EDM parameters on
process criteria namely material removal rate (MRR), tool wear rate (TWR),
overcut (OC) and diameteral variation at entry and exit (DVEE) of the machined
micro-holes. The variations of MRR with peak current (Ip) and pulse-on-time
Fig. 3.31 Variation of MRR with a peak current and b pulse-on-time [58]
Fig. 3.32 Variation of TWR with a peak current and b pulse-on-time [58]
(Ton) with stationary and rotating electrode are shown in Fig. 3.31a, b, respec-
tively. It is observed from the graph that MRR increases with increase in peak
current as was expected for both stationary and rotating electrodes. Since higher
peak current leads to higher discharge energy, so it results in increase of MRR. It is
also observed from the same figure that with rotating electrode higher MRR is
achieved. The higher MRR with rotating electrode may be attributed to better
removal of sludge and carbonized particles from the machining zone due to cen-
trifugal force of rotation. This improved sludge removal due to rotating effect of
electrode helps in exposing the actual machining surface, which in turn improves
the overall machining condition leading to higher MRR. Thus, for maximum MRR
from within the considered range of parametric setting, the best parametric com-
bination in the present case study is 2 A/10 ls/0.5 kgf cm−2/95%/150 rpm.
Figure 3.32a, b respectively show the variations of TWR with peak current
(Ip) and pulse-on-time (Ton) with stationary and rotating electrode. It can be
observed from the graph that TWR increases as the peak current increases from 0.5
to 1.5 A. However, TWR is observed to decrease from 1.5 to 2 A. The increase in
TWR with the increase in peak current can be attributed to the increase in discharge
Fig. 3.33 Variation of OC with a peak current and b pulse-on-time
energy and the rotational effect of the electrode. Further increase in peak current,
increases machining efficiency and decreases the tool wear because the tool elec-
trode is subjected to high-energy electric field for shorter duration. Thus, this figure
clearly indicates that for micro-hole machining with low TWR, smaller peak current
is suitable. Owing to rotational effect, the magnitude of TWR further decreases
which is evident from the figure under consideration. This may be attributed to
better removal of debris due to the tangential force of rotation. Thus, for least TWR,
the best parametric combination within the considered range of parametric settings
is 1 A/10 ls/0.5 kgf cm−2/95%/150 rpm.
Figure 3.33a, b respectively show the variations of OC with peak current
(Ip) and pulse-on-time (Ton) with stationary and rotating electrode. It is observed
from the figure that overcut decreases with the increase in peak current in the range
0.5–1 A which may be attributed to increase in discharge energy with the increase
in peak current and enabling faster machining and thereby reducing effective
machining time. The reduction in machining time means less exposure of tool
electrode to discharge energy which is responsible for tool wear. However, peak
current beyond 1 A, overcut has found to increase monotonically. Increase in peak
current above 1 A results in larger discharge energy which causes larger MRR
resulting in larger overcut. Thus the most suitable parametric combination for least
overcut from within the considered range of parametric settings is 1 A/10 ls/95%
duty factor/0.5 kgf cm−2/150 rpm.
The variations of DVEE with peak current (Ip) and pulse-on-time (Ton) with
stationary and rotating electrode are shown in Fig. 3.34a, b, respectively. It is
observed from the same graph that with the increase in peak current, the DVEE
decreases. Furthermore, the magnitude of DVEE with rotating electrode is less than
that of stationary electrode throughout the considered range of peak current. As the
depth of the micro-hole increases, the sparking point shifts radially inward. When
the peak current is increased, the thermal energy density increases at the pointed tip
of the micro-tools. This high density discharge energy rapidly melts and vapourizes
the sharp micro-tool tips and subsequently making the micro-tool end broader
Fig. 3.34 Variation of DVEE with a peak current and b pulse-on-time
which finally helps in achieving a straight through micro-hole by decreasing DVEE.

Further, the rotational speed of the tool helps to remove the sludge and debris
efficiently from the machining zone and also reduces the chances of secondary
discharge sparking thereby providing stable machining condition for achieving
micro-hole with less DVEE. The lowest DVEE achieved is with the parametric
combination of 2 A/10 ls/95%/0.5 kgf cm−2/150 rpm.
The improvement in micro-hole geometry with the increase in peak current
coupled with rotation of tool electrode may be attributed to better flushing of debris
due to rotation of electrode, uniform tool wear, and evenly distribution of discharge
energy. Figure 3.35a shows the optical micrographs of micro-hole’s diameters at
entry and exit machined with parametric setting of 1 A/5 ls/95% duty
factor/0.5 kgf/cm2 i.e. with stationary micro-tool and Fig. 3.35b shows the optical
micrographs of micro-hole’s diameters at entry and exit machined with parametric
setting of 1 A/5 ls/95% duty factor/0.5 kgf/cm2/150 rpm i.e. with rotating
micro-tool. It can be observed from these two micrographs that with rotating tool
electrode, straight-through micro-hole can be fabricated.
3.10.5 Reversing Polarity of Electrodes
During micro-EDM process, especially, for micro-drilling operation, the amount of

carbon deposition and machining debris increases as micro-hole depth increases
and its removal becomes very difficult. Therefore, with the increase in micro-hole
depth it becomes necessary to increase the rate of change of polarity in order to
facilitate the removal of deposited carbon and debris from the machining zone. In
this section, a novel approach has been considered to change polarity of electrodes
in reduced time domain. The experimental condition has been designed in a novel
way in which the polarity during micro-EDM machining has been changed in a
designed fashion in exponential time domain to improve the machining condition,
debris removal, machining efficiency to achieve better geometrical accuracy of the
Fig. 3.35 Optical micrographs of micro-holes with a stationary and b rotating tool electrode
machined at 1 A/5 ls/95% duty factor/0.5 kgf/cm2
micro-hole. In constant polarity machining condition, the job was positive and tool
electrode was negative i.e. normal polarity. But, in changing polarity machining
condition, the polarity of the job and the tool electrode has been changed in
exponential time domain.
(a) Experimental method and machining conditions
The machining begins with normal polarity for the first 10 min, then the polarity is
changed for next 3 s and again the polarity is switched over to normal polarity and
the machining continues for another 9 min before the second change. The time
duration of machining with normal polarity reduces after every change and this
continues till the through micro-hole is produced on the workpiece. However, the
machining with reverse polarity is kept constant at 3 s in each change. The time
chart has been prepared after conducting several trail experiments to find out the
time required to machine the through micro-hole in 1 mm thick Ti–6Al–4V alloy
sheet with 300 µm diameter brass tube electrode. The dielectric fluid used is ker-
osene. It is learnt from past literatures and experimental investigations in
micro-EDM that peak current and pulse-on-time are the most influential parameters.
Therefore, these dominating parameters have been selected as process parameters in
the present micro-EDM experimentation. To study the effects of pulse-on-time
(Ton) and peak current (Ip), the experimental planning has been carried out firstly
by only varying the peak current from 0.5 to 2 A keeping pulse-on-time (Ton), duty
factor (t) and flushing pressure (Pr) constant at 10 ls, 95% and 0.5 kgf/cm2
respectively and secondly by only varying the pulse-on-time (Ton) from 1 to 20 ls
keeping peak current (Ip), duty factor (t) and flushing pressure (Pr) constant at 1 A,
95% and 0.5 kgf/cm2 respectively. The experiments were conducted on the same
ZNC R50 EDM machine. Experiment at each parametric setting was conducted
three times and the average of the three were considered for calculating material
removal rate (MRR), tool wear rate (TWR), overcut (OC) and diameteral variation
at entry and exit (DVEE) of the micro-hole.
The variations of MRR with peak current and pulse-on-time with constant and
changing polarity, keeping all other process parameters constant i.e. pulse-on-time
at 10 ls in case of varying peak current and peak current at 1 A in case of varying
pulse-on-time, duty factor at 95%, and flushing pressure at 0.5 kgf/cm2, shown in
Fig. 3.36a, b, respectively. It is noticed from Fig. 3.36a that MRR increases
monotonically in both cases with the increase in peak current from 0.5 to 1.5 A but
for changing polarity it decreases as peak current increases from 1.5 to 2 A. The
magnitude of MRR in both cases is almost equal in the considered peak current
range. The low MRR at smaller peak current could be due to lower discharge
energy when machining in both constant and changing polarity. However, MRR at
changing polarity is low compared with constant polarity as shown Fig. 3.36a due
to the change in the position of maximum liberation of heat energy due to sparking.
The increase in MRR with increasing peak current is attributed to larger discharge
energy. Figure 3.36b shows the variation of MRR with pulse-on-time. It is
observed from this figure that the MRR variation is almost opposite in nature for
changing and constant polarity at lower pulse-on-time values between 1 and 5 ls.
MRR decreases from 1 to 2 ls for constant polarity but in the same pulse-on-time
range it increases for changing polarity. In the range from 2 to 5 ls, MRR increases
and decreases sharply for constant and changing polarity respectively. However,
Fig. 3.36 Variation of MRR with a peak current and b pulse-on-time [59]
Fig. 3.37 Variation of TWR with a peak current and b pulse-on-time [59]
from 5 to 10 ls, MRR increases gradually in both cases. Furthermore, in the

pulse-on-time range of 10–20 ls, MRR increases slowly for constant polarity
whereas it decreases for changing polarity. It can also be observed that maximum
MRR is obtained at the lower range of pulse-on-time, i.e. 1–5 ls. In the case of the
changing polarity approach to machining, owing to change in polarity, the position
of maximum liberation of heat energy due to sparking is changed and at the same
time the number of sparking per cycle is increased for lower pulse-on-time. Thus
the total heat energy generated in the discharge phenomenon is increased during the
parametric setting and a high MRR is obtained.
Figure 3.37a, b show the variation of TWR with peak current and pulse-on-time
respectively. It is observed from Fig. 3.37a, as expected, that TWR increases
proportionally with the increase in peak current from 0.5 to 2 A at fixed
pulse-on-time of 10 ls in both constant and changing polarity. The increase in
TWR with the increase in peak current is due to the increase in discharge energy.
The increase in magnitude of discharge energy rapidly deteriorates the tool
geometry as the thermal energy is concentrated in a very small area (the size of the
electrode in this case). However, it can be seen from Fig. 3.37a that TWR is greater
with changing polarity; this is exactly opposite to the expectation outlined above,
where it was thought that tool wear should be less in this case. This might have
occurred owing to the removal of carbon deposition from the tool during normal
polarity. However, when pulse-on-time was varied keeping peak current, duty
factor, and flushing pressure constant as shown in Fig. 3.37b, TWR has decreased
significantly with changing polarity in comparison to constant polarity. This indi-
cates that pulse-on-time is the more critical factor in tool wear than peak current.
Therefore, for minimum TWR it is better to use changing polarity with smaller
pulse-on-time (1–10 ls) and low peak current of 1 A as this yields higher MRR and
low TWR. This observation reveals that shorter pulse-on-time, which means a
higher frequency of sparking, and low peak current are suitable for micro-EDM.
Figure 3.38a, b show the variation of OC with peak current and pulse-on-time,
respectively. It is observed from Fig. 3.38a that OC decreases sharply from 0.5 to
1 A for both constant and changing polarity and thereafter increases monotonically
Fig. 3.38 Variation of OC with a peak current and b pulse-on-time [59]
with increasing peak current in both machining conditions. This clearly indicates
that the optimum peak current setting is 1 A at the present level of process
parameters range. If peak current is low, the discharge energy is also low, which
means a longer machining time exposing the sidewall of the hole to secondary
sparking resulting in larger OC. However, the increase in OC at higher peak current
is due to higher discharge energy and larger debris concentration in the gap because
of higher MRR. Also, it can be observed from Fig. 3.38b that OC increases steeply
from 1 to 5 ls, decreases sharply from 5 to 10 ls, and again increases at 10–20 ls
for constant polarity. Thus the OC fluctuates with the change in pulse-on-time for
constant polarity. However, for changing polarity, OC is found to decrease grad-
ually for pulse-on-time from 1 to 20 ls, thereby suggesting the benefit of using the
changing polarity technique for achieving lower overcut in the machining of
micro-holes, hence increasing the geometrical accuracy of the machined micro-hole
in Ti–6Al–4V material. Further, it is observed throughout the range of
pulse-on-time from 1 to 20 ls that the magnitude of OC is far lower with changing
polarity than with constant polarity, which is an indicator in itself that changing
polarity yields low OC and results in improvement of micro-hole geometry. This is
due to the fact that the carbon particles, which are the by-product of the micro-EDM
process, are deposited on the surface of the tool electrode and this helps in pre-
venting secondary sparking. Thus only the end face or bottom face is exposed for
sparking, thereby reducing OC and resulting in straight-through micro-hole gen-
eration, thus improving the accuracy of micro-hole machining.
It is observed from Fig. 3.39a, b that DVEE decreases sharply with the increase
in peak current and pulse-on-time. The lowest DVEE is found at 1 A and 10 ls,
which can be seen in the figures for both constant and changing polarity machining
conditions. Also it is observed that DVEE is less with changing polarity than with
constant polarity throughout the peak current and pulse-on-time ranges considered
in the experiments. It can be concluded that with the novel polarity changing
technique, a straight micro-hole is possible. As the depth of the micro-hole
increases, the sparking points shift radially inward. When the polarity is changed
the pointed tip of the micro-tool wears off uniformly, making the tool end broader
and helping in machining a straight micro-hole, resulting in the decrease in DVEE.
Optical micrographs of the micro-holes (entry and exit diameter) machined with
constant and changing polarity at 1 A/20 ls/95% duty factor/0.5 kgf/cm2 are
shown in Fig. 3.40a, b, respectively. The DVEE at parametric combination of
1 A/10 ls/95% duty factor/0.5 kg cm−2 for the constant polarity machining
condition is 0.0270 mm, and for changing polarity the value is 0.0173 mm.
Fig. 3.39 Variation of DVEE with a peak current and b pulse-on-time [59]
Fig. 3.40 Optical micrographs of micro-holes with a constant and b changing polarity machined
at 1 A/20 ls/95% duty factor/0.5 kgf/cm2
Fig. 3.41 SEM micrographs of micro-holes with a constant and b changing polarity machined at
1 A/20 ls/95% duty factor/0.5 kgf/cm2
The comparison of these data and the micrographs clearly indicate that DVEE and
geometrical shape are better when using the changing polarity condition for the
micromachining of micro-holes by the micro-EDM. The SEM micrographs of
machined micro-holes at parametric settings of 1 A/20 ls/95% duty
factor/0.5 kg cm−2 with constant and changing polarity techniques are shown in
Fig. 3.41a, b, respectively. It can be observed from these figures that the thickness
of recast layer formed on micro-hole surface with polarity changing technique
machining condition is less as compared to constant polarity machining condition
corroborating the fact that the surface quality of the machined micro-hole has
improved with this new machining technique. This observation clearly indicates
that with changing polarity technique, a better machining condition is achieved
during micro-hole machining by micro-EDM process.
3.11 Conclusions
In this chapter, a brief introduction of micro-EDM process and the implementation

of innovative machining strategies for improving the process performances during
machining was presented. Moreover, the principle of normal EDM and then
micro-EDM were described with brief details of sub-systems and significant pro-
cess parameters with performance measures. Detailed research and investigation
was performed during micro-EDM of Ti–6Al–4V alloy implementing various
machining strategies such as ultrasonic vibration assisted micro-EDM, parametric
influence and comparative study of process criteria employing two different
dielectrics i.e. kerosene and de-ionized water, use of boron carbide mixed kerosene
and de-ionized water as dielectrics, providing rotation of micro-tool electrode
during micro-hole generation and reversing the polarity of electrodes. The exper-
imental results show that these innovative machining strategies have great influ-
ences for improving the machining rate and geometrical accuracy in terms of
material removal rate, tool wear rate, overcut and diameteral variance of entry and
exit of micro-hole. Furthermore, the process performances also greatly depend on
significant process parameters such as peak current, pulse-on-time and flushing
pressure. As micro-EDM process is slow process, therefore, novel machining
strategies mentioned above must be implemented to improve the process perfor-
mances to improve the accuracy of micro-structure, surface finish and efficiency.
Furthermore, innovative hybrid micro-machining processes can also be developed
for micro-EDM to machine hard-to-machine materials like Ti–6Al–4V alloy for
increasing the yield of micro-manufacturing.
Acknowledgements The authors acknowledge the financial support and assistance provided by
CAS Ph-IV programme of Production Engineering Department of Jadavpur University under
University Grants Commission (UGC), New Delhi, India.
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Chapter 4
Advancements in Micro Wire-cut
Electrical Discharge Machining
Asit Baran Puri
Abstract A WEDM process may be called as a Micro WEDM (MWEDM) process

when it is used for manufacturing micro parts. The rest underlying theory is same as
traditional WEDM. A micro part is machined with good dimensional accuracy and
surface finish when the kerf (slot) width becomes considerably smaller compared to
that obtainable in conventional WEDM. Truly speaking, the cutting tool in
WEDM/MWEDM is not the wire, but it is the pulse (electrical discharge).
A minimum kerf is ensured in Micro WEDM, when (i) pulse sizes are made
extremely small, (ii) extremely thin wire is used (/ = 20–100 lm), and (iii) process
inaccuracies along with the discharge gap are minimized. It is required for
Micro WEDM to maintain the pulse energy in the order of 10−5–10−7 J. Process
inaccuracies are minimised by minimising the amplitude of wire vibration and wire
lag. Hence, for an MWEDM machine, the following subsystems are modified as
compared to a conventional WEDM setup: (a) the machine tool configuration is
designed mainly to eliminate stray capacitance or leakage of charges from the gap,
(b) the pulse generator produces discharges with pulse energy preferably in the
order of 10−6–10−7 J, (c) a pulse discrimination system is installed to avoid arc or
other abnormal discharges, (d) a closed-loop controlled proper wire transportation
system is needed, (e) the wire diameter should be 20–80 lm and preferably of
tungsten, (f) a suitable oil dielectric is used and lastly, (g) a precise closed-loop
controlled servo mechanism is used for gap and work-table feed control to operate
at steps at submicron level.
A.B. Puri (&)

Mechanical Engineering Department, National Institute of Technology Durgapur,
Durgapur 713209, West Bengal, India

DOI 10.1007/978-3-319-52009-4_4
146 A.B. Puri
4.1 Introduction
Micro manufacturing and micro fabrication are synonymous while micromachining

is only a subset of them. Micromachining may be defined as a process or a set of
processes used to manufacture or fabricate parts or machine components whose
dimensional feature(s) are most conveniently described in microns.
Micromachining is done by conventional machining (also called tool based
machining, TBM) and nonconventional machining whereas, surface microma-
chining, bulk micromachining and other high aspect ratio machining (e.g. LIGA)
pertain to a completely different process technology, commonly called MEMS
technology. However, micro wire-cut electrical discharge machining (Micro
WEDM) process is a variant of WEDM process and WEDM process is a variant of
EDM process. EDM has been a very important and versatile machining in its
applicability in the current manufacturing scenario. It has applications in diverse
major modes as in: (a) electrical discharge die sinking, (b) electrical discharge
drilling, (c) electrical discharge grinding, and (d) wire-cut EDM. Although the
traditional EDM processes are the most versatile, a few shortcomings of the process
are often observed with regard to the tool in applications. In EDM, both the job and
tool electrode erode up. While a part is to be produced with very fine tolerance, the
tool should have even finer tolerance, which sometimes is very difficult to achieve.
A tool electrode can produce only a limited number of parts, sometimes only 1 or 2
owing to the tool wear. For a definite shape, size and tolerance of a workpiece a set
of new tool electrodes are required and for new jobs these tool electrodes are of no
further use. Also, the consumption of labour and material in manufacturing the
electrodes are relatively high. All these problems related to tool are eliminated in
WEDM, since the tool electrode used here is a very thin disposable wire.
4.2 Working Principle
A WEDM process may be called as a Micro WEDM process only when it is used
for manufacturing micro parts, the rest underlying theory remaining same as of
WEDM. A scheme of the MWEDM setup is shown in Fig. 4.1. In WEDM, the
electrode is a continuously moving electrically conductive wire. The mechanism of
material removal in WEDM and MWEDM involves complex erosion effect by
rapid, repetitive and discrete spark discharges between the wire tool and the job
immersed in a liquid dielectric medium. A DC power supply is used to generate a
very high frequency pulses. The wire is unwounded from the feeding spool by a
drive unit moving at constant speed to pass through a tension mechanism and then
through the workpiece. The expended wire is either rewound on a take-up spool or
chopped off in small pieces to be collected in a bin. However, a fresh electrode wire
is continuously presented to the machining zone. The work is connected to the
positive terminal and the wire-tool is connected to the negative terminal of the
4 Advancements in Micro Wire-cut Electrical Discharge Machining 147
wire break
switch tension
+ clutch
wire electrode + Feeding
Current spool
pick up +
+
Upper
flushing
valve V-axis motor MONITOR
(-)
U-axis
Y-axis
nozzle motor
motor
upper
wire
Dielectric guide
flow line
Control
Panel
X-axis motor
(+)
workpiece
Wire feed motor
Lower wire
guide
Lower
flushing + Wire cutting
valve + + & collection
Current
pick up
Cut wire
Fig. 4.1 A basic scheme of the MWEDM setup
power source. A DC power source is used as fixed polarity is desired. In MWEDM

process, the electrical energy in the form of short duration electrical impulses is
required to be supplied to the machining gap. The pulse energy is maintained
commonly in the order of 0.1–10 lJ. Therefore, specially designed generators are
employed and also different types of electrical circuits are used to meet the above
requirement. Each of them has its own merits and demerits. When the circuit is
switched on, a suitable voltage is generated between tool and work surface. The
voltage goes on increasing and when a certain voltage (breakdown voltage) is
reached, a discharge takes place. As soon as an avalanche of electron reaches the
workpiece from tool, the voltage becomes almost zero between the tool and work,
and requires a certain time to generate that suitable voltage to cause another spark.
Also, at the end of one spark, the non-conducting medium (dielectric) helps to break
the contact between the tool and work allowing a gradual increase in voltage
between the terminals. The intense heat generated melts and vapourises the material
in the sparking zone. The metal in the form of liquid drops is dispersed into the
space surrounding the electrodes by the explosive pressure of the gaseous products
148 A.B. Puri
in the discharge. This results in the formation of a tiny crater at the point of
discharge in the workpiece. In MWEDM, the diameter of the crater may range from
submicron level to a few micron. Furthermore, the particles removed from the
electrodes due to the discharge fall in the liquid and cool down to form a colloidal
suspension of metal. The dielectric, thus, becomes contaminated.
4.2.1 Mechanism of Sparking and Material Removal
The mechanism of sparking and material removal in WEDM and MWEDM are
same. The spark gap between the electrodes at various points would vary due to the
asperities present at the surfaces of tool and work as well as due to wire-tool
vibration. When a suitable voltage is built up across the electrodes, a strong elec-
trostatic field is established causing cold emission of electrons from cathode to
anode at a point where least resistance is offered by the dielectric medium. These
electrons start accelerating to gain sufficient velocity with which they collide with
dielectric fluid molecules breaking them into electrons and positive ions. Electrons
so produced also accelerate and collide with dielectric molecules to dislodge more
and more electrons. Ultimately, an ionized column is established in the dielectric
across the gap. The conductivity of this ionized column is very high, so it connects
the tool and work, and an avalanche of electrons flow from cathode to anode. This
is seen as spark. As soon as this happens, the gap between the electrodes increases
at that spot and the next spark occurs at somewhere else where the spark gap is
minimum. Thus, the sparks move all over the electrode surface. As a consequence
of spark, the temperature generated is of the order of 8000–10,000 °C which melts
and evaporates the metal in the sparking zone, i.e., both in the surfaces of tool and
work. Also the dielectric fluid adjacent to the sparking zone evaporates and other
gaseous products may form. The products try to expand against the inertia of the
adjacent dielectric creating high compressive pressure wave. Shortly after, the
discharge column collapses and gaseous products cool down. Pressure starts falling
leading to cavitation (when pressure falls below its vapour pressure). So the sur-
rounding fluid rushes towards the sparking zone and occupies the space resulting in
a mechanical blast. This blast removes the molten metal from anode and cathode in
the shape of metallic globules. Thus, major portion of the molten metal is dispersed
into the dielectric fluid medium and forms a colloidal suspension. A small fraction
of molten metal adheres to the crater surface and resolidifies upon cooling to form
a thin white layer.
4.2.2 Work Material
Any electrically conductive material can be used as work material with a minimum
electrical conductivity of j = 0.01 S/cm (siemens/cm). Electrical conductivity (j)
is the reciprocal of electrical resistivity, q (i.e., j = 1/q). However, EDM is widely

used in machining of high strength and temperature resistive (HSTR) alloys, hard
carbides, hardened steels etc.
4.2.3 Dielectric Fluids
The most important requirements of a dielectric fluid are: (a) it should have high
dielectric strength, i.e. it should remain non-conductive until the breakdown voltage
is reached, (b) it should have high cooling ability, (c) it should deionise the spark
gap quickly and completely after the discharge takes place and (d) it should possess
low viscosity to assure good flow characteristics at room temperature. All these
qualities are generally found in hydrocarbon oils having a viscosity of 3–6 cSt at
20–22 °C. This is the reason why kerosene is most widely used dielectric medium
in die-sinking EDM process. However, a dielectric, usually, de-ionized water
(jw * 1 lS/cm), is continuously forced fed to the machining zone to flush away
the eroded particles from the machining zone in WEDM. De-ionized water is used
as the dielectric medium because it not only affords better flushing and cooling but
also creates an environment of low conductivity dielectric medium to provide a
larger spark gap compared to oil dielectric. The wire electrode under tension is
subjected to vibrations due to various forces (like, electrostatic, electrodynamic,
hydraulic etc.) during spark discharges. That is why a larger spark gap is required to
be maintained than that of traditional EDM process. It is worthy to mention that
water is not at all a suitable dielectric for traditional EDM as it causes rapid
electrode wear.
Although deionized water is normally used as the dielectric liquid in conventional
WEDM, dielectric oil (jw < 0.1 lS/cm) is more preferable than water as the
dielectric in micro-WEDM for several reasons. They are: (a) electrolysis corrosion of
workpiece does not occur in oil dielectric, (b) the discharge craters generated in oil
dielectric are smaller than those in water even under the same pulse conditions, and
(c) the permittivity of water is about 36 times higher than that of oil, i.e., the
capacitance of the working gap in water is about 36 times larger than that in oil [1].
This is one way of obtaining very low pulse energy content in the order of 0.1–10 lJ
for MWEDM. However, in addition to the above, the tool wear is less and deioni-
sation unit is not necessary when oil is used as dielectric.
4.2.4 Wire Electrode
In general, copper and brass are normally preferred as wire electrode material in
WEDM with diameters of the wire ranging from 100–300 lm. In MWEDM,
tungsten and molybdenum wire in the range of 20–100 lm are used as extremely
sharp corners and high precision are the major requirements of machining. Brass
150 A.B. Puri
Table 4.1 Comparison of the properties of tungsten and molybdenum [2]

Properties Tungsten, W Molybdenum, Mo
1 Thermal expansion 4.5 µm/(mK) (at 25 °C) 4.8 µm/(mK) (at 25 °C)
2 Thermal conductivity 173 W/(mK) 138 W/(mK)
3 Electrical resistivity 52.8 nXm (at 20 °C) 53.4 nXm (at 20 °C)
4 Young’s modulus 411 GPa 329 GPa
5 Shear modulus 161 GPa 126 GPa
6 Bulk modulus 310 GPa 230 GPa
7 Poisson ratio 0.28 0.31
8 Mohs hardness 7.5 5.5
9 Vickers hardness 3430–4600 MPa 1400–2740 MPa
10 Brinell hardness 2000–4000 MPa 1370–2500 MPa
wire and zinc coated brass wire are also used. The resistance to erosion and tensile
strength of tungsten and molybdenum are much higher than that of copper or brass
wire. Hence, a very high precision machining is achieved with the least possibility
of wire rupture. At the same time, tungsten and molybdenum wires are too costly.
A brief comparison of the properties of tungsten and molybdenum is given in
Table 4.1 [2]. It may be seen that tungsten is a few steps ahead of molybdenum so
far as wire material is concerned. That is why tungsten wire is used almost uni-
versally. However, for high precision machining a very low flushing pressure is
used as the wire vibrates during machining. Very often, the working gap is simply
kept immersed in dielectric medium (no flushing condition).
4.2.5 Wire Tool Failure and Its Prevention
Among other problems, wire rupture is perhaps the most serious problem in the
application of MWEDM. The wire EDM machine is used to run continuously
without operator. If the electrode wire breaks during the process, rethreading of the
wire is done causing the downtime of the machine. It has two drawbacks as follows:
(i) it increases the overall machining time of a part or product, and (ii) the
machining accuracy of the profile decreases, since a stripe (tool mark) is left on the
work surface very often. This is due to the fact that it is very difficult to reset the
wire at the same position where it ruptured. To make the matter worse, the wire
rupture phenomenon has a more or less stochastic behaviour. However, the causes
of wire rupture during machining may be listed as follows:
(a) Contact resistance (between the wire and the current pick-up): Current pick-up
is a conductive ceramic object through which the electrical power is supplied
into the wire. In this case, localized joule heating depending on the contact
resistance between the wire and the current pick-up(s), becomes intense upon
increasing working current or effective pulse frequency. Thus the surface of the
wire is soiled.
(b) Improper winding system of the wire.
(c) Improper wire feed.
(d) Improper wire tension adjustment.
(e) Short circuiting: When the work-table feed rate (feeding of workpiece) is more
than the cutting speed, the wire electrode may get physical contact with the
workpiece. A short circuit is said to occur in this case. A high current passes
through a very small segment of wire producing joule heating followed by wire
rupture.
(f) Improper pulse types and frequency: The basic reason of wire rupture under
this category may be called as thermal failure due to time and space concen-
tration of spark discharges. This renders the local heating of the wire more
severe and wire rupture becomes inevitable. The increase in pulse frequency
leads to the same phenomenon to occur. Occurrence of arc pulses is another
reason of wire rupture. Thus, the remedies to this type of wire rupture are:
(i) avoiding a high pulse frequency; and (ii) avoiding occurrence of increased
arc and other abnormal pulses. Wire rupture of the first type may be avoided by
increasing pulse off time and to achieve a fairly stable process. The wire rupture
of the second type may also be avoided by increasing pulse off time, and
employing a specially designed pulse discriminator system which eliminates or
suppresses the arc and other abnormal pulses by maintaining a suitable ignition
delay period (tl).
4.3 Micro WEDM Machine
In micro-WEDM, the key is to limit the energy in the discharge. Lower energy
results in low MRR, high accuracy and better surface finish. To generate small
energy pulses of the order of 0.1–10 lJ, a DC power supply system should be
properly designed as micro energy pulse generator. For better MRR discharge
frequency should be increased. This is ensured with the use of MOSFET.
A MOSFET (metal oxide semiconductor field effect transistor) is a device used for
amplifying or switching electronic signals. But, the biggest problem is posed by
‘stray capacitance’ prevailing in an R–C circuit. Any two adjacent conductors can
be considered as a capacitor. If the conductors are not close together for long, they
may also form a capacitor although the capacitance will be small. This (often
unwanted) effect is termed ‘stray capacitance’. Stray capacitance can allow signals
to leak between two isolated circuits (an effect called crosstalk), and it can be a
limiting factor for proper functioning of circuits at high frequency. The problem of
stray capacitance is tackled with the use of granite basement, piezo-electric
ceramics and other electrically nonconductive strong materials. Granite is quite
suitable for micro-WEDM machine equipment because it has good insulating
152 A.B. Puri
characteristics and has no inductance. Hence, it can be used for basement and work
table for its lower heat transmission coefficient. It is insensitive to temperature, and
good at absorbing vibration. Piezo-electric ceramics are good for making driving
parts. It has very high displacement sensitivity and high frequency response.
However, because of its limited stroke, researchers often make special mechanism
to increase its force and enlarge its stroke. Apart from the above, a good MWEDM
machine tool should have, (i) iso-energy and iso-frequency micro pulse generators
fitted with a suitable pulse discriminating system, (ii) a wire transport system
supplemented with a closed loop feedback control of precision wire tension
mechanism. However, designing and developing the micro pulse generator is the
task of an electrical engineer.
4.3.1 Taper Cutting System in MWEDM
While cutting a straight job, the upper guide remains stationary in u-v plane at u = 0
and v = 0 with respect to lower guide (Fig. 4.1). Actually, instead of movement of
both the upper and lower guides, the worktable carrying the job blank is moved
along the programmed path while the lower guide remains permanently stationary.
Thus, during straight cutting of jobs, the wire tool is kept exactly vertical to x-y and
u-v plane. In case of taper cutting, the upper wire guide is not kept stationary but
moves along u and v axes with respect to the lower guide at a predetermined pace
with the worktable movement. The lower guide is kept stationary as stated earlier.
Thus, the wire does not remain vertical, embracing the generation of motion of the
top slide in u and v axes. The angle so produced with the vertical axis, can be varied
at various points which can be controlled by the path programming. A desired taper
angle can be achieved by simultaneous control of the movement of the x-y table and
the u-v auxiliary table along their respective predetermined path as designed and
stored in the controller. However, taper cutting in WEDM system is performed very
cautiously and at a considerably low cutting speed as compared to straight cutting
due to following difficulties encountered: (i) achieving proper flushing is difficult as
the wire remains tilted and flushing direction is vertical (this renders the heating of
wire more severe causing the wire rupture due to the thermal load), and (ii) wide
fluctuation in wire tension.
4.3.2 Trim Cutting Features in MWEDM
The trim cut (also called skim cut) is an operation where the wire electrode traces
back the same path after the first cut is over (Fig. 4.2). Obviously, this is used for
machining of job profile in multi-pass cuts. Multi-pass cutting of jobs is usually
done in two or three cuts depending on the specific requirement. While trim cutting,
very low energy pulses are applied to obtain a very less amount of material
Fig. 4.2 Trim cutting in

MWEDM
removal. Generally, high pressure flushing is avoided in case of trim cut to obtain
better accuracy. However, the objective of using trim cuts may be listed as follows:
(i) to achieve better job accuracy; (ii) to achieve improved surface finish; (iii) to
reduce inaccuracies produced by minor job deformations after the first cut due to
residual stresses in the job material; (iv) to reduce the bow effect (or cambering
effect) on the cut job surface produced in the first cut due to wire vibration or
adverse flushing conditions; (v) to improve the life of the job by reducing thermally
affected layer formed on the machined surface in the first cut or previous cut.
4.3.3 Micro WEDM Process Parameters
A few important process parameters with their operating ranges in MWEDM is

shown in Table 4.2.
4.4 Micro WEDM Circuits and Operating Principles
In the MWEDM process, electrical energy in the form of short duration impulses is
required to be supplied in the machining gap. For this purpose several electrical
circuits or even specially designed generators are employed. The circuits are
154 A.B. Puri
Table 4.2 Process parameters with their operating ranges in MWEDM

Parameters Type/value
1. Wire tool material W, Mo (less common)
2. Wire diameter 20–100 lm
3. Wire speed 20–50 mm/min
4. Wire tension 300–600 g
5. Dielectric Kerosene (hydrocarbon oil)
Deionised water (less common)
6. Servo reference voltage 80–120 V
7. Open voltage, (VO) 100–120 V
8. Peak current, (IP) a few mA to 1 A
9. Pulse duration, (TON) 0.1–64 ls
10. Pulse off-time, (TOFF) 0.1–64 ls
distinguished according the way in which the voltage is built up and the pulse is
controlled and also the characteristics of discharge. However, in almost all such
circuits a capacitor is used for storing the electric charge before the discharge takes
place across the gap. Different circuits are used for different machining conditions
and requirements. The commonly used systems are:
i. R–C relaxation circuit with a constant D.C. source or Relaxation generator.
ii. High frequency electronic circuit.
However, irrespective of the circuits, the pulse energy may be determined as,
Zt2
Wp ðor EP Þ ¼ I(t)V(t)dt
t1
4.4.1 R–C Relaxation Circuit
In micro-WEDM, a relaxation type of power supply may be used. This is because

of the following advantages of the relaxation circuit. The power supply is simple,
rugged and competitive for small energy for micromachining. The discharge energy
(Ep) generated in the discharge circuit can be expressed as: EP = ½ (C + C′) Vb 2 ,
where, C is the capacitance of the capacitor and C′ is the total stray capacitance in
the circuit. Vo, Vb, C and C′ can be made very small. Although elimination of C′ is
quite a difficult task, the machine tool and power generator in MWEDM are
designed in order to eliminate stray capacitance from the system. This is of utmost
importance to achieve both stability and less discharge energy simultaneously.
Fig. 4.3 A basic scheme of

an R-C circuit
However, R–C relaxation circuit is the simplest type and it can produce sparks over
a wide range of frequency (although not in higher range). It is shown in Fig. 4.3.
4.4.1.1 Current in the Charging Circuit
When the circuit is switched on, there will be a current in the charging loop while
there is no current in the discharge loop and the capacitor charges itself through the
resistance Rc. The voltage across the capacitor goes on increasing. At a voltage
V = Vb, the spark occurs discharging the capacitor completely (theoretically). After
the spark, the dielectric deionises, the capacitor starts itself recharging and the cycle
repeats. The time taken to recharge the capacitor to the breakdown voltage (Vb)
must be sufficient to allow the dielectric to deionise completely.
Let, in the charging loop, the current at any instant is Ic (i.e., instantaneous
current), V0 is the supply voltage, Vc is the voltage across the capacitor at any
instant, Rc is resistance, C is the capacitance of the capacitor and t = time elapsed
after switching on the circuit. The instantaneous current in the charging loop will
be,
V0 Vc d(V0 Vc ) dVc
Ic = = C =C
Rc dt dt
ð4:1Þ
dVc 1
) = dt
V0 Vc Rc C
Using boundary conditions: (i) at t = 0, Vc = 0 and (ii) at t = tc, Vc = Vb,

(tc = charging time of the capacitor or pulse off time, and Vb = breakdown voltage)
and solving
the differential
Eq.
(4.1), the Vc and Vb may be obtained as,
Rct C
, and Vb ¼ V0 1 eRc C :
tc
Vc ¼ V0 1 e
t
Thus, Ic ¼ V0RVc ¼ V0 Re c ; 0 t tc
R C
c c
Therefore, the charging voltage across capacitor increases exponentially while
the charging current decreases exponentially.
156 A.B. Puri
4.4.1.2 Current in the Discharging Circuit
Let, in the discharge loop, Id is the current at any instant (i.e., instantaneous cur-
rent), Vd is instantaneous voltage, R is the resistance. The total resistance in the
discharge circuit R may be considered to be comprised of the line resistance (RL)
and the spark resistance or machine resistance (RS). As, RS RL, R RS. Thus,
Vd dVd Vd
Id ¼ ¼ C ¼
R dt Rs
ð4:2Þ
dVd 1
) ¼ dt
Vd RS C
Putting the boundary conditions: At t = 0, Vd = Vb and at, t = td, Vd = Ve, (td is

discharging time of the capacitor or pulse on time, and Ve is the residual voltage
across capacitor at the end of the discharge) and solving the differential Eq. (4.2),
the Vd and Ve may be obtained as,
t
R t C R dC
Vd ¼ Vb e S ; and Ve ¼ Vb e S
t
Thus, Id ¼ V V b e RS C
Rs ¼ Rs ; 0 t td
d
Therefore, in the discharging circuit, the voltage will fall exponentially while the
capacitor discharges itself and the discharging current will also exponentially decay,
i.e., theoretically, the time taken for the current to be zero is very large. The
theoretical voltage and current waveforms are shown in Fig. 4.4. However, the
actual voltage and current waveforms reveal that there exists a negative voltage
during the later part of the discharge. Also, the profile of the discharge voltage
indicates definite existence of an inductive load in the discharging circuit. Hence,
Fig. 4.4 Voltage and current

waveforms (theoretical) in an
R-C circuit
neither purely resistive nor purely inductive is the discharging circuit, it behaves as
an R-L-C circuit.
4.4.1.3 R-L-C Discharging Circuit
Actually, Id ¼ VR d e
¼ C dVdt
d
Where, ‘e’ is the back emf generated in the discharging circuit due to inductance
and R = RL + RS. Importantly, when, e > Vd at the later part of the discharge (tail
end), Id becomes negative.
However, e ¼ L dI d
¼ LC d2 V d
dt dt2
Thus,
dVd
Vd e ¼ RC ;
dt
dV2 dVd
) LC 2d þ RC þ Vd ¼ 0 ð4:3Þ
dt dt
dV2 R dVd 1
) 2d þ þ Vd ¼ 0
dt L dt LC
The discharge voltage will be governed by the Eq. (4.3), which is a case of
damped oscillation. For purely inductive circuit (i.e., R = 0), the governing equation
2
for ‘Vd’ becomes, d V2 d þ LC 1
Vd ¼ 0. This is a case of simple harmonic fluctuation
dt pffiffiffiffiffiffiffiffiffiffiffi
of voltage with a time period 1=LC . Naturally, there will be more number of
reversal of sparks leading to high tool wear. Hence, this oscillation has to be damped
effectively by introducing a suitable R. The total resistance in the discharge circuit R
may be considered to be comprised of the line resistance (RL) and the spark resis-
tance (RS). RS is very large, almost constant and uncontrollable [3]. Hence, RL has to
be adjusted suitably.
4.4.1.4 Frequency and MRR in R-C Circuit
The pulse energy in an R-C relaxation circuit may be obtained as, Wp = ½ CV2b J,
C = capacitance, F; V
b = breakdown
voltage, V.
V
Thus, tc ¼ Rc C ln V V ; and, td ¼ Rs C ln V
0 b
0 b Ve
The frequency of operation, m ¼ T1 ¼ tc þ1 td .
So, MRR ¼ K m Wp ¼ 1=2 Km CVb 2 ; K is a constant of proportionality
which depends grossly upon dielectric, type of flushing, work material properties. It
may be calibrated for a certain experimental condition.
158 A.B. Puri
4.4.2 High Frequency Electronic Circuit
A pulse generator for micro WEDM provides iso-energy and iso-frequency pulses
with low discharge energy and may be considered as ‘heart’ of the system. The
ideal voltage and current waveforms have been shown in Fig. 4.5, where VP is
pulse peak voltage or open circuit voltage, Vm is average working voltage, Vd is
discharge voltage, tl is ignition delay time, IP is pulse peak current, td is pulse
discharge time, TON is pulse on time; TOFF is pulse off time. Yan and Chien [4]
have developed a transistor-controlled elementary power supply which minimizes
the single discharge energy and also provides high frequency pulses (Fig. 4.6). The
circuit is composed of a discharge circuit and a snubber circuit driven by MOSFET
M1 and control MOSFET M2, respectively. Figure 4.7 illustrates the timing chart of
the pulse control signals and associated pulse trains of MWEDM pulse generator.
P1 and P2 are the pulse control signals of the MOSFET M1 and M2, respectively.
When the MOSFET M1 is turned on, the discharge circuit leads the gap to discharge
by supplying a DC voltage of 110 V. After each discharge, the excessive discharge
Fig. 4.5 Ideal voltage and

current waveforms in a high
frequency electronic circuit
Fig. 4.6 Micro-WEDM power supply circuit with MOSFET [4]

Fig. 4.7 Timing chart of the

pulse control signal and
associated pulse trains [4]
energy, if any, stored into the inductive part of the discharging path is directed to
the resistor R2 through the control MOSFET M2. If the excessive energy remains in
the discharging circuit and is not drained out in due time, it would result in
instability of the discharging process.
4.5 Pulse Types and Pulse Discrimination
Like EDM, in Micro WEDM also, pulses are classified into four major types,
namely: open, normal, arc and short pulses (Fig. 4.8). The basis of this classifi-
cation is the time evolution of the gap voltage and gap current. In open pulses (also
called open circuit pulses), the discharge between the wire-tool and the work piece
does not take place. Hence, the energy is continuously accumulated in the elec-
trodes for a discharge to take place. A normal pulse is an effective and the most
desirable when it has a suitable ignition delay time (tl). Ignition delay-free dis-
charges are called arc pulses and in ‘off’ pulses, neither gap voltage nor gap current
is detected. A short circuit occurs when metal contact between the work piece and
the wire electrode takes place. The occurrence of arc discharges is due to poor
flushing, gap contamination and short ionization, which depend on the instanta-
neous concentration of the slag in the spark gap. Also, when the pulse interval of
each spark is not sufficient to flush away the spark debris and allow re-ionization of
the dielectric, the arc discharges and short circuits occur.
The time between the application of the voltage between electrode and work-
piece, and the start of ignition is termed as ignition delay time (tl). It is a parameter
of the WEDM process having correlation with the physical circumstances in the
gap. It is inversely proportional with the electrical field strength at the spot of spark
discharge. This is the reason why the average delay time is considered as an
evaluation parameter for on-line process information required for adaptive control
160 A.B. Puri
Fig. 4.8 Voltage and current

waveforms of the four basic
MWEDM gap states [4]
system in WEDM. The breakdown field strength as material constant, influences the
delay time and a lower value of the breakdown field strength of the dielectric fluid
causes a decrease of the delay time. Also, an increase in the contamination of the
dielectric with the uncharged gap width results in a lower value of the delay time. It
is worth mentioning here that none of these circumstances are constant not even for
a stable process and a great variation of the delay time occurs for every individual
pulses. However, results of various investigators have shown that generally a
decreasing average ignition delay time is attended by an increased relative electrode
wear and a decreased average MRR. This phenomenon had led to the idea that
pulses preceded by a very short ignition delay time are not good and ineffective.
But, at the same time it has also been experimentally verified that the elimination of
pulses with very short ignition delay does not yield any improvement in machining
performances as expected in connection with the above mention ideas [5].
However, a micro pulse generator in MWEDM should be able to generate
iso-frequency and iso-energy pulses and must have a suitable pulse discriminating
system incorporating the control strategy for regulating the pulse interval in
real-time according to the identified gap states to avoid the occurrence of arc
discharges and short circuits.
4.6 Wire Vibration in Micro WEDM
The wire vibration phenomenon is extremely complicated in nature. This is because

the magnitudes and directions of various forces acting along or upon the wire are
not always constant as the occurrence of sparks is highly stochastic in nature. The
stochastic nature of the wire-cut electrical discharge machining (WEDM) process is
also attributed to a combination of factors including fluctuation in voltage and
current, decomposition and distribution of dielectric, random ionic migration,
interaction of two successive discharges and presence of debris particles in

machining zone. Not only that, several of the above-mentioned factors vary
markedly with time and space in the discharging zone [6]. The main forces acting
along or upon the wire are forces from the gas bubbles formed by the plasma of the
erosion mechanism, hydraulic forces due to flushing, electrostatic force and elec-
trodynamic force.
All these above-mentioned forces along with the axial tensile force (F) applied to
the wire set the wire to vibrate when discrete sparks are generated between the
electrodes. Therefore, vibration of a stretched wire supported by the two wire
guides at opposite ends satisfying the standard vibration theories of vibrating
strings may be mathematically modelled with the following assumptions [7, 8]:
(i) The wire mass is uniformly spread along its length; (ii) The axial tension remains
constant between the wire guides; (iii) The wire is static (not moving); (iv) The wire
is perfectly flexible; and (v) The disturbing forces acting per unit length of the wire
perpendicular to the axial force, varies as a function of time and space. A scheme of
the wire vibration during cutting is shown in Fig. 4.9 [9].
Therefore, the general partial differential equation of motion (Newton’s second
law of motion) for a stretched vibrating string of length ‘L’ in a plane (along Z-axis)
may be expressed [10] as follows:
Fig. 4.9 Wire vibration

during cutting [9]
162 A.B. Puri
@2y @4y @2y @y

F EI ¼ q þb þ qðz; tÞ ð4:4Þ
@z 2 @z 4 0
@t 2 @t
where, F is wire tension (N), y is wire deflection (m), t is time (s), q0 is q.s (kg/m),
q = wire mass density, kg/m3, s = wire cross section (m2), b = specific damping
co-efficient (N-s/m2), E = young’s modulus, N/m2, I = area moment of inertia,
(pd4/64), d = wire diameter (m), q (z, t) = specific external load or body force per
unit length of the wire, N/m. The term F @@z2y indicates the force due to bending
2
deformation because of the applied axial tension F. The term EI @@z4y represents the
4
force required for transverse bending against flexural rigidity of the string. As the
wire is perfectly flexible, as has been assumed, this term is negligibly small.
The terms q0 @@t2y and b @y
2
@t represent the acceleration force (Newton’s 2nd law of

motion) and damping force respectively.
It may be assumed that the workpiece is kept at the mid position of the
wire-span. The wire has the length ‘L’ between the two wire guides. It is displaced
laterally through a distance over the workpiece height ‘H’ upon action of the body
force q (z, t) as shown in Fig. 4.10 [9]. The body force being the predominant one,
pushes the wire away from the workpiece during collapsing of discharges and the
Fig. 4.10 Action of the body

force before the wire is set to
vibration [9]
wire deviates through a distance a0 from its ideal initial stretched condition over the
workpiece height theoretically and the same is released at t = 0.
From the geometry of the wire shape, the displacement function y (z, t) may be
determined by the following initial conditions (IC):
2a0 z L H
IC: y(z,0) ¼ f(z) ¼ ; when, 0 z
LH 2
LH LþH
¼ a0 ; when, z
2 2
2a0 ðL z) LþH
¼ ; when, zL
LH 2
However, Eq. (4.4) may also be rewritten as:
@2y 2@ y
2
@y
¼ c K Q ð4:5Þ
@t2 @z2 @t
With: c2 ¼ qF ; K ¼ qb and Q ¼ qq ; q ¼ qðz; tÞ:

0 0 0
It is understood that the amplitude of vibration will go on increasing with the
increase of Q and decrease of wire tension. However, as the wire tension remains
unchanged during a machining process, the displacement function ‘y’ may be
expressed as, Q = ay. ‘a’ is the constant of proportionality. Although it may appear
apparently that this is overly simplified, the complexity lies in determining ‘a’.
Therefore, Eq. (4.5) is simplified as a linear homogeneous equation as stated below
[9]:
@2y @2y @y
¼ c2 2 K ay ð4:6Þ
@t 2 @z @t
The above equation is solved by the method of separation of variables with the
following initial and boundary conditions (IC and BC):
@y
IC : y ðz; 0Þ ¼ f ðzÞ; and; ðz; 0Þ ¼ 0
@t
BC : yð0; tÞ ¼ 0; and; yðL; tÞ ¼ 0
Thus, displacement function y = y (z, t), may be determined as,
X
1 np
2qbt
yðz; tÞ ¼ e 0 fAn cosðxn tÞ þ Bn sinðxn tÞg sin z ð4:7Þ
n¼1
L
np np
With: An ¼ n2 p8a 0L
2 ðLHÞ sin 2 cos 2 HL , Bn ¼ An 2qb x1n , and
0
164 A.B. Puri
sffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffi
2 2
1 4n p F b2
xn ¼ 2 þ 4a
2 q0 L2 q0
‘xn’ is the natural angular (circular) frequency of the wire vibration.

Therefore, An = 0, for n = 2, 4, 6…, i.e., for even harmonics and for odd har-
monics, i.e., (n = 1, 3, 5…), An possesses different values. Thus, An may be cal-
culated for known values of L, H and a0. ‘a0’ may be determined for a particular
machining setup experimentally. Once An is known, Bn may be calculated if b, q0
and xn are known. ‘xn’ may be calculated when values of F and a are known. The
values of ‘a’ may be determined by the calibration.
So, finally, the exact equation of motion may be determined as given by the
bt
Eq. (4.7). The term e 2q0 indicates that the vibration will decay exponentially with
pffiffiffiffiffiffiffiffiffiffiffiffiffiffiffi
time. An cosðxn tÞ þ Bn sinðxn tÞ may also be expressed as A2n þ B2n sinðxn t þ hÞ,
pffiffiffiffiffiffiffiffiffiffiffiffiffiffiffi
where h ¼ tan1 ABnn . The maximum amplitude of vibration is A2n þ B2n and the
angular or circular frequency will be xn. x1, x2, x3… are the natural frequencies
for n = 1, 2, 3… respectively. The fundamental frequency of the vibration will be
xn
2p c/s, for n = 1.
Di et al. [11] have measured the amplitude of wire vibration during MWEDM
process using an indirect but accurate method. They measured the kerf width by
confocal laser scanning microscopy. The vibration amplitudes were determined
using known values of wire diameter, spark gap and the measured value of the kerf
width for a particular experimental condition. The experiments were carried out on
the self-developed micro-WEDM machine which mainly included an
transistor-controlled R-C pulse generator, constant tension winding system using
30 lm tungsten wire, kerosene fluid circulation system, a gap detection system and
a precise servomechanism with piezoelectric ceramics motions. In experiment, the
workpiece was a 0.5 mm thick stainless steel plate, and there was 2 mm distance
from workpiece to both wire guides. The experimental condition is given in
Table 4.3 (condition no. I) and the corresponding vibration amplitude plot is pre-
sented in Fig. 4.11. Thus, it is seen that in a normal situation, the vibration
amplitude may lie between 3 and 5 lm.
Table 4.3 Experimental condition for MWEDM [11]

Process parameters Experimental Condition
I II
Open voltage (V) 30–120 110
Discharge capacitor (pF) 400 300, 770, 1300, 1800, 2270
Charge resistance (kX) 1 3, 1, 0.6, 0.5, 0.33
Feeding speed (lm/min) 50 50
Reference voltage (V) 18–90 90
Wire tension (N) 1 1
Fig. 4.11 Plot of vibration

amplitude versus open voltage
in MWEDM [11]
4.7 Wire Lag in Micro WEDM
The static deflection of a stretched wire supported by the two wire guides at
opposite ends, is defined as wire lag in WEDM and is shown in Fig. 4.12. Thus, the
wire bending or the static deflection (y) of the stretched wire of length ‘l’ in a plane
(along z-axis) may be expressed as [12]:
@2y
F ¼ q0 ð4:8Þ
@z2
where, F = wire tension (N), y = y(z) = wire deflection (m), q0 = specific external
load or body force per unit length of the wire (N/m),
The solution of the Eq. (4.8) will appear as follows:
q0
y¼ zðl zÞ
2F
This is an equation of a parabola which indicates that the shape of the wire
within the work piece will be parabolic during machining operation.
2
Also, ymax ¼ 2F
q0
Hðh þ HÞ q8F
0h
¼ y1 þ y2
2
where, y1 ¼ 2F
q0
Hðh þ HÞ, and y2 ¼ q8F
0h
On the other hand, the solution of equation F @@z2y ¼ q0 outside the work piece and
2
within the wire span between the guides (q0 = 0) will appear as,
q0
y¼ ðh þ HÞ z
2F
This equation describes a straight line, i.e., the wire outside the work piece will
be straight up to the guide during machining. However, as the ‘y’ appears to be
negative, it ascertains that the static deflection or wire lagging occurs in the opposite
166 A.B. Puri
Fig. 4.12 Illustration of wire

lag phenomenon during
WEDM operation [12]
Fig. 4.13 Illustration of the

effect of wire lag on the
work-piece contour in
WEDM
direction of cutting. The geometrical error resulting out of this wire lag should affect
any contour cutting as depicted in Fig. 4.13, which clarifies that the magnitude of
wire lag (y) is equal to the maximum deviation of the traced path from the defined
path of the wire-tool in WEDM. However, as the pulse energy is very less in
MWEDM, the lag effect is less pronounced with appropriate machining conditions
and magnitude of wire lag may be made significantly less as would be seen later in
Sect. 4.8.
4.7.1 Equation of the Traced Path of the Wire for Right

Angle Corner Cutting
The lag effect in a WEDM rough cutting process affects the generation of contour of
a product or part directly. This has been further illustrated in Fig. 4.14 where
generation of a 90° corner is exhibited. The programmed path is A-o-A2. The guide
position would be at ‘o’ at the extreme corner and the ideal position of the wire
along with the surrounding spark gap would be the dotted circle with its center at
‘o’. But, due to the wire lag, the actual position of the wire will be the circle C with
center at c where oc is the wire lag (=y). Thus, while the guides trace the path o-A2,
the center of the wire traces the path c-c1-c2-cn-A2. This phenomenon directly
affects the generation of the job profile. In Fig. 4.14, the dotted circles (O and On,
O1 and O2 are not shown in the figure to avoid clumsiness) are the ideal positions of
the wire in the programmed path and circles C, C1, C2 and Cn (with their centres at
c, c1, c2 and cn respectively) are actual positions of the wire on the traced path. It is
assumed that the constant body force acts on the wire always in the reverse
direction of cutting, then the distances oc, o1c1, o2c2, and oncn are equal and
constant. Further, if a circle is imagined with radius oc with its center at ‘o’, which
moves along a path oA2 and the circle rolls over the line cA3 (Fig. 4.15), befitting to
the exact situation described above, then the path c-c1-c2-cn will be a cycloid. The
situation may be compared with a heavy ball tied up with a rope. The free end of the
rope is at ‘o’ and is moving on the line oA2 while the center of the ball is at ‘c’. Let,
the point C is the origin (0, 0) and the straight line CFD is X-axis as shown in
_
Fig. 4.16. While rolling at an instant, say, CD ¼ C1 D ¼ rh, where, r = radius of the
circle, and h = \C1 O1 D.
Let, the coordinate of C1 is (x, y). C1E is perpendicular on O1D and C1F is
perpendicular on CD. Hence,
Fig. 4.14 Illustration of the

movements of centres of
guides and wire during
machining
168 A.B. Puri
Fig. 4.15 Illustration for the

locus of the center of the wire
as cycloid
Fig. 4.16 Determining the

equation from analytical
geometry
x ¼ CF ¼ CDFD ¼ rðhsinhÞ ð4:9Þ
And; y ¼ C1 F ¼ O1 DO1 E ¼ r ð1coshÞ ð4:10Þ
Thus, if the circle starts to roll from the origin on X-axis (base line), then the
parametric equation of the locus of its center may be described as above. The
greatest distance from the base (vertex) will be obtained for h = p/2. Thus, for the
vertex;
x ¼ r ðh sinhÞ ¼ rðp=2 1Þ and y ¼ r ð1coshÞ ¼ r:
It is worth to mention here that when the corner angle will be lesser or higher
than 90°, the wire will trace only a part of a full cycloid whose vertex will depend
on the corner angle.
4.8 The Kerf Produced in Micro WEDM
A micro part can be machined with good dimensional accuracy and surface finish
only when the kerf (slot) width and corner radius become considerably smaller
compared to that obtainable in conventional WEDM. Truly speaking, the cutting
tool in WEDM/MWEDM is not the wire, but it is the pulse (electrical discharge).
In MWEDM, both the workpiece and the wire are eroded although the erosion of
Fig. 4.17 Kerf produced by

the wire in MWEDM
the wire does not affect the accuracy as the wire passes through the work only once.
The size of the kerf is always more than the diameter of the wire used. This is due to
the presence of side sparks as shown in Fig. 4.17. The width of the cut (b) depends
on the wire diameter (d), the spark gap (g) and the amplitude of vibration (a). Thus,
width of cut; b ¼ d þ 2g þ 2a ð4:11Þ
The spark gap is controlled by setting servo reference voltage while the
amplitude of vibration mainly depends on pulse energy, pulse on time, pulse fre-
quency, type of pulse, wire tension and distance between the wire guides. Naturally,
a low pulse energy, normal pulse with suitable ignition delay time, minimum
distance between wire guides and a very low flushing pressure are absolutely
necessary for obtaining a minimum kerf width in a particular micromachining
setup. Di et al. [11] have obtained a kerf width as low as 30.8 lm and a corner
radius 15.8 lm using a 30 lm wire tool diameter in their self-developed MWEDM
system. This is shown in Fig. 4.18. Figure 4.19 shows the variation of kerf width
with discharge energy obtained by varying the capacitances as obtained with
experimental condition (II) shown in Table 4.3.
4.9 Wire Transportation System in MWEDM
Wire tension plays the major role in minimising process inaccuracy. The minimum
kerf width and corner radius are governed by two process phenomena, namely
wire-tool vibration and the wire lag. Both the amplitude of vibration and the
(magnitude of) wire lag vary inversely with the wire tension. Thus, the tension in
the wire should be as maximum as it could bear. On the other hand, the wire tension
is set during machining depending on the feed velocity of the wire and the thermal
170 A.B. Puri
Fig. 4.18 A minimum kerf width and corner radius with 30 lm diameter tungsten wire [11]
Fig. 4.19 Kerf width versus

pulse energy (capacitance) in
MWEDM [11]
load on the wire which is basically governed by pulse on time, pulse types and
pulse frequency. Thus, the tension of the micro wire may require to be changed
during machining as and when necessary. Hence, the wire transportation system in
WEDM/MWEDM should be a precise closed loop controlled system necessarily.
The wire transportation system in micro WEDM has the general layout as shown
in Fig. 4.20, which is widely used for keeping the wire tension at a constant level
[13, 14]. It consists of a wire electrode supply spool, a wire feed control apparatus
and a wire tension control apparatus. The feeding wire is directly coupled to a pair
of feeding rollers, which determine the feeding velocity of the wire electrode. While
the wire electrode is pulled out from the wire spool, it passes through another pair
of tension control rollers driven by an electromagnetic brake gear causing a braking
force on the wire.
Fig. 4.20 The wire transportation system in MWEDM [14]
Closed-loop wire tension control system has been developed by many

researchers [13–15] for the purpose of reducing wire vibration and wire lag. Han
et al. [14] devised an optimal tension control of micro wire electrode based on
thermo-mechanical analysis and strategically with the aid of a swinging roll
between the feed rollers and the tension control rollers. In their experiment, a
rectangular slot was cut in the workpiece and the finished workpiece was split into
two parts by the middle section. The corner shapes on both the end surface and the
middle surface were analysed. The wire lag reflected as the machining error in
corner cutting has been represented by the corner radius on the end surface as ‘re’
and on the middle surface as ‘rm’, respectively. The experimental condition was:
pulse on time—3 ls, pulse off time—15 ls, wire feed speed—2 mm/min, work-
piece material—2A12 aluminium alloy, wire material—tungsten (u 100 lm), and
wire tension—0.4 N. In rough cutting re and rm were found to be 0.103 and
0.120 mm respectively while in the finish cutting they were reduced to 0.058
and 0.071 mm. This is shown in Fig. 4.21.
Yan et al. [15] developed a wire transport system by installing a fuzzy logic
controller and used it in their developed prototype MWEDM setup. The overall
block diagram of the fuzzy logic controller (FLC) for the wire transport system is
shown in Fig. 4.22. In this controller, the measured wire tension (y) is compared
with the reference wire tension (r) from which the wire tension error (e) and the
change in wire tension error (ce) are obtained. These two signals, e and ce are then
sent to the fuzzy logic controller for generating the control voltage of the brake
motor. The fuzzy logic controller provided smooth wire transport with a constant
wire tension value.
172 A.B. Puri
Fig. 4.21 Corner cutting error a corner shape at end surface (re) and b corner shape at middle
surface (rm) [14]
Fig. 4.22 A fuzzy logic controller for the wire transport system [15]
4.10 Process Performances in MWEDM
4.10.1 White Layer
A multi-layered heat affected zone is formed at the machined surface of the work-
piece while machining it with WEDM. The upper recast layer of this zone is called
‘white layer’. The workpiece material which gets melted is not completely expelled
during the process. The residual material resolidifies on the machined surface to
form a hard skin on the workpiece. In MWEDM, the formation of white layer can not
be eliminated but can be minimised. The sub-surface characteristics occur in various
layers or zones, which are usually termed as altered material zones (AMZ).
Fig. 4.23 White layer in

Micro WEDM [16]
These alterations caused by the thermal energy of spark discharges are generally in
the forms of micro-cracks, spalling, increase in hardness, residual stresses, metal-
lurgical transformations and, of course, heat affected zone (HAZ). Thermal spalling
is a mechanical failure of the material by overcoming the bond strength of the
material due to the generated internal stresses without being melted. The thickness of
white layer depends on pulse on time, frequency, pulse energy and the properties of
work material. The scanning electron microscope (SEM) photograph in Fig. 4.23
shows the white layer has been reduced to as less as 2 lm for a 1 mm thick stainless
steel sheet [16]. The micro hardness of the surface white layer (recast layer) is three
to four times higher than the base material in Micro-WEDM. This is basically due to
an increase in amount of cementite dendrites that result from absorption of carbon
originating from the pyrolysis of the hydrocarbon oil dielectric. This energy dis-
persive spectroscopy (EDS) study of the white layer suggests that some amount
(*2.28%) of wire material (i.e., tungsten) get deposited on the workpiece surface.
However, instead of having detrimental effect, the existence of W element in micro
die surface improves quality of the micro part by increasing wear and corrosion
resistance.
174 A.B. Puri
Fig. 4.24 AFM image of a

surface topography in
MWEDM [16]
4.10.2 Surface Roughness and Machining Accuracy
It is a well known fact that the surface finish obtainable is not good for a spark
eroded surface in EDM. For EDM process the CLA values (Ra) of surface
roughness varies between 1 and 3.5 lm whereas in conventinal WEDM it varies
between 0.8 and 2 lm. However, in a carefully cut specimen, the same may be
obtained as minimum as 0.1 lm in MWEDM [5]. Hence, micro parts with such an
excellent finish may quite suit for fabrication of miniature products and devices.
The machining accuracy (tolerance) of micro WEDM can be limited in a
range ±0.2 lm with a worktable’s position accuracy ±0.1 lm. Figure 4.24 shows
an AFM image (atomic force microscopy) of topography of a surface obtained in
micro WEDM [16]. The surface roughness (Ra) obtained by AFM is *0.1 lm
for a 1 mm thick stainless steel sheet machined appropriately by Micro WEDM.
4.10.3 Assisted Vibration in MWEDM
One effective way of improving the flushing condition in EDM has been using
vibration-assisted tool, which is called vibration-assisted EDM. Applications of
ultrasonic vibration to WEDM had been studied by many researchers [17–19]. With
ultrasonic vibration applied to the wire, the MRR is found to increase by 30%. The
surface roughness and the surface residual stress are also improved. By studying the
mechanism of the system, it is proved that the improvement of surface finish and
material removal rate attribute to the formation of multi-channel discharges and the
increased energy utilization ratio [17, 18]. Hoang and Yang [20] developed a
vibration assisted method for micro-WEDM systems wherein vibration of both the
wire and workpiece were considered. Effects of imparted vibration on machining
Fig. 4.25 Mechanism of improved flushing with the vibration of workpiece
characteristics are analyzed with various vibration parameters and workpiece

thickness.
In WEDM/MWEDM, when the workpiece is vibrated, it is displaced in a
periodic motion. Thus, in one half of the cycle it is very close to the wire as
indicated in Fig. 4.25a, and in another half of the cycle it is far away from the wire
as indicated in Fig. 4.25b. In position (a), the discharge process will take place and
the gap will be filled with molten debris particles. The very next moment, i.e., in the
second half of the cycle, the workpiece is pulled back causing suction of fresh
dielectric in the gap due to high pressure variation as in position (b). In the first half
of the next cycle, when the workpiece again come closer to the wire, the debris
(melted materials) is flushed away from the machining zone under high pressure.
This is shown in Fig. 4.25c.
It has been observed that MRR increases when vibration frequency increases in
MWEDM. Moreover, vibration on the workpiece provides more improvement than
vibration on the wire. When vibration is applied on the workpiece, the maximum
recorded cutting speed is about 2.5 times faster than without vibration. When
vibration is applied on the wire electrode the improvement is approximately 1.7
times [20]. This is because the pressure variation created by the wire is much
smaller than created by the workpiece. This implies that, the dielectric circulation
and the flushing of debris are less effective when vibration is applied to the wire
than when vibration is applied to the workpiece. The workpiece thickness is also
found to play a role in MRR improvement in MWEDM. In case of thicker work-
piece, the flushing of the debris is more difficult, hence a higher improvement of
MRR can be observed.
Surface roughness is also significantly improved with both vibration methods
[20]. It is understood that when the vibration is applied to the wire electrode, the
wire will vibrate in forced vibration mode and will generate nodes and antinodes.
Since the displacements of the wire at the position of the nodes and antinodes are
different along the length of the wire, surface roughness is varied greatly over the
machined surface. Therefore it is difficult to obtain the desired surface quality for
the case in which the vibration is applied to the wire. On the other hand, the desired
surface finish can be obtained more easily with vibration applied to the workpiece.
176 A.B. Puri
Fig. 4.26 SEM photographs of various micro parts machined by MWEDM and used in micro
fabrication [16]
4.11 Applicability of Micro WEDM
Apart from making micro grooves, micro channels and micro beams, micro
WEDM is successfully used to manufacture shaped micro holes, micro bearing
brackets, micro gears and micro-gear dies with improved software technology
supplemented with suitable NC interpolation functions and programming.
The SEM photographs of a few machine components are shown in Fig. 4.26 [16].
The shaped holes are made on stainless steel sheet with thickness 1 mm. These
holes are widely used for spinneret orifice in textile industries and in fabrication of
micro dies. The micro bearing bracket is made on SS sheet of thickness 2.5 mm.
These brackets are used in MEMS (micro electro mechanical system) for housing
bearings. The micro gears are machined in stainless SS sheet of thickness 1 mm
Table 4.4 Machining conditions in electrostatic induction feeding method [1]

1 Pulse voltage [V] 150
2 Pulse on time [ls] 200
3 Duty factor 50%
4 Feeding capacitance C [pF] 50
5 Workpiece Steel feeler gauge of 90 lm thickness
6 Wire electrode Tungsten U30 lm
7 Wire running speed [m/min] 0.62
8 Wire tension [N] 1.4
9 Dielectric air (slit), EDM oil (beam)
Fig. 4.27 a Micro slit (groove) and b micro beam machined by MWEDM with electrostatic
induction feeding method [1]
with a module as less as 40 lm. Figure 4.26f shows an aluminum alloy micro gear
fabricated from micro-gear die as shown in Fig. 4.26e, by micro-forming process.
Yang et al. [1] used electrostatic induction feeding method to develop an
MWEDM setup. The construction and working principle of the pulse generator
using electrostatic induction feeding method is completely different in regard to the
conventional ones. The electrostatic induction feeding method essentially requires
the use of oil dielectric (sometimes air), because the open voltage of the working
gap decreases the discharge delay time, since the leak current flows into the water
dielectric, if used. However, using this method and experimental condition as stated
in Table 4.4, micro groove of a minimum width 32.4 lm and straight micro-beam
of a minimum thickness 3.8 lm with 100 lm length were obtained (Fig. 4.27).
However, further research is required to apply electrostatic induction feeding
method to develop a micro pulse generator for MWEDM setup.
178 A.B. Puri
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Wire-cut EDM, Journal of Materials Processing Technology, Vol 141, Issue 3 (2003),
pp 295–301
10. D. F. Dauw, I. Beltrami, High-Precision Wire-EDM by Online Wire Positioning Control,
Annals of the CIRP, 43/1, 1994, pp 193–197
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kerf width in micro-WEDM, International Journal of Machine Tools & Manufacture 49
(2009) 788–792
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Mat. Proc. Tech, 1996, vol.58, pp. 385–389
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tension control, International Journal of Machine Tools & Manufacture 44 (2004) 807–81
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Chapter 5
Laser Micro-turning Process
of Aluminium Oxide Ceramic
Using Pulsed Nd:YAG Laser
Golam Kibria, B. Doloi and B. Bhattacharyya
Abstract One of the newly developed laser micromachining processes for gen-
erating micro-turn surface on cylindrical work sample is laser micro-turning pro-
cess. To explore the capability of this laser micromachining process for achieving
particular surface profile and dimensional accuracy of machined parts, authors
considered a number of experimental investigation to find the effect of process
parameters. During investigation and analysis, a number of experimental designs
are applied to in-depth analyse the effect of process parameters on surface rough-
ness (Ra and Rz) and depth deviation. The governing equations of spot and cir-
cumferential overlap were developed for investigating the effect of these overlaps
on surface criteria. By adopting statistical design of experiments approaches such as
Response Surface Methodology, the influence of process parameters on process
performance were studied. Moreover, novel machining strategy of laser defocusing
condition was also implemented for improving the micro-turning surface features.
For qualitative assessment of important process parameters, scanning electron
microscopic images of machined surface were analysed for better understanding the
process.
G. Kibria (&)
Mechanical Engineering Department, Aliah University, Kolkata 700156, India
B. Doloi B. Bhattacharyya
B. Bhattacharyya

DOI 10.1007/978-3-319-52009-4_5
5.1 Introduction
To fulfil the demand of high-end products with specific features in terms of high
precision, accuracy and surface topography, researchers and technocrats are always
engaged with micromanufacturing of macro as well as micro-components with which
continuous miniaturization is developing day-by-day. It is also a challenging job for
the manufacturing engineers and researchers to develop suitable micromachining
process which can be applied to machine hard-to-cut materials such as alloys, com-
posites etc. effectively with unique accuracy and productivity. For achieving effective
machining accuracies and desired surface finish, a number of traditional and advanced
micro-manufacturing processes have been developed for applying these machining
techniques for product manufacturing of wide varieties. Moreover, various micro-
devices and miniature MEMS need specific functional characterization which
necessitate the incorporation of micro-features in diverse range of products. Therefore,
at this stage, it is urgently needed to implement novel machining techniques, besides
traditional processes, which can fulfil these demands. As most of the non-traditional
micromachining techniques utilize different kind of energy for material removal, the
material removal processes are irrespective of material’s mechanical and physical
properties. Amongst various non-traditional processes, laser beam machining
(LBM) is a widely applied and successful material removal process for fabrication of
different geometries with close tolerances at high production rates.
Based on laser types, type of operations and different wavelength, LBM is clas-
sified at various types. Pulsed and continuous wave Nd:YAG laser, Fiber laser and
Excimer laser are widely applied laser sources for manufacturing of different features
in components. In the pulsed mode laser operation, the material instantly melts as well
as vaporises with very short intervals. Therefore, the conduction of heat into the bulk
material does not occur. The compilation of Nd:YAG laser with Q-switch mode offers
exceptional machining geometries during micro-machining processes such as
micro-milling, micro-turning, micro-drilling and micro-cutting. One of the newly
developed Nd:YAG laser micro-machining processes is laser micro-turning operation
in which the cylindrical samples can be machined successfully to micro-turn the
material at small depth with specific surface quality and accuracy. As pulsed mode of
Nd:YAG laser has several advantages during processing of materials that include
instant material melting and vaporization, small resolidified layer and less damage of
machined surface due to micro-cracks formation. In laser micro-turning process, very
thin depth from material’s upper surface is removed due to laser irradiation while
rotating the cylindrical workpiece. Thus, the process can efficiently be applied for
micro-turning of several exotic materials such as ceramics and composites. The length
of micro-turn surface is controlled by axial feed of workpiece. The micro-turning
surface with specific surface properties has huge high precision applications such as
self assemblies, ceramic spikes, ceramic bearing ring etc. Furthermore, due to long
time operation of grinding wheel, the cutting ability of micro-abrasives reduces. The
generation of cutting surface by laser irradiation on blunt grinding wheel surface can
be carried out by laser micro-turning process.
5 Laser Micro-turning Process of Aluminium Oxide … 181
5.2 Need for Micro-machining of Advanced Ceramic

Materials
Chemically, with the exception of carbon, ceramics are nonmetallic, inorganic

compounds. The high structural advanced ceramics were commercially came into
market in 1980s for implementing these in place of metals and alloys to sustain in
elevated temperature environments. Structural ceramics is an emerging class of
engineering materials with variety of current applications and with the potential for
much wider applications, especially at high temperatures. High performance
structural ceramics are uniquely combined strength stable at high temperatures,
hardness, dimensional constancy, high degree of erosion and corrosion behavior,
elevated elastic modulus and small mass density. Structural ceramics are used as
monolithic parts as composites and protective coatings. Monolithic structural
ceramics are currently based primarily on silicon carbide, silicon nitride, and par-
tially stabilized zirconium oxide, aluminum oxide and aluminum titanate. For
enhanced performance, ceramic materials combined with particulate, whiskers or
fibers of a different ceramic compound or metal produce composites those have
several times toughness than that of monolithic ceramics [1–3].
5.3 Suitability of Nd:YAG Laser for Micromachining
Today, engineering ceramics are widely used in a number of applications due to

these ceramics show additional mechanical properties, withstand for oxidation, or
opto-electro-mechanical as well as magnetic properties. The various applications of
ceramics are as follows [1, 2]:
(i) Heat engines,
(ii) Bearings,
(iii) I.C engines components like nozzles, cylinder etc.,
(iv) Turbines components like blade of fan,
(v) Missile and military applications,
(vi) Gas and steam turbines,
(vii) Metal cutting tools,
(viii) Industrial wear components,
(ix) Bio-ceramics for biomedical applications,
(x) Military applications,
(xi) Fabrication of integrated chips and resistors,
(xii) Microelectronics industry,
(xiii) As decorative tiles and pottery,
(xiv) Artificial human joints and many more.
Due to unmatched thermo-physical and chemical properties, now-a-days, engi-
neering ceramics are widely used in micro domain of applications like automotive
parts of IC engines, various parts for aerospace vehicles, computer technology,

sensors, electrical and electronic parts and medical equipments etc. Moreover, these
ceramics are used to manufacture artificial tooth root, artificial hip joints, implant
and other medical purposes. Therefore, there are urgent needs of micro machining
of advanced engineering ceramics to manufacture micro-features on macro as well
as micro-products with high degree of dimensional accuracy and surface quality
characteristics. Machining and fabrication of complicated shaped parts made of
ceramic materials are difficult especially when it is in the microscopic domain. Lot
of research is continuing on in the area of micro machining of advanced ceramic for
the successful utilization of these types of material in various applications.
5.4 Laser Beam Micro-machining Processes
Lasers are finding continuously increasing utilization in the field of micromachining

processes. Figure 5.1 shows the schematic views of various types of laser beam
machining methods. The processes can be classified depending upon the shape of
the erosion front of the material removed from workpiece. In one type of laser
micromachining process, the laser beam is stationary relative to the workpiece to be
machined. There is no relative movement of laser beam and the workpiece surface.
A typical example of this type of machining is laser micro-drilling process. The
erosion front is located at the bottom of micro-drilled hole, propagated in the
direction of line source in order to remove material. In another type of laser
micromachining process, laser beam has relative movement in one direction with
respect to workpiece. The erosion front is located at the leading edge of laser beam.
Therefore, material removal occurs by repetitive movement of the erosion front in
the direction of depth of workpiece. A typical example of this laser beam micro-
machining is laser micro-cutting. In the third type of laser micromachining, either
one or two laser beams are used. Each of the beams produces a cutting front by
providing relative movement of workpiece in respect of laser beams. The erosion
front for each of the cutting processes is found at the leading edge of respective
laser beam. A typical example of this type of laser beam micromachining is laser
Fig. 5.1 Schematic views of various categories of laser micromachining processes

micro-turning. Some of the major laser micro machining techniques is highlighted

in the following sections.
5.4.1 Laser Micro-drilling
Laser micro-drilling is oldest laser materials processing technique. Laser

micro-drilling is widely used in aerospace, medicals, and automotive sectors [4–6].
The generation of high aspect ratio micro cooling holes in several components such
as turbine blades, flow orifice, electron beam system, optical instruments is carried
out by laser micro-drilling process [7, 8]. In this process, high accurate micro-sized
holes with high degree of aspect ratio can be generated in variety of
hard-to-machine materials such as ceramics, composites, alloys etc. without tool
wear as in case of EDM or USM [9]. Laser micro-drilling process has huge
application in drilling of carbon fiber composites for manufacturing of aircraft
components due to significant advantages of laser beam processing of materials
[10].
5.4.2 Laser Micro-cutting
Laser micro-cutting can be called as two-dimensional micromachining technique. In

this process, material removal takes place by controlling the intense laser beam as
well as by moving the workpiece at particular direction. Laser cutting is most
popular cutting process in various industries. Due to heating and melting as well as
vaporization of material due to high intense laser beam, material is removed from
the cutting front. The melted materials and vaporized gases are expelled from
irradiated zone using jet of assist gas (air). The assist gas also helps for enhancing
the chemical reactions in the cutting zone. During laser micro-cutting operation, the
workpiece is moved in particular direction as while feed motion of laser focusing
point vertically downward for facilitating the cutting of thick materials.
5.4.3 Laser Micro-grooving
Laser grooving process is carried out by scanning the irradiated laser beam over
path of surface where the micro-groove is to be generated. There are two methods
of laser micro-grooving process, (i) using a single laser beam and (ii) using two
laser beams. In case of single laser beam, the desired width of groove is machined
by producing multiple micro-grooves side-by-side causing overlap between two
adjacent groove widths. This process produces trapezoidal or rectangular shaped
micro-groove on desired workpiece surface. However, when two intersecting laser

beams are used simultaneously, each of the laser generate cutting surface and the
desired shaped micro-groove is formed by removing a certain volume of material in
bulk form. The mechanism of laser grooving is similar to laser cutting process; only
the difference is that laser grooving process does not produce a through cut up to the
thickness of work material. The groove depth defines the boundary of the volume of
material removed. The quality of the machined surface is related to heat affected
zone and the formation of recast layer at the groove walls or surfaces. Dimensional
accuracy is one of the important criteria for laser grooving process. Dimensional
accuracy is related to deviation of groove width and depth from desired quantity of
dimensions. The groove depth is fluctuated due to several phenomena such as
change in laser beam characteristics, mechanical vibration, material impurity, gas
jet fluctuations, plasma formation and ejection of metal vapour, etc.
5.4.4 Laser Micro-turning
One of the latest and emerging techniques of laser materials processing in

micro-machining domain is laser micro-turning process. This particular
micro-machining process is applied to machine cylindrical shaped engineering
material for removing micron level material from workpiece surface. For removal
of bulk form (like a ring shape or tapered groove) of material from workpiece, laser
micro-turning process is applied by using two intersecting laser beams [11].
Figure 5.2 shows the schematic view of laser turning process by using two inter-
secting laser beams. However, for carrying out micromachining process such as
laser micro-turning, a single laser beam should be used to remove very thin planer
layer from work material surface by irradiating and focusing the laser beam onto the
machining surface of rotating workpiece through the desired length of turn along
the axis of work sample. Figure 5.3 shows schematic view of laser turning process
using single beam while rotating cylindrical workpiece and moving it along axial
direction.
Fig. 5.2 Schematic view of

laser turning (thread
generation) employing two
intersecting laser beams
Fig. 5.3 Schematic view of

laser micro-turning process
using single laser beam
5.5 Difficulties of Micro-turning of Ceramic Materials
Nowadays, engineering micro-components used for fabricating micro as well as

macro-systems are benefited by advanced engineering ceramics. This is due to the
fact that these ceramics have their diversified mechanical as well as thermo-physical
properties such as corrosion and thermal resistance, hardness, fracture toughness,
wear resistance, etc. Due to these extraordinary properties of ceramics, the demands
of parts made of these advanced ceramics are increasing day-by-day as the lifespan of
the parts are high. Micro-turning using diamond turning tool is one of the emerging
machining processes for producing micro-cylindrical parts made of difficult-to-cut
alloys and ceramics. However, this process has several drawbacks such as irregular
wear of highly expensive cutting tools which causes high production cost, defects in
machined surfaces and sub-surfaces due to brittleness properties of ceramics,
excessive vibration of mechanical parts of machine tools, etc. [12, 13]. Wire electrical
discharge turning (WEDT) is another micro-turning process in which cylindrical
micro-parts can be manufactured such as micro-electrodes, micro-pins etc. [14, 15].
However, WEDT can only be applied for conductive materials. Thus, it is challenging
task for the manufacturer engineers and scientist to find out novel material processing
technique which can be utilized for micro-turning of ceramics.
Amongst various ceramics used for manufacturing small parts for micro-systems
as well as for biomedical implants, Aluminium Oxide (Al2O3) is most important
and widely used ceramics materials due to its several extraordinary thermal,
physical and mechanical properties such as stability at high temperature, high
degree of corrosion and wear resistance, extreme hardness, high stiffness, etc. [16].
Micromachining of ceramic materials using laser beam is complex and dynamic in
nature and the large number of process parameters such as beam power, pulse
repetition rate, pulse duration, beam scanning speed etc. have non-linear behaviours
during fabrication of complex geometries and surface features [17]. Moreover, the
optical and physical properties of the workpiece materials to be machined provide
significant variations of the output characteristics during laser micro-machining of
engineering ceramic materials [17, 18]. Therefore, at this stage, it is urgently need
to develop a novel non contact type micro manufacturing process which can effi-
ciently and effectively micro-turn ceramics as well as difficult-to-machine super-
alloy. Past research revealed that research in the direction of numerical model
development and experimentation have been carried out by number of researchers
across the globe in several laser micro machining processes such as micro-drilling,
micro-cutting, micro-grooving, surface modification etc. [19, 20]. Thus, to machine
or micro-turn cylindrical shaped aluminium oxide ceramic utilizing laser beam,
laser micro-turning process has been developed.
5.6 Process Mechanism of Laser Micro-turning
In 1988, Chrysolouris et al. [21] first demonstrated the capability of laser beam for
three dimensional machining employing two intersecting beams. However, two
such intersecting laser beams can remove material from work sample in bulk form.
To simplify the laser micro-turning process, single laser can effectively be utilized
where material is removed from the rotating cylindrical work sample in
layer-by-layer form. Basically, laser micro-turning process is generation of spiral
micro-grooves over a defined length of sample where the each groove has some
overlap onto the previous groove [22]. Thus, planar surface of thickness in micron
range is removed from the top cylindrical surface. The quantity of overlap between
two consecutive micro grooves are controlled by mainly two factors, axial feed rate
and rotating speed of workpiece. For obtaining desired depth of micro-turning,
continuous scanning of laser beam is carried out while rotating of work sample. The
surface characteristics i.e. quality of surface profile of laser micro-turning is gov-
erned by two overlap factors, spot overlap (SOp) and circumferential overlap
(COp). To achieve quality surface features during laser micro-turning process, the
values of these overlap factors must be high as possible. Thawari et al. [23]
formulated the relationship between spot overlap, pulse frequency, spot diameter
and scanning speed of laser beam as depicted in Eq. (5.1).
ðSpot diameterÞ ð1 spot overlapÞ ðpulse frequencyÞ ¼ linear speed ð5:1Þ
Thus
v
Spot overlap ðSOp Þ ¼ ð1 Þ 100% ð5:2Þ
D Fp
In the above equation, D is the spot diameter (in mm), Fp is the pulse frequency
(in Hz) and v is the linear scanning speed of laser beam (in mm/s). The relationship
of linear scanning speed with workpiece rotating speed is
p Ds N
v¼ ð5:3Þ
60
In this equation, Ds is the diameter of workpiece (in mm) and N is the workpiece
rotating speed (in rpm).
p Ds N
Spot overlap ðSOp Þ ¼ ð1 Þ 100% ð5:4Þ
60 D Fp
The schematic representation of overlap criteria between two consecutive spots

during laser beam scanning onto the workpiece surface is shown in Fig. 5.4. The
overlap distance between two successive laser spots i.e. spot 1 and spot 2 is xs
shown by hatched area. Due to the Gaussian energy distribution of laser beam, the
crater profiles are generated on the workpiece surface making overlap between
crater areas. Thus, this amount of overlap area can be increased by either increasing
number of pulses per unit time or reducing the workpiece rotating speed as depicted
in Eq. (5.4).
Another crucial criterion of laser micro-turning process for obtaining quality
machined surface is circumferential overlap (COp). It is the amount of overlap
between two consecutive laser scan widths generated during two consecutive
rotation of cylindrical workpiece. The length of circumferential of a cylindrical
workpiece of diameter Ds is L ¼ p Ds . If, ts is the time (in seconds) to scan this
length L over the one complete periphery of cylindrical work surface, then
ts ¼ L=v ¼ 60=N. Now, if the axial feed rate (in mm/s) of work sample is f, then
axial travel of workpiece in ts seconds is lc ¼ f ts ¼ ð60 fÞ=N. Therefore, the
circumferential overlap is
overlap length xc lc 60 f
COp ¼ ¼ ¼ ð1 Þ ¼ ð1 Þ 100% ð5:5Þ
laser spot diameter D D DN
In this equation, xc is the overlap length (in mm) between two laser spots
produced in two consecutive rotations of workpiece. Figure 5.5 shows the
Fig. 5.4 Schematic view of overlap between two consecutive spots produced by laser scanning
onto the workpiece showing Gaussian energy distribution and crater depth
schematic representation of circumferential overlap criteria between two laser spots

produced side-by-side onto the workpiece surface during successive rotation of
work sample. In this figure, the overlap length between two spots is xc and the
overlap area is shown by hatched region and the Gaussian energy distribution for
these laser spots are shown. The crater depth profiles produced due to melting
and/or evaporation from the laser spot regions have an amount of circumferential
overlap. This amount of overlap can be increased by either reducing the axial feed
rate of workpiece or increasing number of rotation per minute as also depicted in
Eq. (5.5).
5.7 Development of Laser Micro-turning Set Up
Maintaining the standard and performing high quality micro machining operations
on advanced engineering material, a high power pulsed Nd:YAG laser set-up
(Make: M/s Sahajanand Laser technology, Model no: SLT-SP-2000) with some
modifications has been utilized for carrying out various experimentation in laser
micro-turning operation. The detailed specifications of this pulsed Nd:YAG laser
Fig. 5.5 Schematic view of overlap between two spots produced by two consecutive rotations of
workpiece showing Gaussian energy distribution and crater depth
set-up are listed in the Table 5.1. The beam operates in Gaussian mode (TEM00).
The wavelength of Nd:YAG laser beam is 1064 nm. The focusing lens has focal
length of 50 mm. To carryout different set of experimentations utilizing various
laser machining strategies on flat and cylindrical shaped work samples using the
existing laser machining set-up, various fixtures have been developed indigenously.
The pulsed Nd:YAG laser beam machining system includes the various subsystems
that include laser beam generation unit, cooling system (internal and external),
power supply system, CCD camera, CCTV, X-Y-Z controller, assist air/gas supply
system and developed fixtures etc. The photographic view of these subsystems of
laser beam machining set-up is shown in Fig. 5.6.
To conduct experimentation on laser micro-turning process on different work-
piece materials utilizing pulsed Nd:YAG laser micromachining system, workpiece
rotating system is developed separately. The rotating system is made of three sub
components, (i) servomotor with workpiece holding collet system, (ii) servo
amplifier, and (iii) power supply unit. The schematic representation of the work-
piece rotating system is shown in Fig. 5.7. In Table 5.2, the details of the servo-
motor and servo controller, which are utilized for developing the rotating system,
are enlisted. The workpiece holding collet can hold workpiece in the range of
2–16 mm diameter sample. The collet was fixed to the axis of motor precisely to
Table 5.1 Detailed Specification Description

specifications of pulsed Nd:
YAG laser setup Laser type Nd:YAG laser
Wavelength 1064 nm
Mode of operation Q-switched (pulsed)
Type of Q-switch Acousto optic
Mode of laser beam Fundamental mode (TEM00)
Mirror reflectivity Rear mirror—100%
Front mirror—80%
Beam diameter 1/e2 1 mm
Laser beam spot diameter 100 lm
Pulse width 120–150 ns
Fig. 5.6 Photographic view of the pulsed Nd:YAG laser machining system indicating various
sub-systems [24]
reduce the eccentricity error. The eccentricity of rotation was found as 3 lm, which
is acceptable. The whole rotating system is placed on X-Y worktable of the laser
machine as shown in Fig. 5.7.
To rotate the workpiece at desired rotational speed, all the sub systems are inter
connected. The power supply system has several switches and knobs to change the
rotating speed of servomotor as well as to change the rotational direction of ser-
vomotor. After placing the rotating system underneath the laser beam, the axial feed
of workpiece is given using the software installed in the personal computer attached
to the laser beam machining system. Multi pass micro-turning is carried out by
scanning the desired length of rotating workpiece surface and also by focusing the
laser beam onto the new surface generated by previous laser beam scan. Therefore,
laser micro-turning process of desired axial length and micro-turn depth is achieved
on cylindrical workpiece.
Fig. 5.7 Schematic diagram of the developed workpiece rotating system with connections
between sub-components [25]
Table 5.2 Detailed specifications of servomotor and servo controller

Details of servomotor Details of servo controller
Specifications Description Amplifier type RYC101D3-VVT2
Servomotor type GYS101DC2-T2A Phase Single
Input voltage AC 200 V Input voltage 200–230 V
Rated output 100 W Rated output 100 W
Rated speed 3000 rpm Circuit breaker EA33AC/5
5.8 Experimentation and Measurement Schemes
For conducting research investigation of the novel laser micromachining technique

i.e. laser micro-turning process, a well planned research scheme is organized to
study the influence of various controllable process parameters using various sta-
tistical techniques such as Response Surface Methodology etc., the effect of spot
and circumferential overlaps, the influence of various laser defocusing conditions
on machining criteria such as surface roughness (Ra, Rt) and micro-turning depth.
The axial feed and Z feed rate is provided using Multisawing software, which is
installed in personal computer connected with the laser micromachining system. All
the experiments were conducted using cylindrical shaped 99% pure aluminium
oxide ceramic material (length 40 mm and diameter 10 mm). The detailed
thermo-physical properties of 99% pure aluminium oxide ceramic are enlisted in
Table 5.3. The process parameters which are varied during laser micro-turning are
laser average power, pulse frequency, workpiece rotational speed, assist air pres-
sure, Y feed rate, defocusing positions and number of passes.
Using a laser power measuring device (make: Ophir Optronics Solutions Ltd,
Israel), the laser beam average power was controlled. Several experimental
Table 5.3 Detailed Properties Values and units

thermo-physical properties of
99% pure aluminium oxide Melting temperature 2050 °C
ceramics Creep rate 10−9 s−1 at 150 MPa
Density 3.984 g/cm3
Specific heat 755 J/kg K
Activation energy 325(25) kJ/mol
Thermal conductivity 33 W/mK
Tensile strength 267 MPa
Thermal diffusivity 0.111 cm2/s
Bulk modulus 257 GPa
Shear modulus 167 GPa
Grain size 5 lm
methodologies were applied to conduct experiments varying the above-mentioned

process parameters. Before selecting the actual range of process parameters, a
number of pilot experiments were conducted. According to experimental schemes,
laser micro-turning process is carried out at various parametric combinations and
performance criteria such as machining depth and surface roughness (Ra and Rt)
were measured using precision measuring instruments. The micro-turn depth was
measured by differentiating the Z axis movements of machined (A) and unma-
chined surface (B) of workpiece using high precision optical measuring microscope
(resolutions of X and Y are 0.5 µm each) with 10 magnification lens by a high
precision dial gauge attached as indicated in Fig. 5.8. The target machining depth is
100 µm. The micro-turning depth deviation is calculated by differentiating the
machined depth and target depth. The roughness values (Ra and Rt) of laser
micro-turning surface is measured using surface roughness measuring instrument
(Model: SURFCOM 120A-TSK, Make: Zeiss, Germany). The methodology of
measuring the surface roughness values is depicted in Fig. 5.9. Roughness of
machined surface was measured at several locations of cylindrical job by rotating at
60° angle each. As the micro-turning length along the workpiece is selected as
5 mm, therefore, surface roughness was measured for a length of 2.5 mm exactly at
middle segment of machined surface. During roughness measurement, the cutoff
length (kc) is selected as 0.25 mm because form errors can be eliminated and micro
dimensional irregularities can be taken into account during surface roughness
assessment.
5.9 Results and Discussion
Based on the various schemes, experimentation have been conducted at various

parametric combinations considering different process parameters such as laser
average power, pulse frequency, workpiece rotational speed, assist air pressure,
Fig. 5.8 Methodology of micro-turn depth measurement utilizing optical measuring microscope
Fig. 5.9 Measurement scheme of surface roughness criteria
Y feed rate, defocusing positions and number of passes. Performance criteria were
measured at all machining parametric settings and the test results were analysed
through various plots and analytical tools. The results of validation experiments
show good sign of validity of empirical models and optimizations. Optical and
Table 5.4 Process parameters and various levels for RSM based experimentation [25]
Parameters Unit Symbol Levels
L1 L2 L3 L4 L5
Average power W X1 6 7 8 9 10
Pulse frequency Hz X2 3000 4000 5000 6000 7000
Rotational speed rpm X3 200 300 400 500 600
Air pressure kgf/cm2 X4 0.3 0.8 1.3 1.8 2.3
Y feed rate mm/s X5 0.1 0.2 0.3 0.4 0.5
Coded value −2 −1 0 +1 +2
scanning electron microscopic (SEM) images of laser micro-turning surface were

also analysed to acquire clear depiction of quality of machined surface conditions.
5.9.1 Parametric Studies, Modeling and Optimization

of Laser Micro-turning in RSM Approach
In this section, basic parametric studies and influences of process parameters on

laser micro-turning process are analysed using statistical design of experiments tool
known as response surface methodology (RSM). Rotatable Central Composite
Design (RCCD) based on RSM is a well-designed and established experimental
plan to considerably trim down the total quantity of experiments required to per-
form for making design of experiment cost effective, time saving and also for
achieving high accuracy. In the present experimental investigation, five number of
parameters such as average power, pulse frequency, rotational speed of workpiece,
air pressure and Y feed rate have been considered. Based upon the various input
factors and their levels as mentioned in Table 5.4, a uniform rotatable CC Design
for developing response models of laser micro-turning process has been designed.
After conducting each of the experiments, responses i.e. micro-turning depth
deviation and surface roughness (Ra) have been measured and the results of
responses for each parametric combination of process parameters are enlisted in
Table 5.5. MINITAB of version 13 software was utilized to plan the design of
matrix of experimentation and also to analyze the responses. Based on the test
results, mathematical models have been developed for correlating the outputs with
the process parameters. Further, response surface plots were analysed for investi-
gating the influence of process parameters on responses.
Considering the proposed second order polynomial regression model, the
empirical models on micro-turning depth deviation and surface roughness
(Ra) have been established by computing the values of various coefficients of
second order polynomial equation. The developed mathematical relationship cor-
relating the response and process variables are shown in Eqs. (5.6) and (5.7).
Table 5.5 Experimental results based on RSM experimentation design approach

Expt. Coded values Responses
no. X1 X2 X3 X4 X5 Depth Surface
(W) (Hz) (rpm) (kgf/cm2) (mm/s) deviation, roughness (Ra),
mm lm
1 8 5000 400 1.3 0.3 0.01192 6.59
2 8 5000 400 0.3 0.3 0.00002 5.51
3 8 5000 400 1.3 0.3 0.02922 6.31
4 7 6000 500 0.8 0.4 0.01271 6.61
5 8 5000 400 1.3 0.5 0.00030 5.77
6 7 4000 300 0.8 0.4 −0.03439 5.86
7 9 6000 500 0.8 0.2 0.07586 7.54
8 9 4000 300 1.8 0.4 0.01579 5.45
9 7 6000 300 1.8 0.4 −0.02178 6.43
10 8 7000 400 1.3 0.3 0.02543 7.12
11 9 4000 500 1.8 0.2 0.04314 7.21
12 7 4000 500 0.8 0.2 0.03639 7.00
13 8 5000 400 2.3 0.3 0.00710 6.13
14 8 5000 400 1.3 0.1 0.09000 8.39
15 8 5000 600 1.3 0.3 0.01678 6.33
16 7 6000 500 1.8 0.2 0.03755 7.49
17 10 5000 400 1.3 0.3 0.03883 5.46
18 6 5000 400 1.3 0.3 0.00631 6.19
19 8 5000 400 1.3 0.3 0.01333 6.68
20 9 4000 500 0.8 0.4 −0.01648 5.16
21 7 4000 500 1.8 0.4 0.00273 5.88
22 9 6000 300 0.8 0.4 0.01954 5.73
23 8 5000 200 1.3 0.3 0.02786 6.97
24 7 4000 300 1.8 0.2 0.04686 6.74
25 9 6000 500 1.8 0.4 0.00407 5.54
26 9 6000 300 1.8 0.2 0.08448 7.94
27 8 5000 400 1.3 0.3 0.00958 6.15
28 8 3000 400 1.3 0.3 −0.04500 5.67
29 8 5000 400 1.3 0.3 0.00963 5.99
30 8 5000 400 1.3 0.3 0.01128 6.13
31 7 6000 300 0.8 0.2 0.05218 7.35
32 9 4000 300 0.8 0.2 0.05324 7.23
Ydepth dev: ¼ 0:053142 0:038222 X1 þ 0:000048 X2 0:000191 X3 þ 0:094368 X4

0:852803 X5 þ 0:003616 X12 0:000000 X22 þ 0:000000 X32
0:004544 X42 þ 0:926106 X52 þ 0:000004 X1 X2 0:000071 X1 X3
þ 0:002107 X1 X4 0:012561 X1 X5 þ 0:000000 X2 X3 0:000016 X2 X4
0:000015 X2 X5 0:000070 X3 X4 þ 0:000423 X3 X5 þ 0:031346 X4 X5
ð5:6Þ
YRa ¼ 3:3853 þ 2:4496 X1 þ 0:0001 X2 0:0008 X3 þ 0:5522 X4 þ 1:9032 X5

0:0825 X12 þ 0:0000 X22 þ 0:0000 X32 0:3400 X42 þ 23:0837 X52
0:0000 X1 X2 0:0009 X1 X3 þ 0:0975 X1 X4 2:6381 X1 X5
0:0000 X2 X3 þ 0:0000 X2 X4 0:0001 X2 X5 0:0007 X3 X4
0:0016 X3 X5 0:4104 X4 X5
ð5:7Þ
Here, X1, X2, X3, X4 and X5 are the uncoded values of input process parameters
i.e. average power, pulse frequency, workpiece rotational speed, assist air pressure
and Y feed rate, respectively. The ranges of these process parameters are as
6 X1 10 (W), 3000 X2 7000 (Hz), 200 X3 600 (rpm), 0:3 X4 2:3
(kgf/cm2) and 0:1 X5 0:5 (mm/s). The analysis of variance (ANOVA) results
for micro-turning depth deviation and surface roughness (Ra) models are shown in
Tables 5.6 and 5.7. The standard F-value for lack-of-fit is 4.06 for 95% confidence
level. However, the calculated F-values for depth deviation and surface roughness
(Ra) are 3.11 and 1.18, which are lower than the standard F-value. These imply that
the developed mathematical models are adequate at 95% confidence level. The
values of adjusted R2 are 87.07 and 86.90% and these values indicate the degree of
accuracy of the developed models. The p-values for lack-of-fit are 0.117 and 0.436,
indicating that the models adequately fit the data and ensuring that these models can
well correlate the responses.
In Table 5.8, the results depth deviation and surface roughness of eight verifi-
cation experiments obtained from experimentation are enlisted. The parametric
combinations were chosen in the considered range of each process parameters. In
Table 5.6 Analysis of variance test for depth deviation [25]

Source DF Seq SS Adj SS Adj MS F p
Regression 20 0.027766 0.029966 0.001388 11.44 0.000
Linear 5 0.021140 0.001785 0.000357 2.94 0.063
Square 5 0.004014 0.004014 0.000803 6.62 0.004
Interaction 10 0.002611 0.002611 0.000261 2.15 0.112
Residual error 11 0.001335 0.001335 0.000121
Lack-of-fit 6 0.001053 0.001053 0.000175 3.11 0.117
Pure error 5 0.000282 0.000282 0.000056
Total 31 0.029101
Table 5.7 Analysis of variance test for surface roughness (Ra) [25]
Source DF Seq SS Adj SS Adj MS F p
Regression 20 18.7631 18.7631 0.93816 11.28 0.000
Linear 5 14.7690 0.5454 0.10908 1.31 0.328
Square 5 2.6320 2.6320 0.52641 6.33 0.005
Interaction 10 1.3620 1.3620 0.13620 1.64 0.215
Residual error 11 0.9148 0.9148 0.08316
Lack-of-fit 6 0.5367 0.5367 0.08945 1.18 0.436
Pure error 5 0.3781 0.3781 0.07561
Total 31 19.6779
Table 5.8 Verification experimentation showing the test results of responses

Expt. Process parameters Responses obtained from
no. experiments
Average Pulse Rotating Air Y feed Micro-turning Surface
power frequency speed pressure rate depth roughness
(W) (Hz) (rpm) (kgf/cm2) (mm/s) deviation (lm)
(mm)
1 7 7000 500 0.8 0.3 0.0314 7.51
2 8 4000 500 1.8 0.2 0.0352 6.16
3 8 5000 500 1.8 0.4 0.0094 7.00
4 9 5000 400 0.8 0.2 0.0480 6.26
5 9 6000 200 0.8 0.3 0.0517 7.23
6 8 6000 500 1.8 0.2 0.0253 6.74
7 9 4000 500 1.3 0.3 0.0002 6.09
8 7 6000 500 1.3 0.1 0.0017 6.89
Table 5.9, the comparative results of prediction errors of responses for experimental
and RSM predicted results are shown for eight verification experiments. The pre-
diction errors for depth deviation and surface roughness are 3.12 and 3.19%,
respectively. The overall prediction error is 3.16%. These percentage errors of
prediction are within acceptable limit and it is concluded that the developed models
are valid within the parametric ranges.
ðExperimental result Predicted resultÞ

Prediction error ð%Þ ¼ 100 ð5:8Þ
Experimental result
Utilizing various surface plots which represent the variation of response during
simultaneous increasing of two process parameters, the responses were analysed. In
Fig. 5.10, the influence of variation of laser average power and laser pulse fre-
quency on depth deviation is shown. The figure shows that the depth deviation is
increasing with laser beam average power. Due to high intense energy in the laser
Table 5.9 Comparison between experimental and RSM predicted results of test data
Expt. Experimental results RSM predicted results % of prediction error
no. Micro-turning Surface Micro-turning Surface Micro-turning Surface
depth roughness, depth roughness, depth roughness
deviation Ra (lm) deviation Ra (lm) deviation (Ra)
mm) (mm)
1 0.0314 7.51 0.0303 7.28 3.66 2.95
2 0.0352 6.16 0.0341 5.96 3.25 3.19
3 0.0094 7.00 0.0091 6.74 3.14 3.64
4 0.0480 6.26 0.0468 6.09 2.48 2.70
5 0.0517 7.23 0.0504 6.96 2.39 3.83
6 0.0253 6.74 0.0243 6.56 4.17 2.66
7 0.0002 6.09 0.0002 5.84 3.89 4.03
8 0.0017 6.89 0.0016 6.72 2.01 2.53
Average percentage of prediction error 3.12 3.19
Overall percentage of prediction error 3.16
Fig. 5.10 Response surface plot of depth deviation for varying average power and pulse
frequency [25]
beam at high average power, the amount of material evaporation is increasing and
this result in more depth deviation. It is also observed that at low value of average
power, the depth deviation is not so high and it is due to the fact that pulse off
duration decreases with increase of pulse frequency and due to this, number of
pulses reaching the workpiece surface increases. These huge numbers of pulses
cause more material to remove from workpiece surface. However, at higher setting
of laser average power, the increase of pulse frequency results in more depth
deviation. With increase of pulse frequency, according to Eq. (5.9), peak power of
Fig. 5.11 Response surface plot of depth deviation for varying average power and workpiece
rotational speed [25]
laser beam decreases. But, at the same time, the duration of successive pulses
decreases and large amount of material is removed from workpiece surface.
Average power ðPA Þ

Peak power ðPP Þ ¼ ð5:9Þ
Pulse frequency ðFP Þ Pulse duration ðlÞ
In Fig. 5.11, the effect of average power and rotational speed of workpiece on
depth deviation is shown. The surface plot shows that with the increase of laser
average power, the depth deviation increases. As per Eq. (5.9), the peak power of
laser beam increases with the increase in average power and thus, the amount of
material melted and evaporated is more. It is observed that increase in workpiece
rotating speed results in increase in depth deviation. At high average power,
increase in workpiece rotational speed results in reduction in depth deviation. Due
to increase in rotating speed, the amount of absorbed energy by cylindrical material
is low and consequently, the amount of material removal is high enough and more
depth deviation.
In Fig. 5.12, the influence of air pressure and Y feed rate on depth deviation is
shown. By closely observing the surface plot, it is obvious that the parameter assist
air pressure has less effect on variation of depth deviation. Moreover, it is also
observed that with the increase in Y feed rate, the depth deviation decreases. It is
due to the fact that due to higher feed rate value, the time duration of material
melting and evaporation is less per laser scan area and thus, material removal is
moderate.
In Fig. 5.13, the surface plot shows the effect of variation of laser average power
and pulse frequency on roughness of machined surface. It is seen that surface
roughness first increases and after that, it decreases due to varying the laser average
power. As per Eq. (5.9), with increase in laser average power, the peak power also
Fig. 5.12 Response surface plot of depth deviation for varying air pressure and Y feed rate [25]
Fig. 5.13 Response surface plot of surface roughness (Ra) for varying average power and pulse
frequency [25]
increases and therefore, the amount of material melted and vaporized is more due to
more incident energy and ultimately, the roughness of machined surface increases.
At high setting of average power, due to removal of more material and wider crater
formation on the workpiece surface, the surface roughness decreases. From the
same surface plot, it is also seen that with increase in pulse frequency, the
roughness of machined surface increases. Although, the value of peak power of
laser beam decreases with pulse frequency according to Eq. (5.9), the duration of
consecutive laser pulses is small and the upper surface of material melts and
Fig. 5.14 Response surface plot of surface roughness (Ra) for varying average power and
workpiece rotational speed [25]
vaporizes instantly. Due to this, more peaks and valleys are generated on the
machined surface and cause more roughness.
The surface plot of variation of laser average power and rotating speed of
workpiece on surface roughness is shown in Fig. 5.14. The minimum value of
surface roughness is obtained at high setting of average power and moderate value
of rotational speed of workpiece. It is obvious from this surface plot that the
increase in workpiece speed causes the absorbed amount of laser energy per unit
scan area is less and it further reduces the amount of material removal from
workpiece. This causes fewer irregularities on the machined surface. The surface
plot also depicts that when the workpiece rotating speed is high, the surface
roughness is less for varying laser average power. According to Eq. (5.4), it is
obvious that spot overlap decreases with increasing value of workpiece rotational
speed. This causes more waviness in circumferential direction of work sample.
Moreover, according to Eq. (5.5), the circumferential overlap increases with
workpiece rotational speed and therefore, the value of surface roughness decreases.
In Fig. 5.15, the surface plot shows the effect of assist air pressure and Y feed
rate on roughness criterion. The minimum value of surface roughness is achieved at
low value of assist air pressure and large setting of Y feed rate. At low value of Y
feed rate, as the time duration of laser beam material interaction is high, therefore,
the absorbed energy per laser scan area is high. Due to this, more material is
removed from the laser irradiated zone creating large micro-peaks, which ultimately
causes high value of roughness. From the same plot, it is also observed that the
variation in assist air pressure has very less effect on surface roughness criterion.
However, it is seen that with increase in air pressure, surface roughness value at first
increases; however, at high air pressure, it decreases the roughness value of
machined surface. At high air pressure, the melted and vaporized material can be
Fig. 5.15 Response surface plot of surface roughness (Ra) for varying air pressure and Y feed rate
[25]
Fig. 5.16 Results of multi objective optimization for minimum depth deviation and surface
roughness (Ra) [25]
removed uniformly and completely from machining zone; therefore, the irregular-
ities on the surface are quite less.
For obtaining the accurate geometrical dimensions of machined parts as well as
for achieving quality machined surface, multi performance optimization was carried
out using MINITAB software. The results of multi objective optimization for
achieving the minimum value of depth deviation and surface roughness are shown
in Fig. 5.16. The parametric setting at which the target machined depth and min-
imum surface roughness was achieved as average power at 7.81 W, pulse frequency
at 5601.59 Hz, rotating speed at 435.60 rpm, assist air pressure at 0.30 kgf/cm2 and
Table 5.10 Results of confirmation experiment at optimal parametric combination

Optimization type Experimental parameters Experimental results:
combination Surface roughness,
Multi-objective Average power = 7.81 W Ra = 5.91 µm
optimization Pulse frequency = 5600 Hz Depth
Rotating speed = 436 rpm deviation = −0.00021 mm
Air pressure = 0.30 kgf/cm2 RSM predicted results:
Y feed rate = 0.443 mm/s Surface roughness,
Ra = 5.63 µm
Depth
deviation = −0.00020 mm
Percentage of errors:
For surface
roughness = 4.76%
For depth deviation = 4.78%
Y feed rate at 0.443 mm/s. Verification experiments were performed to confirm the
multi-objective optimized results at parametric combination that can be set to the
nearer feasible setting achieved in RSM based optimization. Table 5.10 shows the
results of verification experiment and calculated error percentage for both respon-
ses. It is observed from the results of percentage of prediction error calculation that
the prediction errors were 4.76 and 4.78% for surface roughness and depth devi-
ation. These errors are within acceptable limit and it can be concluded that the multi
objective optimization is valid within the parametric range of consideration.
5.9.2 Influence of Overlap Factors on Machining Criteria
It has been found in the previous section that there are huge influences of various
process parameters on surface roughness (Ra) and depth deviation for obtaining
desired surface features and dimensional geometries during laser micro-turning
process of alumina ceramic. However, for achieving better surface characteristics, it
is urgently to know the basic understanding of surface roughness variation as the
surface quality and irregularity is governed by two overlap factors i.e. spot overlap
and circumferential overlap. As the values of these overlap factors depend on range
and value of various process parameters, therefore, in this section, attempts have
been made to carry out in-depth studies of overlap factors on surface features during
machining.
For experimentation, same pulsed Nd:YAG laser micromachining system and
workpiece rotating fixture is utilized. The ranges of various process parameters
considered are enlisted in Table 5.11. For each of the experiments, the number of
laser scan passes was 100. In this experimental investigation, the values of work-
piece rotating speed and pulse frequency were selected cautiously so that the per-
centage values of spot overlap (SOp) lay as some distinct and positive value. In
Table 5.11 Experimental details and other conditions

Condition Description
Average power, W 7, 8
Pulse frequency, Hz 3000, 4000, 5000, 6000, 7000
Workpiece rotating speed, rpm 200, 300, 400, 500, 600
Y feed rate, mm/s 0.1, 0.2, 0.3, 0.4, 0.5
Pulse width, % of duty cycle 3%
Air pressure, kgf/cm2 1.3
Z feed rate, mm/s 0.01
Fig. 5.17 Influence of rotational speed of workpiece and pulse frequency on spot overlap
Fig. 5.17, the graph represents the variation of spot overlap (%) at various pulse
frequency and rotational speed of workpiece. During trial runs, the parametric range
of Y feed rate was chosen very cautiously so as to keep the circumferential overlap
within acceptable limit. In Fig. 5.18, the influence of rotational speed of workpiece
and Y feed rate on circumferential overlap (%) is depicted. By observing these two
plots, it is concluded that the variation of significant process parameters have huge
influence on these overlaps. In these graphs, some data points were taken in which
there are no overlaps to analyse its effect on response criteria.
The graphical plots shown in Fig. 5.19 and 5.20 represent the effect of spot
overlap on surface roughness criterion due to variation in pulse frequency and
rotational speed of workpiece, correspondingly. As per Eq. (5.4), the spot overlap
can be varied using two schemes, one by varying rotational speed of workpiece
while pulse frequency kept at particular value, and second by varying pulse fre-
quency while rotational speed kept at particular value. For the Fig. 5.19, the con-
stant parameters were average power at 7 W and Y feed rate at 0.3 mm/s. From this
Fig. 5.18 Influence of rotational speed of workpiece and Y feed rate on circumferential overlap
Fig. 5.19 Effect of spot overlap on surface roughness (Ra) at various pulse frequencies [26]
plot, it is obvious that increase in spot overlap results in decrease in surface

roughness value at all pulse frequency values. Due to high amount of spot overlap,
the machined surface become even with least number of irregularities. From the
same plot, it is also observed that for any value of spot overlap, increase in pulse
frequency results in increase in surface roughness values. According to Eq. (5.4),
the spot overlap increases with pulse frequency. Yet, at higher value of pulse
Fig. 5.20 Effect of spot overlap on surface roughness (Ra) at various rotational speed of
workpiece [26]
frequency setting, the time interval between two consecutive pulses is low. The
laser irradiated material get evaporation energy instantly and ultimately, the total
energy absorbed by the material surface is high. Consequently, depth of craters
obtained is high and ultimately increases surface roughness values. The graph
shown in Fig. 5.20 was drawn by keeping the average power at 8 W and Y feed rate
at 0.3 mm/s. From this figure, it is clear that the value of surface roughness is
decreasing with increase in spot overlap at all values of rotational speed of work-
piece. As more material is removed from the laser irradiated zone due to high
amount of spot overlap, therefore, uniform machined surface is achieved. For any
particular spot overlap value, the roughness of machined surface is high at higher
value setting of workpiece rotational speed. The value of spot overlap is less at high
rotating speed and thus, the uneven machined surface is obtained. Figures 5.21 and
5.22 represent the variation of surface roughness values due to varying the cir-
cumferential overlap (%) drawn at different values of Y feed rate and rotational
speed of workpiece, consecutively. Figure 5.21 is drawn by keeping parameters at
constant as average power at 8 W and pulse frequency at 5000 Hz. It is clear from
Eq. (5.5) that circumferential overlap is governed by two significant process
parameters i.e. workpiece rotational speed and Y feed rate. The increasing value of
rotating speed of workpiece at constant Y feed rate setting results in increase in
circumferential overlap and surface roughness value decreases. As per Eq. (5.5),
with decreasing value of workpiece rotational speed, the value of circumferential
overlap increases and this result in reduce in roughness value of machined surface
due to uniform material removal. It is also obvious from Fig. 5.21 that for any
particular setting of circumferential overlap, higher value of surface roughness is
Fig. 5.21 Effect of circumferential overlap on surface roughness (Ra) at various Y feed rate [26]
Fig. 5.22 Effect of circumferential overlap on surface roughness (Ra) at various rotational speed
of workpiece [26]
obtained for increasing the Y feed rate. It is due to the fact that lot of null spacing is
generated for successive laser scanning and uneven machined surface is generated.
The graphical plot shown in Fig. 5.22 depicts the variation in surface roughness
due to increase in circumferential overlap. The constant process parameters were
average power at 8 W and pulse frequency at 5000 Hz, correspondingly. From this
plot, it is obvious that roughness of micro-turn surface reduces due to increase in
circumferential overlap for all values of rotational speed of workpiece. At higher
setting of circumferential overlap, the consecutive laser scanned widths comes

nearer and due to this, the amount of irregularities reduce. It is also clear from the
plot that at higher setting of workpiece rotational speed, the values of circumfer-
ential overlap increases and in turn, roughness of machined surface reduces by
reducing the surface unevenness.
5.9.3 Influence of Laser Defocusing Conditions

on Machining Criteria
In previous sections, laser micro-turning process has been carried out based on
response surface methodology (RSM) approach to explore the effect of process
parameters on machining criteria and also to achieve the optimum machining
parametric combination to obtain minimum value of micro-turning depth deviation
and surface roughness simultaneously. Moreover, in-depth investigation and studies
of spot and circumferential overlaps have also been done. The values of surface
roughness (Ra) show that the laser micro-turning surface has lot of irregular
micro-peaks, which have been generated due to variation in spot as well as cir-
cumferential overlaps and also due to sudden solidification of melted material.
However, manufactured products must be geometrically and dimensionally accu-
rate with high quality machined surface. Therefore, at this stage, further experi-
ments must be conducted taking novel machining strategies considering defocusing
conditions to remove the irregular micro-peaks from laser micro-turn surface
without much impeding the geometrical dimensions of machined parts. At defo-
cusing condition, due to enlargement of laser beam spot, the energy density of the
laser beam is reduced and the micro-peaks get sufficient energy to melt and
evaporate from the upper surface without affecting the base material. As it is not
possible to completely remove the micron-sized peaks from the surface in one pass,
therefore, multi pass laser micro-turning operation at various defocusing conditions
has been carried out and the test results were analyzed through graphical plots.
Figure 5.23 shows the schematic representation of scheme laser micro-turning
process for removing micro-peaks from laser micro-turn rough surface. The sche-
matic view of defocusing conditions of laser beam for machining micro-peaks from
rough surface is shown in Fig. 5.24. The defocus position is termed as upward
when the laser focus plane is above the workpiece surface, whereas defocus
position is termed as downward when the laser focus plane is inside the workpiece
or below the workpiece surface. As the present experimentation is dealing with
surface features, therefore, surface roughness (Ra and Rt) have been taken into
consideration as responses for the analysis. All the experiments have been carried
out at nearer feasible process parametric setting of RSM based multi-objective
optimization. Eight number of job surfaces were prepared at parametric combina-
tion of average power, pulse frequency, workpiece rotating speed, assist air pressure
and Y feed rate at 7.81 W/5600 Hz/436 rpm/0.30 kgf-cm−2/0.443 mm/s. The
Fig. 5.23 Mechanism of elimination of surface irregularities during laser defocusing
Fig. 5.24 Representation of various defocusing conditions [24]
values of surface roughness (Ra and Rt) measured for these eight experiments are
listed in Table 5.12. These eight machined work samples were used for carrying out
experimentation by varying the two process parameters i.e. defocus positions and
number of passes. The values of these two process parameters are enlisted in
Table 5.13. For each focusing position, each experiment is carried out by increasing
the number of laser scan passes (up to 10). After conducting each experiment by
increasing the number of laser scan pass, the values of surface roughness (Ra and
Rt) were measured by the same surface roughness measuring instrument. The
variation of surface roughness values was graphically plotted and analysed.
The variation of surface roughness (Ra) with number of laser passes for upward
laser defocusing positions is shown in Fig. 5.25. From this figure, it is obvious that
Table 5.12 Results of surface roughness (Ra and Rt) machined at RSM based optimal parametric
combination during preparation of surface
Expt. Process parametric combination Experimental results
No Surface roughness
Ra (lm) Rt (lm)
1 Average power = 7.81 W 5.94 45.38
2 Pulse frequency = 5600 Hz 5.87 46.21
Workpiece rotating speed = 436 rpm
3 5.84 46.02
Air pressure = 0.30 kgf/cm2
4 Y feed rate = 0.443 mm/s 5.89 45.68
5 5.98 45.69
6 6.00 45.88
7 5.88 46.39
8 5.81 46.01
Table 5.13 List of parameters and different levels for defocusing experiments [24]
Process parameters Unit Values
Defocus conditions mm −0.2, −0.4, −0.6, −0.8, +0.2, +0.4, +0.6, +0.8
Number of passes – 1, 2, 3, 4, 5, 6, 7, 8, 9, 10
Fig. 5.25 Influence of number of laser scan passes on surface roughness (Ra) at various upward
defocus conditions [24]
surface roughness is decreasing with scan passes for all downward defocusing
conditions. With number of laser scan passes, the height of micron sized peaks
decreases due to removal of materials from the peaks. From this figure, it is also
Fig. 5.26 Influence of number of laser scan passes on surface roughness (Ra) at various
downward defocus conditions [24]
revealed that for any value of laser scan pass, the surface roughness obtained are
different for various defocusing conditions. With higher value of defocusing,
roughness of machined surface is low due to finishing of irregular micro-peaks for
delivering adequate beam energy of laser. It is also obvious from the same figure
that at higher setting defocus, the surface roughness is high due to inadequate
energy density of laser beam that cannot reduce the height of micro-peaks.
In Fig. 5.26, the variation of surface roughness (Ra) with laser scan passes with
downward defocus conditions is shown in Fig. 5.26. From this graph, it is obvious
that with increase in scan passes, the value of surface roughness is decreasing due to
removal of micro-peaks from the surface. It is seen from the plot that surface
roughness again increases after certain number of laser scan passes. It is due to the
fact that the removal of irregular peaks from machined surface is reducing. At high
value of defocusing, the spot diameter of laser beam on the material is high and due
to this, the laser energy density is less. Due to this fact, the laser beam has incapable
for removal of micro-peaks from machined surface and consequently, the surface
roughness is high.
In Fig. 5.27, the variation in surface roughness (Rt) with laser scan passes is
shown for different values of upward defocus conditions. From this plot, it is
obvious that surface roughness (Rt) is decreasing for increasing value of scan
passes. As the laser scan pass is increasing, the total height of micro-peaks are
decreasing and this phenomena has direct effect on surface roughness (Rt) values.
For any particular value of laser scan pass, low value of defocus results in rough
machined surface and this is due to variation in energy densities of laser beam at
different defocus conditions. At high value of defocus i.e. at 0.8 mm, Rt is high
compared to other defocus conditions and this is due to less energy density at high
setting of defocus.
Fig. 5.27 Influence of number of laser scan passes on surface roughness (Rt) at various upward
defocus conditions [24]
Fig. 5.28 Influence of number of laser scan passes on surface roughness (Rt) at various
downward defocus conditions [24]
In Fig. 5.28, the variation in surface roughness (Rt) is shown with number of
laser scan pass at different downward defocus conditions. The graph shows that the
roughness of machined surface decreases up to definite value of scan passes. This is
due to decrease in overall height of micro-sized peaks on the machined surface. It is
seen from the plot that after few number of laser scan passes, there is no such
Table 5.14 Results of parameter settings to obtain least surface roughness (Ra and Rt) values
Responses Parameter settings of average Parametric setting of Minimum value of
power, pulse frequency, additional parameters responses
workpiece rotating speed, air Number Defocus Surface Surface
pressure and Y feed rate of position roughness, roughness,
passes Ra Rt
Surface 7.81 W/5600 Hz/436 rpm/0.30 9 0.6 mm 5.07 lm 35.08 lm
roughness, kgf-cm-2/0.443 mm/s (upward)
Ra
Surface 8 0.4 mm 5.28 lm 34.65 lm
roughness, (downward)
Rt
improvement in surface roughness. At defocus positions of 0.4 and 0.8 mm, the
value of surface roughness slightly increases afterward 7th laser scan pass. It is also
obvious from the plot that the values of surface roughness obtained are random and
least value of Rt is achieved at 8th number of laser scan pass and at defocus
condition of 0.4 mm.
By analyzing various plots of Ra and Rt, it can be concluded that the values of
surface roughness (Ra and Rt) are decreasing with number of laser scan pass for all
values of upward defocus conditions. Moreover, it is also observed that with same
value of defocus condition, Ra values are decreasing, while the values of Rt are
moderately changing. In Table 5.14, the least values of surface roughness (Ra and
Rt) obtained at different parametric settings are enlisted. The minimum value of Ra
is obtained as 5.07 lm (corresponding Rt is 35.08 lm) for upward defocus whereas
the least value of Rt is obtained as 34.65 lm (corresponding Ra is 5.28 lm) for
downward defocus.
5.9.4 Comparative Study of Focused and Various Defocus

Conditions Machining
In the previous section, it has been found that the laser micro-turning process at
defocused positions have great influence for removing the micro-peaks from the
rough machined surface. In this section, an attempt has been made to comparative
study and analysis of laser micro-turning process at focused and defocused con-
ditions considering four process parameters such as laser beam average power,
pulse frequency, workpiece rotating speed and Y feed rate. In Table 5.15, the
details of constant and varying process parameters are shown. The target
micro-turning depth is same as 100 µm. All the experiments were carried out using
one factor at a time methodology. It is revealed from the previous section that
minimum surface roughness (Ra) is achieved at upward defocusing position.
Therefore, the present experimentation is carried out at focused as well as upward
Table 5.15 Details of Process parameters Values

machining conditions
Variable parameters
Average power 5, 6, 7, 8, 9, 10 W
Pulse frequency 4000, 4500, 5000, 5500, 6000 Hz
Rotational speed 200, 300, 400, 500, 600 rpm
Y feed rate 0.2, 0.3, 0.4, 0.5, 0.6 mm/s
Condition of lens Focused, defocused
Defocused 0.2, 0.4, 0.6 mm upward
Constant parameters
Air pressure 0.3 kgf/cm2
Fig. 5.29 Effect of variation of average power on surface roughness (Ra) at focused and different
upward defocus positions
defocusing conditions. Surface roughness (Ra and Rt) were measured after con-
ducting each experiment and the test results were analyzed through various
graphical plots.
The variation of surface roughness (Ra) with laser beam average power for
focused and defocused (upward) positions is shown in Fig. 5.29. The constant
process parameters were pulse frequency at 5000 Hz, rotational speed of workpiece
at 400 rpm and Y feed rate at 0.4 mm/s. It is seen from this plot that the quality
surface is achieved at lower setting of average power. This is due to less amount of
material ablated from workpiece surface. However, with laser beam average power,
the roughness of machined surface increases. From this comparative graph, it is also
observed that the values of surface roughness are low for the machined surface
generated during laser defocused positions than focused condition. It is due to the
laser beam energy density to be low and consequently, adequate laser energy for
melting and evaporation is received by material surface which efficiently remove
Fig. 5.30 Effect of variation of pulse frequency on surface roughness (Ra) at focused and various
micro-peaks generated on the surface. For a particular value of average power, the
values of surface roughness decreases with increasing value of defocusing and it is
only due to efficient removal of micro-peaks from the machined surface.
The variation in surface roughness (Ra) with laser pulse frequency at focusing
and defocusing positions is shown in Fig. 5.30. The average power, rotational
speed of worpiece and Y feed rate were kept at 8 W, 400 rpm and 0.4 mm/s,
correspondingly. The values of surface roughness (Ra) are found to increase
slightly at focused and defocused machining conditions. With increase in pulse
frequency, peak power is decreasing. However, the time duration between two
pulses is very short and the material from top surface gets adequate thermal energy
to remove the material rapidly creating higher peaks and valleys. From the same
plot, it is observed that the roughness values are less at same parameters setting
when machining is done at defocus positions when compared to focus position and
this is due to adequate thermal energy which is received on the material surface and
consequently, the height differences of peaks and valleys are less. When applying
higher setting of defocus during machining keeping other factors constant, it is
observed to obtain less value for surface roughness.
The variation of surface roughness (Ra) with increasing value of rotational speed
of workpiece at different upward defocus positions and focused condition is
observed in Fig. 5.31. The values of other process parameters were constant as
average power of laser beam at 8 W, laser pulse frequency at 5000 Hz and Y feed
rate at 0.4 mm/s. The plot shows that the roughness of micro-turning surface is less
at defocus conditions when compared with roughness value for focus condition
machining. As it is a known phenomenon that at defocus condition, the laser energy
density is reduced and therefore, the height differences of generated peaks and
valleys are less. With increase in rotating speed, it is seen that the roughness of
Fig. 5.31 Effect of variation of rotational speed of workpiece on surface roughness (Ra) at
focused and various upward defocus positions
Fig. 5.32 Effect of variation of Y feed rate on surface roughness (Ra) at focused and various
machined surface achieved is low and it is due to increase of circumferential

overlap percentages as per Eq. (5.5). Moreover, surface roughness values are less at
higher setting of defocused condition and this is due to instantaneous melting and
afterward solidification of material on material surface.
In Fig. 5.32, the effect of variation of Y feed rate on roughness (Ra) is observed
at different defocus and focused conditions. The constant parameters were average
power at 8 W, laser pulse frequency at 5000 Hz and rotational speed of workpiece
Fig. 5.33 Effect of variation of average power on surface roughness (Rt) at focused and various
at 400 rpm. The plot shows that the roughness of machined surface increases with
Y feed rate and this is due to decrease in circumferential overlap values for higher
values of Y feed rate. Due to this, the machined surface obtained as uneven and
irregular. Here also, it is seen that at focused condition machining, the surface
roughness value is high when compared to defocused conditions.
The variation of surface roughness (Rt) with laser beam average power at
defocus conditions and focused machining condition is depicted in Fig. 5.33. The
pulse frequency, rotational speed of workpiece and Y feed rate were kept constant
at 5000 Hz, 400 rpm and 0.4 mm/s, respectively. The plot shows that the roughness
of machined surface increases with average power due to generation of micro-peaks
on the material surface. At defocused position of laser beam, with constant value of
average power, surface roughness achieved as low compared to focus machining
condition. Moreover, for higher defocus values, there is no such effect of average
power on Rt values.
In Fig. 5.34, the graph shows the variation in surface roughness (Rt) with pulse
frequency at focused and defocused conditions while keeping the other process
parameters as constant at average power at 8 W, rotational speed of workpiece at
400 rpm and Y feed rate at 0.4 mm/s. From the plot, it is obvious that Rt has no
such variation with pulse frequency at defocused positions. However, at focused
condition, Rt is slightly increasing. The values of Rt is higher at all defocus con-
ditions compared to focused positional micro-turning.
The variation in Rt with respect to rotational speed of workpiece is depicted in
Fig. 5.35 at focused and different defocus positions. The constant parameters were
average power at 8 W, pulse frequency at 5000 Hz and Y feed rate at 0.4 mm/s.
The figure shows that the roughness of machined surface decreases with rotating
speed of work sample and it is due to increase in circumferential overlap with
Fig. 5.34 Effect of variation of pulse frequency on surface roughness (Rt) at focused and various
Fig. 5.35 Effect of variation of rotational speed of workpiece on surface roughness (Rt) at
focused and various upward defocus positions
rotating speed. The plot also shows that there is no such variation in Rt at defocus
conditions. The Rt values obtained is higher in focus positional micro-turning than
roughness at defocus positions.
The variation in surface roughness (Rt) with Y feed rate at various defocus
conditions and focused position is graphically shown in Fig. 5.36. The pulse fre-
quency was 5000 Hz, average power was 8 W and rotational speed of work sample
was 400 rpm. The graph shows that the Rt values are increasing with Y feed rate
Fig. 5.36 Effect of variation of Y feed rate on surface roughness (Rt) at focused and various
and it is due to lower value of circumferential overlap at higher setting of Y feed

rate as per Eq. (5.5). It is also observed from the plot that the values of Rt are low in
defocused positions when compared to focused condition micro-turning.
5.9.5 Microscopic Observations of Laser Micro-turning

Surfaces
In this section, detailed surface features and conditions of machined micro-turning

surface of alumina work material have been observed using Scanning Electron
Microscope (SEM) during machining at various experimental schemes as men-
tioned in previous sections. SEM micrographs shown in Fig. 5.37a–f demonstrate
surface morphologies of the machined surface taken at 27 and 200 magnifi-
cations and machined at various parametric combinations utilizing Response
Surface Methodology (RSM) approach. The SEM micrographs shown in Fig. 5.37a
has been taken for the micro-turned surface machined at 9/4000/500/1.8/0.2 of
average power (W), pulse frequency (Hz), workpiece rotating speed (rpm), assist air
pressure (kgf/cm2) and Y feed rate (mm/s) parameters and the surface roughness
(Ra) is achieved as 7.20 lm. Similarly, Fig. 5.37c, e show the SEM micrographs of
machined surface machined at 9/4000/500/0.8/0.4 and 7.81/5600/436/0.3/0.443 (at
nearer feasible parametric setting which can be set in the Nd:YAG laser set-up) of
the process parameters combinations, respectively. The surface roughness
(Ra) achieved for these parametric combinations are 5.15 and 5.91 lm, respec-
tively. It is observed from Fig. 5.37b, d that for lower setting of assist air pressure
and higher setting of Y feed rate the roughness of micro-turned surface achieved is
(a) (b)
(c) (d)
(e) (f)
Fig. 5.37 SEM graphs of the surfaces machined at a, b 9/4000/500/1.8/0.2; c,

d 9/4000/500/0.8/0.4 and e, f 7.81/5600/436/0.3/0.443 of average power (W), pulse frequency
(Hz), workpiece rotating speed (rpm), assist air pressure (kgf/cm2) and Y feed rate (mm/s) [25]
comparatively low. Moreover, the SEM micrograph shown in Fig. 5.37d shows low
degree of peaks and valleys on the machined surface compared to micrograph
shown in Fig. 5.37b. Comparing the SEM micrograph shown in Fig. 5.37b, d, f, it
is observed that the there are small amount of irregularities with some peaks and
(a) (b)
(c) (d)
Fig. 5.38 Micrographs of the surfaces machined at average power, pulse frequency, workpiece
rotating speed and Y feed rate of a 7 W/4000 Hz/600 rpm/0.3 mm/s (Ra is 6.72 µm),
b 7 W/6000 Hz/300 rpm/0.3 mm/s (Ra is 6.18 µm), c 8 W/5000 Hz/400 rpm/0.5 mm/s (Ra is
7.77 µm) and d 8 W/5000 Hz/600 rpm/0.1 mm/s (Ra is 6.02 µm) [26]
valleys on the machined surface machined at optimal parametric combination.

Although, at optimal parametric setting, the micro-turning depth deviation is
comparatively low as −0.00021 mm than the values achieved in other two para-
metric combinations i.e. 0.04314 mm (Fig. 5.37b) and −0.01648 mm (Fig. 5.37d).
In Fig. 5.38a–d, the SEM images of micro-turning surfaces machined at different
parametric combinations are shown. By comparing images shown in Fig. 5.38a, b,
it is obvious that quality of machined surface is better in Fig. 5.38b compared to
shown in Fig. 5.38a. The corresponding surface roughness (Ra) values are 6.72 lm
(Fig. 5.38a) and 6.18 lm (Fig. 5.38b). This variation in surface roughness value is
resulted due to combining effects of increasing pulse frequency from 4000 to
6000 Hz and decreasing rotational speed of workpiece from 600 to 300 rpm. Due
to this variation in process parameters, the spot overlap has increased from 21.43 to
73.81%. In Fig. 5.38c, d, the SEM images shows the machined surfaces obtained at
different parametric combinations in which the value of circumferential overlap has
increased to 90% from 25% due to combined variation in Y feed rate to 0.1 mm/s
from 0.5 mm/s and rotational speed of work sample to 600 rpm from 400 rpm. The
corresponding values of surface roughness (Ra) were obtained as 7.77 lm
(Fig. 5.38c) and 6.02 lm (Fig. 5.38d).
(a) (b)
(c) (d)
(e) (f)
Fig. 5.39 Surface conditions of alumina machined at a, b defocus of 0.2 mm (downward) and
10th laser scan pass (Ra = 5.50 lm and Rt = 38.96 lm); c, d defocus of 0.8 mm (upward) and
10th laser scan pass (Ra = 5.26 lm and Rt = 36.34 lm) and e, f defocus of 0.6 mm (upward)
and 10th laser scan pass (Ra = 5.10 lm and Rt = 34.91 lm)
The SEM images at various magnifications of laser micro-turning surface

machined at different parametric combinations are shown in Fig. 5.39a–f. The
values of surface roughness (Ra and Rt) obtained at these three parametric
(a) (b)
resolidified material
micro-peaks
(c)
Fig. 5.40 Magnified SEM graphs of surface machined at a defocus of 0.2 mm (downward) and
10th laser scan pass, b defocus of 0.8 mm (upward) and 10th laser scan pass and c defocus of
0.6 mm (upward) and 10th laser scan pass
combinations are Ra as 5.50 lm and Rt as 38.96 lm (Fig. 5.39a, b), Ra as 5.26 lm

and Rt as 36.34 lm (Fig. 5.39c, d) and Ra as 5.10 lm and Rt as 34.91 lm
(Fig. 5.39e, f). It is concluded from these SEM images that quality machined
surface is obtained at defocus condition of 0.6 mm and at 10th number of laser scan
passes compared to other two parametric combinations. In Fig. 5.40a–c, the SEM
images (500 magnification) of machined surface micro-turned at same
above-mentioned three parametric combinations were shown to find out the reso-
lidified region or surface cracks on machined surface. Some micro-peaks can be
viewed in the surface shown in Fig. 5.40a. However, these peaks are absent on the
machined surface shown in Fig. 5.40b. This is due to the fact that some melted
material again resolidified on the surface itself and reduce the chances of generation
of micro-peaks on micro-turning surface. However, the machined surface shown in
Fig. 5.40c has no such micro-peaks and also resolidified material due to adequate
laser energy received by the material during machining.
(a) (b)
Focused condition Defocused condition = 0.6 mm
Fig. 5.41 Quality of machined surfaces at average power at 8 W, rotational speed of workpiece at
400 rpm, pulse frequency at 5000 Hz and Y feed rate at 0.4 mm/s at a focused condition
(Ra = 5.46 lm and Rt = 33.6 lm) and b defocused position (Ra = 5.1 lm and Rt = 31.4 lm)
The exhibited SEM images shown in Fig. 5.41a, b represent the machined
surface obtained at focused condition (Ra and Rt were obtained as 5.46 and
33.6 µm) and 0.6 mm defocused position (Ra and Rt were obtained as 5.1 and
31.4 µm) at parametric combination of laser average power at 8 W, pulse frequency
at 5000 Hz, rotational speed of work sample at 400 rpm and Y feed rate at
0.4 mm/s. By comparing these values of surface roughness as well as observing the
SEM images, it is concluded that the machined surface obtained at defocus con-
dition is much better in quality than machined at focused conditional machining.
Furthermore, there are lot of micro-peaks found on the machined surface generated
at focused condition than obtained in defocused positions.
5.10 Conclusions
In the present chapter, the capability of pulsed Nd:YAG laser for carrying out laser
micro-turning operation on difficult-to-machine 99% pure aluminum oxide (Al2O3)
ceramic has been investigated in-depth through various machining strategies and
experimental schemes. Through various experimental schemes and novel machin-
ing strategies, it is found that pulsed Nd:YAG laser has the potential to achieve
desired micro-turn depth and surface finish of the cylindrical aluminum oxide
(Al2O3) workpiece by proper controlling the process parameters. Moreover, for-
mulations of spot and circumferential overlaps have been done and effect of overlap
factors on machined surface criteria were studied to achieve accurate geometrical
dimensional parts with desired surface features. The outcomes of the present
research based on various experimental schemes in the area of the pulsed Nd:YAG
laser micro-machining of advanced ceramic material will be effectively utilized to
predict the surface conditions and dimensional features to fulfill the urgent
requirement for high precision micro-machining and micro-fabrication of ceramic
materials. Furthermore, author trusts that the research findings will definitely
provide important information to the precision manufacturing engineers in clear

understanding the influence of various process parameters of pulsed Nd:YAG laser
for successful application of this novel technique of laser turning in microma-
chining domains.
Acknowledgements The authors acknowledge the financial support and assistance provided by
CAS Ph-IV programme of Production Engineering Department of Jadavpur University under
University Grants Commission (UGC), New Delhi, India.
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Chapter 6
Fiber Laser Micro-machining
of Engineering Materials
A. Sen, B. Doloi and B. Bhattacharyya
Abstract In the present era, fiber lasers have been successfully replacing Nd-YAG
and CO2 lasers along with other conventional laser systems for various
micro-machining applications such as micro-cutting of stents, thin sheet of ferrous
and non-metals in terms of cutting speed, cut edge quality and the length of micro
cracks. The usage of fiber laser can also be observed in field of micro-machining of
various engineering materials owing to the characteristics of short pulse lengths
which range from millisecond to picosecond or even femtosecond. The present
chapter aims to carry out an in depth study of the fiber laser micro-machining, i.e.,
micro-cutting, micro-drilling, engraving, marking, etc., of engineering materials
ranging from polymer to ceramics. The aim of the chapter is also to include an
overall concept of fiber laser micro-machining system in the present scenario and its
applications along with the occurring physical phenomena and influence of various
process parameters on the fiber laser generated micro-features.
6.1 Introduction
In the present era of commercialization and advancements in technology, smaller

but effective products are in utmost demand in places starting from the household to
heavy industrial areas. The booming interests towards new products with new
functionality in each passing day, not only demand stringent research, but also
A. Sen (&) B. Doloi B. Bhattacharyya

B. Doloi
B. Bhattacharyya

DOI 10.1007/978-3-319-52009-4_6
228 A. Sen et al.
enhancement of the present machining facility available in the world. Conventional

machining approaches towards various engineering materials with high ductility
and brittleness are not only cumbersome, but also suffer from the prolonged
machining time along with cost ineffectiveness. These result into poor machining
surfaces with high tolerances which fail to match up with the present need of
stringent quality control. On the contrary, non-traditional machining
(NTM) approaches with different form of energy as an input energy, i.e., thermal,
mechanical, etc., are more suitable to meet up the challenges towards achieving a
high surface finish and astoundingly good machining quality.
Laser has emerged as one of the best machining solution from the NTM family
for achieving thick material cutting to solar cell scribing with the least amount of
time and flexibility of the process along with cost effectiveness. Laser
micro-machining process can be attributed as an application which requires a
substantial amount of energy (in pulse mode operation) to induce the change in state
along with phase transformation in a small volume for a given material [1]. Among
the recent advancements in the laser systems, fiber lasers have observed a rapid and
consistent growth from the stent cutting to the thick and thin material cutting,
drilling, etc.
The pulsed mode of the fiber laser system, with an output power less than
200 W, is most suitable for micro-machining of a wide range of engineering
materials owing to its superior features such as simplicity, ruggedness, cost effec-
tiveness, low maintenance, higher efficiency, higher reliability and smaller spot size
[2]. Fiber laser micro-machining approaches towards various difficult to machine
materials for generating precise micro-features such as micro-channels,
micro-grooves, micro-holes, etc., mainly in the domain of bio-medical, automotive
and aerospace engineering, have aided to become the most versatile and rapid
growing laser systems in the last decade.
6.1.1 Fundamentals of Fiber Laser Generation
Fiber laser, since its inception in 1961, moved along the path of technological
advancement from the developments of high power diode lasers, low loss doped
glass fiber, diode-fiber coupling devices, Bragg gratings, etc. [3]. A simple fiber
laser can be constructed by placing a fiber amplifier inside a cavity designed to
provide optical feedback. Laser is generated by pumping the diodes to excite lower
energy molecules to the excited states. Fibers, having one core and one cladding
along with the protective coating, are usually made of silica glasses for the purity.
The propagation of the lasing mode is in the core, whereas, the propagation of the
pump beam is by the outer layer cladding. The primary function of the outer layer
cladding is to confine the pump light, which allows the pumping of the core with a
high power beam. Fiber glass usually has a higher refractive index core which is
followed by a low refractive index of the cladding. Further, this particular property
of the outer layer cladding converts pump light of relatively low brightness to a
6 Fiber Laser Micro-machining of Engineering Materials 229
Fig. 6.1 Schematic

representation of a simple
fiber structure
much brighter laser beam. A schematic representation of a fiber is shown in the

Fig. 6.1.
The most popular rare-earth elements that are doped with the optical fiber are
neodymium (Nd3+), ytterbium (Yb3+) and erbium (Eb3+), which are further pumped
by diode lasers operating at a wavelength range of 950–980 nm. Out of the above
mentioned rare earth doped elements, ytterbium (Yb3+) is considered to be the most
widely accepted element owing to its low quantum defects, and high quantum
efficiency (close to 95%) [3]. In addition to this, Yb3+ doped optical fibers are
useful to control the refractive index along with the photon absorptions. Phosphate
glasses have provided a good alternative solution than silica glasses by providing a
higher Yb3+ emission cross-section and laser efficiency as compared to silica
glasses [4]. Stępień et al. [4] demonstrated a development of the thermally stable
Yb2O3-high-doped phosphate glass synthesized in a P2O5–Al2O3–Yb2O3–BaO–
ZnO–MgO–Na2O oxide system. The characteristics of high transmittance along
with a low absorption coefficient in a wide spectral range of 320–2700 nm is
associated with Yb3+ doped developed glasses.
The numerical aperture by virtue of which the effective angle of light can be
altered, is associated with the acceptance of light, i.e., higher the numerical
230 A. Sen et al.
aperture-higher the broad light of acceptance. The light propagation into the fiber
itself is dependent on five characteristics; (a) fiber type, (b) fiber size, (c) numerical
aperture, (d) refractive index and (e) doping of the fiber. Fiber Bragg gratings act as
mirrors which also control the amount of reflections for a particular wavelength.
The combination of fiber with Nd3+, Yb3+ etc., along with the fiber Bragg gratings
form the base of a fiber laser. The wavelength of the reflected light is determined by
the longitudinal period of the grating and the percentage of the reflected radiation is
controlled by the magnitude of the refractive index [3]. Fiber lasers reflect the light
through the optical cavity so that the string of photons stimulates the atoms to store
and release the light energy by means of useful wavelengths. The photons absorbed
by ytterbium ions, may disappear. The electrons moving around the atomic nucleus
move to the higher orbit by absorbing energy. Pumping is a process by virtue of
which the energy is injected and stored by the fiber. Within a millisecond, the
stimulated electrons drop to ground states (for example, drops to 1064 nm in the
case of infrared laser system). In order to maximize the coordination of pumping
and emission, the fiber cavity resonator is formed [3]. At the pump end of the
cavity, a high reflector fiber Bragg grating is sliced to the fiber doped with the
ytterbium atoms. However, at the output end, a similar kind of Bragg grating with a
modest reflectivity is installed. A schematic representation of the fiber laser
structure is represented in the Fig. 6.2.
As a result of the above mentioned phenomenon, the light which propagates
along the fiber, stays with the fiber. Such a design of the fiber laser is termed as a
monolithic device. The length of the doped fiber is important as it determines the
amount of light that can be absorbed within the fiber. The long length of the fiber
results in a high surface to volume ratio, which aids in removing the excessive
amount of heat from the fiber. Usually, fiber laser has an absorption length, which is
95% of the pump energy [5].
The number of diodes for pumping is dependent on the output power of the fiber
laser. Large numerical aperture diodes with high power along with the larger
diameter output fiber are the most preferable for the construction of the high power
fiber laser. In the recent years, invention of double clad fiber lasers leads to fiber
lasers with high power, greater electrical efficiency and astoundingly high bright-
ness. Double clad fiber lasers have higher numerical aperture and larger in diameter
as compared to the single mode fiber lasers. When the laser is assembled and
pumped power to the diode, much of pump light passes down the cladding without
intersecting the dopant ions in the core of the fiber. Without the intersection and
Fig. 6.2 Schematic representation of fiber laser structure inside the laser head
transformation of the power, the laser cannot be generated. To overcome this

problem, extra reflective facets on the outside of the first cladding can be used.
During the laser generation and propagation of laser along the length of the fiber,
two kinds of non-linear effects, i.e., stimulated Brilluin scattering and stimulated
Raman scattering [6], can be observed. To overcome these phenomena, the length
of the fiber along with the diameter of the core can be increased. However, it may
lead to the reduction of the laser light intensity in a considerable amount compared
to the single mode beam quality. Bending of fiber to some extent may change the
acceptance of light by the fiber and improve the beam quality. In addition to this, a
residual pump stripper with high refractive index can be utilized at the end of the
fiber to overcome the loss of thermal energy.
6.1.2 Different Types of Fiber Laser Systems
Fiber laser power output up to 1 kW range are most desirable for material pro-
cessing applications, such as metal cutting, welding, brazing and marking [7]. In the
present era, ultrafast fiber lasers, based on passive mode-locked fiber oscillators,
have been dominating both the industrial and scientific realms. The amplification
during the several stages of ultrafast fiber laser generation and beam deliver system
have allowed them to reach at the desired output pulse energies. A large variety of
fiber components rely on all-fiber systems to be constructed rather being utilized
only for the beam delivery system. Core diameters of a conventional rare earth
doped fiber amplifiers are typically in the range of 5–10 lm. Chirped pulse
amplification (CPA) technique for ultrafast fiber laser systems, is a new design
concept designed for preventing nonlinear processes in the fiber amplifiers for better
utilization in various micro-machining applications [8, 9]. Over the years, the fiber
mode area has undergone several modifications to achieve a continuous increase in
achievable pulse energies.
In general, fiber laser can be broadly classified into two types: (a) continuous
fiber laser and (b) pulse fiber laser. Fiber laser can be further classified into single
frequency fiber laser, Q-switched fiber laser and mode locked fiber laser.
A continuous fiber laser consists of high reflector (HR) and output coupler
(OC) along with fiber Bragg gratings [10].
Usually, a single-frequency fiber laser is pumped by a single-mode pump diode
in order to obtain an output power, ranging from a few tens up to hundreds of
milliwatts. In Q-switched fiber lasers, longer pulses are obtained in longer fibers.
However, if the pulse duration becomes longer than round-trip cavity time, pulse
breakup may occur. On the flip side, optimal utilization of the intrinsic cavity mode
structure in an optical fiber oscillator is utilized by the mode locked fiber laser, in
order to produce short pulse, as depicted in the Fig. 6.3. In the recent years,
232 A. Sen et al.
Fig. 6.3 Schematic representation of a mode locked fiber laser with acousto optic modulator
end-to-end all-fusion-spliced-fiber master oscillator power amplifier (MOPA)

designs (pulsed operation is obtained by means of an external electronically con-
trolled modulator) are also utilized in fiber-coupled semiconductor lasers [10].
However, for the thick material cutting, continuous fiber lasers are more suitable,
whereas pulse fiber lasers are commonly employed to produce high peak intensity
laser beam for achieving high aspect ratio micro-channels, micro-holes, etc.
Depending on the regime of the pulse width of the fiber laser, it can be also termed
as nanosecond, picosecond or femtosecond pulsed fiber laser systems.
6.1.3 Importance and Advantages of Fiber Laser

in Micro-machining Domain
The importance of fiber laser system for the micro-machining domain is inevitable.
Fiber lasers are ideally suited for the generation of micro-features required for the
bio-medical applications, electronics industries, automotive and aerospace indus-
tries. The importance of fiber laser for the fabrication of micro-features on a wide
range of engineering materials lies in its characteristic features. The astounding
features of fiber laser such as compactness, elimination of complex cooling systems,
excellent constant beam properties, long focal lengths, and rapid warm-up make it
ideal for the applications in the aforesaid manufacturing industries. Fabrication of
stents and seam welding pacemakers and implantable batteries for medical appli-
cations are fewer possibilities of the fiber laser [11].
6.1.3.1 Superior Beam Quality
The laser beam quality is determined by the wavelength, beam waist radius along
with far-field divergence and further, it is defined by M2 value. Further, the highest
beam quality lasers will be defined as M2 close to 1. The high quality laser beams
are formed due to the long and thin gain medium. Fiber lasers which are com-
mercially available are high quality beams ranging up to a few kW.
The primary characteristics of the high quality beams are that, it can be focused
on a small spot on the workpiece, providing high power density thereby leading to
faster processing time. Compared to the other laser technologies, fiber laser beams
have a longer focal length (working distance) along with greater depth of focus
(workpiece positioning tolerance) [11]. Further, the beam diameter can be smaller if
there is a fixed focal length and focus spot size. Therefore, a larger area of
parameter space is achieved because of the high beam quality and hence, the optical
parameters for a process are easily optimized.
6.1.3.2 High Wall Plug Efficiency and Reduction of Operating Cost
The wall plug efficiency of a laser is defined by the ratio of the electrical power
efficiency to optical power efficiency. High wall plug efficiency around 25–30% can
be achieved for the fiber lasers due to the high efficiency of the pump source and the
extraction from the gain medium. Therefore, this not only involves lower operating
cost but also requires reduced electrical supply along with reduced cooling
requirements which is up to 300 W, compact laser head design.
Further, fewer mechanical components are required in the construction of the
laser as compared to the other solid state lasers. This invariably helps the fiber laser
to be cost competitive compared to the other kW class, such as CO2 lasers, as used
in several flat-bed cutting applications.
6.1.3.3 High Reliability and Low Maintenance
Fiber Laser products in the present market are offering 100,000 h MTBF (mean
time before failures) for their pump sources which is equivalent to over 11 years of
operation in total [11]. At present, the fiber laser products have demonstrated over
40,000 h of operation already and they are still being used today, owing to its high
reliability. Therefore, it will be difficult for any industrial technology to currently
replace any laser diodes primarily due to the cost and time effectiveness of the
system. Another interesting feature that adds a feather in the cap of the diode
pumped fiber laser system is the low routine maintenance. This feature is primarily
because of its all fiber construction, which means that no beam delivery optics or
alignment of the resonator is required. In addition to this, minimum or almost no
cooling system is required for the running of the fiber laser system as compared to
Nd-YAG laser system.
6.1.3.4 Ease of Beam Delivery
Apart from being highly reliable and cost effective, fiber lasers possess easy
operating features that are the light that generates inside the fiber, delivers to the
234 A. Sen et al.
work material within the fiber. This particular phenomenon enables a stable setup
and eradicates any issue relating to the number of beam delivery mirrors or prob-
lems arising out of coupling laser beam into a beam delivery fiber.
6.1.4 Basic Principle of Fiber Laser Micro-machining

Process
The working range of the fiber laser is either in the near infrared (NIR) or infrared
region (IR). Fiber laser micro-machining process is based on the interaction of the
laser light with the top surface of the working material in order to remove a small
amount of material from the surface. It is a well known fact that the photon energy
is inversely proportional to the laser working wavelength, i.e., shorter the
wavelength-higher the photon energy. When the working wavelength (1064 nm) of
the fiber laser is shortened either to the first order harmonic wavelength (532 nm) or
second order harmonic wavelength (264 nm), the thermal process changes into a
chemical process, which eventually break the bonds of the workpiece material [12].
As a result of this, fiber laser micro-machining process can be classified into two
distinct features, i.e., photo-thermal process and photo-chemical process.
Photo-thermal processes are identified mostly in metals, ceramics, alloys, etc.
Photo-thermal processes are characterized by a rapid thermal cycle, heating, melting
and partly evaporation of the heated volume [13]. Whereas in photo-chemical
process, the photon energy is sufficient enough to break the chemical bonds, which
is mostly suitable for polymers and plastics.
Fiber laser micro-machining process for various engineering materials ranges
from nanosecond regime to femtosecond regime. Depending on the laser-material
interaction time, the micro-machining quality is varied. Based on the laser-material
interaction time regime, three processes can be distinguished. In all the three pro-
cesses, first, absorption of the photon by an electron occurs and then the rest of the
set of other physical steps are varied depending on the time regime. In nanosecond
ablation of the materials (for metals), the absorbed laser energy first, heats the
workpiece to its melting point and further to the vaporization temperature. During
the interaction time, the loss of energy is associated with the heat conduction into
the solid material. Nanosecond pulse ablation is associated with the detrimental heat
affected zone (HAZ) which can be partially overcome by picosecond ablation. In
picosecond ablation, the pulse length is in the same order during the time of
transferring the energy from the electrons to the lattice. However, the picosecond
ablation also suffers from a considerable amount of evaporation and the formation
of the melted zone inside the material [13]. This pertinent problem can be com-
pletely eliminated by femtosecond ablation as no time is available for the heat
transfer to the lattice during this series of processes in femtosecond ablation. This
results in no heat affected zone and precise micro-machining characteristics.
6.1.5 Applications of Fiber Laser in the Micro-machining

Domain
In the field of medical sciences, fiber laser micro-cutting process has been widely
accepted process instead of lamp pumped pulsed Nd-YAG lasers. Manufacturing of
medical devices is a daunting task because of their relatively small size, use of
expensive materials and ability to fit into small areas. In this scenario, fiber lasers
can operate in the areas which can tolerate the power of only a few microns for
being an effective solution for costly and smaller devices.
Fiber laser micro-machining has emerged through the micro-cutting of cardio-
vascular stents over the years. Fiber lasers have obtained a decent market share in
the present era, in the field of fine and precise micro-cutting which combines both
continuous mode as well as pulse mode, aided by fusion cutting (inert gas to
sublimation cutting) [14]. Fiber lasers are commonly employed in thin material
cutting, whereas the other solid state lasers and gas lasers such as Nd-YAG and
CO2 lasers are mostly utilized for the thick material cutting. Although, experimental
studies carried out by Olsen et al. [15] demonstrated that the fiber laser cutting
efficiency for thick materials is better than that of a CO2 laser. Comparative
experiments were conducted by Kleine et al. [16] and Meng et al. [17] in order to
analyze the quality of cutting between the fiber lasers and the Nd-YAG lasers. The
result of the analysis was that, with the fiber laser cutting, cut quality was com-
paratively better than the Nd-YAG lasers, i.e., in terms of roughness, heat affected
zone (HAZ) and kerf width. The number of research works employing fiber laser in
order to micro-machining of difficult to machine materials with the aid of fiber laser
systems, is increasing rapidly in the recent years. Fiber laser ablated micro-holes in
various super alloys such as Ti-6Al-4V, nickel super alloys are utilized for various
automotive and aerospace applications.
Fiber laser marking process is one of the key areas that have emerged through
the marking of electronic goods to the daily household products. Hard coated
plastic cases have been adopted by several manufacturers in order to provide
scratch resistance. However, laser marking over such surfaces without damaging it
is typically daunting task because in this case, a précised balance between the peak
power, average power as well as the pulse energy has to be maintained. As a result
of this, fiber lasers are replacing green [18] and other ultrashort lasers which are not
cost effective compared to the fiber lasers.
An increase in the touch screen usage has created a more functional thin-film
processing application for fiber laser systems. Multi-pass processing enables this
application, where the initial pass removes the bulk of the film and the secondary
passes cleanses the residues by using a combination of different process parameters,
short pulses, high pulse frequency and high speed. Fiber lasers have the ability to
change the parameters such as pulse energy, pulse duration within few microsec-
onds. Controlled heating characteristics that provide better and faster marking can
be obtained by the use of long duration pulses and high repetition rates. These long
duration pulses and high repetition rates strongly resemble gated continuous wave
236 A. Sen et al.
pulse fiber laser than the high peak power nanosecond pulses. Fiber laser engraving
is another emerging area of fiber laser in the field of micro-machining. Other key
features of fiber lasers are hallmarking, texturing, and personalized marking on a
wide range of precious materials.
6.2 Different Units of Diode Pumped Fiber Laser

Micro-machining System
Details of a 50 W ytterbium doped fiber laser system with a wavelength of

1064 nm working in TEM00 mode of operation, made by M/S Sahajanand Laser
Technology Limited (Model: AKSHAR Fiber Pro-309), have been discussed.
A diode pumped fiber laser micro-machining system is comprised of (a) power
supply unit, (b) laser head, (c) collimator, (d) beam bender, (e) beam delivery unit
and focusing lens, (f) assist gas supply unit and (g) computer numerical control
(CNC) controller for X–Y–Z movement. Fiber laser is generated within the laser
head with the aid of power supply unit. The rest of the aforesaid sub-systems of a
fiber laser are utilized in the beam delivery system. The schematic diagram of the
fiber laser micro-machining setup is shown in the Fig. 6.4. In the aforesaid fiber
laser system, the working range of pulse frequency is 50–120 kHz, whereas pulse
width is in the regime of 120 ns.
6.2.1 Power Supply Unit
The power supply unit consists of a 1.5 kVa of isolation transformer and 1 kVa of
uninterruptible power source (UPS). The isolation transformer is connected with the
main power supply unit and the UPS is connected to the isolation transformer. The
pumping of laser diodes inside the laser head is achieved via the power supply unit.
6.2.2 Laser Head
The diode pumped fiber laser system is comprised of a fiber itself doped with Yb3+,
fiber Bragg grating and number of diodes. The number of laser diodes is dependent
on the total output power of the system. A total number of 8 diodes are utilized in
the present system for pumping. Fiber Bragg gratings are sliced into two ends of the
fiber optics so that the laser can be generated. The total length of the fiber can be up
to 3 mm depending upon the output power generated by the fiber laser.
Fig. 6.4 Schematic diagram of a fiber laser micro-machining set up
6.2.3 Collimator
After the generation of the laser within the optical fiber, the laser is transferred into
a collimator. In the collimator, two prisms are fitted at the two ends of it. This
collimator acts as a beam expander, i.e., the laser can propagate to the required
distance. The diameter of the laser beam is 9 mm at the end of the collimator.
6.2.4 Beam Bender
After the collimator, a beam bender with 100% reflectivity is placed at an angle of
45º with the horizontal plane so that the laser can be perpendicular to the focus lens.
At the top of the beam bender, a charge couple device camera (CCD) is placed
which is further connected to a CCTV.
238 A. Sen et al.
6.2.5 Beam Delivery Unit and Focusing Lens
The laser finally propagates through a f-h lens of 71 mm of diameter (focus lens)
which is protected by a nozzle for preventing against dust and other contaminations.
The spot diameter of the fiber laser beam is 21 µm. The laser beam falling on the
surface from the focusing lens has to be précised and appropriately aligned. If the
center of the lens does not coincide with the beam center, then the beam that will
pass through the lens will not be linear, resulting in low energy of the laser beam
and less micro-machining efficiency. CCTV and CCD camera are the two units
used for focusing. At the top of the laser head, the CCD camera is placed in order to
capture the image during the operation of the laser micro-machining. Further, the
beam should also be focused on the surface so as to receive optimum
micro-machining operations.
The function of the CCTV is to adjust the position of the focused beam on the
workpiece. This device is connected to the CCD camera so as to obtain précised
laser beam focusing condition. After the laser beam is appropriately focused, the
material melts at a faster rate and thereby evaporates. This is the reason why the
focal point position of the laser beam should be properly adjusted. A CNC con-
trolled arrangement is provided in the experimental setup, in order to effectively
adjust the focal point of controlling the lens movement position along the Z axis.
6.2.6 Assist Gas Supply Unit
Inert gases such as nitrogen, argon, helium, etc., along with compressed air can be
supplied through a co-axial nozzle attached to the beam delivery system depending
upon the selection of micro-machining process and materials. The jet flow of
assisting gas assists in removing the molten material from the ablated surface to
partially overcome re-solidification of the molten material from the
micro-machining zone. If any compressed air flow is required, then the supply line
must pass through a moisture separator and should be connected further to a
pressure regulating valve. It results in the jet flow of dry pressurized air to the laser
micro-machining zone. The laboratory setup has a vacuum job fixture which can
hold a workpiece up to 1 mm of thickness when the compressed gas pressure is
4 kgf/cm2.
6.2.7 CNC Controller for X–Y–Z Movement
A CNC controller unit not only controls the movement of the worktable along the
X-Y axis, but also controls the movement of the laser nozzle along the z axis. Servo
motors are attached to each of the axis and are also connected to the servo
interfacing unit. This servo controller is connected to the computer system (inter-
face software-I mark plus) from where the axis movements of the X–Y worktable
are controlled. If any movement of the X, Y or Z axis is required, then the computer
system sends a command to the servo interfacing unit which is followed by
receiving a command for the respective servo motor movement in the specific
directions.
The axis of the fiber laser system can be governed by either CNC based motor
system or galvanometer type motor system, depending upon the applications of the
fiber laser systems. For marking and scribing applications, a galvanometer type
system is most preferable. In contrast to the aforesaid system, CNC based system is
well recognized for cutting, drilling and various micro-machining applications.
Generally, in CNC based fiber laser systems, the table can only move in the X–Y
direction, whereas the laser head can only travel in Z direction. In a sharp contrast,
galvanometer type laser systems rely only on the movement of the laser head in
X-Y-Z direction. As a result of this, scanning speed can be very high, sometimes
even up to 3000 mm/s. In the aforesaid fiber laser micro-machining system, a CNC
type system is utilized where the maximum cutting speed ranges up to 70 mm/s.
Although, for the optimum results of the system, maximum cutting speed of
40 mm/s can only be utilized.
6.3 Various Fiber Laser Micro-machining Operations

on Engineering Materials
Commercial acceptance and application of fiber laser micro-machining has

increased in the recent years due to the astounding mode quality and high focusing
ability, which are necessary for achieving small size features. The growth of more
efficient, compact, high beam quality fiber lasers in the recent years is due to the
increased demand for extremely fine machining. Over the years, the widely used
commercial laser was Nd-YAG lasers because of its ability to produce a fine cut
quality of a variety of engineering materials along with their drilling and welding
ability. Fiber lasers as compared to the CO2 lasers, at 1 µm wavelength, have better
and smaller focusing ability in order to achieve smaller spot sizes. In the present
era, several optimizing research works have been carried out in order to improve the
micro-cutting quality.
Compared to the conventional lasers, fiber lasers function at near infrared
(IR) spectral region and provide a range of advantages along with the promise to
create avenues for new micro-machining applications. Fiber laser micro-machining
of metals, alloys are governed mainly by the photo-thermal process. Various pro-
cess input parameters such as laser power, laser beam focal position, composition
and thickness of the workpiece material, scanning speed/cutting speed, pulse width,
pulse repetition frequency, number of passes, type of assisting gasses along with
assisting gas pressure, etc. are the major governing variables considered for the fiber
240 A. Sen et al.
laser micro-machining of a wide range of engineering materials. The quality

characteristics (or process performance) of interest in fiber laser micro-machining
are material removal rate (MRR), machined geometry (kerf width, hole diameter,
taper), surface quality (surface roughness, surface morphology), metallurgical
characteristics (recast layer, heat affected zone, dross inclusion) and mechanical
properties (hardness, strength, etc.) However, fiber laser micro-machining of metals
and alloys are commonly associated with the formation of striation, dross, recast
layer, HAZ, micro-cracks along with the micro-machining zone [19].
6.3.1 Micro-cutting
Okamoto et al. [20] partially tried to overcome dross free fiber laser micro-cutting
of a copper plate of 100 µm of thickness in the presence of nitrogen assists gas with
the aid different set of nozzles. It can be summarized from the experimental results
that not only the maximum cutting speed varied with the different set of nozzles, but
also straight cut profiles were achieved with minimum HAZ. Another investigation
on laser cutting of various micro-patterns on carbon fiber reinforced polymer
(CFRP) with a continuous wave fiber near-IR laser (k = 1090 nm) to achieve
précised cutting of CFRP, devoid of debris and thermal damages around the
grooves was conducted by Niino et al. [21]. A fast beam galvanometer scanning
process with the multiple-scan-pass method was conducted along with the fiber
laser irradiation on CFRP. The observations that were made out of the experiment
was that, fine cutting of 3 mm CFRP sample at fiber laser irradiation with a 15
multiple-scan-pass (scanning speed: 0.8 m/s) was free of debris and other thermal
damages around the periphery of the micro-machining zone. Further, around
600 µm of the kerf width of the groove on the laser beam incident surface was
observed. Thin film solar cell micro-machining with the aid of high power ultra-
short fiber laser was carried out by Lecourt et al. [22], where the pulse repetition
rate was varied from 100 to 1 MHz. Another set of comparative study [23]
showcased the advantages of using bursts of picosecond pulse for micro-machining
of materials compared to the nanosecond source, having the same pulse energy
along with pulse width and pulse shape. The result of the experiment was satis-
factory when bursts of picosecond pulses were used, as the material removal along
with the surface quality was as high as 25% and more in comparison to the
nanosecond pulses having the same pulse energy along with the combination of
pulse width and pulse shape.
In a set of comparative study, femtosecond pulsed micro-machining with
1.56 µm erbium-doped fiber-laser oscillator-amplifier system along with direct
amplification and pulse extraction was carried out by Mizunami et al. [24]. For the
pulse extraction and amplification, a peak power, as high as 25 kW was obtained.
Further, with the process of pulse extraction and amplification, a 6 µm trace of
ablation was observed on an amorphous carbon film. The experimental result was
narrower than that of 16 µm of direct amplification. On the flip side, when
polyvinyl chloride film underwent micro-machining with the aid of a fiber laser, it
was observed that direct amplification was more suitable and a cutting width as low
as of 4 µm was obtained from the experiment. Further, for an increased repetition
rate of 100 kHz, optical damage was observed to be less, owing to the lower peak
power of the fiber laser. However, the same phenomenon was not observed in the
case of direct amplification. Another study of precise laser micro-machining on
multiple layers of ceramic/metal (thermal barrier coated super alloy) was conducted
by Qi et al. [25]. In this experiment, an industrial-grade economic nanosecond
pulsed fiber laser was utilized in order to study the relationship between the process
parameters and machining geometric features of stainless steel (SS) 304, copper,
Inconel 718 and TBC coating samples. It was found that the depth of the trench was
dependent on the laser peak fluence in a logarithmic relation. When the beam waist
was 50 µm for SS304 and 30 µm for copper, the volume removal rate was high. It
was also observed that a similar trend was followed by the finite element model
(FEM) model predicted volume removal rate along with the beam waist variation.
Finally, for TBC coating, fiber laser micro-machined surface roughness using laser
scanning was measured 5.96 µm (Ra), whereas for Inconel 718, surface roughness
turned out to be 7.32 µm (Ra).
6.3.1.1 Stent Cutting
The most promising possibility of fiber laser in the field of bio-medical lies in
profile cutting for cardiovascular stent, which is a lattice-shaped metal tube which is
utilized for the implantation into arteries [26]. Cardiovascular stents can be made of
various materials such as nickel titanium (NiTi) alloy, stainless steel. Liu et al. [27]
analyzed the effect of fiber laser process parameters such as surface roughness, kerf
width, heat-affected zone (HAZ) and formation of dross for the fabrication of
vascular stent on NiTi alloy tube of outer diameter of 1.8 mm and wall thickness of
240 µm. The experiments were performed with the continuous water flowing
through the inside walls of the tube in the presence of argon as an inert gas
(constant pressure of 0.45 bar). It was observed that due to the wet cutting con-
ditions, pure striation topography was not formed. The optimum choice was the
mixed topography striation ratio for the micro-cuts having lower surface roughness,
low kerf width and corresponding small recast layer than the micro-cuts bearing
other topographies. Kerf width geometry was influenced by the power density. An
increment in the power density causes an increase in pulse energy. This in turn
resulted in the increment of the kerf width dimensions. The entry cut width was
found to be wider than 30 µm or even 35 µm, when the power density varied from
2900 to 8000 J/nm. Further, at an intermediate power density along with the low
cutting speed, smallest entry width of 25.53 µm could be achieved. On the other
hand, at high power density followed by fast cutting speed, entry kerf width was
obtained which was 38.59 µm (maximum dimensions for the kerf width). With the
increase in the power density, it was also observed that the surface roughness along
with the kerf width had the tendency to increase. However, with the settings of
242 A. Sen et al.
different combinations of the aforesaid parameters, the results varied. Further, it was
observed that the cutting speed was the most critical parameter for obtaining good
surface finish compared to the other process parameters. In addition to this, surface
topographies also varied with the cutting speed, while keeping the power density as
constant. Spot overlapping factor determines the uniformity and smoothness of the
micro-machined profiles, i.e., higher the spot overlapping factor-higher the uni-
formity and smoothness of the profiles. Cutting speed is also associated with the
spot overlapping factor [14]. When the cutting speed is high, the spot overlapping
factor is low. The phenomenon reverses back with the increment in the cutting
speed. Meng et al. [17] utilized a 50 W fiber laser system for the micro-cutting of
316L stainless steel tube (thickness 110 mm, diameter 2 mm) cardiovascular stents
in order to observe the effects of various micro-cutting parameters including laser
output power, pulse length, repeat frequency, cutting speed and assisting gas
pressure on the kerf width profiles. The kerf width was the primary function of the
cutting speed in order to obtain different laser power outputs. The repeat frequency
was observed to be 1500 Hz, followed by 0.15 ms of pulse lengths along with
0.3 MPa of assisting oxygen gas pressure. The kerf width dimensions increased
with the increment of laser output powers owing to high power density. The
phenomenon reversed back when the cutting speed increased, because of the low
power density. The kerf width size also increased when both the pulse length and
repeat frequency were increased. It was observed that the kerf width was less than
20 µm along with low roughness and HAZ when the fiber laser process parameters
were, laser output power of 7 W, pulse length of 0.15 ms, the repeat frequency of
1500 Hz, cutting speed of 8 mm/s and assisting oxygen pressure 0.3 MPa. Another
experiment carried out by Muhammed et al. [28], showed the effect of both wet and
dry 316L stainless steel with the aid of fiber laser system. It was concluded from the
experiment that in the case of wet stainless steel cutting, the results were com-
paratively better in terms of narrower kerf width along with low surface roughness,
less dross, no back wall damages and smaller HAZ. All these positive features
would lead to lower cost of post-processing of the material. In order to control the
micro-cutting quality, low average power with the combination of low pulse width,
play a significant role. To achieve high aspect ratio profiles, pulse width should be
lower in order to increase the laser beam penetration rate. However, this in turn will
lower the pulse energy irradiated on the workpiece. The controlling of all the
process parameters is critical and can be achieved by the extensive research works.
6.3.2 Micro-grooving
Laser grooving process can be characterized by the jet flow of gas in order to
remove excessive amount of molten material from the micro-grooved zone. The
characteristics of three-dimensional heat transfer, moving boundary, a multi-phase
and spatially distributed heat source are associated with the fiber laser
micro-grooving process [29]. Sen et al. [14] carried out a total of 49 experiments of
Fig. 6.5 Microscopic view of the micro-groove width at different number of passes [14]
fiber laser micro-grooving on Ti-6Al-4V in an open atmosphere to find out the

influences of various process parameters such as laser power, pulse frequency, scan
speed and number of passes the geometrical aspects of micro-grooves, i.e., width,
depth and surface roughness. The experimental results showed that the depth and
width dimensions tend to decrease with the higher scan speed with the combination
of low pulse frequency, whereas with the increase of pulse frequency combining
moderate scan speed, reduction in the dimensions of width and depth were
observed. It was also found that depth tend to increase while width decreased with
the increment of the number of passes. With the more heat input, width and the
depth of the micro-grooves increased simultaneously. Smooth micro-groove pro-
files were obtained with the combination of low scanning speed and high pulse
frequency. A microscopic view of a fiber laser ablated micro-groove on Ti-6Al-4V
is shown in the Fig. 6.5. Another research work carried out by Biffi et al. [30]
revealed that a nanosecond pulse fiber laser could be utilized in order to fabricate
linear grooves of on poly crystalline FSMANi45Mn33Ga22. The authors observed
that the scanning velocity was a more critical parameter on the micro-grooves width
dimensions rather than the number of the laser pulses. On the contrary,
micro-groove depth dimensions tend to vary with the change in the laser pulses.
However, the formation of micro-cracks in the middle of the micro-grooves was a
problem associated with the aforesaid material.
6.3.3 Micro-channeling
Laser ablated micro-channels are growing field of interest for the fabrication of
micro-fluidic channels not only in the bio-medical applications, but also in micro
electrical mechanical systems (MEMS). Fiber laser technology has moved away
beyond the growing interest for the fabrication of micro-fluidic channels using
nanosecond pulse or picosecond pulse fiber laser systems. Sen et al. [31]
244 A. Sen et al.
Fig. 6.6 Microscopic view showing the widths of the micro-channel profile at 50 mm/s of scan
speed, 15 W of average power, 50 kHz frequency and number of pass of 1 [31]
successfully facilitated a multi diode pumped infrared fiber laser system to fabricate
micro-fluidic channels on polymethyl methacrylate (PMMA). Scan speed of
10–300 mm/s, pulse frequency of 50–90 kHz, average power of 5–15 W and
number of passes of 1–5; were considered for the utilization of fiber laser in this
domain. The author found some of the micro-channel profiles having high aspect
ratios such as 2.34, 2.06 and 0.87. In addition to this, the waviness of the
micro-channel profiles along with HAZ width was found to be less for some of the
micro-channeling conditions. However, some of the micro-channel profiles suffered
from the uniformity and re-solidification along the micro-channel profiles which is
shown in the Fig. 6.6. Sen et al. [32] also carried out sensitivity analysis of the
process variables (scan speed, pulse frequency, number of passes and average
power) considered for the fiber laser ablated micro-channel profiles on PMMA. The
sensitivity analysis revealed that pulse frequency was the most critical parameter for
obtaining desired width and depth dimensions on PMMA. The sensitivity of the
other three process parameters, i.e., scan speed, laser average power and number of
passes on the depth dimensions were found out to be negative. The author suc-
cessfully facilitated infrared fiber laser micro-machining system for the fabrication
of micro-features on polymer materials.
6.3.4 Micro-drilling
Pulsed mode of fiber laser system is quite suitable for micro-drilling of high ductile
and brittle materials also. Many research works are being carried out in this area and
the results are being discussed as follows.
From the past research works, it is evident that sputtering along with other
metallurgical defects such as cracks, morphological irregularities are always asso-
ciated with the laser micro-drilling process owing to the rapid solidification of the
molten materials [33]. In this regard, Biffi et al. [33] carried out percussion
micro-drilling of commercially pure titanium sheets having 0.5 mm of thickness
Fig. 6.7 SEM views of drilled holes according to the two boundary process conditions: a entrance
at pulse frequency of 20 kHz and pulse energy of 0.5 mJ; b exit hole at pulse frequency of 20 kHz
and pulse energy of 0.5 mJ; c entrance at pulse frequency of 50 kHz and pulse energy of 1.2 mJ;
d exit hole at pulse frequency of 50 kHz, and pulse energy of 1.2 mJ [33]
with the aid of nanosecond pulsed fiber laser system. Figure 6.7 depicts the
obtained entrance and the exit holes at the two limit process conditions along with a
maximum average power (pulse frequency of 20 kHz, pulse energy of 0.5 mJ) and
a minimum average power (pulse frequency of 50 kHz, pulse energy of 1.2 mJ). An
annular corona of melted material was observed at both the entrance holes, but on
the other hand, the exit holes were almost devoid of drops and sputter (Fig. 6.7b, d).
They successfully demonstrated high aspect ratio sputter free holes on the exit side,
although the entry side holes suffered from a considerable amount sputter.
When ultrafast fiber laser percussion micro-drilling of high purity copper
(99.9%), stainless steel (Fe/Cr18Ni10) and high-carbon steel (C 1095) sheets with
0.25-mm thickness each [34] were utilized, the results were satisfactory compared
to Q-switched nanosecond laser. However, the overall accuracy of the ablated
structures was not as good as compared to the femtosecond laser micro-drilling of
aforesaid materials. Ghosal et al. [35] identified that wait time and modulation
frequency were the most important parameters for the material removal rate
(MRR) during the micro-drilling of Al/Al2O3-MMC by a ytterbium doped fiber
laser system. The authors concluded that the material removal rate increased with
an increase of N2 gas pressure and maximum material removal rate observed within
246 A. Sen et al.
the range of 400–475 W of laser power. The minimum taper angle on

micro-machined hole was observed with the combination of nitrogen pressure of
18–20 bar, along with 600–680 Hz of modulation frequency. The optimal para-
metric combination for maximized MRR and minimized taper was identified as
473.12 W of laser power, 604.54 Hz of modulation frequency, 0.18 s of wait time,
19.82 bar of assist gas pressure and 93.47% of duty cycle pulse width.
Huang et al. [36] also fabricated high aspect ratio micro-holes on glass as well as
on metal and tissues using a femtosecond fiber laser system. The fabricated
micro-holes were free from any kind of debris formation and thermal damages. It
was observed by the researchers that in the absence of micro-cracks around the
periphery of the micro-holes, high aspect ratio, i.e., 8:1 micro-holes could be
generated in both glass and metals with the aid of femtosecond fiber laser system.
Fiber laser can also be successfully applied to the fabrication of micro-holes on the
ceramic substrates. Adelmann et al. [37] carried out rapid single mode fiber laser
micro-drilling of alumina and aluminum nitride in order to analyze the effect of
various process parameters such as laser focus position, laser power, gas pressure
and laser modulation scheme on the hole diameter of both the aforesaid materials.
The experimental observations revealed that single mode fiber laser was capable to
generate 50 µm micro-holes with minimum taper angle (as low as 1.57°) and
astounding circularity of 1.07. However, some amount of sputter on the top side
of the micro holes was observed, which could be further eliminated by the uti-
lization of pre-pigmenting and ultrasonic cleaning.
6.3.5 Engraving
The number of research works on engraving process with the aid of fiber laser, is an
emerging field of interest. An engraving operation was carried out on C45 carbon
steel by Genna et al. [38], where, a Q-Switched 20 W Yb: YAG fiber laser with the
fundamental wavelength of k = 1070 nm was utilized, in order to study the
influence of process parameters on surface roughness along with the material
removal rate (MRR). The engraved depth was found out to be highly dependent on
the scan speed, pulse frequency along with the scan number. It was also observed
that the line spacing, pulse frequency along with the scan speed governed the
surface roughness of the engraved profiles. However, after around 10 scans, the
surface roughness remained unaltered with the combination of aforesaid parame-
ters. It was summarized that the selection of appropriate and accurate process
conditions would lead to higher values of MRR and better surface roughness.
Finally, when the combination of scan speed of 20 mm/s, pulse frequency ranges of
30–40 kHz along with line spacing of 0.04 mm were utilized, better MRR and
surface roughness (Ra) were observed. In comparison with the other process
parameters, the effect of the scan speed was found to be negligible. Further,
experimental tests were carried out on Ti-6A1-4V alloy sheet having a thickness of
4 mm, using Q-Switched 30 W Yb: YAG fiber laser by Tagliaferri et al. [39].
The aim of the experiment was to identify the effect of the process parameters over
the depth of the machined volume along with the quality of the roughness of the
machined surface. After the first phase of the experimentation, the effect of the
process parameters over the machined volume along with the quality of the
roughness of the engraved surface was identified. The results of the experiment
revealed that the machined volume was linearly dependent on the total amount of
released energy, for each of the pulse frequency.
6.3.6 Micro-turning
Laser micro-turning process aids the fabrications of micro-patterns on cylindrical

workpiece, ranging from metal to ceramics. However, only a few research works
are highlighted on fiber laser micro-turning operation process on the engineering
materials. Till date, Nd-YAG laser systems are most preferred systems by the
researchers in the micro-turning process instead of fiber laser micro-machining
system. Biswas et al. [40] carried out spiral micro-grooving on pure aluminum with
the aid of a 50 W ytterbium doped fiber laser system. Laser average power, pulse
frequency and axis feed rate were considered as the fiber laser process parameters
in order to study the influence of spiral micro-grooves geometries in terms of
groove width and groove depth. Around 115.2 µm of maximum micro-groove
width was achieved at parametric combination of the average power of 42.5 W
along with 55 kHz of pulse frequency and around 0.4 mm of pitch value. The
micro-groove depth, as high as 51.95 µm, at a parametric combination of the
average power of 45 W was also be achieved along with 70 kHz of pulse frequency
and 0.2 mm of pitch value. The outcome of the aforesaid experimental work has the
potential to be utilized for various of other engineering materials also.
6.3.7 Marking
Fiber laser marking is the key area that has emerged in the recent times. The
utilization of fiber laser for marking applications produces clean and high end
finishing of a wide variety of materials. Astarita et al. [41], carried out fiber laser
marking of titanium cold sprayed coatings on aluminium substrates. The authors
observed that the heat input rules the fiber laser marking process in particular three
different conditions. Firstly, irregular groove was observed due to a too high energy
released for unit length, whereas regular mark with hidden damages along with
regular and effective mark was also observed. It was concluded by the authors that
regular mark with inadequate groove was observed due to a low heat input during
the process. The homogeneity of the cold spray coating played a crucial role in
obtaining high end finishing of marking. The discontinuous nature of coating
affected the nature of the marking process. Penetration depth more than 0.4 and
248 A. Sen et al.
Fig. 6.8 Microscopic view

of the markings on the
titanium cold sprayed layer at
20 kW of power [41]
0.2 mm were observed on titanium sheet (without coating) and cold sprayed
coating, respectively. A microscopic view of markings on the titanium cold sprayed
layer performed at output power of 20 kW is shown in the Fig. 6.8.
6.4 Recent Developments and Future Scope of Fiber Laser

Micro-machining
In order to exceed the limited peak power (*10 GW) of fiber systems, fiber-laser
pumped parametric amplifiers are being developed by the researchers in the present
era. These solutions necessarily engage a range of complexities to the systemic
architecture. Further, in order to eradicate any group delay between the individual
amplifier sections, these amplifiers need to be appropriately designed. Along with
the aforementioned tasks, the optical path delay between the individual amplifiers
must be controlled by using proper feedback electronics to reach to a fraction of a
wavelength. Pulse energies in the micro-joule to millijoule range are required for
the micro-machining of dielectrics and metals. Superior hole quality in
micro-drilling is the driving force for the usage of femtosecond pulses in
micro-machining applications as compared to the nanosecond or picosecond pulses
along with the faster ablation speed, when it is combined with the use of pulse
burst. With the introduction of large-mode-area fibers, fiber lasers capable of
generating femtosecond pulses with millijoule pulse energies became possible.
These fiber lasers have allowed the construction of micro-joule level fiber
picoseconds pulse sources that does not utilize the CPA [9]. By the usage of
nonlinear spectral compression, high spectral quality can be obtained. In order to
expand the mode area of optical fibers, the most suitable method is to increase the
core diameter. This phenomenon is effective for the core diameters in the range of
25–50 lm. The fundamental mode can be excited if appropriate mode matching at
the input, higher order mode filtering via bending and/or the insertion of satellite
cores, which channel out higher-order modes from the central core structure, is
carried out; although resulting fibers are multimedia in nature. New applications are
invented with the utilization of nonlinear effects in gas-filled fibers. Another
interesting area that is still under progress is the combination of coherent beam with
the fiber laser system, in order to expand its capabilities in the ultrafast region. Two
different forms of multimedia fibers have become widely accepted in the recent
years, which are, large-path fibers and leakage channel fibers. The characteristics of
both the fibers are, firstly, they are derived from photonic crystal fiber designs,
bearing a core which is encompassed by air holes in a cladding to make sure that
there is countless single-mode propagation.
In the previous years, research works on the fiber laser systems were primarily
based on generating micro-features mainly for biomedical industries and thin
material cutting. Although, few researchers have showcased the utility of fiber laser
for thick material cutting, but the number of research works in this field are not
satisfactory. In the present day scenario, researchers are trying to utilize the fiber
laser in various hybrid machining approaches, i.e., laser assisted micro-machining,
laser assisted micro-turning, etc. along with the conventional micro-machining
approaches for the newly developed materials. Utilization of infrared fiber laser for
generating micro-fluidic channels on polymer materials such polymethyl
methacrylate, is a new dimension in the domain of fiber laser micro-machining [31].
Research works are also being conducted on fiber laser micro-machining of various
engineering materials with the aid of developed set ups for assisting the fiber laser
micro-machining process. However, further research works on hybrid fiber laser
micro-machining processes need be carried out.
6.5 Summary
Fiber laser has emerged as one of the strong force in the solid state laser systems in
the recent years. The utilization of the fiber laser is not only confined to the
fabrication of micro-features on a few selected fields, but also successfully managed
to diversify its applications in the realm of thick material cutting also. The number
of research works is escalating for the developers of fiber laser systems, such as
amplifiers, high diode lasers, along with the generation of burr, dross free
micro-cuts on a wide spread of materials. The potential of fiber laser system in the
micro-machining area is still not completely utilized as a consequence of which the
market share of fiber laser is still lagging behind the conventional solid state laser
systems such as Nd-YAG laser systems. In the present chapter, a vivid discussion
250 A. Sen et al.
has been conducted with the concept of the fiber laser generation along its diversity
of applications in the various micro-machining arenas. Fiber laser diversified from
the conventional laser systems only from the fact that the laser is generated within
the fiber itself while the other laser systems only utilize fiber as a beam delivery
system. The past research studies show that most of the research works with the aid
of fiber laser micro-machining are confined only to micro-cutting, micro-drilling
and engraving. Only a hand full of work has been conceptualized for hybrid laser
machining with the aid of fiber laser systems. Although, the experimental results
turn out to be satisfactory compared to CO2 and Nd-YAG lasers, but even then, heat
affected zone, dross formation etc., are inevitable for ultrafast fiber laser systems.
The problem can be partially or fully overcome by introducing pico and fem-
tosecond fiber laser systems. However, the aforesaid lasers are not at all cost
effective. Efforts are being made by engineers and researchers to not only reduce the
overall costs, but also to establish outstanding industrial applications which will be
critical factors to converge both the academic and the industrial arenas.
Acknowledgments The authors acknowledge the financial support and assistance provided by
CAS Ph-IV program of Production Engineering Department of Jadavpur University under
University Grants Commission, New Delhi and TEQIP phase II program of Jadavpur University.
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Chapter 7
Laser Beam Micro-cutting
N. Roy, A.S. Kuar and S. Mitra
Abstract This chapter gives a brief overview of laser beam cutting. An illustration
of basic fundamentals of laser material interaction and material removal is given
here which considers generation of photon and interaction with electron to generate
heat, absorption of heat, phase transformation, plasma generation, ablation and
removal mechanism of cut material from the irradiate region at dry condition. An
experimental study of laser beam cutting of Inconel 625 superalloy at dry condition
is given at the end of this chapter. During this experimental study effect of different
process parameters on machining characteristics also discussed in details.
7.1 Introduction
Laser, acronym of, “Light Amplification by the Stimulated Emission of Radiation”

is an optical oscillator where amplified radiation is oscillating by the stimulated
emission process. Laser is said to be the available purest frequency form of radi-
ation energy to be used as an industrial energy, having a great aftermath on man-
ufacturing. Today laser is omnipresent from our house to machine floor of
manufacturing sector to medical industry. In modern manufacturing industries, laser
plays a significant contribution in terms of machining of hard to machine materials
and development of new processing techniques. Simulated emission produced
electromagnetic radiation (laser) is utilized for the processing of a wide range
of newly developed engineering materials.
N. Roy (&) A.S. Kuar S. Mitra

A.S. Kuar
S. Mitra

DOI 10.1007/978-3-319-52009-4_7
254 N. Roy et al.
In different kind of unconventional manufacturing processes, laser beam

machining can be considered as a machining process with high speed of operation,
flexibility, non-contact type in nature and localized processing. A beam of elec-
tromagnetic photon is used as a machine tool during laser beam machining oper-
ation. High collimation, monochromacity, spatial and temporal coherence along
with very less divergence is the reasons behind the production of high intensity
laser beam. High focusability with large irradiance (up to 1021 W/cm2) makes it a
non conventional machine tool to process wide range of difficult to machine
materials i.e. superalloys, nanocomposite, bio-compatible ceramic materials.
Absence of wear & tear and chance of contamination of processed materials makes
laser beam a sterile tool to process medical and biological components. Laser beam
machining operation is independent from physical, mechanical and/or electrical
properties of target substrate, whereas it only depends on the opto-thermal prop-
erties of the target material. Monochromaticity of the laser beam has a great impact
on laser matter interaction as it affects the absorptivity of the single wavelength
beam by target surface. Normally Gaussian spatial distribution with TEM00 mode is
used during laser material processing to get enough energy density at the laser
irradiate region, for alteration of irradiate zone’s property in a controllable desired
manner. Diode laser, CO2 Laser, Nd:YAG laser, Fibre laser and Excimer lasers are
generally used for various material processing applications in industries [1].
7.2 Physics of Laser Material Processing
The phenomenon of electromagnetic radiation Laser-matter interaction is generally

a coupled of electronic and thermal events which regardless starts with an electronic
excitation followed by local heating due to photon-electron interactions. Reflection,
refraction, scattering, transmission and absorption are the physical phenomena that
take place whenever the laser beam falls on the surface of work substrate.
Figure 7.1 shows a schematic of interaction of laser beam with work material.
Fig. 7.1 Interaction of laser

beam with workpiece material
[2]
7 Laser Beam Micro-cutting 255
Fig. 7.2 Various governing physical phenomena of material removal mechanism [2]
Reflection, scattering, transmission, and absorption are the physical phenomena

occur during solid laser interaction at the workpiece surface. Linear and non-linear
absorption are the most important phenomenon for lattice heating. The physical
phenomena of material removal mechanism are shown in Fig. 7.2.
Generally high speed electron formed electric cloud is present around positively
charged nuclei in atom. This electric cloud is the basic building block to form a
molecular structure in atom. When a laser beam is interact with the matter a force is
generate by the collision of the electric field of electromagnetic radiation and atoms
in the irradiate region which eventually cause the oscillation of nuclei to generate
the heat. The force exerted by the electromagnetic radiation of the electron can be
expressed,
256 N. Roy et al.
v
F ¼ eE þ e H
c
where, E is electric field vector, H is magnetic field vector, v is the velocity of

electron and c is the speed of light.
Excited electron–phonon interaction (10−11 to 10−12 s) is one of the main rea-
sons to transfer laser energy to lattice in metal by energy absorption by conduction
band electron. Excitation energy of the bound electrons and kinetic energy of the
free electrons are the source of extra energy of charged particles. Absorption of
laser energy is governed by Beer-Lambert law [3],
IðZÞ ¼ I0 elz
where, I0 is the incident intensity, I(z) is the intensity at depth z, and l is the
absorption coefficient.
Conversion of absorbed energy into heat is happened in very short time period
(<pulse width) by degradation of the ordered and localized primary excitation
energy. The temperature distribution on laser irradiate zone not only depends on
absorbed laser energy but also on thermal diffusivity (D). Thermal diffusivity [4]
can be expressed in terms of specific heat (Cp) and thermal conductivity (k),
D ¼ k=qCp
where, q is the density.

Significant attenuation of laser energy takes place during pulse duration in
vertical direction which is expressed as,
z ¼ ð2Dtp Þ1=2
where, z is vertical distance, tp is pulse duration.

Depending on the temperature rise at the irradiate region various physical
phenomenon like heating, melting and vaporization occurred. To and fro move-
ment of solid liquid interface in a very high velocity( 30 m/s) is the reason
behind surface melting and subsequent resolidification at the machining zone [5].
Depth of melting increases with increase in time subsequently reaches at maxi-
mum at around pulse time (tp) when the temperature reaches at boiling point.
Further increase in laser power density or pulse on time, results in material
removal from irradiate region by vaporization without increase in the depth of
melt. The liquid vapour interface moves in vertical direction inside the material
during pulse on time after the vaporization is initiated. The highest possible value
of surface tension pressure is exceeds by evaporation induced recoil pressure
during laser irradiation and material removal starts to take place. Material removal
takes place by evaporation above the vapour-liquid interface. Depth of vapor-
ization [3], mass of material removed per unit time and velocity of the liquid–
vapour interface can be calculated by
m_ ¼ Vs q
where m_ the mass of material removed per unit time, Vs is the velocity of the
liquid–vapour interface and q is the density.
d ¼ Vs tp
where, tp is the pulse time and d is the depth of vaporization.

When the incident laser energy on the target surface is sufficiently large to
exceed the boiling temperature, rapid vaporization starts. The vapour particle size
decreases with decreasing pressure and evaporation rate [6]. Plasma is generated at
high laser irradiance (I 109 W/cm2) where the vapour or the ambient gas
becomes ionized due to the interactions between the incident laser beam and the
produced vapour. Lesser amount of laser energy is available on machining zone
due to shielding effect of plasma plume. In photo-thermal ablation process material
is removed by thermal stresses and surface vaporization. Whereas in
photo-chemical ablation material removal takes place by molecular fragmentation
without significant thermal damage by the high energy photon causes the direct
bond breaking of the molecular chains in the organic materials [7].
7.3 Laser Beam Cutting
In different types of laser based fabrication techniques, laser cutting is characterized

by high speed, reliable and full/semi automated 2-Dimensional material processing
method to produce a high aspect ratio and clean cut width. During laser cutting
process, a high intensity laser beam is focused on the target region of the workpiece
which subsequently heats up the surface of the irradiate zone by absorbing the
thermal energy of the laser beam. Cutting front is generally produced by expulsion
and vapourization of the melt pool from the machining zone by the assistance of
pressurized gas flow coaxially/axially. From the quality and quantitative point of
view assist the gas flow has a great impact on the laser cutting process. It helps to
get cleaner cut width along with less heat affected zone (HAZ) in terms of quality
aspect. Chemical reactions like oxidization at elevated temperature at the machining
zone may enhance the material removal which indicates at the quantitative aspect.
Now-a days, laser cutting process is applied in the industries to process a wide
range of materials such as wood, ferrous and non ferrous metals, polymers,
ceramics, composite materials, superalloys to nanocomposte materials also.
258 N. Roy et al.
7.3.1 Different Types of Laser Beam Cutting
Based on the role of assist gas and interaction between laser beam and workpiece
substrate laser beam cutting operation can be classified into four groups, i.e. laser
sublimation cutting, controlled fracture technique, fusion cutting and reactive fusion
cutting.
7.3.1.1 Laser Evaporative Cutting
During laser evaporative/sublimation cutting, absorbed laser energy heats up the

irradiate region to the vaporization point and ablates it to the vapour state up to a
subsurface region along the cutting seam (Fig. 7.3).
Materials like polymers and organic substances are suitable to process by this
method due to low thermal conductivity and lesser vaporization temperature. In this
process, all the thermal energy is used in evaporation in a localized manner.
Generally, non-reactive gas jet has been used axially/coaxially to remove the
vapour from machining zone [8]. The volume of material removed per unit second
per unit area is used to determine the penetration velocity,
V ¼ F0 =q½L þ Cp ðTV T0 Þ
where,
F0 = absorbed power density (W/m2); q = density of solid (kg/m3); L = latent heat of
vaporization (J/kg); Cp = heat capacity of solid (J/kg °C); Tv = vaporization tem-
perature (°C); T0 = temperature of the material at start (°C).
During laser sublimation cutting, no additional evaporation occurs after cut
width reaches its maximum value due to insufficient laser energy at machining zone
by conduction and convection loss of thermal energy [9].

evaporation laser Cutting
technique
7.3.1.2 Controlled Fracture Technique
In laser induced stress cutting, irradiate laser energy generates mechanical stress on
the machining zone, which causes crack propagation with controllable fracture
growth, results in material separation on the direction of laser beam movement. In
this process, a laser beam moves over the work substrate only to heat up (>melting
temperature) the irradiate region. During the cooling period, the thermo-mechanical
stress is induced on the irradiate region which produced the crack. A high plastic
compressive stress is generated around the laser spot diameter which relaxed with
the movement of laser beam, results in generation of residual tensile stress on the
upper surface of the irradiate region. This artificial crack then propagates along the
path of laser movement for precision separation of materials in a controlled manner.
Due to asymmetry of thermo-mechanical stress along with crack generation, the
crack trajectory does not follow the laser movement path precisely [10]. Controlled
fracture technique requires very less energy due to the absence of melting or
vaporization processes. Thus, this technique is very useful to process brittle
materials with clean cut with higher cutting speed than other laser cutting
techniques.
7.3.1.3 Laser Fusion Cutting
Movement of laser beam relative to workpiece makes a straight or curved cut

profile during laser fusion cutting. High intensity laser energy from impinging beam
absorbed by the work substrate melts the metal throughout the thickness to create a
cutting front. Blind cut, where thickness of work substrate is more than the depth of
cut, can also be achieved by fusion cutting. Multiple reflections on the keyhole and
sudden increase of absorptivity result in increase in the depth of cut. On the con-
trary, the combination of reaction forces exerted by the vapour acceleration and
change in surface tension on melt pool drags the melt pool towards the direction of
laser beam path to generate the kerf. Absorption of thermal energy is mainly
governed by re-radiation, Fresnel absorption and plasma absorption. Generally,
high pressure, nonreactive assists gasses such as argon, helium etc, transform
momentum to the thin melt pool. Drag force of the high pressure assist gas is one of
the reasons of melt pool and plasma removal from the machining zone. Melt film is
normally ejected from the bottom of the kerf as a droplet due to comparatively
thicker melt along with retarding of the film and surface tension at the subsurface
region of machining zone. Otherwise dross formation has been occurred [11].
Generation of reverse vortex by assist gas on melt pool, driving the dross upward
and leaves the machining zone to form blind cut. The assist gas not only enhances
the material removal process, it also acts as a coolant. One part of the pressurised
assist gas flows radially outward direction along the work substrate while the other
part enters into the kerf. Kerf edges generated by laser fusion cutting, is generally
free form oxides of the parent material (Fig. 7.4).
260 N. Roy et al.
Fig. 7.4 Schematic diagram of the inert-gas laser beam fusion cutting process
7.3.1.4 Reactive Fusion Cutting
In some of the laser cutting processes, co axially flown high pressure reactive gas
not only assists in removal of molten material from the machining zone, but also
adds some energy on the machining process in terms of exothermic reaction to
enhance the process. This aforesaid laser cutting process is a variation of laser
fusion cutting and known as laser reactive cutting technique. During laser beam
cutting, thermal energy source is added by the exothermic reaction at the erosion
front when the impinged high pressure oxygen gas reacts with the molten material.
Oxide of the base material is also formed on the top surface of the melt pool.
Generation of enormous exothermic heat energy not only nullifies the conductive
thermal loss to the parent work substrate, but also helps to enhance the cutting
speed as a combine effect of higher fluidity and absorptivity of hot molten layer of
oxide slag on the erosion front [12]. This increased cutting speed results in better
cut quality due to less thermal diffusion to the adjacent base work substrate. The
extra thermal energy added by the exothermic reaction at the irradiate region helps
the rise of temperature of the melt pool up to evaporation temperature very rapidly
results in ease of material removal by vaporization. Erosion front propagates
through the melt pool-parent material interface in the direction of laser cutting by
further melting into the unmachined region and material removal due to friction
force works between impinged assist gas and melt pool to accomplish the cutting
process. Heat balance at the machining zone is described by the heat gain at the
melt pool by laser irradiation and exothermic reaction due to oxidization and heat
losses due to conduction, vaporization and ejection of melt pool [13]. Generally,
oxygen or oxygen enriched gas mixture is used as an assist gas for reactive fusion
cutting. Thin layer of oxide above the melt pool have some good as well as adverse
affect on quality of laser reactive fusion cutting. Sometimes oxide adherent on the
kerf edges as dross which affects the cut quality adversely in terms of micro crack
formation. Striation on the side wall of the kerf may be reduced sometimes due to
blanket effect of the thin oxide film on melt pool. This process mainly used to cut
thick section of hard to machine metals, i.e. stainless steel, aluminium alloys,
titanium superalloy etc.
7.3.1.5 Laser Cold Cutting
Absence of thermal effects make this laser cutting technique known as laser cold
cutting. In this technique, ultra-short pulsed laser, in the range of picosecond to
femtosecond interact with the work substrate with a very high fluence, results
material removal by molecular fragmentation due to direct bond breaking by multi
photon absorption mechanism. Photon energy of 4.9 eV is very much sufficient to
break the chemical bond directly [14]. To get debris free cutting of various material
along with surface modification of biodegradable materials, this cutting process is
used in industries i.e. medical industries, electronics manufacturing industries.
7.3.1.6 Laser Beam Microcutting
In the modern technologies, miniaturization is an important trend to fabricate

microparts for biotechnological, microelectronics, telecommunication, MEMS, and
medical applications. Laser beam micromachining is utilized for the generation of
microproducts with better flexibility in the dimensional design. Photo-thermal or
photochemical ablation is the mechanism behind the material removal in micron or
in sub-micron range during laser beam micromachining operation. Laser beam with
wavelength in the range in near infrared (1.06 lm) to deep Ultraviolet (150 nm) is
commonly used in micromachining operation. Photon energy increases with shorter
wavelength enhance the material removal, results in less thermal damages like
melting, charring of adjacent unirradiated material. Thermal diffusivity, thermal
relaxation time and absorption coefficient have a great effect on ablation process
[15]. Efficiency of ablation increases by lower value of thermal diffusivity whereas
the pulse duration shorter than thermal relaxation time facilitates restriction of
temperature distribution on the surrounding material. Shorter pulse width (<100 ns
to few femtosecond) is preferably utilized for micromachining application due to
high peak intensity (>1015 W/cm2) to get précised dimensional accuracy with
substantially low thermal damages [16].
262 N. Roy et al.
7.3.1.7 Laser Cutting at Different Assisted Medium
Sometimes laser cutting process is performed at various atmospheric conditions to

get desired cut quality. Laser cutting technique sometimes performed in submerged
condition or in preheated condition or in vacuum or sometime mixture of various
conditions.
7.3.2 Process Characteristics
Laser beam cutting is one of the most widely used laser material processing
technique in industries. It is a complicated process dominant by various process
parameters, i.e., laser beam properties, beam delivery system, assist gas properties,
to get desired quality aspects in terms of narrow cut width, smoother inner kerf,
striation and dross free cut along with less heat affected zone. The term laser beam
properties indicate at laser fluence, wavelength, mode of operation (continuous or
pulse), pulse frequency which have great impact on laser cutting as well as on
physical, thermal and metallurgical properties of kerf generated.
7.3.2.1 Laser Fluence
Laser fluence or energy density determines the energy input at the irradiate region
which is the most significant factor to effect the performance and quality of the
machining. Laser fluence also the deciding factor to determine minimum cutting
speed required for a through cut [17].
7.3.2.2 Mode of Operations
Laser beam cutting procedure generally performed either in continuous mode or in

pulse mode. During continuous mode of operation laser, average power is con-
sidered, whereas laser peak power is taken into account for laser pulse mode
operation. Mode of operation plays a vital role to get fine finishing of the kerf edges
along with striation free kerf wall. Q-switching is one of the vastly used pulsing
techniques. In industries, Nd:YAG laser generally used in pulsed mode, whereas
CO2 laser preferably used in continuous mode. During pulsing mode operations,
pulsing time varies from 100 lm to few femto-seconds. This pulsing time effects
the material removal mechanism from irradiate zone. Up to 1 ns pulse material
removal takes place by photothermal ablation. Although, in pico or femto second
range pulse operation, photochemical ablation takes place.
7.3.2.3 Wavelength
Wavelength has a linear relationship with absorption. Absorptivity increases with

decrease in wavelength from infrared (IR) to near infrared (NIR). Wavelength is not
only a predominant process parameter, but also effects the choosing of other process
characteristics like mode of operation. The wavelength of Nd:YAG laser (1.06 lm)
falls in NIR region and CO2 (10.6 lm) falls in IR region. Wavelength in the
ultraviolet region helps to machine transparent materials, i.e., polymer to glass. In
very short wavelength ( 532 nm), the photon energy is 4.2 eV which is more than
equal to bond energy of work substrate. Laser beam having wavelength in UV
region is capable to break the chemical bond directly to machine transparent
material with minimal or no thermal defects.
7.3.2.4 Beam Delivery System
Beam delivery or optical system determines the spot diameter, relative focal dis-
tance and beam energy distribution on the workpiece. Spot diameter is determined
by measuring the area of single pulse laser irradiate zone. The laser power intensity
on the irradiate zone is determined by laser spot diameter. Deep cut cannot be
achieved by focusing the laser beam just on the top surface of the work substrate
due to multiple reflections on the kerf wall. To get the optimum cut quality gen-
erally, laser beam is focused just beneath the top surface. Mainly, Gaussian energy
distribution with the combination of very low spot diameter and very high energy
density laser beam, is preferred in the industries. Similar interaction with work
substrate in all direction due axial symmetry of the Gaussian beam, results in low
roughness in and outside of the kerf.
Polarization is defined by the way of oscillation of electric and magnetic field
vector respect to each other. In laser beam cutting operations, generally electric and
magnetic vectors are oscillating in a same plane and perpendicular to each other.
The angle between plane of incidence and electric field vector defined different
types of polarization, such that S type or P type. Beam polarization is a control
factor for absorption of incident laser beam energy by work substrate [18].
7.3.2.5 Assist Gas
Assist gas velocity not only act as an coolant but also helps to enhance the ejection
of molten material from the erosion front to accelerate the cutting process. From the
past research works, it has been found that velocity of assist gas enhance the cutting
process up to a certain point, then the efficiency of the cutting process is degraded
due to nonlinear effect of cooling by the assist gas velocity [19]. Generation of
density gradient fields by non uniform assist gas velocity leads to change in
refractive index which affects the performance characteristics [20]. The alignment
of nozzle where gas jet is used co-axially has a great impact on surface roughness
264 N. Roy et al.
[21]. Impact on cut quality by the composition of gasses is significant. It is found

that with decrease in purity of oxygen utilized in reactive fusion cutting, the cutting
performance reduces [22]. Generally, inert gases are used to perform cutting
operations other than laser reactive fusion cutting technique to reduce the sidewall
burning effect. In industries various kind of nozzles are used in which conical shape
nozzles are commonly used. Selection of nozzle diameter is very important to get
desired quality aspects as well as the thickness of the material to be cut.
7.3.3 Quality Aspect
Quality characteristics of laser beam cutting are a great concern with increased
application in biomedical industries, aerospace industries and automobile indus-
tries. Geometric qualities like corner accuracy, kerf with good aspect ratio, smooth
inner surface and surface roughness in the range of nanometer along with great
metallurgical quality, i.e. less heat affected zone (HAZ) and thermal stress induced
micro crack free cut is required to get during laser beam cutting.
7.3.3.1 Dross
Incomplete expulsion of molten material from the bottom side of the kerf during
through cut is known as dross. It is required to understand mechanism of dross to
get nonadherent dross by controlling the process variables. Arata et al. first explain
the mechanism of dross during laser beam cutting of stainless steel. A small portion
of molten material is ejected as droplet form whereas the other portion subsequently
flows in reverse direction and solidified at the bottom corner edge of the kerf to
form dross. This phenomenon is happened when the cutting operation takes place at
lower cutting speed [23]. Dross free cut can be achieved when the maximum exit
momentum thrust is equal to ambient gas pressure. This aforesaid condition con-
trols the nature of the geometrical shape of ejected molten material from the bottom
of the kerf [24]. Surface tension force dependent ejection speed of melt and
insufficient melt expulsion due to blockage by excess molten material is the two
mechanism of dross formation [25].
7.3.3.2 Striation
Formation of periodic patterns along the kerf inner edge. Frequency and amplitude
of striation are the characteristics of striation on the inner edge which are mainly
affects by cutting speed. Side wall burning and oscillation of melt pool phenomenon
may be the most accepted mechanism of striation formation by the researchers [27].
Burning front is established by extra energy gain by the exothermic oxidation
reaction apart from the laser irradiation. Burning fronts propagate faster than laser
beam in radial direction from the centre of laser beam, end at the edge of the beam.
Thus, single striation is created. Further movement of laser beam at the erosion
front, reinitiate burning front to generate a striation pattern along the kerf edge.
Temperature fluctuation on the melt pool due to sudden temperature drop by
resistance to oxygen diffusion by oxide layer and subsequently temperature rise by
sudden increase in reaction energy by extra oxide slag result in periodic striation
[28]. Figure 7.5 illustrate different patterns of striation.
Fig. 7.5 Striation formation on cut section [26]

266 N. Roy et al.
7.4 Application of Laser Beam Machining
Laser beam cutting process is on of the fastest, clean and green manufacturing
technique applied in manufacturing industries with a precision and cost effective
way. Laser cutting technique is first applied in industry to cut Die board [29]. This
technique I used in job shop to produce complex profile like valve plates, gaskets,
complex shape medical parts, i.e. coronary/pulmonary stent. In aerospace industry it
is used to make titanium ducting, fuselage skin stiffeners an jet engine component
with the dimensional profile. This process is utilized to produce micro electronics
parts like circuit boards. For dismantling or repair nuclear power station, this
technique is obvious choice. Fabrication of micro fluidic device is done by laser
cutting process.
7.5 A Case Study on Laser Beam Micro Cutting of Inconel

625 Superalloy
7.5.1 Machining Conditions
A pulsed Nd:YAG laser-based CNC machining system, manufactured by M/s

Sahajanand Laser Technology, India, is used for the experimental study.
A specially designed workpiece holding unit is placed over the CNC controlled
work table. Inconel 625 superalloy with 8 mm 8 mm 0.9 mm dimension has
been considered as workpiece material for experimental study. Properties of Inconel
625 are listed in Table 7.1 [30]. Photographic view of machining set up is given in
Fig. 7.6.
Lamp current, pulse frequency, pulse width, cutting speed and assist gas pressure
are considered as the controllable process parameters to carry out the experiment.
Kerf width is considered as process response. Here compressed air is selected as an
assist gas. The ranges of these process parameters are selected on the basis of trial
experiments conducted by using one factor at a time approach. Experiments have
been carried out according to the central composite rotatable second-order design
Table 7.1 Properties of Property Unit Value

Inconel 625
Yield strength MPa 414–645
Ultimate tensile strength MPa 827–1034
Modulus of elasticity GPa 207.5
Poisson’s ratio – 0.278
Elongation % 60–30
Density Gram/cc 8.44
Hardness Brinell 145–220
Fig. 7.6 Photographic view of the CNC-pulsed Nd:YAG Laser machining system [31]
Table 7.2 Process parameters levels

Process parameter Unit Symbol Levels
−2 −1 0 1 2
Lamp current A x1 20 22 24 26 28
Pulse frequency kHz x2 2 4 6 8 10
Pulse width % x3 2 4 6 8 10
Cutting speed mm/sec x4 1.0 1.5 2.0 2.5 3.0
Assist gas pressure kg/cm2 x5 0.1 1 1.5 2 2.5
based on response surface methodology. Range of all controllable input process

variables are listed in Table 7.2.
Response surface modelling was used to establish the mathematical relationship
between the response, yu and the various machining parameters, with the eventual
objective of determining the optimum operating conditions for the system. Usually,
a second- order polynomial equation is used in RSM,
X
k X
k XX
k
yu ¼ b0 þ bj xj þ bjj x2j þ bij xi xj ð7:1Þ
j¼1 j¼1 i\j j¼2
where yu is the corresponding response, e.g., kerf width. xi is the coded value of the
i-th machining parameter, k is the number of machining parameters and bi, bii, bij
are the second order regression coefficients.
Olympus optical measuring microscope has been used to capture the image of
cut region at 20 magnification from where kerf width is calculated by image
268 N. Roy et al.
Table 7.3 Experimental results

Exp Kerf width Exp Kerf width Exp Kerf width Exp Kerf width
no. (mm) no. (mm) no. (mm) no. (mm)
1 0.0645 14 0.0645 27 0.0625 40 0.0753
2 0.0830 15 0.0830 28 0.0660 41 0.0828
3 0.0677 16 0.0677 29 0.0673 42 0.0793
4 0.0756 17 0.0756 30 0.0826 43 0.0878
5 0.0654 18 0.0654 31 0.0636 44 0.0877
6 0.0837 19 0.0837 32 0.0689 45 0.0882
7 0.0703 20 0.0703 33 0.0590 46 0.0878
8 0.0769 21 0.0769 34 0.0833 47 0.0881
9 0.0679 22 0.0679 35 0.0791 48 0.0906
10 0.0835 23 0.0835 36 0.0670 49 0.0909
11 0.0636 24 0.0636 37 0.0784 50 0.0906
12 0.0692 25 0.0692 38 0.0780 51 0.0905
13 0.0684 26 0.0684 39 0.0758 52 0.0901
analysis software. Measured value of kerf width is listed in Table 7.3. Minitab 17
Software is used for analysis of the measured responses and determining the
mathematical models with best fits. The adequacy of the model is tested using the
sequential f-test, lack-of-fit test and the analysis-of-variance (ANOVA) technique
by the same software to obtain the best fit model.
7.5.2 Results and Discussion
The developed model second order polynomial equation is given below,
Kerf width ¼ 0:089295 þ 0:005661x1 0:003313x2 þ 0:000415x3 0:000466x4

þ 0:000900x5 0:004633x21 0:004151x22 0:002873x23 0:003539x24
0:002160x25 0:002863x1 x2 0:000424x1 x3 0:000500x1 x4
0:000078x1 x5 þ 0:000818x2 x3 0:001048x2 x4 0:001179x2 x5
þ 0:000047x3 x4 0:000322x3 x5 þ 0:000089x4 x5
ð7:2Þ
ANOVA analysis of the quadratic model with other adequacy measures R2,
adjusted R2 and predicted R2 are given in Table 7.4.
The associated p-value of less than 0.05 indicates that the model term can be
considered as statistically significant at 95% confidence level. Value of lack of fit of
the model is more than 0.05 which indicates at non significant as desired. From the
table it is found that lamp current is the most dominating factor followed by pulse
frequency, assist gas pressure, cutting speed and pulse width. It can be concluded
Table 7.4 ANOVA analysis results

Source DF Adj SS Adj MS F value P value
Model 20 0.004573 0.000229 159.63 0.000
Linear 5 0.001769 0.000354 246.99 0.000
Lamp current 1 0.001282 0.001282 894.91 0.000
Pulse frequency 1 0.000439 0.000439 306.50 0.000
Pulse width 1 0.000007 0.000007 4.82 0.036
Cutting speed 1 0.000009 0.000009 6.07 0.019
Assist gas pressure 1 0.000032 0.000032 22.63 0.000
Square 5 0.002423 0.000485 338.33 0.000
2 way Interaction 10 0.000381 0.000038 26.60 0.000
Error 31 0.000044 0.000001
Lack of fit 22 0.000027 0.000001 0.63 0.822
Pure error 9 0.000018 0.000002
Total 51 0.004617
Value of S 0.0011968 R sq 99.04% R sq (adj) 98.42% R sq (pred) 97.39%
Fig. 7.7 Response

surface plot of Kerf Width
with respect to lamp current
and pulse frequency
that the data for each response are well fitted in the developed model from the
values of S, R-sq, R-sq(adj) and R-sq(pred) given in Table 7.4.
Parametric analysis:
From Fig. 7.7 it is observed that kerf width first increase with increase in lamp
current but it marginally decreases with lamp current after 26 A. Firstly increase in
lamp current generates more laser power for which amount molten material
increases, results in increase in kerf width. But when lamp current exceeds 26 A
value, excess amount of molten material is formed in machining zone which cannot
properly removed by assist gas from the machining zone and results in decrease in
kerf width. Kerf width marginally increases with increases in pulse frequency up to
4 kHz then gradually decreases. At low pulse frequency comparatively high energy
beam is generated which removes more material from the top surface of the
270 N. Roy et al.
Fig. 7.8 Response

surface plot of Kerf Width
with respect to lamp current
and cutting speed
Fig. 7.9 Response

surface plot of kerf width
with respect pulse frequency
and cutting speed
workpiece and vice versa. From Fig. 7.7 it can be concluded that low kerf width
can be achieved at lowest lamp current with highest value of pulse frequency.
From Fig. 7.8 it is observed that kerf width first increases with increase in lamp
current but it marginally decreases with increase in lamp current after 26 A whereas
incase of cutting speed kerf width gradually increases up to mid value of cutting speed
then decreases. In beginning due to increase in lamp current along with low cutting
speed at that very point of operation, more laser power is transferred to machining
zone results in increase in kerf width but further increase in cutting speed results in
decrease in interaction time between laser beam and workpiece results in decrease in
kerf width inspite of higher laser power at higher lamp current.
From Fig. 7.9 it is observed that lowest kerf width can be achieved at highest
cutting speed along with highest value of pulse frequency. At highest value of pulse
frequency comparatively low beam power generates which incorporates with less
interact time at high cutting speed transferred lower amount of energy to the
machining zone results lesser value of melt pool. For that lower kerf width may be
achieved.
From Fig. 7.10 it is observed that, lowest kerf width is achieved at highest value
of cutting speed and lowest value of assist air pressure. During aforesaid parametric
condition interaction time between laser beam and work piece is very small but due
Fig. 7.10 Response

surface plot of kerf width
with respect to cutting speed
and assist gas pressure
Fig. 7.11 Optimal process parameter settings
to moderate value (hold value) of lamp current some adequate amount of melt pool
may be formed which may not be properly removed by assist gas at that lowest
value. That result in resolidification of the molten material along kerf edges and
inner wall of the cut profile, make the kerf width narrow.
7.5.3 Determination of Optimal Parameter Settings
Figure 7.11 shows the optimization results for the minimum kerf width based on the
mathematical model developed using Eq. (7.2). To get ideal machining response, the
value of the weight for linear desirability function (D) is considered as 1.
It is found from the figure that minimum kerf width of 0.0486 mm dimension
can be achieved at process parameter settings of 20 A lamp current, 7 kHz pulse
frequency, 5% pulse width, 1 mm/sec cutting speed and 1 kg/cm2 of assist gas
pressure (Fig. 7.12).
272 N. Roy et al.
Fig. 7.12 Microscopic view

of kerf width at optimum
parameter settings
7.5.4 Conclusion of Case Study
Experimental study of pulsed Nd:YAG laser beam cutting is carried out success-
fully on Inconel 625 superalloy. From ANOVA analysis it is found that lamp
current is the most dominating process parameter whereas pulse width is the least
effecting process parameter. Optimal parameter setting is determined by RSM CCD
technique at highest level of pulse frequency and pulse width with lowest level of
lamp current and moderate level of cutting speed and assist gas pressure to get
minimum kerf width.
7.6 Summary
Overview of laser beam cutting is illustrated in this chapter. Material removal by

photo-thermal or photo-chemical is discussed here in details. Fundamentals of
different kind of laser beam cutting technique are illustrated. Undesired laser cutting
characteristics and controllable process variables are briefly discussed here. Defects
like dross formation, striation may be removed and less heat affected zone can
achieved by knowing the fundamentals of these defects and identifying the process
variable which have a great impact. Also different assisted medium can be used to
get desired result. An experimental study of nanosecond pulsed Nd:YAg laser on
Inconel superalloy also carried out here. From the study, it can be concluded that
laser beam cutting is fast, flexible manufacturing technique for processing of a wide
range of engineering material from thickness of thin film to very thick material.
Acknowledgements The authors acknowledge the financial support from UGC, New Delhi under
the scheme of Rajiv Gandhi national Fellowship scheme and technical equipment support from
UGC, New Delhi under the CAS Ph-IV program of Production Engineering Dept. of Jadavpur
University.
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Chapter 8
Electrochemical Micromachining (EMM):
V. Rathod, B. Doloi and B. Bhattacharyya
Abstract Product miniaturization is the principal driving force for 21st century’s
industries because of the escalating demands for compact, intelligent, robust,
multi-functional, and low cost products in all fields. As demand of miniaturized
products is exponentially increasing, the need to manufacture such products from
advanced engineering materials becomes more apparent. Micromachining plays
significant role in miniaturization, and consist of machining different microfeatures
on products. Design of microtools, tool wear, surface quality, burr and heat removal
are the main challenges in various micromachining methods. Electrochemical
micromachining is one of the important techniques because of its special material
removal mechanism, better precision and control, environmentally acceptable, and
mainly it permits machining of any metallic materials irrespective of its hardness.
For better understanding of EMM process, the basic concepts such as electro-
chemistry, Faraday’s laws of electrolysis, electrical double layer, equivalent elec-
trical circuit, and material removal mechanism have been discussed. Significant
process parameters which affect the process performance, need of EMM setup
development, various subsystems, along with the challenges in setup developments,
and important techniques for improving the machining accuracy have been high-
lighted. Machining, finishing, and surface engineering applications of EMM, as
well as recent advancement in EMM for micro and nanofabrication have also been
discussed.
V. Rathod (&)
Department of Mechanical Engineering, Government Polytechnic Ratnagiri,
Maharashtra, India
B. Doloi B. Bhattacharyya
Production Engineering Department, Jadavpur University,
Kolkata 700032, India
B. Bhattacharyya

DOI 10.1007/978-3-319-52009-4_8
276 V. Rathod et al.
8.1 Introduction
Material removal as a means of making things dates back to prehistoric times, when
ancient man started to carve wood and chip stones to make the hunting and farming
tools. Human beings shaped copper by casting for metal and jewelry work before
5000 BC. Invention of copper, bronze and then iron age revolutionized the ancient
civilizations. Development of modern machine tools is closely related to the
Industrial revolution. Introduction of hard, temperature resistant materials in various
fields of application led to the development of various non-conventional machining
processes. The non-traditional processes have been developed since World War II,
in response to new and unusual manufacturing requirements such as machining of
complex part geometries with close tolerances, without any surface damage that
could not be realized by conventional methods. There are various non-traditional
machining processes, most of which are unique in their range of applications.
Electrochemical machining (ECM) is one of the important non-conventional
machining processes used for machining of extremely hard alloys, which cannot be
machined satisfactorily by conventional methods. The metal removal phenomenon
of controlled anodic dissolution was known early in 20th century, but it was until
the 1960s that ECM came into use as a practical machining method. In last decades,
ECM has been developed, and anodic dissolution can be effectively utilized for
high-precision ultrafine machining to generate macro-as well as micro features on
work pieces, due to its advantages like no tool wear, ability to machine any metallic
surfaces irrespective of its hardness, stress/burr free surfaces, high MRR and
accuracy, and capability to machine irregular 3D shapes.
Miniaturization is the principal driving force for 21st century’s developments
because of the escalating demands for compact, intelligent, robust, multi-functional,
and low cost industrial products. As the demand of micro and nano products is
exponentially increasing, the need to manufacture micro and nano products from
advanced engineering materials becomes more apparent. Advanced micro
machining may consist of machining different micro features on micro or macro
work pieces. Micro features such as micro holes, micro slots, microgrooves, thin
walls etc. are to be machined on different surfaces of a product to fulfill its func-
tional requirements. Design of microtools and micro fixtures, tool wear, lack of tool
rigidity, poor surface finish, scrap and heat removal etc. are the main challenges,
when these micro features are machined with traditional machining techniques.
8.2 Electrochemical Machining (ECM): Basic Process
The principle of ECM was discovered long back in the nineteenth century by
Michael Faraday (1791–1867). Faraday established the laws of electrolysis in 1833,
which is the foundation of both the better-known electro deposition and electro
dissolution techniques. In 1929, the Russian researcher W. Gussef first developed a
8 Electrochemical Micromachining (EMM): Fundamentals and Applications 277
process to machine metal anodically through electrolytic process. The significant

developments in ECM occurred in the 1950s, when ECM was investigated as a
method for shaping high-strength alloys. In 1959, Anocut Engineering, Chicago
established the anodic metal machining techniques for commercial applications. In
1960s and 1970s the technique was applied mainly for machining of large com-
ponents made of advanced and difficult-to-cut metals particularly in the gas turbine,
aircraft and aerospace industries for shaping, finishing, deburring, and milling
operations. Although ECM was initially developed to machine the hard-to-machine
alloys, any metal can also be machined, only from the 1990s ECM was employed in
applications such as automotive, biomedical, and aerospace firms, which are its
major user until now.
Manufacturing processes such as electroplating, electro polishing, and other
allied processes that are well established in the manufacturing industries were
initiated from the basic concept of Faraday’s laws. The basic mechanism of metal
removal in ECM is based upon the electrolysis, in which metals are liberated from
anode workpiece surface atom by atom. ECM is an anodic dissolution process in
which work piece as anode and shaped tool as cathode are placed very close to each
other and immersed in an electrolyte tank. When potential is applied across the
electrodes, the work piece material dissolves locally so that the shape of the gen-
erated work piece is approximately negative mirror image of the tool, as shown in
Fig. 8.1. The electrolyte, which is generally a concentrated salt solution, is pumped
at high velocities through the machining gap in order to remove the reaction
products and to dissipate the heat generated. The smaller the machining gap
between preshaped tool and workpiece surface, the greater will be the current flow
and rate of metal removal from the anode. It also promotes rapid generation of
metal hydroxide and gas bubbles in the small gap between the electrodes and
becomes a barrier to the current flow and further machining. Hence, for the con-
tinuation of the dissolution process, these products of the machining process are to
be removed by circulating electrolyte at a high velocity through the gap between the
electrodes. The initial gap increases in size as metal ions are removed from the
anode, which increases the electrical resistance across the gap and in turn reduces
the current flow. To maintain the initial current flow and rate of metal removal, the
(a) Before machining (b) After machining
Fig. 8.1 Schematics of ECM process

gap between the electrodes should be maintained uniform by advancing the cathode
toward the anode at the same rate at which the metal is being dissolved. As the
cathode tool advances during machining operations the anode workpiece gradually
attains a shape that is almost a replica of the cathode tool.
Controlled metallic dissolution with high accuracy is required to put the ECM
technique in industry for practical applications. For this purpose the ECM setup
needs electrical power source to supply the machining current to the electrodes,
arrangement to circulate an electrolyte in the machining gap, and mechanical
structure for regulating the tool movement towards the workpiece. In ECM, dis-
solution rate of anodic surface depends upon the machining current, machining
time, atomic weight of the workpiece metal, and valency of the ion produced,
whereas it does not depends on the hardness of material. Various process param-
eters such as applied voltage, machining current, electrolyte type, concentration,
flow rate, and inter electrode gap (IEG) influences the major ECM machining
criteria like metal removal rate, surface finish, and accuracy. The shape of the tool
remains unchanged during machining, since only hydrogen gas is evolved at the
cathode surface [1]. Significant technological development such as tool vibration,
pulsed machining current, electrolyte microfiltration, CNC controller and applica-
tion of computer aided design to predict cathode tool profiles, for improving
machining accuracy and waste disposal make today’s ECM technique a better
choice than many other conventional as well as non-conventional machining
techniques.
8.3 Electrochemical Micromachining (EMM):

Focusing Area
Product miniaturization with integrated functions is the recent trend in manufacturing

industries due to the multiple benefits of microproducts such as less space, light
weight, less material and less energy consumption, and low cost of production etc.
Microproducts has to perform multiple functions in adverse service conditions,
which necessitates the micro components to be made from advanced engineering
materials like super alloys, titanium, nickel, aluminum alloys, copper alloys, and
stainless steel, which are hard and difficult to cut by conventional machining
methods. With the development in MEMS, micro products are widely used in various
fields namely electronics, aerospace, optical, biomedical, automotive, refrigeration
and air conditioning etc. for fabrication of micro products like inertia sensor for air
bag deployment systems in automobiles, read-write heads in computer storage sys-
tems, nozzles of ink jet printers, bio-medical filters, micro robots, micro reactors,
micro pumps, micro fuel cells, and ultra precision machinery parts, etc. Different
micromachining methods are available to machine the micro features on macro or
micro sized components on advanced engineering materials, which can be selected
based on the number of criteria’s such as required machining accuracy, surface finish,
type of workpiece material, production rate, and cost of production [2].
8.3.1 ECM and EMM
The term micromachining refers to the material removal of smaller dimensions

ranging from 1 to 999 lm. When ECM is applied for machining of micro features
in microscopic domain, it is called as Electrochemical Micromachining (EMM) [2].
EMM is an anodic dissolution process in which high frequency pulsed direct
current with low voltage is applied between the metallic workpiece as anode and
microtool as cathode, immersed in an electrolyte with few microns of
inter-electrode gap. The anodic material dissolves into metallic ions by the elec-
trochemical reactions generating hydrogen gas bubbles on the cathode surface.
Micro features of the micro tool electrode such as shape, size and surface finish are
directly transferred to the work surface, hence micro tool electrodes plays a vital
role during machining of micro features by EMM. EMM is similar to the ECM in
all respect, whereas these processes can be compared with each other on the basis of
range of major machining characteristics as given in Table 8.1.
Table 8.1 Comparison between ECM and EMM [3]

Major machining Electrochemical Electrochemical
characteristics machining (ECM) micromachining (EMM)
Voltage 10–30 V 1–12 V
Current density 20–200 A/cm2 75–100 A/cm2
Power supply Continuous/pulsed Pulsed
Electrolyte flow 10–60 m/s <3 m/s
Electrolyte type Natural salt solution Natural or dilute acid/alkali
Electrolyte temperature 24–65 °C 37–50 °C
Electrolyte concentration >20 g/l <20 g/l
Size of the tool Large to medium Micro
Inter electrode gap 100–600 lm 5–50 lm
Operation type Maskless Mask/maskless
Machining rate 0.2–10 mm/min 5 lm/min
Side gap >20 lm <10 lm
Accuracy ±0.02–0.1 mm ±0.01 mm
Surface finish Good, 0.1–1.5 lm Excellent, 0.05–0.4 lm
Problems due to waste Low Low to moderate
disposal/toxicity
8.3.2 Advantages and Limitations of EMM
The EMM process has numerous advantages and some limitations which can be
categorized by product, material and machine advantages.
(a) Product Advantages
The EMM has the following advantages on the final product:
(i) Burrs free surfaces are machined by EMM.

(ii) In EMM, micro tool does not touch the workpiece surface, hence it does not
cause thermal or physical strain in the product. Also, the upper layer of the
workpiece surface is free from any deformations.
(iii) By designing a single tool cathode or adopting suitable microtool movement
strategies, free formed 3-dimensional micro features can be processed in
single step. Use of EMM techniques permits more freedom of design a micro
product.
(iv) By adopting the advanced process monitoring capabilities, high dimensional
accuracy and high surface quality (Ra < 0.05 lm) can be attained with
EMM.
(b) Material Advantages

In EMM, the rate of anodic dissolution i.e. rate of machining depends only upon
the atomic weight (A) and valency (z) of ions produced, the machining current
passed through the electrodes, and the time (t) for which the current passes. The
mechanical properties of metal such as hardness, and toughness, as well as thermal
conductivity do not influence the material removal rate. The process has a complete
freedom of machining the product before or after hardening step. Material removal
rate is higher in comparison to the competing micromachining techniques and can
be controlled by selecting appropriate process parameters.
(c) Machine Advantages
The EMM process has following advantages over other micro machining
processes
(i) Initial investment on process design and micro tool fabrication is low. Also
the, running cost and tooling costs are low.
(ii) The shape of the microtool remains unchanged during machining, since only
the hydrogen gas is evolved at cathode microtool surface during electrolysis.
Hence microtools of complicated shapes can be reused multiple times.
(iii) EMM is a process with high machining speed and relatively low cost.
(d) General Limitations

Although ECM process has following disadvantages:
(i) ECM was previously known as process that harms environment. After
thorough developments in the treatment of electrolytes, the process has
become less harmful to the environment. However, EMM also needs very
less volume of electrolyte.
(ii) Each micro product and material requires new research. So, higher produc-
tion numbers are essential for the cost effectiveness of the process.
(iii) Needs careful handling of micro tools with in situ fabrication.
(iv) EMM requires a relatively high knowledge base for operation.
8.3.3 Role of EMM in Micromachining
Micromachining is an application of specific techniques to produce micro features on

macro or micro sized components with high precision and close geometrical toler-
ances. Micromachining technology will be an important technology in the future,
since the miniaturization will continue as long as people require effective space
utilization with more efficient and accurate products. Therefore attention needs to be
given for further developments in traditional as well as non-traditional micro
machining techniques to improve the machining precision. Machining of advanced
engineering materials needs suitable micro machining techniques for the fabrication
of precise and accurate micro features on products. Traditional micromachining
techniques such as micro turning, micro grinding, and micro milling have dimen-
sional limitations for the cutting tools and fixtures, high tool wear, and poor surface
quality. Whereas, non-traditional micro machining methods like EDM and LBM are
thermal based, and results tool wear and heat affected zone respectively. LIGA
process is limited to the fabrication of 2D micro structures and chemical machining
process cannot be controlled properly in micromachining domain [4]. Hence, EMM
is the most suitable method for machining of micro features on difficult to cut metals
because of its important benefits like better precision and control, good surface
quality without affecting metallic properties of work piece irrespective of the hard-
ness of the material, no residual stress, no heat affected zone, and no tool wear i.e.
complex microtools can be used repeatedly for longer period of time [5].
8.4 Fundamentals of EMM
EMM is the application of basic ECM in microscopic domain for micromachining

applications. Basically it is anodic dissolution process in which, workpiece as anode
and microtool as cathode are submerged in an electrolyte with narrow
inter-electrode gap, and low voltage pulsed direct current is applied in between the
electrodes. The workpiece material dissolves into metallic ions by the electro-
chemical reactions according to Faraday’s law of electrolysis. The dissolved
material and other process by-products such as precipitates, sludge, hydrogen gas
etc. are carried away from narrow machining zone by the electrolyte. The final
shape, and size of the machined micro feature is approximately negative mirror
image of the microtool electrode. Machining accuracy depends on different
machining conditions in the narrow machining zone. Machining criteria like
material removal rate, machined surface characteristics, and machining accuracy are
influenced by the process parameters such as pulse amplitude i.e. applied voltage,
pulse frequency, duty ratio, machining current, electrolyte type and its concentra-
tion, inter-electrode gap and tool feed rate etc. [6].
8.4.1 Electrochemistry of EMM
The chemical process which occurs when an electric current is passed between the
two conductors immersed into electrolytic liquid solution is known as
‘Electrolysis’. The metallic conductors immersed in liquid solution are termed as
‘electrodes’. The electrode with positive polarity is called as ‘anode’ and the
electrode with negative polarity is called as ‘cathode’. Electrodes conduct electrical
current by the movement of electrons. The liquid solution in which electrodes are
immersed, and also conducts electricity through it is known as ‘electrolyte’. The
system of electrodes and electrolytes is called as ‘electrochemical cell’. The reac-
tions which occur at anode and cathode are called as ‘anodic reaction’ and ‘cathodic
reaction’ respectively. Electrolytes carry electrical current by the movement of
atoms or group of atoms, which have either lost or gained electrons, thus acquiring
either positive or negative charge. Such atoms are called as ‘ions’. Ions which carry
positive charges and moves through an electrolyte towards cathode are known as
‘cations’. Similarly, the negatively charged ions which move towards the anode are
known as ‘anions’ [7].
When small electric current (DC) is applied across the workpiece as anode and
the microtool as cathode, submerged in an electrolyte with very small
inter-electrode gap, the transfer of electrons between ions and electrodes completes
the electric circuit. Since the electrons cannot flow through the electrolyte, the
electric current is maintained by the removal of electrons from the atomic structure
of the workpiece, i.e. the current is carried by the ions. The metal material dissolves
atom by atom from anodic surface and enters into the electrolyte as positive ions.
The positively charged ions move through the electrolyte towards the cathode and
the negatively charged ions travel towards the anode as shown in Fig. 8.2. The
movement of ions is accompanied by the flow of electrons in the opposite sense
outside cell and both the actions are a consequence of the applied potential dif-
ference. The least strongly bounded electrons are found at the surface of the
Fig. 8.2 Principle of anodic

dissolution of metal
workpiece and flow into the electrolyte circuit. These electrons dissociate them-
selves from the workpiece and flow into the electric circuit.
In electrochemical machining, dissolved metal appears as precipitated solid of
metal hydroxides. Chemical reactions occur at the cathode, and anode in the
electrolyte. At cathode i.e. microtool, the reaction having the smallest oxidation
potential takes place, and at anode i.e. the workpiece, the reaction having the largest
oxidation potential occurs first. Hence, the factors such as (i) nature of metal being
machined, (ii) type of electrolyte, (iii) current density and, (iv) temperature of
electrolyte influences the oxidation potential and thus determine the kind of reaction
that will occur. Different variables as shown in Fig. 8.2, also affects the rate of
electrochemical reaction. The material removal in electrochemical reactions are
governed by (i) electrical variables such as an applied potential, and quantity of
electricity passed i.e. machining current passed for machining time, (ii) electrolyte
variables like type of electrolyte, its concentration, pH, and temperature of elec-
trolyte, (iii) mass transfer variables i.e. different modes of mass transfer such as
diffusion, convection, surface concentrations and adsorption, (iv) electrode vari-
ables namely electrode material, surface area, surface conditions and geometry of
electrode, (v) External variables such as room temp., pressure and machining time.
The electrochemical reactions taking place at cathode and anode during
machining are as follows [8].
8.4.1.1 Cathode Reactions
Two possible reactions occurring at cathode are:

(i) Evolution of hydrogen gas,
(ii) Neutralization of positively charged metal ions.
The reactions causing the evolution of hydrogen gas at the cathode are:
2H þ þ 2e ! H2 " ðfor acidic electrolyteÞ ð8:1Þ
2H2 O þ 2e ! H2 " ðfor alkaline electrolyteÞ ð8:2Þ
The neutralization of positively charged metal ion is caused by the reaction:
M þ þ e ! M ðMetalÞ ð8:3Þ
For example, when the workpiece is iron, the cathode reactions are:
Fe 2e ! 2Fe2 þ ð8:4Þ
2Fe2 þ þ 2OH ! Fe ðOHÞ2 ð8:5Þ
Metal ions form the metal hydroxides when neutral electrolytes are used. They
appear as solid precipitates since these are insoluble in water. These precipitates do
not affect the electrochemical reaction.
Fe þ 2H2 O ! FeðOHÞ2 þ H2 " ð8:6Þ
Ferrous oxide may further react with water and oxygen to form ferric hydroxide
such as:
4FeðOHÞ2 þ 2H2 O þ O2 ! 4FeðOHÞ3 # ð8:7Þ
8.4.1.2 Anode Reactions
At anode also two possible reactions are occurring

(i) Evolution of oxygen or halogen gas,
(ii) Dissolution of metal ions.
The reactions leading to the evolution of oxygen gas are as follows:
2H2 O ! O2 " þ 2H þ þ 2e ðfor acidic electrolyteÞ ð8:8Þ
4ðOHÞ ! 2H2 O þ O2 " þ 4e ðfor alkaline electrolyteÞ ð8:9Þ
The reaction leading to the dissolution of the metal
M ! M þ þ e ð8:10Þ
M þ þ ðOHÞ ! MðOHÞ ð8:11Þ
The overall reactions occurring during ECM of iron can be given as:
Anode: Fe ! Fe þ þ þ 2e ð8:12Þ
Cathode: 2H2 O þ 2e ! 2ðOHÞ þ H2 " ð8:13Þ
It has been observed that, the metal dissolution is the main or the only reaction that
occurs at the anode, and the electrolyte acts as carrier of current only. The current
efficiency, which is the ratio of the amount of dissolved metal to the amount that should
be dissolved according to Faraday’s law for the known current and time, is often lower
than 100%. This is because apart from the dissolution of the metal, other anode reactions
can occur, such as the oxidation of water, with the release of oxygen gas:
2H2 O ! 4H þ þ O2 " þ 4e ð8:14Þ
The extent to which this reaction lowers the current efficiency depends greatly on
the material of the workpiece, the electrolyte and the current density. Besides the
oxidation of water further oxidation of metal ions can also occur at the anode.
8.4.2 Faraday’s Law of Electrolysis
Michael Faraday introduced two fundamental laws of electrolysis in 1934, which

governed the phenomenon of electrolysis. The most common statements of
Faraday’s law resemble as the following:
(i) The mass of any substance deposited or dissolved at an electrode during
electrolysis is directly proportional to the amount of electricity passed through
electrode. Quantity of electricity refers to the electrical charge, and typically
measured in coulombs.
(ii) The amounts of different substances deposited or dissolved by the same
quantity of electricity at an electrode is directly proportional to chemical
equivalent weights.
Mathematically these two laws can be combined to give mass (m) removed from
electrode or deposited upon the electrode, as:

Q M
m¼ ð8:15Þ
F z
where, ‘Q’ is the total electric charge passed through the metallic material, ‘F’ is
Faraday’s constant (96.485 C/mol), ‘M’ is the atomic weight of the substance, ‘z’
is the valancy number of the substance (electrons transferred per ion), and (M/z) is
the chemical equivalent weight of the substance altered. As per Faraday’s first and
second law, Q, M, F, and z are the constants hence larger value of Q, as well as
chemical equivalent weight of metal implies higher mass of material removal.
For constant current electrolysis, total electric charge passed through the metallic
material can be given as:
Q ¼ I:t ð8:16Þ
where, ‘I’ is the current passed through the electrodes for time ‘t’Therefore, amount
mass removed (m) can be given as

I:t M
m¼ ð8:17Þ
F z
When the product (I.t) is unity i.e. one coulomb charge is passed through the
electrodes, the mass of material removed (M/z.F) is known as ‘electrochemical
equivalent of the metal’. From above equations, it can be concluded that rate of
anodic dissolution depends upon atomic weight, valency of the ions produced, the
current, and the time for which the current is passed. The metallic dissolution rate is
not influenced by the hardness or any other mechanical properties of metal. During
the electrochemical reaction only hydrogen gas is evolved at the cathode surface,
hence the shape of cathode tool remains unchanged i.e. no tool wear takes place.
This feature is very much useful during machining of complex micro features with
micron sized tools in EMM applications.
8.4.3 Electrical Double Layer
When the metallic electrode is placed in electrolyte, an equilibrium potential dif-

ference is established between the metal electrode and electrolyte solution. This
potential difference arises due to the transfer of metallic ions into the electrolyte
from the metal electrode, and the simultaneous discharge of ions from the elec-
trolyte at the electrode surface. Equilibrium is established when the electrons left in
the metal contribute to the formation of a layer of ions whose charge is equal and
opposite to that of the cations in solution at the interface. The negative charges of
electrons just inside the metal electrode and positive charges of cations just outside
the electrode surface in the electrolyte solution forms an array of positive and
negative charges, as shown in Fig. 8.3, and is known as ‘electrical double layer’
[9]. The solution side of the double layer consists of several layers. The inner layer,
which is closest to the electrode consist of solvent and other ions, known as
specifically adsorbed ions. This inner layer is compact, called as Helmholtz layer,
and locus of the electrical centers of this inner layer is called ‘Inner Helmholtz plane
(IHP)’. The locus of the centers of the nearest solvated ion is called as ‘Outer
Helmholtz plane (OHP)’. The interaction of solvated ion with metal electrode
Fig. 8.3 Schematics of electrical double layer
involves only electro-static force and independent of the chemical properties of the
ions. These ions are called as non-specifically adsorbed ions. These ions are dis-
tributed in three dimensional region called as diffusion layer or Gouy-Chapman
layer and its thickness depends on ionic concentration in the electrolyte. The bulk
electrolyte with its usual properties is located outside the Gouy-Chapman layer. The
structure of the double layer affects the rate of electrode reactions. The transfer of
ions will cease, when the energy required for an ion to dissolve is less than the work
necessary to pass it across the double layer. The excess charge stored on both sides
of the double layer depends on the electrode potential and acts like the charged
plates of capacitor separated by very small distance. Therefore, double layers at the
electrode-electrolyte interface can be represented by a capacitor in equivalent cir-
cuits and the interfacial capacity can be described as two capacitors in series. The
resulting potential drop across the interface due to this capacitance is termed as
‘double-layer potential’.
8.4.4 Equivalent Electrical Circuit
In EMM, workpiece as anode and microtool as cathode are immersed in electrolyte

with very small inter-electrode gap and connected to the DC power source. The
inter-electrode gap filled up with electrolyte, acts as resistance to the flow of
Fig. 8.4 Equivalent electrical circuit of EMM
current, and the double layers which form at electrode-electrolyte interfaces which
act as capacitors.
Hence the electrodes i.e. anode and cathode, immersed in the electrolyte can be
represented by the basic analogous equivalent R-C circuit as shown in Fig. 8.4,
which consist of two capacitors (Cdl) representing double layers at both the
electrode-electrolyte interfaces and resistance of the electrolyte (Re) in between two
electrodes.
At metal-electrolyte interface, the metal molecule dissolves into the elecrolyte.
In the forward reaction, electrons enter the metal and metal ions diffuse into the
electrolyte, called as ‘charge transfer’. Whereas in backward reaction, metal ions
are discharged to metal, and thus equilibrium condition is reached. For the disso-
lution of anodic metal, the reaction must be in the forward direction only i.e.
irreversible. The resistance involved in irreversible reaction is called ‘charge
transfer resistance’. The electrolyte flow velocity is negligible or stagnant elec-
trolyte is preferable in the case of EMM. So there is not sufficient transfer of mass
from one electrode to the other electrode due to convection. This gives rise to
another diffusion component called Warburg Impedance (Rw). Faradic reaction
consists of an active charge transfer resistance (Rct) and Warburg resistance.
In EMM, the equivalent electrolyte resistance can be represented by considering the
effect of flow of current from the lateral and longitudinal surfaces of the microtool
to the workpiece. The inter-electrode gap in case of EMM is very small, hence
current flow path is small across the front end of the microtool, and this electrolyte
resistance is represented by Rbottom. Path of current flow from longitudinal surface
of the microtool to the workpiece surface is much longer and this electrolyte
resistance is represented by Rside. Therefore by considering the flow of a current
along lateral and longitudinal surfaces of the microtool, their respective electrolyte
Fig. 8.5 Modified equivalent electrical circuit of EMM
resistances, and polarized resistance (Rp), the equivalent circuit of EMM can be
modified as shown in Fig. 8.5 [10].
8.5 Material Removal Mechanism in EMM
In EMM, ultra short pulses of very low voltage amplitude are applied between the
electrodes which are separated by very narrow machining gap. At narrow
machining zone, in addition to the electrolyte resistance, other resistances which are
not so prominent in conventional ECM have much more influence in EMM. Hence,
all of these resistances at machining zone need to be considered in electrical circuit
model of EMM. The inter-electrode gap electrolyte resistance in EMM is given as:
qs :h
R ¼ ð8:18Þ
A
where, ‘qs’ is specific resistance or resistivity of electrolyte, ‘A’ is active micro

electrode surface area which is taking part in machining, and ‘h’ is inter-electrode
gap. Faraday’s two laws of electrolysis can be combined to predict the volume of
material removed during electrochemical micromachining as:
g:M:I:t
Vm ¼ ð8:19Þ
z:F:qw
where, ‘M’ is the atomic weight of the material dissolved, ‘I’ is the amount of current
passed through the electrode, for machining time ‘t’, ‘qw’ is the density of workpiece
material, and ‘η’ is the dissolution efficiency or current efficiency. The current
efficiency is defined as the ratio of the actual amount of metal dissolved to the
theoretical amount as predicted by Faraday’s laws. The material removal rate or unit
removal in electrochemical reaction basically depends on the following factors [11]:
(i) Anodic reaction and current efficiency,
(ii) Mass transport and controlled anodic dissolution, and
(iii) Current distribution and shape evolution.
(i) Anodic reaction and current efficiency
Based upon the various machining conditions and electrode-electrolyte combina-
tions, different anodic reactions take place. Rate of these reactions depends upon the
ability of the electrochemical cell to remove the reaction products as soon as they
are formed, and supply of fresh electrolyte at machining zone. All of these factors
influence the machining performance namely dissolution rate, shape control and
surface finish of the workpiece. The current efficiency (η) of the metal dissolution is
related to the weight loss (∇w), which is given as:
rw:z:F
g¼ ð8:20Þ
I:t:M
where, ‘z’ is the valency of metal dissolved, ‘F’ is Faraday’s constant, ‘I’ is
machining current, ‘t’ is machining time, and ‘M’ is atomic weight of the metal.
Current efficiency for metal dissolution is the function of current density and
local flow conditions, and varies as a function of distance from the tool. Though
current efficiency is a commonly used factor in ECM, a more accurate evaluation of
the process requires an estimate of electrical power efficiency. Power efficiency is
the ratio between output power and input power of a device. Conductivity of
electrolyte increases with the increase of temperature. Hence, for the same operating
condition power requirements decreases and power efficiency increases.
(ii) Mass transport and controlled anodic dissolution
Electrolyte with negligible flow velocity or almost stagnant electrolyte is utilized in
the case of EMM. Therefore, mass transport plays significant role in shaping and
surface finishing of anode in dissolution process. Rate of electrochemical reactions
at electrode surfaces are mainly influenced by the current passing through the
electrodes, and also depends on mass transport, various surface effects, and kinetic
variables. Current distribution and machining accuracy may get affected by mass
transport conditions. The simplest electrode reactions are those in which the rates of
all associated chemical reactions are faster as compared to those of the

mass-transfer processes.
The mass transfer is the movement of material from one location to another, in
electrolytic solution, and is achieved through the different modes as follows:
(a) Migration is the movement of a charged body under the influence of an electric
field (electrical potential gradient).
(b) Diffusion is the movement of a species under the influence of a gradient of
chemical potential (i.e. a concentration gradient).
(c) Convection is related to hydrodynamic transport. Generally fluid flow occurs
because of natural convection i.e. convection caused by density gradients, and
forced convection, and may be characterized by stagnant regions, laminar flow,
and turbulent flow.
In EMM, smooth surface finish can be achieved only at limiting current density.
An increase in current density leads to increase in the rate of metal dissolution at the
anode. If the current density is too high, it may cause heating effect due to rise in
temperature and it finally results improper surface finish and accuracy. The limiting
current density is controlled by convective mass transfer, the anodic limiting current
density ‘J’ is given by
v:F:D:Csat
J¼ ð8:21Þ
d
where, ‘D’ is the effective diffusion coefficient that takes into account the contri-
bution from transfer by migration, ‘Csat’ is surface concentration, and ‘d’ is dif-
fusion layer thickness.
(iii) Current distribution and shape evolution
The nature of current distribution pattern also influences the shape generation and
degree of leveling in EMM. In through mask EMM, three different scales must be
considered with respect to current distribution, i.e. workpiece scale or cell scale,
pattern scale and feature scale. At the workpiece/cell scale, geometry of the
workpiece and tool can be controlled by the current distribution. On the pattern
scale, current distribution is achieved by carrying out dissolution under mass
transport control. Current distribution also depends on the spacing of the features
and on their geometry. On the feature scale, shape is evaluated through the current
distribution. The current distribution at the anode depends on the geometry, anode
reaction kinetics, electrolyte conductivity and hydrodynamic conditions.
Fig. 8.6 Types of EMM
8.6 Different Types of EMM
Two-dimensional as well as three-dimensional micro features of different shapes,

sizes, and surface qualities can be machined on micro or macro products by elec-
trochemical micro-machining (EMM). In EMM controlled metallic dissolution can
be achieved in microscopic domain utilizing high-frequency pulse power supply,
and by the precise movement of microtool and workpiece. Flexibility in anodic
material dissolution by applying the principle of electro-chemical technique is one
of the main criteria to be considered during selection of the type of EMM.
Depending upon the basis of the degree of localization effect of the material
removal mechanism, EMM can be broadly classified into two groups as shown in
Fig. 8.6.
8.6.1 Through-Mask EMM
Material removal is restricted by positioning a photoresist pattern i.e. masks on the

metal surface thus, dissolution is allowed from the desired portions of the metal
surface only. Through-mask EMM is more suitable for shaping and finishing of 2D
micro features, as well as for fabrication of micro patterns. The photoresist is
applied on metallic workpiece in required pattern, and made as anode in an elec-
trochemical cell, so that metal surface is removed by anodic metal dissolution from
the exposed surfaces only. In through-mask EMM, metal dissolution takes place at
the workpiece surface that lies at the bottom of the cavity created by the photoresist
mask [12]. Figure 8.7 shows the schematics for the shape evolution during
through-mask EMM. Through-mask EMM process involves the careful imple-
mentation of various steps that include production of the master artwork, surface
preparation, choice of suitable photoresist, and imaging. The metal removal is
isotropic in nature, and hence leads to undercutting below the mask. During the
designing of a photoresist mask, it is essential to have a knowledge of the metal

removal rate and the undercutting of the photoresist in through-mask EMM at
different electrolytes and metal combinations. The undercut and shape of the
evolving surface are governed by aspect ratio, spacing to opening ratio, and film
thickness ratio, etc. [13].
Through-mask EMM can be of two types (i) dissolution of the metal substrate
from a single side, and (ii) simultaneous dissolution of material from both the sides.
Micro nozzles can be fabricated on a thin metal foil by one-sided through-Mask
EMM. Fabrication of nozzle plates by EMM involves cleaning of the metallic foil
and application of photoresist on both sides of the foil. The photoresist on one side
is exposed and developed to generate the initial pattern, consisting of an array of
circular openings. A controlled one-sided through-Mask EMM process is employed
to fabricate flat-bottomed V shaped nozzles on the sample as shown in Fig. 8.8. The
taper angle of the micronozzle i.e. the ratio of the undercut (r) to thickness of metal
film (b) can be controlled by regulating the EMM parameters [14]. By controlling
EMM parameters, nozzles of desired shapes can be fabricated. The final nozzle
shape is determined by several factors that include undercutting, etching factor,
Fig. 8.7 Schematics for

shape evolution during
through-mask EMM
Fig. 8.8 Micronozzles

fabricated by single sided
through-mask EMM [11]
dissolution time, and dissolution conditions. Pulsed power supply is found to be

effective in achieving dimensional uniformity of an array of nozzles during
one-sided through-Mask EMM.
Through-mask EMM offers better control and flexibility for micro fabrication, as
compared to chemical etching process. Higher machining rate and the use of less
corrosive electrolyte are some of the advantages of through-mask EMM. Moreover,
a wide range of materials, including high strength corrosion resistance alloys, can
be machined by this technique. However, a limitation of through-mask EMM is the
low aspect ratio of the produced micro features, due to the isotropic etching
behavior.
8.6.2 Maskless EMM
Material removal from the workpiece surface is not limited by photoresist masking
but is controlled by localized material dissolution mechanism. Highly localized
selective metal dissolution from workpiece surface can generate the desired pattern
or shape in 2D or 3D scale [15]. Anodic dissolution in maskless EMM is controlled
by the current density, which depends on various predominant machining param-
eters. Inter electrode gap between the workpiece surface and tool is maintained at a
very low value such that stray current effect is minimized. Passivating electrolyte is
suitable for maskless EMM due to its ability to form transpassive oxide films and
evolve oxygen in the stray current zone. To achieve highly localized anodic dis-
solutions, maskless EMM requires machining setup for precise movement of the
tool as well as workpiece. During micromachining, to maintain and monitor the
narrow IEG, the EMM setup needs highly sensitive sensing and controlling devices
that should work on close loop control strategies. Circulation of fresh electrolyte at
narrow machining zone is one of the important challenges in maskless EMM.
Selection of a suitable electrolyte during micromachining of different materials is
another essential task that influences the controlled metal removal process at dif-
ferent metal–electrolyte combinations. Another significant problem is the removal
of machining by-products such as sludge, gas bubbles, and heat generated at fine
IEG. For effective localization of metal removal, maskless EMM demands a higher
frequency pulsed power supply.
Maskless EMM is competent to machine a high aspect ratio micro feature, which
is one of the main limitations of through-mask EMM process. One of the main
advantages of maskless EMM is the machining of 3D micro features. Different
types of micro features can be fabricated by maskless EMM by exploiting its
flexibility of material removal mechanism. It can be utilized to generate
microstructures starting from a very low depth to very high aspect ratio, including
surface structuring, micro patterns, deep micro holes, as well as 3D micro features.
Depending on the depth of machining and geometrical complexity of the micro
features, different techniques of maskless EMM may be selected. Maskless EMM
can be classified into three categories, for example, Jet EMM, micro drilling, and
Fig. 8.9 Microholes and micro patterns machined by a jet EMM [15], b micro drilling, and 3D
EMM [16]
3D EMM. Figure 8.9a shows micro hole array and micro pattern machined by jet
EMM on stainless steel foil of 250 µm thickness with a nozzle diameter of 100 µm,
voltage 56 V, 5 M NaNO3 as an electrolyte, with at a feed speed of 300 µm/s. The
cavity has a geometries consisting of lines having length of 1500 µm and semi-
circles with a radius of 250 µm, depth of about 180 µm and width of approximately
190 µm. Figure 8.9b shows the micro hole and micro patterns machined on nickel
at 1 MHz pulse frequency, 5% NaCl + 0.3 M HCl electrolyte concentration, 3 V
applied voltage, 30 ns pulse duration, 50 lm tool diameter [16].
8.7 Important Process Parameters of EMM
Basic mechanism of material removal in EMM is based on anodic dissolution, in

which metals are liberated from workpiece surface atom by atom. Various process
parameters, namely applied voltage, machining current, electrolyte type, concen-
tration, flow rate, inter-electrode gap (IEG), etc., influence major machining criteria
of EMM such as metal removal rate, surface finish, profile accuracy, etc. [17]. In
order to achieve the effective and high precision of machining in microscopic
domain the process parameters needs to be controlled optimally [18, 19]. The
machining accuracy and process performance can be improved by selecting and
regulating the appropriate process parameters at narrow machining zone.
Figure 8.10 shows a fishbone diagram, also called as Ishikawa diagram or cause
and effect diagram, indicating the influential EMM process parameters. Some of the
Fig. 8.10 Cause and effect diagram for EMM
predominant process parameters, which have major influences on EMM criteria are
identified as follows:
(i) Nature of power supply i.e. DC or pulsed DC, its amplitude, and pulse
frequency etc.
(ii) Microtool parameters like shape, size, surface quality, IEG, tool feed rate.
(iii) Electrolyte parameters such as type of electrolyte, its concentration, tem-
perature, flow rate, and density.
(iv) Mechanical capabilities of machining setup such as resolution, rigidity, damp
proof structure etc.
8.7.1 Nature of Power Supply
Electrical power is the driving force for the flow of charged particles inside the
electrolyte, which is essential for continuation of electrochemical reaction. The
applied power supply may be direct current or pulse direct current. With direct
current supply workpiece material dissolves continuously. It may give very high
concentration of reaction products, which can only be partly removed by the elec-
trolyte, especially if the inter-electrode gap is very narrow. The increasing contam-
ination can cause a deposit to form on the microtool surface, so that the workpiece
material no longer dissolves uniformly. Furthermore, changes in the electrolyte
composition rise in electrolyte temperature, and increase in electrical resistivity can
also affect the machining accuracy. These problems can be largely minimized by
applying the pulsed direct current instead of continuous one [20]. Pulse duration and
the intervals between the pulses are properly matched to the current density, so that
the machining gap can be completely swept clean during machining resulting in a
continuous EMM process. The pulse off-time should be long enough to ensure a
complete flushing of the electrolyte in narrow machining gap. The current efficiency
is much more dependent on the current density when pulsed current is used than the
use of continuous current. With continuous supply, the efficiency decreases gradually
when the current density is reduced, where as with pulsed supply the decrease is
much more rapid. A steep fall in efficiency with decreasing current density improves
the machining accuracy. This improvement depends upon the pulse duration and to
somewhat lesser extent on the interval. By using pulsating current one can apply
extremely high instantaneous current densities to the workpiece without the need for
an elaborate electrolyte pumping system and rigid machine frame. This is possible
since each current pulse is followed by a relaxation time of zero current, which allows
removal of reaction by-products and heat from the inter electrode gap. Compared to
direct current dissolution where only average current can be chosen, pulsating current
has three parameters, i.e. pulse on-time, pulse off-time, and peak current density
which can be varied independently in order to achieve a desired machining rate. By
proper selection of these parameters, it is possible to minimize variations of elec-
trolyte conductivity in the machining region and to achieve high instantaneous mass
transport even at low electrolyte flow rates. On the other hand, the average current
density in pulse EMM is lower than the direct ECM. Pulsating current is therefore,
particularly suitable for high precision micromachining of delicate micro features
where high electrolyte flow velocity cannot be tolerated. Shorter pulse period is
preferable for achieving higher accuracy. Anodic dissolution becomes more local-
ized, the throwing power is more restricted and the machining accuracy is improved
with the application of shorter pulses.
8.7.2 Microtools for EMM
In electrochemical micromachining, the machined micro features are the mirror

image of the microtool, and somewhat greater than the microtool size called an
oversize or overcut. Hence, in machining of micro features by EMM, shape and size
of the microtool plays an important role, as the geometry of machined feature is
dependent on the geometry of microtool. The design of microtool depends upon
microtool geometry, as well as suitable microtool material. The development of
microtools for micro manufacturing is still a challenging task, and mainly deals
with (i) selection of suitable microtool material, (ii) determination of the accurate
microtool geometry, and (iii) fabrication of the microtools for actual machining.
Microtool handling is also an important issue to be considered, especially when the
microtool are fabricated by one machining method and to be used by another
machining method for actual micro machining applications. Some of the important
issues related to the micro tool are as discussed below:
(a) Microtool material
EMM demands micron sized tools to be used in working conditions like extremely
corrosive environment, at elevated temperature due to Joules effect. Hence,
microtool materials should have properties like high electrical and thermal con-
ductivity, good wear and corrosion resistance, mechanical strength i.e. stiffness to
withstand the pressure of electrolyte, and be easily machinable. Considering these
requirements of the microtool materials, the microtools are generally made of
chemically inert materials. The best choice of the materials limits to tungsten,
platinum, titanium, and some super alloys. Other metals, such as gold, nickel,
copper, silver, molybdenum, and steel are also used as electrode materials in
connection with specific applications. Among a wide choice of metals available,
tungsten and its alloy, platinum and its alloy, and titanium are most widely used as
metallic electrodes. Such electrodes offer a very favorable electron-transfer kinetics,
large anodic potential range and low hydrogen overvoltage. Platinum wire is a soft
metal but alloying with iridium and rhodium increase its hardness. Tungsten is
widely used as tool material because of its important properties like high rigidity,
toughness and resistance to chemicals [21].
Tungsten carbide (WC) with cobalt binder is also used as tool material. Titanium
and its alloys have also been used in electrochemical micromachining due to the
high strength, high melting point and has proven suitable for harsh environment
where the corrosion resistance plays a major role. Tungsten wires are commercially
available in a long pieces and cutting-off the tungsten wire with wire cutter or micro
grinder may leave burrs or micro-cracks. Therefore, the cut ends should be grind
and clean in order to get a good microtool tip shape. No single material has been
proven to be superior over all others, no single material can satisfy all the microtool
design purposes, since each material has its benefits and limitations.
(b) Microtool shape, size, and surface finish
In EMM, geometry i.e. shape of the microtool plays an important role in machining
accuracy, as well as machining performance. Microtool size is also an important
parameter to be considered in EMM, which helps to improve the machining
accuracy, as well as machining performance [22]. Microtools of higher diameter
increases the effective surface area of microtool, increasing machining current and
tool polarization area, and finally generates micro features of higher overcuts. Use
of micron sized tool, not only generates accurate micro features but also takes less
time to machine the micro features [23]. Microtools with different end shapes have
already proven their effectiveness in micromachining applications. Cylindrical
microtools with flat end, conical end, reverse conical end, spherical end, and disc
shaped microtools, can be developed by different methods and utilized in EMM
[24]. Use of disc shaped microtool generates straight walled micro features of
higher depths, with minimum stray current effects. Surface quality of the microtool
also plays an important role during machining of micro features by EMM.
The minor defects on the surface of microtool, directly affects the surface quality of
machined micro features [25]. This can be observed on features machined with a
microtool having a surface not finished to a high degree of surface smoothness. The
presence of nicks, notches, scratches, lines, burrs, or other similar type of surface
defects will be reproduced as the mirror image on the work surface. Therefore,
special care must be taken to maintain the surface of the microtool very smooth.
(c) Microtool insulation
While machining micro features of high aspect ratio by EMM, workpiece material
dissolves from the front end, as well as the lateral surface of the microtool. This
results a micro features whose entry side is wider than exit side i.e. taper along the
depth and also poor surface quality due to stray current effects [26]. Therefore
sidewalls of the microtools are insulated to minimize the stray current effects and
taper formation along the walls of the micro features.
(d) Microtool feed rate
In EMM, material dissolution depends upon machining time also. Tool feed rate
regulates the time for which microtool is available at particular position during
machining of micro features, hence microtool feed rate is one of the important
process parameter in EMM. The micro tool feed rate should be always less than
material removal rate to avoid short circuit during machining, since short circuit can
seriously damage both the microtool and delicate surface of workpiece. The
maximum value for the microtool feed rate for a particular machining condition can
be determined depending on the occurrence of sparks or short-circuits between
microtool and the workpiece during machining operation.
8.7.3 Electrolytes for EMM
Electrically conductive solution which carries electricity through ions is termed as

electrolyte. The electrolyte not only completes the electric circuit between the tool
and workpiece, but also allows the desired machining reactions to occur. The
conductivity of an electrolyte solution depends on the concentration of the ions and
behaves differently for concentrated and dilute electrolytes. The electrochemical
processes take place at the interface of electrode-electrolyte solution, usually bulk
solution. In electrochemical cell, the electrode potential is used to dissolve work-
piece materials. The mass transfer inside the electrochemical cell i.e. the dissolution
of material depends on the hydrodynamic conditions for a given metal-electrolyte
combination, and the dissolved mass transfer occurs in three different modes
namely diffusion, convection, and migration. In electrochemical micromachining
processes, the migration mode dominates the process mostly when very low con-
centration electrolytes are used, and the use of electrolyte circulation system is very
limited. Electrolyte selection is an important task in EMM [27], and following

points needs to be considered before electrolyte selection for specific application.
(a) Types of electrolytes
An electrolyte contains free ionic species that make it electrically conductive.
Depending upon pH value electrolytes can be classified into three categories
namely acidic, neutral, and alkaline. pH is the negative logarithm of hydrogen ions
concentration in the solution. If the electrolyte solution has pH value equal to 7 then
it is neutral solution. If the electrolyte solution has pH value less than 7 then the
solution is acidic, and if the pH value exceeds 7, then electrolyte solution is
alkaline. Neutral electrolytes such as NaCl, NaNO3 are commonly used in EMM.
However, for microhole drilling acidic electrolytes are preferred. Electrolytes can
also be classified based on the degree of dissociation and nature of passivation
factor. The term degree of dissociation of an electrolyte is the fraction of solute
which is dissociated into ions that are free to carry current at a given concentration.
Electrolytes are also classified as strong electrolyte and weak electrolyte based on
degree of dissociation of solute. Strong electrolytes dissociates greatly for con-
centration ranging from very low to high values, whereas, for weak electrolytes
dissociation of an electrolyte tends to unity at very low, limiting concentration, and
reduces to about zero at high concentration. Strong electrolytes such as NaCl are
generally preferred for anodic dissolution. Whereas the electrolytes based on pas-
sivation are classified into two categories: passivating electrolytes containing oxi-
dizing anions, i.e., sodium nitrate, sodium chlorate, and nonpassivating electrolytes
containing relatively aggressive anions such as sodium chloride. Passivating elec-
trolytes are known to give better machining precision. The pH value of electrolyte
solution is chosen to ensure the good dissolution of the workpiece material during
EMM process without affecting the microtool. In some applications acidic elec-
trolytes are preferable for EMM because it produces soluble reaction products
which can be removed easily from narrow inter-electrode gap without affecting the
micro features of microtool. Although the precipitate has no direct effect on the
process, it definitely increases the possibility of damage of microtool from short
circuit. Hence it is advisable to use fresh and clean electrolyte for micromachining
instead of re-circulation. For electrochemical micromachining of various metallic
materials different electrolytes or mixed electrolytes are suitable. For machining of
aluminum and aluminum alloys, NaCl or NaNO3 is suitable; for copper, copper
alloys, and tungsten, NaOH can be used; for titanium and titanium alloys, elec-
trolytes such as NaBr, NaCl or mixture of NaCl and NaNO3 is suitable, for Stainless
steel, electrolyte such as H2So4, NaCl and NaNO3 can be used; and for machining
of tungsten carbide, mixture of NaCl, NaNOH and triethanolamine can be used
[10]. Machining accuracy can be improved by using additives such as NaHSO4 in
the electrolyte. Also to prevent to prevent formation of metal hydroxide precipi-
tates, complexing agents such as citric acid are added in the electrolyte.
(b) Electrolyte properties

The electrolyte at narrow inter-electrode gap facilitates the electrochemical reaction.
Therefore the electrolyte solution should:
(i) Ensure a uniform and high speed anodic dissolution,
(ii) Avoid the formation of a passive film on the anodic surface,
(iii) Not deposit on the cathode surface,
(iv) Have a high electrical conductivity and low viscosity to reduce the power
used,
(v) To have good flow conditions in the narrow inter-electrode gap,
(vi) Be safe, nontoxic, and less erosive to the machine body,
(vii) Maintain its stable ingredients and PH value during machining,
(viii) Have minimum variation in its conductivity and viscosity due to tempera-
ture rise during machining,
(ix) Be less expensive and easily available,
(x) Possess less throwing power apart from basic properties like good chemical
stability, high electrical conductivity, low viscosity, non-corrosive and
inexpensive to increase the machining accuracy.
Apart from facilitating for electrochemical reactions, electrolytes have to per-
form various functions such as:
(i) Create an environment for anodic dissolution of workpiece material,
(ii) Conduct the machining current,
(iii) Remove the process by-products formed during machining,
(iv) Carry away the heat generated at narrow inter-electrode gap, during
machining to maintain the constant temperature.
(c) Working life of electrolytes
The composition of the electrolyte begins to change with the progress of time
during electrochemical machining. The major changes that may occur and their
effects are enumerated as follows:
(i) Loss of hydrogen, which may cause a reduction in electrical conductivity of
the electrolyte and increase its pH value.
(ii) Loss of water, either by evaporation or carried off by evolved hydrogen gas,
which may increase the concentration of the solution and thus may affect its
electrical conductivity and its viscosity.
(iii) Formation of precipitate, which will reduce the concentration of the elec-
trolyte and may affect its electrical conductivity,
(iv) Metal ions from the anode may pass into the solution and may be deposited
on the cathode.
The aforesaid changes mean that the electrolyte has got finite life and in practice
the life may be limited because of the following reasons:
(i) The need to maintain a reasonably constant electrical conductivity so as to
facilitate the control over the process and to ensure the machining accuracy.
(ii) The need to prevent plating out of dissolved material on the microtool sur-
face to ensure the machining accuracy.
(iii) The need to avoid formation and accumulation of excessive quantities of
precipitate and sludge at narrow machining zone.
The first of the aforesaid consideration applies to all type of electrolytes, the
second consideration applies mainly to acidic electrolytes and the third one applies
mainly to neutral type of electrolytes.
(d) Electrolyte concentration, temperature and flow
(i) Electrolyte concentration
The electrolytes in electrochemical cell carry electrical current by the movement of
ions and the number of ions available for electrochemical reaction increases with
increases in concentration. Therefore increased concentration of an electrolyte offers
low resistance to flow of current resulting increased electrical conductivity. The
magnitude of conductivity is determined by the type and number of ions present in
the electrolyte. Hence, to compare the conductivities of the different electrolytes, the
term electrolyte concentration is generally used, which can be applied to all elec-
trolytes. Electrolyte concentrations are measured as weight of the solute per unit
(w/w) or weight per unit volume (w/v) of solution, or the volume of the solute per unit
volume (v/v) of the solution. Molecular weight in grams i.e. gram-molecules, or
moles of solute per liter of solution (M), is generally used to measure the concen-
tration of the electrolytes. Electrical current is carried out by the movement of ions in
electrochemical cell. The rate of ionic movement is termed as the ionic mobility.
Increase in electrolyte concentration increases machining current due to reduced
electrolyte resistance, however further increase in electrolyte concentration reduces
the electrical conductivity due to reduced ion mobility. Also increased density of
electrolyte at very high electrolyte concentration makes it difficult to remove the
process by-products from narrow machining zone. Therefore dilute electrolytes are
preferred in electrochemical micromachining of micro features [28].
(ii) Electrolyte temperature
During electrochemical micromachining of micro features, electrolyte concentration
and temperatures are expected to be constant throughout the process for machining
the micro structures with uniform features. Temperature of electrolyte at narrow
inter-electrode gap increases due to Joule’s heating effect. Electrical conductivity of
an electrolyte increases with increase in temperature because of increase in mobility
of ions at increased temperature. Finally, increase in machining current because of
reduced electrolyte resistance may result micro features with varied characteristics
like increased surface roughness, reduced machining accuracy, and higher MRR.
Therefore, maintaining constant temperature of electrolyte during machining of

micro features has its own importance.
(iii) Electrolyte flow
Machining of precise micro features by EMM demands micron sized tools with few
micron of inter-electrode gap during machining. As per the requirements of the
EMM process, fresh electrolyte needs to be supplied continuously at narrow
inter-electrode gap by flushing out used electrolyte, for effective machining of
micro features. Size of the microtools and IEG of few microns limits the movement
i.e. flow rate of an electrolyte during machining. Higher flow rate of an electrolyte
may vibrate the microtool in turn results in reduction of machining accuracy or
result short circuit due physical contact with workpiece. Therefore, generally steady
electrolytes are used in machining of micro features by EMM, since very small
amount of material is removed precisely during micro machining [29].
8.7.4 Mechanical Capabilities of Setup
Mechanical capabilities of machining setup also play an important role in

machining of accurate micro features. Resolution of linear stages representing X, Y
and Z axes directly affects the machining accuracy of machined features.
Arrangement for rotating the microtool, as well as an attachment of microtool
vibration system enhances the supply of fresh electrolyte at machining zone, as well
as helps to remove the machining by-products from narrow machining gap, and
improves the machining accuracy of EMM [30]. Hall current sensor for detecting
the short circuit is very much useful in detecting the physical contact of the
microtool with workpiece surface, which prevents the damage of the micron sized
tool or precious workpiece surface [31]. CNC controller for synchronizing the
movements of linear stages representing X, Y and Z axes facilitates the machining
of complex or free-formed surfaces or micro structures. Damp proof structure helps
to improve the machining accuracy by isolating the machining setup from the
mechanical vibrations generated in surrounding.
8.8 EMM Setup Development
8.8.1 Need of Setup Development
The escalating demand of microproducts in various fields have forced manufac-

turing industries to fabricate microproducts of best surface qualities from advance
engineering materials, in very short period of time. In recent years, applications of
microproducts have been considerably increased in electronics, optical, medical,
automotive, aerospace, and telecommunication fields. The demand for microprod-

ucts will increase exponentially in the coming years also due to the vast applications
of microproducts and global competition among industries. Electrochemical
micromachining offers unique advantages over competing micromachining tech-
nologies which has a great potential to machine microfeatures like surface struc-
turing, patterning, microholes, microgrooves, microchannels, microcavities, and 3D
microstructures of complex shapes with a high aspect ratio for various industrial
and household microproducts. To fulfill the increasing market demand of micro
products, an industrial EMM machine needs to be developed, which will be robust,
will have a low price, maintenance free, and will have a higher production rate.
8.8.2 Challenges in Setup Development
Anodic dissolution of workpiece material by electrolysis demands several technical

specifications of the setup. Precise microtool movement, narrow IEG and regulating
it uniform throughout the machining, arrangement and rigidness of mechanical
structure, power supply requirements, in-process monitoring, microtool and
workpiece holding arrangements etc. are important criteria to be considered for the
effective utilization of EMM. There has been few micromachining systems devel-
oped in research institutes, academic universities, as well as by commercial com-
panies. Some of them are multipurpose systems or dedicated systems for EMM as
well as for micro electro-discharge machining. Many research papers describes the
machining capabilities of EMM for microtool fabrication, machining of micro holes
and microstructures, still as of today there is no commercial, ready to use EMM
machining set up for micromachining applications. This is because of the electro-
chemical micromachining parameters which do not remain same for the different
electrode-electrolyte combinations, and required shape and size of micro features
and machining accuracy etc. Therefore for machining specific micro feature of
desired machining accuracy, specific electrode-electrolyte combination is required.
Also various microtool movement strategies namely layer by layer machining,
milling, sinking and milling, wire cut EMM demands different arrangements of
machining setup [32]. Therefore, EMM setup development is facing the problem of
combining the various requirements in single machine setup, and is under the
developmental stage. Smaller inter-electrode gap in the range of few microns is
preferred in EMM, since machining localization improves with reduction reduced
IEG. Whereas, accumulation of sludge and generation of bubbles at narrow IEG
hinders the EMM process that may reduce IEG gradually causing short circuit
microtool damage. It is very much difficult to maintain the narrow IEG throughout
the machining. Therefore, regulation of minimum IEG during machining demands
online monitoring of the process to avoid short circuit, physical contact of the
microtool with workpiece [33].
Fig. 8.11 Various subsystems of the developed EMM setup
8.9 EMM Subsystems
Controlled machining of micro features by EMM necessitates different tasks to be

done simultaneously in-tune with time or in coordination with each other. Hence, to
develop an electrochemical micromachining system setup, various subsystems
along with their sub-components such as mechanical machining unit, power supply
unit, microtool vibration unit and machining chamber along with work holding
fixture have been interconnected as shown in Fig. 8.11. Individual subsystems are
described in detail in succeeding sections.
8.9.1 Mechanical Machining Unit
The basic function of mechanical machine unit is to provide precise movements to

the tool or workpiece and to provide mechanical support to tool holder, machining
chamber etc. The mechanical machining unit of the developed EMM system setup
Fig. 8.12 Different types of Mechanical Machine units a column and Knee type, b gantry type,
and c structure with rotational axis
comprises of the various machine elements like main machine structure, machine
controller unit, and desktop computer with graphics user interface software.
(a) Main machine structure
Main machine structure provides rigid support to various components during
machining, and space to mount the different components such as base plate, linear
stages, tool holder at required positions. The main structure comprises of platform
with support, vertical or horizontal supports, Stepper motor or servomotor operated
long travel linear stages with precise movements to represent X, Y, Z axis.
Figure 8.12 shows the different combinations of linear stages to fabricate
mechanical machine unit.
(b) Machine controller unit

Machine controller unit controls the long travel linear stages through stepper motor
or servomotor movements. It also synchronizes the movements all stages according
to instructions of the program for a specified path. It is interfaced in between
desktop computer and mechanical machine setup. Various feeds can be given to all
or any of the three motors at a time through a motor controller unit using position
controller software or labview programs installed on a desktop computer. The
software enables the user to program movement of each stages in the form of
commands executed sequentially. For machining of complex microprofiles and 3D
microstructures, Computer Numerical Controlled (CNC) controllers are preferred.
8.9.2 Power Supply Unit
Power supply unit is very important unit in EMM system setup, since the nature of
pulse and pulse parameters directly affect the machining accuracy. Machining takes
place during pulse ‘on’ time only, and sludge removal from narrow machining zone
mainly takes place during pulse ‘off’ time, therefore pulsed DC supply with short
pulse period is preferred to machine the micro features by EMM. Better control over
process needs pulse monitoring and control of the pulse parameters during machining
operation. Main components of the power supply unit can be elaborated as:
(a) Pulse generator
Pulse generator generates DC pulses of required parameters and is the heart of
power supply system. Continuous supply of the stable pulse patterns during
machining is the prime function of a pulse generator. Various pulse parameters such
as pulse period, pulse amplitude, pulse ‘on-time’ and ‘off-time’ i.e. duty ratio, pulse
rise/fall times, positive or negative bias, as shown in Fig. 8.13 can be adjustable
from a minimum to maximum value, resulting in different outputs for the same
frequency.
(b) Digital storage oscilloscope
Digital storage oscilloscope provides the online image of the supplied pulse along
with the detail information during machining. Digital storage oscilloscope can also
be used during initial IEG setting and to monitor the machining conditions at
narrow machining zone to detect the occurrence of short circuit if any between
electrodes. As soon as the short circuit is detected, microtool feed and power supply
is turned off, and microtool is retracted back by few microns to clear the IEG, and
machining is continued again with required parameter settings. Digital storage
oscilloscope can also be interfaced to the desktop computer for online monitoring,
and pulse parameters can be directly stored using external storage devices for
further analysis.
Fig. 8.13 Pulse parameters
8.9.3 Microtool Vibration Unit
Main objective of vibration system is to provide vibrations to the microtool to

improve the machining performance by enhancing the availability of fresh elec-
trolyte at narrow machining zone by displacing machining by-products, especially
during machining of deep micro features. The microtool vibration produces pres-
sure waves which help in flushing away the reaction product from the machining
zone leads to generation of better quality micro features [34]. Microtool vibration
system may consist of Piezoelectric transducer (PZT) actuated compact single axis
translational stage and voltage amplifier system.
8.9.4 Machining Chamber
It is the space where electrochemical reaction takes place in between anode and
cathode that are submerged in an electrolyte with very small IEG. It consists of an
electrolyte tank and workpiece holding fixture. Material used to fabricate the
electrolyte tank must be non-conductive, non-corrosive, light in weight, transparent,
machinable into the required size. Perspex is one of the most suitable materials to
satisfy all of these requirements [35].
8.9.5 Process Monitoring and Control
While fabricating micro features of desired dimensions by EMM, its process

parameters, path of machining, microtool movement and control strategy has to be
predetermined before machining. During machining, a micron-sized tool electrode
moves with a constant feed rate toward the workpiece to maintain the IEG. Based
on the machining strategy, the microtool tracks the scheduled path to fabricate the
desired microfeatures such as microhole, microgroove, etc. Machining strategy
followed during machining directly influences the machining accuracy, as well as
process performance. IEG controls the dimensional accuracy of the machined
feature in micro-machining. Minimum IEG needs to be maintained throughout the
machining, for continuation of the process effectively. Accumulation of sludge and
generation of bubbles at narrow IEG hinders the EMM process, and may reduce
IEG gradually causing short circuit. Smaller IEG in the range of few microns results
higher machining accuracy, whereas it is very difficult to maintain the narrow IEG
throughout the machining. Physical contact of microtool with workpiece surface
during machining may lead short circuit and may damage microtool or workpiece
surface also. Sparking phenomena may damage both the microtool and the work-
piece. When the tool feed rate is smaller than the material removal rate, the IEG
increases gradually, and generates a higher machining gap that may affect the
machining accuracy. Therefore, to maintain a constant IEG, the microtool feed rate
should synchronize with the material removal rate, known as equilibrium speed.
While machining microfeatures by EMM, the material removal rate varies
according to various process parameters as well as the equilibrium speed of the
microtool. Hence, to maintain a constant IEG during micromachining, different
strategies have been developed and adopted by researchers. Various IEG control
strategies for EMM adopted by researchers are reported from Figs. 8.14, 8.15, 8.16
and 8.17 as follows.
8.10 Accuracy Improvement Techniques in EMM
To exploit full potential of EMM, research is still needed to improve the machining
accuracy by controlling different factors such as the effect of overcut and taper
formation during the machining of various micro features. Geometrical shape, size
and surface quality of the microholes, microslots and grooves affect the perfor-
mance and service life of the various micro components. Hence, fabrication of
micro features consisting of various types of microholes; microgrooves and slots
with good shape accuracy and surface quality are the focused areas of research in
EMM. To improve the machining accuracy of EMM, the control of stray current
phenomenon is one of the major challenges. The proper removal of sludge, pre-
cipitates and gas bubbles from the very narrow machining gap in EMM is another
major challenge to the researchers. Because of the improper flushing of machining
Fig. 8.14 Flow chart for IEG control [36]
Fig. 8.15 IEG control sequence [37]
zone as well as inadequate control of microtool feeding movement, micro sparks

may generate between microtool and workpiece. Machining accuracy can also be
improved by developing newer machining strategies and increasing the competence
of anodic dissolution by incorporating other special methods and effects. The
machining accuracy of EMM can also be improved by controlling and optimizing
the combination of different influencing EMM parameters. Some of the important
aspects by which accuracy of EMM can be improved have been discussed as:
Fig. 8.16 Gap control strategy [38]
8.10.1 Geometry of Microtools
Geometry of microtools i.e. shape and size plays an important role during con-
trolled anodic dissolutions to achieve the desired shape, size, and surface finish of
the micro-features. In many application microfeatures like straight cylindrical
microhole, taper free microgrooves and vertical walled 3D microstructures are
essential, whereas during machining of such microfeatures of higher depths using
straight cylindrical microtools, taper is formed on the sidewalls of the structure
because of the machining time difference between top face and bottom face of the
microfeature. Microtools of different shapes or end shapes such as reverse conical,
spherical based, disc shape microtools as shown in Fig. 8.18 can be successfully
used to improve the machining accuracy.
Cylindrical microtools with a flat end are suitable for machining of microholes,
microgrooves, and microcavities by controlling the movement of the tool. For
machining straight cylindrical microholes, cylindrical microtools with a flat end and
cut edge electrode can be effectively used with a rotary arrangement. Cut edge
microtools enhance the supply of fresh electrolyte flow and improve the machining
accuracy as compared to microtools with flat ends. Conical microtools are suitable
for machining of conical microholes to fabricate micronozzles required for the
applications in inkjet printers, etc. Reverse microtool electrodes are suitable for
taper reduction of microfeatures, Disk shape, and spherical end-shaped microtools
are suitable for reducing the taper formation on vertical walls of the microfeatures
with straight edges as shown in Fig. 8.19. Use of disc shape microtool restricts the
dissolution of the workpiece along the disc height only which minimizes the taper
along the vertical wall of the microfeature.
Fig. 8.17 Flow chart for IEG control [39]
8.10.2 Microtool Insulation
High aspect ratio micro features are commonly used in many applications. For the
fabrication of these micro features, cylindrical microtools of a few microns in
diameter are used in EMM, and scanning type machining strategies are followed for
the microtool movement. The microstructures fabricated by un-insulated microtool
are not capable of producing higher aspect ratio micro features, because of the
Fig. 8.18 Microtools of different end shapes a cylindrical b cut edge c conical d reverse conical
e spherical and f disc shape
material dissolution from front as well as sidewalls of the microtool. Sidewall

insulation of microtool restricts the material dissolution along the lateral surface and
improve the machining accuracy in terms of reduced taper angle, stray current
effects, with better surface quality [40]. Figure 8.20 illustrates the effect of sidewall
insulation on vertical wall profile of microhole machined with cylindrical microtool.
There are various methods of insulating the microtools such as physical vapour
deposition, chemical vapour deposition, spin coating, and dip coating etc. with
uniform film thickness of few microns [41]. Uniform coating thickness in the range of
few microns, difficulty in handling of the microtools, suitability of the insulating film
in different electrolytes, method of opening the front end of the microtool for EMM,
etc. are the major challenges in sidewall insulation of the microtools. Figure 8.21
illustrates the micro holes machined with and without sidewall insulations of the
microtool at applied voltage 3 V, pulse frequency 8 MHz, 35% duty ratio, tool feed
rate 0.1 lm/s, using 0.2 M H2SO4. Similarly microgrooves of 2000 lm length
Fig. 8.19 Effect of microtool shape on wall profile of microhole machined by a cylindrical b disc
microtool
Fig. 8.20 Effect on wall profile of microhole machined a without b with, sidewall insulation
machined at 3 V, 8 MHz, 35% duty ratio and 0.2 M H2SO4. with scanning speed
93.75 lm/s and microtool feed of 0.3125 lm at the end of each scan, with and
without sidewall insulations of the microtool are shown in Fig. 8.22 [41].
8.10.3 Electrolyte Circulation
In EMM, presence of fresh electrolyte at narrow machining zone is essential for the
continuation of the process. Practically, IEG between tool and workpiece is very
small i.e. of few microns and the circulation of electrolyte through machining gap is
difficult task. Fresh electrolytes cannot be circulated with high velocity through
Fig. 8.21 Micro holes machined a without, b with sidewall insulations [41] and c variation in
microhole diameter
Fig. 8.22 Microgrooves and its depth profiles machined a without and b with sidewall insulations
[41]
machining zone, since it may vibrate the microtool and delicate workpiece which
will affect the stability of dissolution process and may deter the machining accu-
racy. However, it is essential to remove process by-products, heat, precipitates as
well as gas bubbles from the narrow machining gap to achieve higher machining
accuracy. There are various techniques by which electrolyte circulation in the
machining zone can be improved. Electrolyte circulation can be improved by
hybridized EMM with low-frequency tool vibration. The microtool vibrates
longitudinally with the definite combination of amplitude of vibration and fre-

quency of vibration. Vibrations within the machining zone, in the stagnant elec-
trolyte, have considerable influence on the diffusion and convection of dissolved
metal ions. As the microtool vibrates, the generated bubble collapse, which will be
maximum very near to the microtool [42]. The impact of the micro jets in the
machining zone, results in the enhanced convective mass transport of dissolved
ions, the disruption of diffusion layer and supply of fresh electrolyte. To improve
the machining accuracy in EMM, circulation of fresh electrolyte by completes
flushing of sludge and precipitates from the very narrow gap between tool and
workpiece is essential.
8.10.4 Microtool Movement Strategy
The achievable machining accuracy of EMM changes depending on the tool

movement strategy. The effect of uncontrolled machining due to the improper
flushing of the machining zone as well as the poor localization effect of current can
be greatly minimized by regulating the movement of the microtool. During
machining, microtool may move horizontally along X–Y plane and vertically along
Z axis as well as it rotates. During EMM by scanning, microtool moves mainly
along the combination of XY plane and Z axis following the specific tool move-
ment strategy for three-dimensional shape generation. Microtool may move with
faster or slower feed rate which directly controls the time of interaction between
microtool and workpiece; thus controlling the anodic dissolution in the machining
zone results in the degree of machining accuracy. The tool movement also controls
the flow of electrolyte in the narrow machining zone thus facilitating the removal of
machined products. Rotary movement to the microtool while it is fed along the
desired path enhances the effective circulation of electrolyte in the machining zone.
The rotary tool generates centrifugal force in stagnant electrolyte along its
peripheral surface which may create micro-pumping action in the confined
machining zone. This helps to stir up the micro machined products and gas bubbles
to eject from the machining area to the periphery and create cavitations effect in the
machining zone. Due to the availability of fresher electrolyte in the machining zone,
the efficiency of the anodic dissolution improves which in turn increasing the
machining accuracy.
8.10.5 Micro-sparks Phenomena in EMM
Micro sparks in the narrow machining zone cannot be eliminated completely, which
deteriorates the machining accuracy of EMM. The micro sparks are occurring in
narrow machining zone due to the variation in machining parameters apart from
tool feed rate, heat generation across IEG accumulation of sludge and gas bubbles
in the very small IEG. The increase in gap resistance due to various reasons such as
generation of gas bubbles, sludge formation etc. leads to the occurrence of micro
sparks, causing higher overcut as well as micro spark affected zone that results in
the poor quality of final products.
8.11 Applications of EMM
EMM has improved in reliability through continuous developments, permitting its

industrial implementation for automated large-scale micro manufacturing. The
various applications of electrochemical micro fabrication technologies covering
micromachining, finishing, as well as surface engineering applications have been
illustrated through selected industrial examples. It has also some technical limita-
tions that may constrain its full-fledged applicability in the micro fabrication field.
Typical applications of EMM technologies for micro fabrication of components can
be categorized in three domains such as machining, finishing, as well as surface
structuring applications. Some of the machining applications are discussed as:
8.11.1 Machining Applications
Machining of micro features on micro or macro devices has become an important

issue in recent technologies. EMM is one of the best techniques which can be
successfully utilized to machine different micro features with high accuracy and
surface quality. Very few techniques are available to machine microstructures with
three-dimensional (3-D) features on advanced engineering materials like copper,
aluminum, nickel, titanium, steel, and their alloys. Some of the important
machining applications of EMM are as:
8.11.1.1 Micronozzles
Micronozzles with high surface quality can be fabricated on advanced high strength
temperature resistance (HSTR) materials such as titanium, nickel alloys, and
stainless steel utilizing the EMM technique. These micronozzles can be success-
fully utilized in various applications such as injectors for automobile and aerospace
applications, microfluidic applications for heat transfer devices, as well as for
various biomedical applications. Figure 8.23 shows a magnified view of a
micronozzle fabricated by EMM utilizing a conical microtool [43].
Fig. 8.23 a Micronozzle fabricated by EMM. b Surface quality of internal wall [43]
Fig. 8.24 Microscopic image of a microhole [50], b micro slots [45] and c microgrooves by
EMM
8.11.1.2 Microholes, Slots, and Channels
Microholes, slots, and channels can be fabricated successfully by EMM with high
precision and quality. Figure 8.24 shows the microhole of average entry diameter
24 µm and exit diameter 22.5 µm drilled on an SS-304 plate. Conical microtool can
be used for the generation of taperless micro channel. Initial drilling followed by
milling, i.e., sinking and milling method, is used for the generation of micro channel.
Microchannels separated by very thin fins can also be fabricated by EMM [44].
8.11.1.3 Three-Dimensional Micro Features
Three-dimensional microstructures can be machined successfully by EMM utilizing

scanning movement of the microtool at the desired path. Figure 8.25 shows the
microscopic images of the various three dimensional micro features machined by
EMM. Micro features have been machined utilizing cylindrical microtool adopting
layer by layer machining.
Figure 8.26a shows the SEM micrograph of micro hemisphere machined on SS.
Micro hemisphere has been machined on SS with 6 V, 60 ns pulse on-time, 1 µs
pulse period. This structure has been machined in three steps. As the rough cut, the
cylinder has been machined and the hemisphere with 100 µm diameter was
machined on the cylinder. As the finish cut, the hemisphere with 60 µm diameter
was machined [46]. Figure 8.26b shows the single crystallites of the steel that is cut
without changing the texture. Micro cube has been machined into SS foil with flat
Fig. 8.25 3D microstructures with plane surfaces
Fig. 8.26 Complex 3D microstructures a micro hemisphere [46] b micro cube [58]
Fig. 8.27 Microrods fabricated by EMM a microelectrode of 5.8 µm length with diff. diameters
[47] b WC micro-shaft of / 5 lm diameter and 3 mm length [48] c micro electrode of / 50 lm
[49] d sharp conical microtool [50]
end cylindrical wire having 50 µm diameter. Upon applying pulse frequency

1 MHz, 100 ns pulse period, voltage 2 V, the wire was fed 30 µm into the
work-piece vertically, followed by lateral movement along a rectangular path.
Sharp grain boundary to a crystal with a different orientation can be seen in the
lower left part on the front face of the cube.
8.11.1.4 Micropins or Microtools
Micropins or microrods of different shape and size are used for different applica-
tions, such as ultra high aspect ratio penetrating metal microelectrodes can be used
in biomedical applications for painless surgery [47]. Microrods can also be used as
microtools in EMM for machining of various micro features. These types of
micropins or microrods of different features can be easily fabricated by reverse
EMM by regulating various process parameters [48, 49]. Figure 8.27 shows the
various microtools fabricated by EMM.
8.11.1.5 Disc Shape Microtools
Disc shape microtools have already proven their effectiveness in EMM for
machining of taper free micro features. Disc shape microtools of different features
namely disc height, disc diameter, shank diameter, and shank height can also be
fabricated by EMM. Figure 8.28 shows the microscopic image of precise disc shape
microtool fabricated by EMM from microrod of 300 µm diameter, under the
machining conditions of applied voltage 1 V, 1 MHz, 80% DR, and 1 M NaOH
Fig. 8.28 Disc shape microtools fabricated by EMM
electrolyte [51]. For achieving strength and rigidity to the microtool, disc microtool
has been fabricated in multiple steps of diameter reduction.
8.11.2 Finishing Applications
Micro components fabricated by different methods may consist of uneven and sharp
edges, microburrs, and rough surfaces, which needs further finishing operations to
make them suitable for various applications. Finishing of such micro components is
a challenging task due to the size limitations. EMM can be effectively utilized for
finishing of different micro components. Some of the finishing applications using
EMM are specified as:
8.11.2.1 Finishing of Print Bands
The print bands used in high-speed impact printers are fabricated from stainless
steel. The print band system consists of group of formed characters. Precise location
of all the characters on a band is achieved through timing marks. The characters and
timing marks on the print bands must have special characteristics to meet the
desired trade-off between ribbon life and print quality. Bands with round-edge
characters increase the ribbon life. To provide a high degree of character rounding,
the EMM should involve a high rate of dissolution. Surface finishing of print bands
is most important in print band manufacturing process. An electropolishing process
has been developed that gives microsmooth surfaces of print bands. Figure 8.29
shows a print band (a) before finishing and (b) after electropolishing and character
rounding [52].
8.11.2.2 Edge Finishing
Electrochemical micro finishing can be successfully utilized to remove microburrs

from the cutting edge of micro structures. The process uses a very simple fixture for
microburr removal. Figure 8.30 shows the microscopic images of micro channel
junction machined with conventional micromachining milling in minimum quantity
lubrication. Excessive burrs can be clearly seen at the junction before processing,
that has been removed after polishing [53].
Fig. 8.29 SEM micrograph of a print band character
Fig. 8.30 Micro channel junction before and after polishing

8.11.3 Surface Engineering Applications
Surface quality is an important property of the microproducts, as it affects the

performance and service life of products. Different types of surface topography can
be engineered on industrial products by EMM. Microscopic features on the surface
of the product may provide different advantages during various engineering
applications such as biomedical, tribological, and aesthetic. EMM offers viable
means to produce surface engineering applications, since it involves the material
dissolution at atomic level. EMM does not bring in mechanical and thermal residue
stresses that are generally accompanied by laser micromachining or dry etching
processes. Some of the surface engineering applications achieved by EMM can be
described as:
8.11.3.1 Generation of Micro Pattern on Stainless Steel
Surface phenomena, particularly at the microscale, have played an elementary role

in the development of many advanced fields such as energy, machining, optics,
tribology, and biomedicine. Surface engineering features such as shape of the micro
fabricated pattern, size, depth, and its functionality can be varied easily by changing
the process parameters of EMM. Surface texturing with micro-dimple is a well
known method for friction reduction under lubricated sliding contact. Figure 8.31
shows the micrographs of micro-dimple patterns machined on carbon steel
machined with applied voltage 9.5, 2 µs pulse on-time and 10 s of nominal
machining time, in 2 M sodium nitrate solution [54].
Fig. 8.31 Micro-dimple

pattern on the step-shaped
specimen [54]
Fig. 8.32 SEM micrograph

of a regular pattern machined
on a titanium surface [55]
8.11.3.2 Surface Structuring of Titanium by EMM
Titanium and its alloy have very good mechanical and chemical properties, because
of which they are in high demand for various engineering applications. Surface
structuring of titanium is a main requirement in micro engineering and biomedical
applications. EMM is one of the important process for surface structuring of tita-
nium, whereas micro structuring of titanium surface is a challenging task due to the
rapid formation of passive oxide layer, which obstructs the smooth anodic disso-
lution of titanium. Figure 8.32 shows SEM micrograph of a regular pattern
machined on a titanium surface by 20 V, 200 ns pulse length and 20% duty cycle,
using ethylene glycol as an electrolyte.
8.11.3.3 Surface Structuring for Biomedical Implants
Microscopic features on surfaces are critical factors that affect successful applica-
tion of titanium as a load-bearing implant in orthopedic surgery. EMM offers a
means to produce patterns on titanium surfaces. Figure 8.33 shows the microscopic
image of microhole patterns machined on Ti6Al4V for biomedical applications. Jet
electrochemical micromachining (jet-EMM) is used to machine microholes with a
high aspect ratio on titanium surfaces. The etching process was con-ducted with a
voltage of 200 V and average current of 45 mA.
Fig. 8.33 SEM micrographs

of microholes produced on
the Ti6Al4V [56]
8.12 Recent Advances in EMM
Anodic dissolution in EMM can be utilized for metal removal in micro as well as
nanoscopic level, because of which EMM has emerged as one of the best alter-
natives for fabrication of micro components with high quality and precision eco-
nomically. In recent years EMM technology has been introduced to meet the
increasing demands of advanced micro as well as nanoscale applications in various
fields of applications. Over the years through research and development in this area,
EMM has diversified its operational capabilities by the introduction of different
features to exploit its potential in the area of submicron and nanorange fabrication.
Different variants of EMM such as wire EMM, solid-state EMM, surface struc-
turing by EMM, micropatterning and stamping by EMM, and nanofabrication by
applying EMM have been established. Recent advancements in the area of EMM
demonstrating the potential of EMM as a solution to the various challenging
problems especially those that arise in the micro and nanofabrication areas have
been presented as:
8.12.1 Fabrication of Micro Features for MEMS
Basic properties and characteristics of the materials are to be retained after fabri-
cation of microdevices for MEMS. Advanced engineering such as copper, alu-
minum, steel, nickel, titanium, and their alloys, are some of the most suitable
materials for the fabrications of mechanical microdevices. Machining of these
materials is a difficult task, when features as well as components are in the
microscale size. EMM can be successfully utilized for micromachining of various
microfeatures made of different metals without altering the basic material charac-
teristics and properties because of the unique mechanism of material removal by
anodic dissolution at atomic level. Therefore the process can be precisely controlled
Fig. 8.34 a Channel-net of symmetrical micro cantilevers [45], b magnetically driven micro
turbine of nickel [11], c two-level structure machined in titanium [57], d freestanding micro
cantilever [58], e high-aspect-ratio micro column [46]
with submicrometer resolution to achieve highly accurate microfeatures that are

most acceptable for MEMS. Electrochemical micromachining of various micro-
features proposed for microdevices that are well suited for functional applications
of MEMS have been attempted by various researchers detailed as:
Figure 8.34a shows microscopic image of taperless and through, microchannel
band generated by the straight cylindrical micro tool of 115 lm diameter in SS
sheet of 35 lm thickness. Machining parameters were 5 MHz pulsed frequency,
0.2 M H2SO4, 40% duty ratio, sinking depth 75 lm, and feed rate along the path
was 0.781 lm/s [45]. Figure 8.34b shows the magnetically driven micro turbine
fabricated by electro-deposition of magnetic alloys through ultraviolet-patterned
photo-resist on nickel. The casing and the axis in the middle have been fabricated
by electro deposition of 50 µm thick Ni, whereas the wheels have been fabricated in
a separate substrate by electro deposition of 40 µm thick NiCo alloy having
diameter of 400 µm. Figure 8.34c shows SEM image of multilevel microstructure
machined on titanium using oxide film laser lithography which can be utilized for
MEMS applications. Figure 8.34d shows the freestanding micro cantilever of
80 µm long, 32 µm wide, and 11 µm thick fabricated in stainless steel by EMM
using ultrashort voltage pulse and microtool of 10 µm Pt wire as microtool. Use of
EMM milling strategy with a disk-type electrode, ultrashort pulses tens of
nanosecond duration, and 0.1 M sulfuric acid, enables the machining of 3-D
microstructures of high aspect ratio on SS as shown in Fig. 8.34e.
Fig. 8.35 Complex microstructures by micro electro-chemical milling a 2D micro complex

shapes, b 3D micro structure with three step [59]
Micro-scale metal complex structures have a wide range of application in many

fields, including biomedicine and aviation. Micro electrochemical milling can be
applied to the fabrication of micro metal parts also. Figure 8.35 shows complex 2D
and 3D micro metal structures machined on the hard-to-cut material super alloy
plate, utilizing microtool of 10 µm diameters. 2D micro shape having width of
about 25 µm, and 3D structure with three steps has been machined with machining
feed rate of 1 µm/s, nanosecond pulses with pulse amplitude of 4.5 V, pulse on
time of 95 ns, and pulse period of 1 µs, with milling layer thickness of 5 µm. The
total depth of the cavity is about 45 µm, and each single-step size was about
15 55 15 µm [59].
Micro features like microgrooves and microholes are to be machined on majority
of the microdevices in various applications such as microactuators, micropumps,
and microdies etc. Presently the demands of microgrooves and microholes with
internal features have increased, since specific cross-sectional shape i.e., geometry
and internal surface quality, improves product functionality as well as product
performance. If the microgrooves and microholes contain different internal features,
the fabrication of microgroove becomes difficult. These types of microfeatures can
be easily machined by EMM by regulating the process parameters during
machining. Figure 8.36 shows microgrooves and microholes with different internal
features machined by EMM using sidewall insulated microtool. EMM has suc-
cessfully proved its capability as an alternative technique for machining different
micro features, high-aspect-ratio 3-D microstructures with high resolutions for
MEMS and various micro engineering applications.
8.12.2 Solid-State EMM
Solid state EMM is an application of anodic electrochemical reaction at micro

contact between the ion conducting microelectrode and metal substrate as a result of
continuous application of direct current. The metal substrate is locally incorporated
into the ionic conductor in the form of metal ions through the micro contact [61].
This method can easily control the machining size and depth by adjusting the
Fig. 8.36 a Micro hole with array of internal microgrooves [60], b microgrooves with internal
features, machined by EMM
contact areas, i.e., shape of the apex or other electrochemical machining parameters.
Figure 8.37a shows the basic arrangement of solid-state EMM cell silver with
pyramid like microelectrode as cathode and target metal substrate M: Ag or Zn as
anode in the system. SEM image of the Ag surface after micromachining under a
constant current of 100 µA for 7 min at 873 K, is as shown in Fig. 8.37b.
8.12.3 Wire-EMM
Wire electrochemical micromachining is a novel method for machining of high

aspect ratio metallic microstructures by electrochemical micro machining using
very thin micro wire as a tool. Figure 8.38 illustrates the principle of Wire EMM,
utilizing tungsten micro wire as tool instead of complex shape electrodes. During
machining, ultra short voltage pulses are applied between workpiece as anode and
wire electrode as cathode that are separated by narrow IEG ranging from 1 to
10 µm. Electrolyte flows around the micro wire electrode accompanying bubbles
up and process by-products. Workpiece material dissolves electrochemically and
narrow groove is produced as the cathode wire moves towards the anode
Fig. 8.37 a Basic arrangements of solid-state electrochemical micromachining b pyramid-shaped

micro-features fabricated by SSEM [62]
Fig. 8.38 Schematics of wire EMM
workpiece. The motion and path of the micro wire electrode is controlled by
computerized numerical control system, and complex shape parts of high aspect
ratio can be fabricated. Different process parameters of WECM such as feed rate,
pulse voltage, and pulse on time influence the size of the machining gap that affects
the machining accuracy. Very thin wires of diameter 5–10 µm are used in this
process [63]. Platinum, tungsten, and copper are some of the common types of
wires used in wire-EMM.
In WEMM microstructures with high aspect ratio up to 30 could be fabricated by
electrolyte flushing and wire traveling. However, with further increase in aspect
ratio, machining gap becomes extremely narrow and long, during which electrolyte
flushing is less effective. Mass transport inside the machining gap plays an
important role in WEMM. The machining stability, the material removal rate and
surface quality can be significantly improved by introducing microwire vibration
along with electrolyte flushing and wire traveling during machine [64].
Fig. 8.39 Micro structures by WEMM a complex micro structure [63], b micro square helix [64]
Figure 8.39a shows the SEM image of with the slit width of 20 lm machined using
micro tungsten wire with the diameter of 5 lm, wire feed rate 0.125 lm/s., slight
vibration of workpiece with the frequency of 5 Hz, nanosecond pulses with pulse
amplitude of 4.2 V, on-time of 50 ns and off-time of 1 ls [63]. Figure 8.39b shows
the SEM image of micro square helix fabricated with 10 lm tungsten wire and
2 Hz wire vibration [64].
8.12.4 Nanofabrication by EMM
Anodic dissolutions can be controlled to atomic scale in EMM, which permits the
use of EMM for nanofabrication in many applications. Use of ultrashort voltage
pulses of nanosecond duration, material dissolution can be localized by spatial
confinement of electro-chemical reactions which leads to high precision machining
of metallic materials with nanometer accuracy. Use of few pulses of ultrashort
duration, complicated shapes in the nanoscale can be fabricated on the workpiece
by utilizing an appropriate shaped microtool containing nanofeatures, which allows
parallel nano-fabrication that is difficult to attain by traditional techniques.
Figure 8.40a demonstrates the improvement in machining resolution improves
with reduction in pulse duration, while machining troughs by EMM on nickel sheet
with different pulse durations, machining voltage 2.2 V, 10% duty ratio, 0.2 M HCl
and feed rate of 2 µm/min with tungsten tool tip of 2 µm diameter [65].
Figure 8.40b shows a spiral trench machined into Ni sheet with 3 ns pulses and
2 V. The depth of the spiral trench is about 5 µm and surface roughness is less than
100 µm. It proves that application of ultrashort voltage pulse in EMM may improve
the precision up to the nanometer range. Figure 8.41 shows SEM images of high
aspect ratio nanometer features fabricated by EMM in nickel sheet with 2 ns pulse
duration, machining voltage of 2.2 V, 10% duty ratio, and 0.05 M HCl electrolyte
[66]. The width of parallel lines in the center of the fabricated structure is 90 nm.
The nanometer features are machined in very short period of time, hence the same
microtool or array of microtools can be repeatedly utilized for mass production.
Fig. 8.40 a Influence of pulse duration b spiral trench on Ni sheet by EMM [65]
Fig. 8.41 a Tungsten microtool fabricated by FIB, b nano-features fabricated by EMM [66]
Application of ultrashort voltage pulses with very small IEG in EMM improves
the machining precision to nanoscale and provides an alternative to the existing
nanoscale fabrication techniques which are mostly limited to two-dimensional
structures. EMM can also be successfully utilized for nano-fabrication of
three-dimensional structures economically, and in shorter time which is still a
challenge to the researchers. However, the area of EMM requires in-depth research
to make it commercially successful in various nanotechnology applications.
8.13 General Conclusions
Electrochemical micromachining has become one of the most important micro-

machining process because of its numerous advantages. This chapter on electro-
chemical micromachining highlights the fundamental concepts in EMM process,
role of EMM in micromachining, material removal mechanism, types of EMM,
important process parameters, challenges in EMM setup development, and appli-
cations of EMM in various fields along with the recent advancements of it.
The EMM technique can be efficiently applied for precise machining applications
such as fabrication of micronozzles, microholes, slots, three dimensional micro
structures, and micropins or microtools of high aspect ratio. EMM can also be
applied effectively for surface finishing applications like edge finishing of print
bands, and surgical blades, and also for the generation of micro pattern on stainless
steel, and for biomedical implants, etc. Extensive research efforts and continuous
developments are required for effective utilization of EMM in various fields of
applications. This may include the improvements in machining setup, microtool
design and development, monitoring and control of IEG, control of material
removal and accuracy, power supply, elimination of micro sparks generation in IEG
and selection of electrolyte to enhance the applications of EMM technology in
modern industries. For better control over the material removal i.e. improving the
machining accuracy in EMM, geometry of microtool, sidewall insulation of the
microtool, supply of fresh electrolyte at narrow machining zone, and eliminating
micro sparks at IEG during machining are the important factors to be focused.
EMM offers many opportunities that have been unexplored till now. Further
research in EMM will open up many challenging possibilities for effective uti-
lization of ECM in the microscopic domain. Electrochemical Micromachining
technique will be more successful and will be able to play a key role in micro and
nano fabrication considering its advantages i.e., quality, flexibility, productivity and
ultimately cost effectiveness.
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Chapter 9
Electrochemical Micromachining
of Titanium and Its Alloys
Sandip S. Anasane and B. Bhattacharyya
Abstract Miniaturization has covered every area of modern world.

Micromachining is one of the key technologies that can enable the realization of
almost all requirements of the microproducts and related domain. However,
materials which can micromachined easily and used in present day Microsystems,
MEMS and microengineering applications have some limitations such as low
strength to weight ratio, corrosion resistance and biocompatibility. Titanium is one
of the potential material and arising as alternative to the conventional MEMS
materials particularly silicon or silicon based materials or glass. Titanium is known
as super metal due to its high strength to weight ratio, excellent corrosion resistance
and superior biocompatibility. This chapter highlights the challenges in microma-
chining of titanium and its alloys as well as potential use of electrochemical
micromachining (EMM) technique for micromachining of titanium. Utilization of
masked i.e. TMEMM as well as maskless electrochemical micromachining tech-
niques for generation of various microfeatures on titanium has been presented in
this chapter. Effect of various EMM process parameters on machining accuracy of
microfeatures of titanium as well as most suitable EMM process parameters for
fabrication of various complex microfeatures on titanium has also been discussed.
This chapter provides comprehensive information on electrochemical microma-
chining of titanium and its prospective applications in the area of MEMS,
Bio-MEMS and microengineering fields.
S.S. Anasane (&)

Department of Production Engineering and Industrial Management,
College of Engineering, Pune, Pune 411005, India
B. Bhattacharyya

DOI 10.1007/978-3-319-52009-4_9
338 S.S. Anasane and B. Bhattacharyya
9.1 Introduction
Miniaturization of the product and systems is in increasing demand in today’s

world. The miniaturization has covered every area of modern world. To name a few
are micro-electromechanical systems (MEMS), micro-sensors, micro-actuators and
also to machine micro size features. For example in electronic devices, e.g. com-
puters, cell phones, CD players, etc. Relays and switches are required to be
assembled to produce functional micro sized mechanical parts. In aerospace
industries lightness of aircraft or satellite is one of the most vital requirements,
which demands to design and manufacture components in smallest possible size on
advanced materials with high accuracy. Another example is the fuel injection
nozzles for automobiles; several factors of environmental safety have forced
manufacturers to improve the nozzle. In addition to that a new potential area
requiring microproducts is the field of biotechnology. Since the objects in this field
include biological cells and genes, the tool that handles them must have micro
effectors. Similarly in medical applications miniaturization of medical tools is one
of the effective approaches to arrive at this target of inspection and surgery without
pain as well as micro devices for drug delivery system. Micromachining is one of
the key technologies that can enable the realization of all of the above requirements
for microproducts and fields with such requirements are rapidly expanding. The
potential advantages of microproducts are less material requirements, lesser space
requirements, compactness, minimum energy consumption etc. Hence, due to this
growing demand of society for micro products, scientists and engineers forced to
develop stable micro-manufacturing process which can efficiently produce micro
components, mechanisms and micro features by machining engineering material
precisely in micron scale by utilizing various micromachining methods. However,
materials which can micromachined easily and used in present day Microsystems,
MEMS and microengineering applications have some limitations such as low
strength to weight ratio, corrosion resistance and biocompatibility therefore these
materials may not cope up with the demands of next generation microproducts.
Hence, there is an urgent need to identify such materials which can have edge over
conventional MEMS materials and importantly these materials should successfully
micromachined. Titanium is the potential material as alternative to the conventional
MEMS materials particularly silicon or silicon based materials or glass. Titanium is
known as super metal due to its high strength to weight ratio, excellent corrosion
resistance and superior biocompatibility. Therefore, titanium is ideal material for
fabrication of microfeatures or microcomponents of new age microstructures.
Introduction of advanced metals such as titanium, forces researchers to develop
newer efficient and stable micromachining processes which can machine this
advanced material efficiently and cost effectively.
9 Electrochemical Micromachining of Titanium and Its Alloys 339
9.2 Electrochemical Micromachining (EMM)
The non-conventional machining processes discussed above are thermal oriented

machining processes except Chemical machining process e.g. Electro discharge
machining (EDM), Laser beam machining (LBM), Electron beam machining
(EBM), etc., which may cause thermal distortion of the machined surface [1].
Chemical machining and electrochemical machining are thermal free processes, but
chemical machining cannot be controlled properly in this micromachining domain.
However, accuracy level of ECM can be highly improved if the inter-electrode gap
i.e. gap between microtool and workpiece is reduced in the order of less than fifty
microns. Electrochemical machining (ECM) process can be applied in the micro-
scopic domain for manufacturing of ultra precision micro features, is called elec-
trochemical micromachining process (EMM).
Electrochemical micromachining process is based on the principles of electrol-
ysis and governed by Faraday’s laws of electrolysis. In this process high frequency
DC voltage of pulsed current is applied between the cathode of micron scale size,
acts as a microtool and metallic work piece which acts as an anode. Both the
electrodes i.e. cathode and anode are immersed in an electrolyte usually stagnant in
nature and are separated by small gap of few microns generally termed as inter
electrode gap (IEG) as shown in Fig. 9.1. As soon as the pulsed current passed
through these electrodes anodic material dissolves into metallic ions by the elec-
trochemical reactions, and hydrogen gas bubbles are generated on the cathode
surface. In order to achieve anodic dissolution in desired direction and shape, the
microtool moves with constant feed rate towards the workpiece to maintain the
predetermined inter-electrode gap (IEG). Ideally, anodic dissolution rate or material
removal rate (MRR) must be synchronized with microtool feed rate to obtain
controlled dissolution with shape accuracy.
EMM appears to be a very potential technology for micro machining due to its
advantages that include high machining rate, better precision and control, rapid
machining time, reliable, flexible, environmentally acceptable and it also permits
machining of chemically resistant materials like titanium, copper alloys, super
Fig. 9.1 Schematic diagram of electcrochemical micromachining process

alloys and stainless steel, which are widely used in biomedical, electronic and
MEMS applications. EMM can be advantageously employed in most applications
related to micromachining of metallic parts due to its cost effectiveness and
achievable high precision, which are previously fabricated by chemical
micromachining.
Neutral solution like aqueous solution of NaNO3, NaCl, NaBr etc. are mostly
used as electrolyte in electrochemical micromachining process and hence it does not
cause any harmful effect to the operators. Electrochemical micromachining process
generates sludge during electrochemical dissolution. Most of the cases the sludge is
formed during the process are neutral salts, which are not harmful to the human
beings as well as to the environment. But some time these sludge materials may
contains small amount of metal ions, acids, nitrates, oils and even traces of heavy
metal ions which may be harmful to the environment and finally to the human
beings. Electrolyte is filtered during the EMM operation, which reduces the amount
and frequency of electrolyte disposal. During electrochemical micromachining
material removed only from the specified area, which also reduces the material
removal rate as well as the generation of sludge. Furthermore, the harmful sludge is
treated before disposal to the atmosphere to make the process environmental
friendly. Since miniaturization will continue as long as people require effective
space utilization with more efficient and better accuracy products without intro-
ducing any harmful material to the environment, electrochemical micromachining
process will be more important in the future.
Furthermore, the use of EMM will widen the range of materials application for
electronic industries, MEMS etc. The role of convective mass transport and current
distribution on the surface finish and shape evolution is very important.
Effective EMM process can be achieved by optimal combination of the process
parametric conditions. In order to achieve the effective and highly precise material
machining in the order of microns, the predominant process variables of the EMM
system will have to be optimally controlled.
9.3 Titanium and Its Alloys: Types and Usage
Titanium was first discovered in 1791 by William Gregor, who was the mineral-
ogist and chemist. William Gregor observed the magnetic sand from the local river,
Helford, in the Menachan Valley in Cornwall, England, and isolated “black sand”,
now known as “ilmenite”. By removing the iron with a magnet and treating the
sand with hydrochloric acid he produced the impure oxide of a new element, called
as “mechanite”. Subsequently, Martin Heinrich Klaproth, who is the Berlin che-
mist, isolated titanium oxide from a mineral, identified as “rutile”. Greek mythology
provided him a new name the Titanium from the children of Uranos and Gaia, the
titans. Matthew Albert Hunter from Rensselaer Polytechnic Institute in Troy, N.Y.,
was able to isolate the metal in 1910 by heating titanium tetrachloride (TiCl4) with
sodium in a steel bomb. Finally, Wilhelm Justin Kroll from Luxembourg is
recognized as father of the titanium industry. In 1932 he produced significant

quantities of titanium by combining TiCl4 with calcium and then changed reducing
agent from calcium to magnesium. Today this is still the most widely used method
and is known as the “Kroll process”. In 1948 the DuPont Company was the first to
produce titanium commercially [2]. Titanium is the ninth element available in the
earth’s crust, and the fourth metallic element. Titanium is naturally available in the
forms of rutile (titanium dioxide, TiO2) and ilmenite (titanium iron oxide, FeTiO3).
These two mineral forms are the most common and commercially exploitable.
Titanium is a material known for its superior physical and mechanical properties
such as high strength to weight ratio, high compressive and tensile strength, low
density, high fatigue resistance in air and seawater, and exceptional corrosion
resistance. Therefore, titanium is a perfect material for micro engineering and allied
applications. Fabrication of micro features on titanium has great potential in the area
of micro electromechanical systems (MEMS) because titanium provides superior
properties to traditional semiconductor materials since it has excellent fraction
toughness and corrosion resistance. Titanium also possesses exceptional biocom-
patibility. Today titanium and its alloys are widely used in aerospace chemical
processing, medicine, power generation, marine and offshore, sports and leisure,
and transportation industries.
Titanium naturally resists corrosion from acids, alkalis, natural salt and polluted
waters. This tendency of titanium metal is achieved by formation of hard, protective
oxide film when it is exposed to oxygen present in the air or water. This thin
tenacious film makes titanium resistant to erosion. Titanium is the only metal,
which is completely immune to microbiological induced corrosion (MIC) in sea-
water. Titanium has a low modulus of elasticity about half that of steel. This gives it
excellent flexibility. It is the most biocompatible of all metals. It is non-toxic, it
resists attack from bodily fluids, it’s strong and light, and its flexibility is close to
bone. Commercially pure titanium finds variety of applications from aerospace
industry to medical industry. Typical applications of titanium in various fields are
discussed in brief:
(a) Aerospace Applications
The exceptional properties of titanium alloys include high specific strength and
excellent corrosion resistance. Therefore, titanium alloys are found in aerospace
applications where the combination of weight, strength, corrosion resistance, and/or
high temperature stability of aluminum alloys, high strength steels, or nickel based
super alloys are insufficient. The main drivers for use of titanium in aerospace
applications are:
i. Weight reduction (substitute for steels and Ni-based super alloys)
ii. Application temperature (substitute for Al alloys, Ni-based super alloys, and
steels)
iii. Corrosion resistance (substitute for Al alloys and low-alloyed steels)
iv. Galvanic compatibility with polymer matrix composites (substitute for Al
alloys)
v. Space limitation (substitute for Al alloys and steels).

The most common and prime use of titanium is in aircraft fuselage applications,
for hydraulic tubing of modern aircraft. Aircraft floors surrounding on-board
kitchens and toilets where the corrosive environment is present. Aircraft landing
gear are manufactured from forged titanium, it has also find its application in the
engine bay of fighter aircraft, where temperatures can quickly exceed. The main
area of application for aerospace titanium and its alloys are in the gas turbine
engine. Approximately one third the structural weight of modern turbine engines is
made up of titanium. Compressor blades were the first engine components to be
made from titanium. For helicopters, titanium alloys are used in the most highly
stressed component i.e. the rotor head. In the space vehicles titanium and its alloys
are also used for fuel and satellite tanks and high-pressure piping in the hydrogen
pumping systems of the Space Shuttle.
(b) Process Industry Applications
Other than aerospace industry titanium found suitable in the areas where harsh
environment is very common such as chemical, process and power generation
industry. Preferred applications are in heat exchangers in which the cooling medium
is seawater, brackish water, and also polluted water. Titanium is also employed in
millions of meters of welded and seamless titanium tubing in steam turbine power
plants, refineries, chemical plants, air conditioning systems, multi-stage flash dis-
tillation, desalination and vapor compression plants, offshore platforms, surface
ships and submarines, as well as for swimming pool heat pumps. Commercially
pure titanium grades and alloys are applied in production facilities for acetaldehyde
and acetone, acrylic fibers, and urea. Another interesting application of titanium is
in architecture, titanium has been increasingly used as exterior and interior cladding
material for roofing, curtain walls, column covers, soffits, fascias, canopies, pro-
tective cladding for piers, artwork, sculptures, plaques, and monuments.
(c) Sports and Leisure Applications
Tennis Racquets, Baseball Bats and Pool Cues, head of the golf club, titanium
accessories for racing bikes, Scuba Diving Equipment, for trekking and hiking
applications such as High strength climbing gear like snap shackles, hooks, rings
and eyes, latches, locking carabineers, pins, clips, eye bolts, cliffhangers, and straps
are usually manufactured from forged titanium and its alloys.
(d) Medical Applications
Another popular application of titanium is in medical industry due to the excellent
compatibility with the human body titanium is generally used as the biocompatible
metallic material. Additionally, titanium is extremely resistant to corrosion from
body fluids, and is compatible with bone and living tissue, and is elastically
deformable as thin foil material. Thus, pure titanium combines many of the attri-
butes desirable for heart pacemaker cases and as the carrier structure for replace-
ment heart valves. Titanium possesses excellent fatigue behavior which is decisive
for the choice of material for orthopedic devices such as various implants for hip,
knee, as well as it is used to make substitute parts of the shoulder, the spine, the
elbow, and the hand. Titanium has a relatively low modulus of elasticity, which
reduces the differences in stiffness between the human bone and the implant.
The introduction of a titanium implant into the jawbone favors osseointegration
before the superstructure is built onto the implant. Today, titanium is successfully
used in prosthetic dentistry for implant screws, crowns, bridges, dental posts, inlays,
and removable partial dentures.
9.3.1 Challenges in Titanium Machining
Titanium possesses two electrons in the third shell and two electrons in the fourth
shell. Titanium has arrangement of electrons, in which outer shells are filled before
the inner shells are completely occupied, which makes titanium transition metal. This
arrangement of electrons is responsible for the unique physical properties of titanium.
Due to the versatile physical and mechanical properties such as high strength to
weight ratio, high compressive and tensile strength, low density, high fatigue
resistance in air and seawater, and exceptional corrosion resistance. Titanium,
machining is always a concern to the researchers. Owing to poor thermal properties
of the titanium as well as low modulus of elasticity with its ability to maintain high
strength at elevated temperature made machining of titanium an intricate task.
9.3.2 Machining of Titanium by Conventional and Non

conventional Processes
Titanium proved its wider range of applications in different domains due to its
excellent properties. However, machining of titanium is difficult either by con-
ventional or non-conventional machining methods. In conventional machining
process, where cutting tool removed material by shearing due to deformation
through physical contact, in this mode, Titanium and its alloys are considered as
difficult to cut materials due to the high cutting temperature and the high stresses at
and/or close to the cutting edge during machining. The poor thermal properties of
the materials forced the larger portion of heat generated in machining process which
will be absorbed by the tool thus causes the rapid wear of tools. Both the high
temperature and the high stresses developed at the cutting edge of the tool may
create plastic deformation and/or accelerate the wear of the tools [3].
Low modulus of elasticity of titanium can cause chatter, deflection, and rubbing
problems [4]. During conventional machining forces perpendicular to the work-
piece may increase three to four times as a result of a build up of titanium on the
wear land of the tool [5]. Because of this high thrust force and the low elastic
modulus of titanium, the deflection of the workpiece can be a serious problem.

Cutting tool materials undergo severe thermal and mechanical loads when
machining titanium alloys due to the high cutting stresses and temperatures near the
cutting edge, which greatly influence the wear rate and hence the tool life. Flank
wear, crater wear, notch wear, chipping and catastrophic failure are the prominent
failure modes when machining titanium and its alloys. Flank and crater wear may
be attributed to dissolution-diffusion, abrasion and plastic deformation, depending
on the cutting conditions and the tool material, whilst notch wear is caused mainly
by a fracture process and/or chemical reaction.
Non-conventional machining techniques such as Electric Discharge Machining
(EDM), Laser Beam Machining (LBM) and Electron Beam Machining (EBM) are
thermal oriented machining process which put constraints to machine titanium and
its alloys beyond i.e. formation of pear shaped and tapering effects on holes as well
as possibilities of hot spot due to lower heat dissipation rate due to low thermal
conductivity of titanium [6]. In EDM, formation of thermal stresses in a small
heat-affected zone is a serious issue which can lead to micro-cracks, decrease in
strength and fatigue life and possibly catastrophic failure of the component [7]. In
case of USM, serious tool wear as well as lower material removal rate has been
encountered during machining of titanium and its alloys [8]. Electrochemical
machining (ECM) technique based on the principle of electrolysis proved to be
partial successful in machining of titanium and its alloys. But passive oxide layer
present on titanium surface is a concern in ECM and limits the process up to
macroscopic level. However, electrochemical micromachining (EMM) has proved
its capability to produce metal microstructures based on anodic dissolution prin-
ciple. In EMM material removal takes place at atomic levels irrespective of their
hardness and toughness. EMM of titanium by electrochemical process could be one
of the promising alternative technique for machining of titanium.
Titanium machining is always a complex task before the researchers and man-
ufacturing engineers because the pace of material research could not be maintained
with machining or machinability research of titanium and its alloys.
9.4 Machining of Titanium by Anodic Dissolution
Material removal based on the principle of anodic dissolution was started in early
twentieth century. The Russian engineer V.N. Gusev was the first to develop
Electrochemical machining set up and patented all basic principles of ECM.
The ECM process is conducted in the working chamber (electrochemical cell) of
the machine, where a workpiece (Anode) and a tool electrode (Cathode) are
positioned. The anode is connected to the positive polarity of a power supply, and
the tool electrode to the negative polarity of the power supply. The electrolyte
(usually an aqueous solution of an inorganic salt is pumped through the inter-
electrode gap (IEG) in order to remove the electrode reaction products (gases,
hydroxides) and the heat generated by the current. Electric current is passed through
the electrodes by the movement of electrons. Flow of electric current in the elec-
trolyte is takes place by the movement of ions. As the electrons transferred between
the electrodes and the electrolyte, physical changes occur at the electrodes and
anodic dissolution begins. To continue the process of material removal by anodic
dissolution tool electrode is moved in the direction of the intended anodic disso-
lution (metal loss) in order to maintain a prescribed machining gap. As the anode
dissolves, the cathode shape is reproduced on the anode i.e. work piece.
Machining of titanium by anodic dissolution is different than anodic dissolution
of other metals such as Stainless steel, copper and mild steel etc. According to the
position of titanium in periodic table and its electrochemical behaviour the titanium
is metal, which always contain a natural oxide film, when it is exposed to air, water
or media containing oxygen. Thickness of this natural oxide film of titanium ranges
from 5 to 70 Å [9]. Titanium gains its excellent corrosion resistance due to the
existence of this persistent and passivating surface film of oxide. This corrosion
resistance property of stable oxide layer obstructs the electrochemical dissolution of
titanium. Hence, to achieve controlled anodic dissolution of titanium it is necessary
to dissolve protective oxide film of titanium.
9.4.1 Difficulties Encountered with Anodic Dissolution

of Titanium in Microscopic Domain
Successful anodic dissolution process occurred when ionic conductivity between

the electrode and electrolyte is sufficient. This ionic conductivity is depends on the
metal and electrolyte combination. Dissolution of the metal electrode can be
influenced by the formation of the oxide film on the anode surface. If the oxide film
is passive in nature then its ionic conductivity is weaker. Hence, this passive oxide
film acts as a barrier between the surface of the electrode and electrolyte.
Development of this passive film depends on the relationship between current
density and applied potential, i.e., polarization curve of the used electrolyte. This
Passivating nature of oxide film present on the surface of titanium may terminate
anodic dissolution process. The strength of this passive oxide film and its
transpassive dissolution behaviour is based on how this passive film is formed on
the titanium. In the case of macroscopic dissolution i.e. with ECM, the electrolyte is
circulated with external pressure which creates high turbulence and thus reduces the
effect of concentration polarization, which limits the passivation. In addition to that
higher anode potential also causes anodic dissolution at higher valency by breaking
down the passive oxide film. However, in microscopic domain i.e. with
micro-ECM, the electrolyte flow is much lower or almost stagnant electrolyte is
preferred as well as potential difference is also lower compared to ECM, this creates
favourable situations for passivation. Selection of appropriate electrolyte combi-
nation as well as power parameters may minimize the chances of Passivating effect
of oxide film. As discussed, titanium always possesses highly passive oxide film.
The nature of this thin tenacious film of oxide is highly passive in nature, which
makes the anodic dissolution of titanium difficult compared to most of the other
metals.
9.4.2 EMM as a Potential Process for Titanium Micro

Machining
Electrochemical micromachining is appears as effective micromachining process

due to its several advantages discussed in sect. 9.2. EMM is also capable of
micromachining of chemically resistance material due to its ability to generate
localized current density. Machining of titanium through EMM is relatively dif-
ferent from EMM of common metals. Titanium gains resistance to corrosion
because of its protective surface oxide film. When titanium undergoes electro-
chemical actions, the role of transfer of Ti2+ and O2− is to contribute for the de-
velopment of anodic film. Formation of passive oxide layer on titanium surface
during electrochemical process with aqueous environment was initiated by reaction
of Ti2+ with hydroxide ions (OH−) ionized from aqueous solution. Following
electrochemical reactions represents stable titanium oxide (TiO2) [10]. At the
interface of anode workpiece and electrolyte, the reactions taking place are:
Ti ! Ti2 þ þ 2e ð9:1Þ
Ti2 þ þ H2 O ! TiO2 þ þ H2 " ð9:2Þ
The oxocation, TiO2+ is acidic in nature and subsequently reacts with OH− to
form stable TiO2 [11].
Following chemical reaction represents the formation of stable TiO2:
TiO2 þ þ 2OH ! TiO2 þ H2 O ð9:3Þ
Throughout the anodic dissolution process, development of oxide layer with the
help of titanium and hydroxide ions has been accelerated by the application of
electric field. This thin oxide film is highly passive in nature, causes anodic dis-
solution of titanium difficult. The controlled anodic dissolution titanium contains
this oxide film is difficult by EMM process parameters generally utilized for
micromachining of other metals especially in terms of machining voltage and type
of electrolyte. Hence, in order to attain uniform transpassive dissolution of titanium,
the oxide film that obstructs the controlled dissolution of pure titanium in the
passive potential region must lose its passivation phenomenon. Removal of oxide
film is possible when the applied potential is adequately high [12]. The passive
oxide film develops linearly with potential until a significant value is attained and
the breakdown of the film takes place from random pitting at higher current
densities and then shape controlled dissolution begins [13]. An additional factor,
which plays vital role in rupturing this passive oxide film, is the electrolyte type.
EMM offers both the advantages i.e. to achieve higher localized current density as
well as possibility to utilize various non toxic eco-friendly aqueous as well as non
aqueous electrolytes. Hence, EMM can be a potential micromachining method to
achieve controlled anodic dissolution of pure titanium as well as titanium alloys.
9.5 Effect of Various EMM Process Parameters

on Maskless EMM of Titanium
Material removal in electrochemical micromachining is based on anodic dissolution

where metals are liberated from anode surface in atomic level. In order to achieve
efficient and precise machining in the sub-microns level, the various process
parameters of the EMM system play crucial role. The accuracy of the micro
machined product in EMM is highly influenced by process parameters e.g. applied
machining voltage, duty ratio, pulse frequency, concentration and type of elec-
trolyte and micro tool vibration etc. During electrochemical micromachining of
titanium these process parameters should be optimally selected and controlled due
to Passivating phenomenon of titanium. Hence, appropriate selection along with
controlling of all these EMM parameters play a vital role in attaining the preferred
results during titanium micro machining utilizing EMM. Some of the predominant
factors, which have major influences on EMM of titanium, are discussed to obtain
fundamental information about how to control the EMM process most optimally
while micromachining of titanium.
9.5.1 Role of Electrolyte
When potential is applied between the electrodes, electrolyte plays crucial role in
flowing the electric current from electrode to electrolyte solution to achieve anodic
dissolution through electrochemical reactions by completing the electric circuit.
Selection of electrolyte is governed by material properties of workpiece and
micromachining criteria such as machining rate, accuracy, surface texture, and
surface integrity. Type and concentration of electrolyte proves crucial in anodic
dissolution of materials which posses passive oxide film such as titanium.
Electrolytes of different combination and concentrations have been employed by
various researchers during masked as well as maskless electrochemical microma-
chining of titanium. Regular pattern of up the depth of 30 µm on pure titanium by
electrochemical dissolution through the patterned photoresist using sodium bromide
and methanol solution containing sulfuric acid and the etching performance of these
two electrolytes has been tested [14]. With the aqueous solution of bromide
irregularly shaped cavities with a rough surface have been appeared. However,
Regular shape and smooth surface textures were obtained when titanium was dis-
solved in the methanol electrolyte. Solution of methanol sulfuric acid has also
effective in electro polishing of titanium. It has been reported that the electro
polishing of titanium in methanol sulfuric acid electrolytes is mass transport con-
trolled. The limiting current density vary with electrolyte composition. This con-
cluded that the dissolution of titanium tetravalent species from anode surface to the
bulk solution is rate limiting due to the presence of compact salt film at the anode
surface under limiting current conditions [15]. Crucial role of mass transport phe-
nomenon in anodic dissolution process and presence of thin salt film at the limiting
current has confirmed the linear growth of passive film with potential until a critical
value reached where the film breakdown occurs and initiates the transpassive dis-
solution [13]. The porous anodization of titanium to create nano-scale features on
titanium surfaces has been possible by utilizing sulfuric acid and H3PO4 electrolyte
with potential sweep [12]. Electrochemical anodization of titanium through pat-
terned photoresist mask using 0.5 M sulfuric acid and Phosphoric acid (H3PO4)
were also performed [16]. Electrolyte combination containing Sodium chlorate
(NaClO3), Sodium nitrite (NaNO2) and sodium fluoride (NaF) can be suitable for
the generation of etchants of Hydrofluoric acid (HF) and Nitric acid (HNO3) for
machining of Ti alloy (Ti6Al4V) with the help of confined etchant layer technique
(CELT). Its micromachining resolution depends mainly on the rate of the scav-
enging reaction. Sodium hydroxide (NaOH) is an effective scavenger to obtain
sub-micrometer resolution [17]. Use of high concentration of aqueous sodium
bromide with working voltage of as high as 200 V through jet electrochemical
micromachining (Jet-EMM) technique were also successful to create deep holes in
titanium alloy [18]. Anodic dissolution of titanium has been performed in NaCl
containing ethylene glycol solution. Anodic polarization of titanium electrode in
NaCl-containing ethylene glycol solutions involves dissolution of titanium as
tetravalent species with the gas being evolved initially [19]. The electrochemical
micromachining of pure Titanium with Ethylene glycol and Sodium Bromide of
higher molar concentration up to 5 M can deliver satisfactory results however,
machining time is very high due to the slower etch rate [20]. Aqueous solution of
sodium bromide has been suitable for carrying out anodic dissolution of titanium
with the help of conventional ECM in macroscopic domain [21].
Majority of electrolytes which can dissolve titanium in microscopic domain are
Sulphuric acid, Hydrofluoric acid (HF), Nitric acid (HNO3) and combination of
Methanol and Sulphuric acid. All these electrolytes are either hazardous as well as
toxic and may create problem to environmental issues. Aqueous solution of Sodium
Bromide (NaBr) and sodium perchlorate can be suitable for anodic dissolution of
titanium. These two electrolytes can be effectively utilize for controlled electro-
chemical micro machining of titanium by employing lower range of machining
voltage and duty ratio. However, formation of black oxide film is predominant in all
these aqueous base electrolytes. In order to overcome the effect of regeneration of
oxide film due to aqueous base electrolytes non-aqueous base electrolytes can be
effectively employed. Non-aqueous base electrolytes, which are non-toxic and
environment friendly are combination of ethylene glycol and sodium bromide
(EG + NaBr) as well as combination of ethylene glycol, sodium bromide and

sodium chloride (EG + NaBr + NaCl) were demonstrated excellent controlled
anodic dissolution of titanium based on the criteria of lesser radial overcut and
lower taper angle of the micro holes machined with these electrolytes [10].
Electrolyte solution includes bromide ions can promote anodic dissolution of tita-
nium with valance of 4 i.e. Ti ! Ti4 + Electrolytes containing bromide ions have
been effective in breakdown of oxide film [22].
9.5.2 Effect of Machining Voltage
In order to dissolve the titanium anodically, passive oxide film must lose its pas-
sivity. To overcome this difficulty suitable composition and type of electrolyte plays
vital role to attack on the film and to break it through pitting. However, mere pitting
or breaking the passive film at random points is not adequate. Phenomenon of
pitting should be controlled to achieve uniform dissolution of base metal i.e. tita-
nium. Another factor which is crucial to attain controlled anodic dissolution of
titanium is applied voltage i.e. voltage between cathode and anode. To achieve
uniform transpassive dissolution of titanium, the anodic oxide film that usually
protects the titanium in the passive potential region must lose its protective prop-
erties. Rapid removal of oxide film is obtained when the applied potential is suf-
ficiently high. The passive oxide film develops linearly with potential until a critical
value is attained and after that the breakdown of the film takes place from local
pitting at higher current densities and then shape controlled dissolution begins.
Hence, to achieve proper current density with the application of appropriate
potential range is crucial to overcome passivity of the oxide film. In order to attain
shape controlled dissolution the desired current density in the appropriate potential
region should maintain until the controlled dissolution gains stability. To make the
process stable so as to attain desired accuracy of the machined product, influence of
applied machining voltage, play vital role.
Study based on the breakdown voltage in terms of a change in efficiency of film
growth the change in slope of the voltage/time relation at constant current density,
are deceptive in the case of Ti in that such changes are not always accompanied by
a change in columbic efficiency. This indicates that the higher voltage is necessary
to breakdown the oxide film because the film consists of amorphous oxide which
gives way to a new anodic behaviour low efficiency oxide growth and gas evolution
associated with crystalline oxide in the film [23]. Based on the changes in the slopes
of the voltage/time relations at constant current density occurred at *100% effi-
ciency for growth indicated that there is variable oxide field strength. During
through-mask electrochemical machining, regular shape and smooth surface tex-
tures were obtained when titanium was dissolved at 8 V with mass transport lim-
iting current density [14]. Micro-dimples with a diameter of 110 lm and depth of
20 lm could be generated with applied voltage of 24 V, pulse duty cycle of 10%
and frequency of 100 Hz [24]. In masked EMM of titanium feature aspect ratio is
limited as well as toxic and reactive electrolytes can be used hence, applied
potential can vary from 5–30 V. However, in maskless EMM machining voltage
can be limited to the range of 8–20 V, in few exceptional cases such as
jet-electrolyte titanium machining voltage can be elevated to 200 V [18].
Maskless EMM of titanium, machining voltage is the major parameter in breaking
down the passive oxide layer. Removal of passive oxide film under the influence of
increased machining voltage is governed by the induced current density, as the
current density increases passive layer breaks randomly at some weaker points and
exposes the base metal. Further, increase in machining current rupture the passive
oxide film and turns into transpassive leads to initiation of controlled anodic dis-
solution of titanium. Increase in machining voltage tends to rise in machining
current. According to Faraday’s law material removal rate increases with machining
current and hence, higher material removed at higher machining voltage. With the
increase in machining current in the narrow machining zone Joule heating effect
generated which leads to elevation in the temperature in the narrow machining
zone. This causes variation in electrolyte conductivity results in non-uniform cur-
rent distribution in the inter electrode gap. Hence, reduces localization of current
flux flow leads to random material removal with higher stray machining. Therefore,
higher stray current flows in the micromachining zone causes more material
removal from the larger area of workpiece, results in an increase in overcut.
Figure 9.2 shows typical behaviour of radial overcut and material removal rate of
micro holes machined on pure titanium sheet of 100 µm thickness, machining
voltage is varied in the range of 8–14 V, utilizing maskless EMM process.
The micro holes machined with machining voltage of Fig. 9.3 shows the SEM
micrographs of micro holes machined at 8 and 14 V machining voltage. From the
Fig. 9.2 Effect of machining voltage on radial overcut and MRR of micro hole
Fig. 9.3 Micro holes machined at a 8 V and b 14 V machining voltage [32]
SEM micrograph it is also confirmed that the effect of stray machining is pre-
dominant in micro hole machined at 14 V.
Stray machining induced by higher machining voltage can also increase conicity
or tapering effect during microfeature fabrication on titanium. The effect of stray
machining is higher at higher machining voltage, majority of stray machining takes
place at the entry of the micro hole. When micro tool further advances into the
workpiece machining depth increases, circulation of fresh electrolyte becomes
crucial and accumulation of sludge in the narrow machining gap increases which in
turn lower down material removal rate result in generation of smaller diameter at
exit of micro hole compared to entry. Hence, tapering effect takes place and micro
hole becomes taper in shape. However, this tapering effect can be utilized for
fabrication of micro nozzles. To reduce the effect of stray machining during micro
hole generation lower machining voltage is preferred or suitable microtool insu-
lation has been applied.
9.5.3 Effect of Pulse Duty Ratio
Duty ratio represents the percentage of time for which pulse remains on i.e. per-
centage of time available for both faradic and non-faradic current. Increase in duty
ratio in turn increases time available for faradic current. Hence, the amount of
faradic effect and current density increases results in more material removal and
causes increase in overcuts and MRR. Micro holes machined with varied duty ratio
keeping other process parameters fixed at machining voltage 8 V, pulse frequency
200 kHz, tool feed rate 0.2 µm/s and keeping electrolyte concentration as 2 M/L.
the influence of duty ratio on overcut and MRR during micro holes generation on
titanium by EMM has been shown. From Fig. 9.4, it can be observed that radial
overcut of micro hole at entry and exit is increases as duty ratio increases.
Figure shows the influence of duty ratio on overcut and MRR during micro holes
Fig. 9.4 Influence of duty ratio on radial overcut and MRR of micro hole
generation by EMM. From Fig. 9.4 it can be observed that radial overcut of micro
hole at entry and exit is increases as duty ratio increases.
Increase in radial overcut at entry follows linear trend. The lowest radial overcut
at 30% duty ratio at entry and exit is found to be 41 and 26 µm respectively. The
highest radial overcut is found to be 124 and 36 µm at entry and exit at 45% duty
ratio. As the duty ratio increases pulse ON time increases and machining current
flows for higher time, which causes higher material removal as well as stray
machining effect is also increases at the entry. Hence, radial overcut at entry is
much larger than exit, which in turn increases taper of micro hole. The micro hole
with highest taper angle of 41° has been obtained at 45% duty ratio. The SEM
micrograph represented in Fig. 9.5 exhibits dominant effect of larger metal removal
right from the entry of micro hole, machined at higher duty ratio of 45%.
9.5.4 Effect of Pulse Frequency
In EMM, pulse frequency directly governs pulse period. Total pulse period
decreases as the pulse frequency increases, results in proportionate reduction in
pulse ON time. Pulse ON time plays crucial role in charging and discharging of
double layer capacitance. In the EMM, during pulse ON time of pulse period, the
total current available consists of two components i.e. non faradic current and
faradic current. Charging and discharging of double layer capacitance has been
performed by Non faradic current and faradic current governs material dissolution
rate. Thus, material dissolution performed only during faradic time of every cycle.
Increase in pulse frequency results in lower faradic time tends to lesser material
Fig. 9.5 Micoholes

machined with 45% duty ratio
Fig. 9.6 Influence of pulse frequency on radial overcut and MRR of micro hole
removal per cycle as a result amount of sludge and gas bubbles are also lesser
which will washed out completely from the narrow machining zone during pulse
OFF time. Hence, it facilitates completely clean machining zone to accomplish
more controlled dissolution. Therefore, controlled and localized material removal
takes place which in turn improves the geometric accuracy of the microfeature. This
is clearly observed from the experimental results of MRR as plotted against pulse
frequency as shown in Fig. 9.6.
Micro hole machined with lower range of pulse frequency i.e. at 140 kHz has
282 µm entry diameter and 226 µm exit diameter. Whereas, micro hole machined
with higher pulse frequency of 200 kHz has entry as well as exit diameter is
reduced to 196 and 167 µm respectively. Hence, remarkable improvement will
Fig. 9.7 SEM micrograph of

micro holes machined at
200 kHz pulse frequency
takes place in machining accuracy of microfeatures machined at higher frequency

compare to lower frequency. The micro holes machined at higher frequency is
shown in Fig. 9.7. From the SEM micrograph, it is clear that the micro hole exhibits
controlled geometrical shape and minimum overcut.
9.5.5 Effect of Micro Tool Vibration
During micromachining material dissolution takes place in very narrow gap

between the cathode and anode electrodes. To maintain smooth anodic dissolution
in this constricted machining zone flow of fresh electrolyte is important to flow off
sludge and gas bubbles. If, external pressure applied to electrolyte to create the flow
in this highly narrow machining zone may displace the microtool. However,
vibrations of very small amplitude with fairly high frequency have been applied to
microtool, made substantial effect on enhancing the dissolution process by circu-
lating electrolyte in the form of micro-jets produced due to microtool vibration.
Microtool vibration creates hydrodynamic effects on the bubble behavior, which
has been utilized for the effective removal of sludge, hydrogen bubbles and
replenishment of fresh electrolyte [25]. The application of microtool vibrations
made significant influence on the diffusion and convection of dissolved metal ions
because of hydrodynamic effects on the bubble performance. This phenomenon of
enhancing anodic dissolution in EMM has also effectively utilized in maskless
electrochemical micromachining of titanium. Machining voltage has been lowered
down as well as controlled dissolution of titanium could be achieved by intro-
duction of microtool vibrations. Machining current density induced by applied
voltage is important in dissolution of material during electrochemical reaction.
Machining current density has been considerably elevated by the effect of microtool
vibrations. Microtool vibrations within the narrow machining zone will help to
Fig. 9.8 Effect of microtool

vibration on change in current
efficiency
circulate the fresh electrolyte and hence increase the convective mass transport
which in-turn increase rate of diffusion as well as conductivity results in increase in
current density.
The current efficiency, which is the ratio of observed amount of metal dissolved
to the theoretical amount predicated from Faraday’s law has been influenced by
dissolution of titanium with the application of microtool vibration. Figure 9.8
shows the change in current efficiency with respect to voltage during micro hole
machining on pure titanium.
The major change in current efficiency proves that the application of microtool
vibration facilitates circulation of electrolyte, which causes increase in the utiliza-
tion of considerable portion of machining current for the metal dissolution and leads
to increase in current efficiency which further enhances mass of metal removal
results in increase in machining depth. Figure 9.9 shows the comparison of
machining depth achieved by two conditions of with microtool vibration and
without microtool vibration. It is clear that the microtool vibration significantly
improves the controlled anodic dissolution of titanium even at lower machining
voltage.
SEM micrograph shown in Fig. 9.10 exhibits the micro holes machined on
titanium with and without microtool vibrations with machining voltage of 8 V.
9.6 Through Mask EMM of Titanium
Through-mask EMM (TMEMM) is a typical masked electrochemical microma-

chining process. This process is commonly employed for fabrication of micropat-
terns, as well as for shaping and finishing of 2D microfeatures. In TMEMM anode
workpiece is covered with photoresist patterned in the form required shape pattern.
Fig. 9.9 Effect of microtool

vibration on change in
machining depth
Fig. 9.10 SEM image of microhole machined at a with microtool vibration b without microtool
vibrations [32]
Uncovered or unmasked metal surface is removed by high rate anodic metal dis-
solution. In through-mask EMM, metal dissolution takes place at the workpiece
surface that lies at the bottom of the cavity created by the photoresist mask [26].
The metal removal in TMEMM can be possible by two ways i.e. on one side of
masked metal or from two sides of masked anode workpiece which is as shown in
Fig. 9.11.
Through mask electrochemical micromachining of titanium has been carried out
in solutions containing hydrofluoric acid. Figure 9.3 shows a SEM micrograph of
an individual cavity etched for 2 min in a solution containing aqueous hydrofluoric
acid. An irregular shape and a rough surface texture result from crystallographic
attack by the acid solution. Anodic dissolution of titanium through the patterned
photoresist was also accomplished with the NaBr electrolyte at applied potentials
Fig. 9.11 Through-mask EMM: a one sided and b two sided [29]
Fig. 9.12 SEM micrograph

of a regular pattern etched on
a titanium surface at 5 V in
the NaBr electrolyte by
passing a charge of 4 C. The
pattern consists of 50 m
diameter cavities, separated
by 130 m [14]
ranging between 2 and 8 V. At 2 V only a few cavities dissolved randomly across

the pattern while the remaining features of the pattern were not etched; moreover,
the etched cavities were large and irregular. The patterns achieved are of pitting
nature of titanium dissolution in NaBr electrolytes at the lower potential. However,
at 8 V all the cavities dissolved across the pattern. When dissolution was performed
at a potential of 5 V all the cavities were etched uniformly across the surface. The
etched pattern were enhanced geometric feature with better surface quality when
etched with 5 V. Figure 9.12 shows a regular pattern etched on a titanium surface at
5 V in the NaBr electrolyte by passing a charge of 4 C. Dissolution time corre-
sponded to 2 s. The pattern consists of 50 lm diameter cavities, separated by
130 lm.
Electrochemical dissolution of titanium through the patterned photoresists was
performed with the 3 M sulphuric acid containing electrolyte at 0 °C. Figure 9.13
Fig. 9.13 SEM micrograph of a pattern etched on a titanium surface at 8 V in 3 M H2SO4 in

methanol. The pattern consists of 30 lm diameter cavities, separated by 130 lm (a), 80 lm (b),
and 50 lm (c) [14]
shows regularly shaped and smooth patterns fabricated by electrochemical etching

at 8 V. The pattern consists of 30 lm diameter cavities, separated by 130, 80 and
50 lm.
The extended application of through mask electrochemical micromachining
(TMEMM) is by combining maskless UV and electron beam lithography in com-
bination with robust SU-8 photoresist technology for increasing the flexibility in
pattern shape and potential scale down of feature size on planar substrates [16]. In
this technique, features with a gradient in etch depth have been possible in one
single micromachining process. Electrolyte of 3 M H2SO4 in methanol at −10 °C
using a 2-electrode setup in a jacketed and tempered glass cell was utilized.
Maskless Ultraviolet and e-beam patterned SU-8 is highly suitable for planar
electrochemical surface micromachining from submicron to several hundred
microns feature scale, excellent chemical stability of SU-8 together with the flex-
ibility of maskless UV lithography providing great freedom in the pattern design.
This technique is suitable for patterning of highly curved surfaces with substrate
material choice, good mask patterning speed and freedom in feature shape.
Figure 9.14 exhibits Ti surface with well-defined hemispherical cavities by
TMEMM via maskless UV patterned SU-8.
Through mask electrochemical micromachining is an effective way to produce
regular patterned microfeatures on titanium. However, in TMEMM processes rel-
atively low achievable aspect ratio is the main limitation.
9.7 Micro Features Generation on Titanium
Masked as well as maskless EMM has proved its compatibility in fabrication of

various microfeatures on titanium. Masked EMM i.e. TMEMM or oxide film laser
lithography (OFLL) are the methods popular for machining regular patterned
microfeatures such as micro dimples or microholes on titanium. As discussed,
TMEMM can be effective in generation of micro patterns by applying photoresist
Fig. 9.14 Hemispherical

cavities by TMEMM via
maskless UV patterned SU-8
[16]
Fig. 9.15 Titanium cylinder

surface electrochemically
microstructured using OFLL
[13]
mask on the anode workpiece. However, in oxide film laser lithography oxide layer
on the surface of titanium is developed through anodic oxidation of the titanium in
an anodising electrolyte such as sulphuric acid, thereafter patterning of the oxide
layer has been carried out by excimer laser irradiation in air to form desired pattern
in such a way that the irradiated area of oxide layer is exposed for anodic disso-
lution. Electrochemical dissolution of the exposed titanium metal from the irradi-
ated areas has been performed with an electropolishing electrolyte such as H2SO4 in
methanol. After dissolution, protruded oxide film due to under-etching is removed
by ultrasonic cleaning [27]. The OFLL technique is better adapted for fabricating
multilevel structures since it does not require application of a photoresist.
Figure 9.15 shows microstructure fabrication by EMM utilizing OFLL. Various
microfeatures which will find potential applications in MEMS can be effectively
produced by this method.
Electrochemical bulk micromachining method named the confined etchant layer
technique (CELT) for micromachining of titanium and its alloys. In this process the
etchant is generated electrochemically on the surface of a machining tool or a mold
with desired 3D microstructures [17]. A specific scavenger added to the electrolyte

that captures the etchant within a very short duration so as to prevent the etchant
from diffusing away from the mold surface. Thus, the etchant layer around the mold
is kept so thin that its profile takes approximately the contour of the microstructures
of the mold. When moving the mold until the etchant layer contacting the work-
piece, the workpiece will be etched. An approximate mirror-image replica of the
microstructures of the mold is obtained by continuously approaching the mold to
the workpiece with etching process. This process can control precisely the
machining depth by controlling the moving distance of mold. It can be used in a
batch process with fewer steps than in photolithography. Authors demonstrated the
creation of microstructures consists of trapezoidal slots fabricated on Ti6Al4V alloy
as shown in Fig. 9.16.
Generation of microfeatures into titanium substrates of various thicknesses,
ranging from 0.5-mm sheet to 10 lm free-standing titanium foils has been fabri-
cated by Metal Anisotropic Reactive Ion etching with Oxidation (MARIO) process
[28]. This process has capability to fabricate arbitrarily high-aspect-ratio structures
with straight sidewalls micromachined structures free of residual stresses.
The MARIO process permits the creation of bulk titanium MEMS, which offers
potential for the use of a set of material properties beyond those provided by
traditional semiconductor-based MEMS.
Maskless electrochemical micromachining can also be effectively utilized for
fabrication of microfeatures on titanium. Various microfeatures such as microholes,
micrnozzles and microslots can be successfully machined by maskless electro-
chemical micromachining. Microholes and micronozzles can be fabricated by
Fig. 9.16 Trapezoidal slot microstructure fabricated on Ti alloy surface in the solution composed
of 0.2 M NaF + 0.4 M NaClO3 + 0.6 M NaClO4 + 0.3 M NaNO2 + 0.1 M NaOH [17]
Fig. 9.17 Microfeatures fabricated by maskless EMM a microholes b microcantilevers
utilizing stagnant electrolyte of mixture of ethylene glycol and sodium bromide by

advancing microtool into the titanium workpiece made as anode. Microfeatures
other than microholes can fabricate by employing micromilling strategy i.e.
cylindrical microtool which acts as cathode removes material in layer by layer
travelling mode or by sinking and milling method in the sinking and milling method
initially microdrilling is performed up to the required depth of the microfeature,
followed by milling along the path of the microprofile [29]. Effect of stray
machining and pitting of oxide layer is still an Issue in maskless EMM. However,
utilizing various shaped microtools such as disc, cone, conical disc shape and
insulated microtools or optimizing various process parameters can minimize these
issues to some extent. Figure 9.17 shows microholes and microcantilevers fabri-
cated on titanium by maskless EMM.
Microfeature such as micro slits were also fabricated on titanium alloy using
Wire electro chemical machining (WECM) [30]. In this process tungsten wire of
diameter in the range of 10–50 lm were utilized. The electrolyte has been intro-
duced between the machining zone by axial electrolyte flushing system to facilitate
removal of electrolysis products and renewing electrolyte. Various process
parameters such as wire feed rate, machining voltage, electrolyte concentration for
cutting microslots or micro slits with various structures were optimized and various
micro slits as well as slots can be machined with this process. Instead of using
single wire, multi-wire can be used to improve the machining productivity of
WECM. Figure 9.18 shows typical microfeature fabricated with WECM.
9.7.1 Suitable Range of EMM Process Parameters

for Fabrication of Micro Features on Titanium
Fabrication of microfeatures on titanium by EMM is relatively different than

microfeatures fabricated on other metals such as stainless steel, copper etc.
Fig. 9.18 Microfeatures fabricated by WECM on titanium alloy (Ti6Al4V) [30]
especially in terms of machining voltage and electrolyte. However, identification

and selection of suitable range of EMM process parameters either in masked or in
maskless EMM process parameters play crucial role in achieving machining
accuracy of microfeatures generated on titanium. In masked EMM, dissolution of
metal is confined to the exposed metal surface among the patterned photoresist
therefore, anodic dissolution must occurs within the patterned area. Hence,
machining time and machining current induced due to applied potential plays vital
role. In addition to that electrolyte combination is also an important factor, mostly
toxic acidic base electrolytes are preferred in masked EMM or TMEMM of tita-
nium. Generally, in reported work of the masked EMM of titanium, machining
voltage ranges from 8 to 150 V with machining temperature as low as −10 °C with
electrolyte combination of sulphuric acid in methanol of higher concentration up to
3 M or hydrofluoric acid were also employed [14, 16, 29]. However, in maskless
EMM major challenge during micromachining of titanium lies in controlling the
dissolution process by localizing the machining area. Localization of dissolution in
maskless EMM is inversely proportional to stray machining effect. Therefore,
highly localized controlled dissolution is important to achieve higher machining
accuracy of microfeature generated by maskless EMM. Selection of suitable pro-
cess parameters can directly influence accuracy of microfeature. In order to generate
precise microfeature in pure titanium machining voltage in the range of 8–10 V
with pulse frequency 160–200 kHz keeping duty ratio 30–35% and optimum
microtool feed rate of 0.6–0.8 lm/s has been found suitable process parameters of
maskless electrochemical micromachining [31]. Machining accuracy of microfea-
tures generated by maskless EMM can be further improved by utilizing electrolytes
which can break passive layer of titanium in lower current density which will
further reduce machining voltage in turn achieving more localized dissolution of
titanium.
9.7.2 Potential Applications of Titanium Micro Features
Titanium and titanium alloys gained popularity in aerospace, chemical process and
biomedical industry due to their biocompatibility, good mechanical properties and
excellent corrosion resistance. Titanium has also possesses plasticity-based failure
when subjected to external loading which makes titanium superior device safety
capability with increase safety and reliability. These properties qualifies the tita-
nium as potential material to MEMS and BioMEMS applications. Titanium has also
a established superior biocompatible metal with a proven applications in dental and
orthopaedic implants, which confirms its physiological compatibility for novel
biomedical microdevices. To state few examples of such devices are microneedles
for transdermal drug delivery [22], thin-foil devices for biomolecule separation and
characterization [23], large-area thermal ground planes for electronics cooling [24,
25], and rationally nanopatterned substrates for improved cellular response [26].
Titanium has also proved its compatibility for sophisticated area such as aerospace.
In many aerospace applications, array of micro holes, micro-nozzles in titanium
alloy plays vital role in critical aerospace applications. EMM can provide better and
reliable micromachining solution for titanium micromachining so as to meet these
emerging titanium microfeatures requirements.
9.8 Future Scope and Challenges in Titanium

Micromachining
Titanium, due to its versatile physical and mechanical properties is a highly

demanding material in MEMS and biomedical engineering applications therefore
titanium will replace traditional MEMS materials such as Silicon and/or semicon-
ductor material. These new opportunities of this material will pose a new challenge
of effective micromachining of titanium and its alloys. EMM has proved its com-
patibility to micromachine various microfeatures on titanium and its alloys.
However, few issues are still to be addressed to make EMM more stable and more
precise technique for titanium micromachining. Masked EMM or TMEMM have to
be improved in terms of effective photoresist masking technique in order to achieve
more confined precise material dissolution so as to minimize undercut material
dissolution below the edges of mask. Masking of cathode needs to be done instead
of anode workpiece which will enhance the productivity in terms of minimizing the
complexity of workpiece masking. Use of non-toxic and environment friendly
electrolytes should be promoted during EMM of titanium. During maskless EMM
total control of anodic dissolution of titanium can be achieved by lowering down
the machining voltage in the range of 2–5 V. This will allow application of higher
range of pulse frequency and thus more localized machining. Micromachining of
high to very high aspect ratio microfeatures is still a challenge which needs to be
addressed.
9.9 Conclusions
Electrochemical micromachining is the only process stress free and clean

machining in the microscopic domain irrespective of material hardness. Titanium
and its alloys known for its excellent material properties and difficulty in machining
either in macro or in microscopic domain can be smoothly micromachined by
EMM. To generate precise regular micro patterns on titanium and its alloys by the
application of Masked EMM or TMEMM technique is highly suitable, which is
proved by generating various micro patterns on titanium surface. Maskless EMM
for titanium microfeature generation through stagnant non-aqueous base electrolyte
by employing various micromilling strategies is found effective. These techniques
established suitable process parameters for EMM of titanium either by masked or
maskless techniques. Considering the emerging potential of titanium microfeatures
in various MEMS and BioMEMS applications EMM will appear as a most reliable
and stable micromachining process for titanium micromachining.
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Chapter 10
Electrochemical Discharge
Micro-machining of Engineering Materials
B.R. Sarkar, B. Doloi and B. Bhattacharyya
Abstract Electrochemical discharge micro-machining (micro-ECDM) process

appears to be very promising as a future micro-machining technique, since in many
areas of applications it offers several advantages, which include machining of variety
of electrically non-conducting hard, brittle materials including glass, ceramics and
composites etc. It is an advanced hybrid micro-machining process that combines the
techniques of electrochemical machining (ECM) and electrodischarge machining
(EDM). This book chapter focuses on the current researches and developments in
micro-ECDM process. The chapter discusses in details about the micro-ECDM
system, which includes the mechanical hardware unit, electrolyte supply unit and
electrical power supply unit etc. The effects of various factors on different machining
performance characteristics such as material removal rate, accuracy, heat affected
zone, gas film quality, machining depth, surface topography and tool wear etc. during
its application mainly for micro-drilling and micro-cutting operations on engineering
materials are represented in this chapter. The chapter also gives a glimpse on the
fundamentals, problematic areas and applications of micro-ECDM process and
highlights the challenges and future possibilities of research in this area. The recent
advancements for improvement of performance of µ-ECDM process by using the
rotating and travelling micro-tool, controlling the gap between the tool and the
workpiece, changing the shape of micro-tool and also controlling the surface texture
and material of tool for micro-spark discharge for required micro-machining opera-
tions are also depicted in this chapter. The chapter is expected to open up new insights
into the process characteristics for successful application of electrochemical
discharge micro-machining (micro-ECDM) process and provides valuable guidance
to the applied researchers and manufacturing scientists for setting up unique platform
for micro-machining electrically non-conducting engineering materials.
B.R. Sarkar B. Doloi (&) B. Bhattacharyya

B.R. Sarkar
B. Bhattacharyya

DOI 10.1007/978-3-319-52009-4_10
368 B.R. Sarkar et al.
10.1 Introduction
The electrochemical discharge in electrolyte cell was observed in 1968 by Kurafuji

and utilized for machining soda lime glass. The electrochemical discharge
machinings (ECDM) [1–3] technology has been developed by combining two
machinings i.e. electrochemical machining (ECM) and electrodischarge machining
(EDM). This technology has been utilized for machining electrically non-conducting
engineering materials in the product range of meso as well as micro scale.
Electrochemical Discharge Micro-machining (µ-ECDM) is an advanced hybrid
micro-machining process comprising the techniques of electrochemical reactions and
electrodischarge phenomena. The process is also referred as “Electrochemical Spark
Machining (ECSM)” [4, 5] and “Spark Assisted Chemical Engraving (SACE)” [6].
The process is important since it can machine a variety of electrically non-conducting
hard, brittle materials including glass, ceramics and composites etc. in the micron
level. Non-conventional micro-machining processes such as µECM, µEDM, etc., are
not able to machine electrically non-conducting engineering materials. Micro-ECDM
technology is used for micro-machining operation using micro dimension tool (less
than 500 µm) as cathode electrode. Depending upon the shape and size of micro-tool,
the micro-features are generated on workpiece. Micro hole/cut (less than 500 µm) can
be generated on micro-components. The travelling wire can be used as cathode
electrode for profile cutting and micro-grooving (width of cut or groove less than
500 µm) using ECDM technology and this process is called as Travelling Wire
Electrochemical Discharge Machining (TW-ECDM). Research works on µ-ECDM
and TW-µECDM processes are going on to solve the problems during its application
in the area of micro-cutting, micro-grooving and micro-drilling etc. on various
engineering materials like glass, quartz, ceramics (alumina, zirconia, silicon nitride
etc.) and composites etc. There are recent advancements for improvement of per-
formance of µ-ECDM process by rotating the micro-tool, controlling the gap between
the tool and the workpiece, changing the shape of micro-tool, controlling the surface
texture and material of tool and also controlling the bubble layer thickness for
micro-spark discharge for required micro-machining operations.
10.1.1 Fundamentals of Electrochemical Discharge

Micro-machining (Micro-ECDM) Process
Electrochemical Discharge Micro-Machining (µ-ECDM) is a hybrid and

non-traditional micro-machining process consisting of electro-chemical machining
and electro-discharge machining. The material removal in µ-ECDM process occurs in
the same way as that takes place in ECDM process. Although the basic mechanism of
the process is not yet completely understood and is still a matter of research inves-
tigations yet it can be revealed that material is removed due to the combined effects of
electrical spark discharge (ESD) action and electro-chemical reactions.
10 Electrochemical Discharge Micro-machining of Engineering Materials 369
Fig. 10.1 Electrolytic cell of micro-ECDM system
In µ-ECDM the electrolyte cell as shown in Fig. 10.1 is similar to that used in
ECM. The workpiece is dipped in an appropriate electrolyte solution (typically
sodium hydroxide or potassium hydroxide) and the level of electrolyte is just 1 mm
above the tool tip and it is controlled by electrolyte supply unit. A constant D.C.
voltage is applied between the machining tool or tool-electrode and the auxiliary
electrode with proper polarity, generally positive terminal as anode (auxiliary
electrode) and negative terminal as cathode (tool). The auxiliary electrode is in
general a flat metal plate. The tool-electrode surface is always significantly smaller
than the auxiliary electrode surface (by a factor of 100). When tool touches the job,
there are micro-gaps present both in the surface of tool and job due to surface
irregularities. The electrolyte present in micro-gaps is responsible for the generation
of gas and vapour bubbles in the micro-gaps and surrounding tool surface. The
generation of the combined gas and vapour bubbles takes place due to electro-
chemical reactions in ECM and joule heating of electrolyte respectively. From the
analysis of the ECM, it has been found that there are two types of reactions usually
occur in the system: electrochemical reactions at the electrodes and chemical reac-
tions in the bulk of the electrolyte [3]. When the applied voltage is increased
hydrogen gas bubbles grow in size. Their nucleation site density increases, current
path gets restricted between cathode and electrolyte interface causing discharge to
occur at this interface instantly. Thus these bubbles ultimately form an insulating gas
film layer around the tool-electrode as shown in Fig. 10.2. When voltage gradient is
sufficient to breakdown this gas bubbles layer between the tool and workpiece i.e.
beyond a threshold value, a conductive path is developed for the spark discharge
owing to the ionisation of the gas bubbles, which thereby causes the flow of a large
amount of current. The electro-discharge action takes place between the tool (cath-
ode) and the electrolyte across the gas bubble layer. Each electric discharge causes a
focused stream of electrons to move with a very high velocity and acceleration from
the tool (or cathode) towards workpiece. Ultimately it creates the compressive shock
waves on the workpiece surface as depicted in Fig. 10.3. This discharge phenomenon
occurs within few micro-seconds and as a result temperature of the spot hit by
Fig. 10.2 Gas bubble formation as in the micro-ECDM process
Fig. 10.3 Mechanism of material (tool and workpiece) removal in micro-ECDM
the focused stream of electrons may rise to a very high value. When this temperature
is above the melting temperature of the workpiece, material is melted and finally
vapourised.
10.1.2 Need of Electrochemical Discharge

In modern manufacturing industries the use of advanced engineering materials such

as ceramics is increasing due to some favorable characteristics and at the same time
some advanced machining methods are required to manufacture the products with
these materials. In Abrasive Water Jet Machining (AWJM) the cutting ability is
hazardous due to the traverse cutting speed and requires high investment as well as
maintenance cost. Also the quality of the product is not so good due to the
machined surface roughness. Ultrasonic Machining (USM) is generally used for
machining electrically non-conductive material but this process has some inherent
limitations such as tool wear, high capital cost and there is a chance of tool bending.
In case of Laser Beam Machining (LBM) a high intensity of monochromatic light is
used during machining operation. But this process requires very high investment
and the formation of very large undesirable heat affected zone degrades the quality
of the product. ECM requires high capital investment, skilled labour to operate and
large space for installation. Also the disposal of used electrolyte and effect of stray
current are the major drawbacks of ECM process. Electro-discharge machining
(EDM) has some drawbacks like difficult to fabricate various shapes, long
machining time required to produce micro-products and high cost of equipments.
Also, the process is useful mainly for electrically conductive materials.
Hence, there is a need of special machining process, which will be helpful for
fabricating products of electrically non-conductive materials and can cope up the
adverse effects of above machining processes. Electrochemical Discharge
micro-Machining (micro-ECDM) process has a great ability to machine electrically
non-conductive materials. It utilizes the electro-discharge phenomena to machine
advanced engineering materials such as ceramics, glass etc. In comparison to above
machining processes, thermal effects i.e. formation of heat affected zone is small.
The process is independent of physical and chemical properties of the material. The
investment cost is very low.
10.1.3 Problems in Electrochemical Discharge

From the basic study of micro-ECDM process for machining of engineering

materials like ceramics and glass etc., it is found that the micro-ECDM process
performances depend on the fundamental process parameters such as applied
voltage, electrical conductivity of tool and auxiliary electrode, type and concen-
tration of electrolyte, which ultimately control the electrochemical reactions and
electro-spark discharge actions. It is also revealed that the material removal rate can
be increased by the proper control of level of the process parameters in
micro-ECDM process. Figure 10.4 shows the cause and effects exhibiting the mix
of various levels of factors for achieving desired major micro-machining criteria in
electrochemical discharge micro-machining process.
But the µ-ECDM process has several problems. The following chart (Fig. 10.5)
shows the problematic areas of l-ECDM process. In the l-ECDM process there are
two electrodes named cathode and anode as they are connected to the negetive and
positive terminals of the power supply respectively. The shape and size of those
Fig. 10.4 Cause and effect (fishbone diagram) of µ-ECDM process
Problematic areas in μ-ECDM
Handling Electrode Preparation Machining Process Measurements
Parts Electrode Surface Dimensions

Quality
Sources Process
of Error Parameter
Job and Electrode Machine Machining Feed

Fixture Depth
Holder & Wear
Fig. 10.5 Problematic areas of l-ECDM process
electrodes depend upon the different types of operation like micro-drilling,

micro-profile cutting etc. The preparation of auxiliary electrode is one of the most
important tasks in micro-ECDM and controlling the inter-electrode gap (IEG) by
special devices is also the challenging task to the researchers. Also the devices,
which are used for performing the above operations, are difficult to handle.
The accuracy in positioning of the machining zone with respect to the measuring
point should be high. Inaccurate positioning of the workpiece may damage the tool
electrode. Hence, workpiece and its holding device preparation have some effects
on machining accuracy. The electrode holder is manipulated by turning, conven-
tional drilling and milling etc. In micro-ECDM the material is removed from both
the tool and workpiece due to the thermal effect. This causes the errors in the
machining process. Also, plating and etching of workpiece take place due to
chemical reactions. When machining is done by micro-ECDM, side sparking lies
among the problematic areas observed during machining the workpiece materials.
Controlling this side sparking is not easy task. By using the heat absorbed material
or insulator the side sparking may be controlled to some extent. Again, the con-
trolling of feed rate in micro machining by electro-chemical discharge phenomenon
is a difficult task. Feed can be given by two ways: one is where workpiece is fed and
tool is kept stationary, another is where the tool is fed keeping the workpiece
stationary. To modify the feeding arrangement some researchers used various types
of special devices such as gravity and spring feeding mechanisms, encoder, dial
indicator and load cell.
One of the major problems in micro-ECDM process is to control the DC power
supply, which provides the breakdown voltage and essential current flow that
causes sparking. The ranges of voltage, frequency and duty ratio are provided from
the power supply unit. Selection of critical process parameters for micro-machining
is not also an easy task. Carefully selected machining parameters and lots of pilot
experiments with different electrolyte concentrations can give better result for
finding the range. From various research works, different process parameters and
their ranges have been investigated and with the help of experimental design the
combination of various process parameters are chosen to carry out various
machining operations. For example, the suitable concentration is not same for
NaOH and KOH electrolytes to perform the machining operation by using
micro-electrochemical discharge machining process. Also, mixing of these two
electrolytes may enhance the performance of the machining process though the
necessity of suitable concentration range is hard to find.
10.1.4 Possibilities and Applications of Electrochemical

Discharge Micro-machining
Eletrochemical discharge micromachining (micro-ECDM) process has a great ability

to machine electrically non-conducting materials. In comparison to other noncon-
ventional micro-machining processes thermal effect i.e. formation of heat affected
zone is small. There is no requirement of skilled labour to operate the machine. The
investment cost is very low, as simple equipments are required to run the machining
operation. The machining can be performed irrespective of the electrical and
mechanical properties of workpiece materials and any shape of the tool-electrode can
be produced on the workpiece surface. The performance of the machining process

totally depends on the influences of some significant factors especially the thickness
of insulating bubbles’ layer formed around the tool-electrode. This film thickness is
influenced by various parameters such as applied voltage, electrolyte’s type and
concentration etc. Again, the area of machining zone can be varied from several
millimetres to microns either by changing the dimension of tool-electrode or by
varying other predominant process parameters. If the diameter of tool is small then
tiny shape or components can be fabricated since the area of machining zone can be
restricted to micro-machining range. Also, no large force as found in all common
conventional machining processes is experienced by tool-electrode during
micro-machining operation. The machining is done only by the use of
physico-chemical energy. Therefore, electrochemical discharge machining process
can be applied as a micro-machining process like other micro-machining processes
by controlling various process parameters.
The hybrid technology of micro-ECDM process consisting of EC reactions and
ESD helps in micro-drilling on electrically non-conductive advanced ceramics like
Silicon Nitride (Si3N4) [7], Alumina (Al2O3) [8], Zirconia (ZrO2) [8] and Silicon
Carbide (SiC) [9] etc. This method can also be used for slicing Quartz [10],
micro-grooving on e-glass epoxy [11] etc. Its unique feature of using thermal
energy to machine engineering materials such as electrically non-conductive parts
regardless of their hardness has been its distinctive advantage in the manufacture of
mould, die, automotive, aerospace, and surgical components. Figure 10.6 repre-
sents various micro operations performed by micro-ECDM process.
Micro-
ECDMing
Operation
Micro- Micro- 3D- Profile Micro- Micro-

Drilling Channel Microstru- Making Grooving slot
Cutting cturing cutting
Building
micro and
nano
systems
Fig. 10.6 Various micro-machining operations of ECDM

Fig. 10.7 a, b Micro-grooves, c micro-pillar, d micro-wall and e, f micro-pyramid machined on

glass by µ-ECDM [12]
The micro-ECDM can be effectively used for high precision machining opera-
tions such as making grooves, micro-channels and 3D micro-machining etc. [12,
13]. Figures 10.7 and 10.8 exhibit some examples of micro-features generated by
micro-ECDM process on glass. Micro channel formation and surface treatment can
be done by micro-ECDM [14]. Glass-based micro-fluidic systems can be produced
by µ-ECDM [15].
Fig. 10.8 3D microstructures in Pyrex glass machined using µ-ECDM [13]
10.2 Electrochemical Discharge Micro-machining System

Details
In order to carry out the experimentation on electrochemical discharge µ-machining

of engineering materials and also to control different process parameters such as
applied voltage, machining current, inter-electrode gap, feed movement of work-
piece as well as configuration of electrical power circuit etc., the µ-ECDM
experimental set-up includes following sub-systems:
(i) Machining chamber details
(ii) Job holding unit
(iii) Micro-tool development for micro-ECDM
(iv) Tool holding and guiding unit
(v) Auxiliary electrode unit
(vi) Inter-electrode gap control unit
(vii) Feeding unit
(viii) Electrolyte supply unit
(ix) Electrical power supply unit.
The schematic diagram of the µ-ECDM experimental system is shown in
Fig. 10.9. Each subsystem is equally important and has been designed separately to
fulfil the requirement of the research work and then integrated to develop the total
experimental set-up. A detailed discussion of each subsystem has been made in the
following sections.
10.2.1 Machining Chamber Details
The machining chamber is the main component of µ-ECDM system where

micro-machining of electrically non-conducting workpiece takes place. It is a
rectangular box having dimension 250 250 150 mm and its wall thickness is
2 mm. It has been fabricated with stainless steel. Stainless steel is selected for
construction of machining chamber due to its high strength, toughness and corro-
sion resistance property. The chamber is fixed on a vice for providing linear motion
Fig. 10.9 Schematic diagram of micro-ECDM system
in one direction and the vice is placed on a rotating table for proper positioning of
the job with tool. Within the machining chamber, job-holding unit, tool holding
unit, inter-electrode gap controlled unit, auxiliary electrode device and feeding unit
have been attached. At the bottom of the chamber there is an exit passage for the
electrolyte to flow out.
10.2.2 Job Holding Unit
The job, which will be machined, should be hold rigidly for getting better
micro-machining performance and the developed job holding unit fulfils this pur-
pose. In the system the job is placed on a supporting plate, which itself rests on a
support structure connected to the machining chamber of µ-ECDM system. The
supporting plate is also made of stainless steel. A rectangular shaped cover plate,
made of Perspex, is placed on the job in order to restrict the movement of work-
piece during machining operation. The cover plate is tightened at four corners with
the supporting plate by nuts. There is a slot on the cover plate for the easy
movement of tool towards the job during micro-machining. The displacement of the
job from the original job holding position may lead to the variation in the
dimensional accuracy of the job.
10.2.3 Tool Holding and Guiding Unit
Since the rigidity of micro-tool as well as its holding unit is one of the main factors
in micro-machining processes. Special attention has been given during the devel-
opment and fabrication of such tool-holding unit. In µ-ECDM system, tool holder
not only holds micro-tool during machining operation but also provides enough
rigidity to micro-tool as well its holding unit. The micro-tool holding unit is made
up of mild steel and consists of a small drill chuck having internal thread at one end.
Lower portion of the support column is made of insulator to insulate the remaining
part of the machine from tool holding arrangement. To generate micro-channel on
the workpiece a template with a curved profile on its outer edge is made and fitted
with the tool holding unit so that the tool can move along the same profile guided
by the template. The tool holder along with micro-tool can be rotated by a handle.
The tool holding unit is fitted with the cover plate by means of screw-nut mech-
anism so that the position of the tool can be adjusted according to the requirement.
There is also a provision for connecting the micro-tool holding unit to the negative
terminal of power supply unit. The diameter of micro-tools used for experiments is
ranging from 300 to 400 µm and the material is stainless steel or other. The
schematic diagram of the micro-ECDM set-up for micro-structuring is shown in the
Fig. 10.10.
Fig. 10.10 Schematic diagram of µ-ECDM machining chamber

10.2.4 Micro-tool Development for Micro-ECDM
The tool material is worn out due to thermal effect of the process and it influences
the process performances specially the accuracy and repeatability. So, the devel-
opment of micro-tool for micro-ECDM process is a hill task and depends on the
physical and chemical properties of micro-too material. There are several types of
micro-tool such as cylindrical shaped with flat end, conical end and spherical end
etc. are generally used in micro-ECDM process. The fabrication techniques of the
micro-tools and their materials in micro-ECDM are quite similar with the fabri-
cation techniques and materials of micro-tool used in micro-EDM process. The
micro-tool is developed by wire electro-discharge grinding (WEDG) technique,
block electro-discharge grinding (BDG) technique, electrical discharge grinding
using two block electrodes (EDG-TBE) and also by rotary disc with wire
electrode-discharge grinding technique etc.
10.2.5 Auxiliary Electrode Unit
Two electrodes are immersed into the electrolyte to complete the electrolytic cell.
Micro-tool is considered as one of the electrodes in micro-ECDM process.
µ-ECDM process machines electrically non-conducting materials. Workpiece
cannot be used as another electrode because it is electrically non-conducting.
Therefore, a special electrode known as auxiliary or counter electrode is necessary
to complete the electrolytic cell and highly electrically conductive material is used
to act as auxiliary electrode. In µ-ECDM system auxiliary electrode is a flat rect-
angular metal plate and placed parallel to the job holding plate. It is made of
stainless steel or graphite. Also, in order to fulfil the criteria of electrochemical
discharge (ECD) phenomenon the size of auxiliary electrode is generally hundred
times greater than the area of smaller electrode i.e. micro-tool. It is connected to
positive or negative terminal of the power supply unit.
10.2.6 Inter-electrode Gap Control Unit
As discussed in the previous section, the inter-electrode gap plays a vital role in
µ-ECDM process. Therefore, special attention is given during its development and
fabrication in such a way that inter-electrode gap can be varied during
micro-machining operation. The distance between the tip of tool (cathode) and top
surface of auxiliary electrode (anode) is known as inter-electrode gap (IEG). In
order to study the effect of the gap on different machining performance charac-
teristics, the inter-electrode gap should be adjusted with the help of inter-electrode
gap control mechanism. Two long vertical screws are joined to the auxiliary
electrode holder block and screwed to the plates projected from the top of main
machining chamber. The movement of the screws in upward or downward direction
can be adjusted by rotating the nuts. Due to this, the auxiliary electrode unit moves
in the upward or downward direction and the desired inter-electrode gap can be set
during the µ-ECDM process.
10.2.7 Feeding Unit
Generally tool feeding is not done in micro-ECDM process so as to protect the

disruption of gas bubbles layer surrounding the micro-tool. Micro-tool is held at a
fixed height and the feeding is given only to the workpiece. So, a gravity-controlled
job feeding arrangement is designed and developed to have the vertical upward feed
during the machining process. A string is connected to the guide block of the job
holding unit. The string passes over a pulley and a pan is placed at the other end of
the string. Two rectangular bars guide the upward movement of the guide block and
a support plate limits the upward motion of the job holding unit. A suitable weight
is placed on the pan so that job just touches the micro-tool tip. The feeding to job
sample can also be given by the use of spring, which is placed under the job holding
unit. In this unit the job is placed on a plate of size 60 60 5 mm, which itself
rests on four springs guided by four stainless steel rods of diameter 5 mm each
located at four different corners of the plate. The stainless steel rods guide the spring
in such a way that the job holding plate can move up and down along the axis of the
rods i.e. only vertical motion is possible for the job holding unit as well as the
workpiece. Micro-tool feeding can also be done keeping the workpiece stationary.
Here, tool-feeding can be observed and measured by the use of encoder, dial
indicator and load cell.
10.2.8 Electrolyte Supply Unit
In electrochemical discharge micro-machining process electrolyte plays significant

role. The electrochemical reactions and formation of insulating layer of the gas
bubbles and also the initiation of sparking during machining operation depend on
the types and concentration of electrolyte. Therefore, to get better machining per-
formance in terms of material removal rate (MRR) and radial overcut, the gener-
ation of gas bubbles due to electrochemical reactions is very important and it should
be accumulated at the bottom edge of the micro-tool. For accumulation of gas
bubbles under the tool a stagnant electrolyte is preferred and the upper level of
electrolyte is always kept at a constant height generally 1 mm above the surface of
workpiece. As heat is generated during this process, the electrolyte is heated up and
evaporates; as a result the level of electrolyte is reduced. So, to maintain the desired
level of electrolyte in the machining chamber the slight movement but steady
supply of electrolyte in the machining chamber is needed. The outlet pipe is fitted
with control valve at the bottom level of the machining chamber for removing the
used electrolyte containing sludge and precipitates. This can also be used for
cleaning of the machining chamber.
10.2.9 Electrical Power Supply Unit
The polarity of DC power supply during micro-ECDM process plays a significant

role and straight polarity is always maintained during micro-machining operation.
The voltage required for machining operation ranges from 10 to 70 V. The
machining current is very small in the range of 0–5 A. Conversion from A.C.
supply to D.C. is got from a step down transformer and silicon-diode controlled
rectifier unit. The voltmeter and ammeter are connected with the circuitry to
measure the applied voltage and machining current. The voltage is varied and set to
the desired value by controlling variac connected with power supply unit. Though
the power supply is D.C. but it is not smooth D.C. rather pulsed D.C., which helps
the machining operations. The electrical circuitry of pulsed D.C. power supply unit
Fig. 10.11 a Electrical circuitry of pulsed D.C. power supply unit; b Pulsed waveform
is shown in Fig. 10.11. The arrangements for adequate protective circuit for the
transformer rectifier and machine have been provided to avoid the short-circuit and
over-load conditions. But, the common µ-ECDM system is not fully compatible to
control the sparking phenomenon when it is used for micro-machining operation,
although it has some provisions such as worktable movement, tool movement, etc.
Therefore, the modification in power circuit configuration of the µ-ECDM system is
essential in order to machine non-conductive engineering materials in the
micro-machining domain with high machining rate.
An inductor does the filtering of supply voltage/current and generates high
current spikes when it is connected to the positive terminal of the power supply.
Therefore, inductance (L) is used in the power circuit of micro-ECDM set-up to
achieve controlled discharge during micro machining operation. There is a provi-
sion to vary the values of inductor during experimentation. A resistance (R) is
added to the negative terminal of power supply in the ECDM system to decrease the
load at the inter-electrode gap between tool electrode and auxiliary electrode. As in
case of micro-machining a controlled sparking as well the less energy per sparking
is desirable. There is a provision in the power circuit configuration where the value
of the resistance can be varied. A filter for light loads is observed in the capacitor,
which is connected directly across the load. The capacitor charges up to the peak
value of the input voltage and tries to maintain this value so that D.C. power supply
behaves as a smooth D.C. power supply. The capacitance (C) is connected across
the two terminals of the power supply of µ-ECDM system during micro-machining
operations. The values of the capacitor can also be varied in the power circuit
configuration of the developed micro-ECDM system. The schematic diagrams of
these various power circuit connections have been exhibited in Fig. 10.12.
10.2.10 Specification Details of the Micro-ECDM System
The detailed specifications for the various subsystems of the µ-ECDM system are as
follows:
(i) (ii)
Fig. 10.12 Schematic diagram of modified power circuit

I. Specification details of main machine set-up

The specifications of the important mechanical hardware modules are:
(i) Size of the machining chamber: 250 mm 250 mm 150 mm.
(ii) Maximum inter-electrode gap: 50 mm.
(iii) Auxiliary Electrode Material: Stainless steel, Graphite
Size: 80 mm 50 mm 1 mm.
(iv) Maximum work-platform movement in horizontal direction: 50 mm.
(v) Feeding mechanism: Gravity feed with counter weight, Spring loaded job
holding table.
(vi) Tool material: Stainless steel and other.
(vii) Tool diameter: 300–400 µm.
(viii) Maximum dimension of the job that can be machined:
For square job: 20 mm 20 mm 5mm.
For circular job: Ø60 mm 5 mm thick.
(ix) Capacity of the electrolyte reservoir tank: 5 lit.
II. Specification details of electrical power supply unit
Main input power supply: 3 phases 440 V A.C.
Output Power supply: Pulsed D.C.
(i) Voltage range: 0–100 V.
(ii) Current range: 0–5 A.
(iii) Frequency: 200 Hz to 1 kHz.
(iv) Duty factor: 0.3–0.8.
(v) External Inductance: 5–25 mH.
(vi) External Resistance: 40–120 X
(vii) External Capacitance: 50–200 µF.
10.3 Parametric Studies on Electrochemical Discharge

Basic principle of electrochemical discharge micro-machining process can be used

to perform various operations like micro-drilling, micro-cutting and
micro-structuring. These operations are very effective to fabricate different
micro-profiles on hard and brittle engineering materials, irrespective of their elec-
trical conductivity. Therefore, next discussions focused on the parametric studies
on electrochemical discharge micro-machining of engineering materials for the
above mentioned operations.
10.3.1 Micro-drilling
Electrochemical discharge micro-drilling is the primary application of micro-ECDM

process and being driven by the demand of high aspect ratio precise micro-holes on
thick or thin substrate [16] of engineering materials. To fulfill the demands of
micro-fabrication, many researchers has drilled through and blind micro-holes by
using micro-ECDM process. This process has been used to drill silicon nitride
ceramics [7], Alumina and Zirconia [8], Silicon Carbide [9], borosilicate glass [17,
18], Pyrex wafer [19], soda lime glass [20], other glass wafers [21] and
e-glass-fiber-epoxy composite [11] etc. The Electrochemical discharge
micro-drilling operation is performed either by die-sinking tool or through the
controlled and progressive movements of the tool electrode along the z-axis. There
are various process parameters related to the electrolyte, tool electrode and power
supply that effectively control the discharge energy. Applied voltage and electrolyte
concentration have strong effect on material removal rate (MRR) of micro-ECDM
process. MRR increases with applied voltage while electrolyte concentration is fixed
[7]. Initially MRR is observed to be decreased with applied voltage at higher elec-
trolyte concentration due to the possibility of material re-deposition at the machining
zone. As shown in Fig. 10.13 MRR increases with electrolyte concentration due to
the fact that the conductivity of the electrolyte medium increases with electrolyte
concentration and as a result, greater current flows through the path between the tool
and the auxiliary electrode. An increase in the inter-electrode gap (IEG) lowers the
flow of electric current hence MRR decreases [7, 8, 22]. Here, the resistance in the
current flow path increases as a result of increase in IEG. Also material removal rate
Fig. 10.13 Effects of applied voltage and electrolyte concentration on MRR [7]
Fig. 10.14 SEM images of micro-holes machined by different tool electrodes [26]
varies with the pulse frequency because the duration of the discharge increases as the
frequency decreases, even though the total time when voltage is applied remains the
same [23]. Also, MRR is increased significantly with the help of the vibration of
gravity feed tool [24] and due to increase in drilling speed [25]. But, it decreases as
the duty ratio decreases [22].
Overcut (OC) during micro-ECDM operations increases with an increase in
applied voltage because of the fact that at high voltage a large number of gas
bubbles are generated at the tool’s sidewall. Overcut is observed small under high
voltage and low inter-electrode gap compared to that under high applied voltage
and high inter-electrode gap [7, 8]. Resistance-capacitor circuit is found to be
suitable in micro-ECDM process for low overcut [22]. A tool electrode with
spherical tip exhibits higher machining rate and accuracy as compared to the
conventional cylindrical tool electrode [26] as shown in Fig. 10.14. The combi-
nation of pulse voltage and side insulation demonstrates a significant effect on the
reduction of overcut in the ECDM micro-drilling operation [27]. By utilizing a
side-insulated electrode the overcut and roundness error of the holes are signifi-
cantly reduced [28]. Tool wear behavior for different tool materials at various
voltage levels plays an important role to preserve the machining accuracy in
electrochemical discharge micro-drilling. It is observed that the steel and tungsten
carbide (WC) tools result in better performance over brass tool [27].
Large amount of heat is generated while machining the ceramic materials by
micro-ECDM process. Heat-affected zone (HAZ) is formed around the machined
zone due to the heat energy conducted to the workpiece during sparking and
micro-cracks are produced within this zone. These cracks degrade the quality of
products. HAZ increases with an increase in applied voltage due to a higher intensity
of sparking [7, 8]. HAZ also varies with electrolyte concentration as shown in
Fig. 10.15. HAZ decreases initially with increase in concentration, gets maximized
and then starts to increase with increase in concentration. HAZ (Fig. 10.16) is
reduced for tungsten carbide tool than tungsten and stainless steel tool [26].
Fig. 10.15 Effects of applied voltage and electrolyte concentration on HAZ [7]
Fig. 10.16 Current responses at optimal voltage and SEM images of HAZ [26]
A powder-mixed electro-chemical discharge machining method has been used to

fabricate glass micro surface [18, 29]. As a result the presence of conductive
particles within the hydrogen film reduces the critical breakdown strength resulting
in the decreased spark energy per single discharge pulse. The hydrogen film at the
moment of discharge is modeled as breakdown of the insulating gas between two
parallel plates for which distance of the gap becomes the theoretical thickness of the
film. The presence of conductive particles reduces the dielectric strength of the film.
The thinner gas film thickness will result in lower fluctuations of discharge
Fig. 10.17 Relationship

between the entrance diameter
and the machining depth
under different magnetic field
configurations [30]
Fig. 10.18 Relationship

between the machining time
and the machining depth
under different magnetic field
configurations [30]
activities [17]. Figures 10.17 and 10.18 show the relationships between the
machining time and the entrance diameter, respectively, with machining depth
under different magnetic field configurations [30]. Further a tool-surface bonding
reduces the machining rate during micro-drilling in gravity-feed or
constant-velocity-feed mechanism [31].
10.3.2 Micro-cutting
Many researchers have combined wire electric discharge machining (WEDM)

concept with electrochemical discharge machining process to cut/slice hard and
brittle engineering materials [32, 33]. In WECDM, electrolyte dipped traveling wire
serves as a cutting tool (cathode) as shown in Fig. 10.19. But keeping the work-
piece in contact with wire is very difficult. Two different workpiece feed
Fig. 10.19 Schematic view of TW-ECDM set-up [36]
Fig. 10.20 Influence of feed

rate on slit mean width and
depth [33]
mechanisms, namely, weight-loading mechanism and reciprocating mechanism are

used to ensure the physical contact between workpiece and tool wire [17]. Between
these two mechanisms, reciprocating mechanism exhibits better surface quality and
accuracy of microgrooves. In reciprocating (to-and-fro) mechanism of the work-
piece across the tool wire facilitates debris removal whereas in weight-loading
mechanism, the tool wire and workpiece are kept close to each other by using
mechanical force, which makes flushing of debris from the machined surfaces very
difficult. This un-flushed debris promotes secondary discharges and results in poor
surface quality within accurate microgroove profiles. In order to enhance the
machining rates as well as geometrical accuracy of the microgrooves, SiC abrasive
particles are added into the electrolytic bath [17]. Feed rate is the most important
process parameter during the fabrication of micro-grooves. It significantly affects
the slit depth as shown in Fig. 10.20. In titrated flow method electrolyte flows in the
form of droplets. Thus, the quantity of electrolyte available at machining zone is
reduced. As a result lesser environmental pollution is found [33]. The optimum wire
breakage ranges are recorded at 10% electrolyte concentrations and less than 60 V.
Fig. 10.21 Influence of tool

rotational rate on groove
width and depth [13]
Fig. 10.22 Influence of tool

travel rate on groove width
and depth [13]
Electrochemical discharge micro-machining process is demonstrated as a

potential method for the fabrication of complex 3D micro-structures on glass and
quartz materials [12, 13]. Many investigations have been reported on surface tex-
turing of the micro channels [34] and fabrication of micro channels [35] and micro
grooves [16] etc. Figure 10.21 shows the individual effect of tool rotational rate on
groove width and depth [13]. A higher tool travel rate can produce shallower
microgrooves with larger width as shown in Fig. 10.22. In order to develop the
deep micro grooves, layer-by-layer material removal approach with small depth of
cut has been introduced in electrochemical discharge micro-structuring. This
layer-by-layer approach facilitates electrolyte flushing at deeper and narrower gaps.
Additionally, deeper micro grooves with smooth surface finish can be machined.
For the fabrication of precise shaped microgrooves on glass substrates, the
parameter settings: i.e. 40V DC supply, pulse on/off time, 2 ms/2 ms, tool rotation
speed, 1500 rpm and tool travel rate, 1000 mm per minute are found suitable
as machining condition [13].
10.4 Challenging Areas of Electrochemical Discharge

Micro-machining
Miniaturisation of products continues to be the trend of the present technological

advancement and micro-ECDM will take a vital role in the area of micro manu-
facturing. However, authors believe that few areas still have to be considered for
improvement for wide acceptance of the electrochemical discharge
micro-machining (ECDM) process for micro-machining applications in modern
manufacturing industries. Therefore, some of the areas of micro-ECDM have been
found out as challenging areas of the research for successful utilisation and these
include:
(i) To increase machining depth of micro-hole in micro-ECDM process for
fabricating high aspect ratio of holes.
(ii) To control the tool-feeding and gap sensing facility for micro-machining
operation in order to facilitate the availability of electrolyte in the machining
zone.
(iii) To develop CNC based micro-ECDM system with all control facilities and
in situ micro-tool development arrangements for accurate and precise
micro-machining operations.
10.5 Summary
Electrochemical discharge micro-machining (micro-ECDM) process is a prominent

non-conventional hybrid machining process for machining of electrically
non-conducting advanced engineering materials. The chapter will provide valuable
guidance to the applied researchers and manufacturing scientists for machining
electrically non-conducting materials such as ceramics and glass, etc. with desire
machining rate, accuracy and other surface characteristics, which are unexplored till
now. Extensive research efforts and continuous advancements in the area of
micro-ECDM for effective utilization in micro-fabrication require monitoring and
control of the gas film, material removal and accuracy. Improvement in HAZ and
surface roughness are expected to enhance the application of micro-ECDM tech-
nology in modern industries. The increasing demands for precision manufacturing
of micro-parts for biomedical and automotive components will lead modern man-
ufacturing engineers to utilize micro-ECDM process more successfully considering
its advantages, i.e. quality, productivity and ultimately cost efficiency, which are
still vital for success in a competitive environment.
Acknowledgements The authors acknowledge the financial support provided by UGC under
CAS-IV programme of Production Engineering Department, Jadavpur University, Kolkata-32,
India.
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34. D. Jana, A. Ziki, T.F. Didar, and R. Wüthrich, Micro-texturing channel surfaces on glass with
spark assisted chemical engraving, International Journal of Machine Tools & Manufacture, 57
(2012) 66–72.
35. L. Paul, and S.S. Hiremath, Characterisation of micro-channels in electrochemical discharge
machining process, Applied Mechanics and Materials, 490–491 (2014) 238–242.
36. T. Singh, and A. Dvivedi, Developments in electrochemical discharge machining: A review
on electrochemical discharge machining, process variants and their hybrid methods,
Chapter 11
Travelling Wire Electrochemical Spark
Machining: An Overview
Anup Malik and Alakesh Manna
Abstract Travelling wire electro chemical spark machining (TWECSM) is a

hybrid machining process; TWECSM is combination of electro chemical machin-
ing (ECM) and wire electric discharge machining (WEDM). This machining pro-
cess can be effectively used for machining of difficult to machine non-conductive
materials that are not possible to machine by non-conventional machining methods
i.e. EDM, ECM and WEDM etc. Now a days the utilization of hybrid machining
techniques are very much important to process advanced materials as the different
types of advanced materials are developing by the modern research community.
The non-conductive materials can be machined with the help of conventional
machining processes but compromise with surface texture, accuracy, micron level
slicing etc. Keeping in view, this chapter presents the detail overview about the
hybrid TWECSM process. The design and development of TWECSM process,
potential and effectiveness of the process, parametric optimization for effective
application of this process etc. are also explained in the chapter.
11.1 Introduction
Developments in today’s materials demand suitable processes for the machining of

such advanced materials. Advanced machining processes are now being effectively
used in industries for manufacturing of components made up of electrically con-
ducting materials which are difficult to machine. With the speedy industrial pro-
gress in the field of engineering ceramic and composite materials, the machining of
these materials is mandatory for applied researchers and manufacturing engineers.
The non-conductive ceramic and composite materials can’t machine by any
well-known non-conventional machining methods such as EDM, WEDM etc. used
A. Malik (&) A. Manna

Department of Mechanical Engineering, PEC University of Technology, Chandigarh, India
A. Manna

DOI 10.1007/978-3-319-52009-4_11
394 A. Malik and A. Manna
in industries. Again, these materials become more difficult to machine once they are
highly sintered. Therefore, it is crucial to develop an accurate and efficient
machining method for machining of advanced ceramic and composite materials.
Non-conductive materials e.g. glass fibres, ceramic, composites etc. can be
machined by utilizing the hybrid machining technique i.e. Travelling Wire Electro
Chemical Spark Machining (TWECSM) process. Advanced Ceramics and glass
fibre composites is having good strength, low weight, flexibility in shape and sizes,
good corrosion, high thermal shock resistance and good creep resistance than that
of monolithic metals. Advanced glass fibre reinforced composite materials can be
used in place of aluminium, steel, their alloys and other monolithic materials.
Advanced ceramics and glass fibre composites materials have extensive range of
applications in industries due to their high performance properties particularly in the
water and wastewater processing or storage, corrosive areas such as chemical
processing and storage, aeronautical and defence, automotive industry, building
construction, electrical utility, marine industry etc. Keeping in view, the hybrid
machining methods can be successfully utilized for machining of non-conductive
materials i.e. ceramics and composites. A TWECSM was designed, developed and
utilized for effective machining of e-glass fibre epoxy composite materials [1].
Authors explained the effect of various parameters of the developed TWECSM on
the machining performance characteristics. In this hybrid machining process,
removal of material takes place because of combined actions of electro chemical
reaction and electrical spark discharge action. TWECSM process has two electrodes
immersed in an electrolytic solution which may be acidic or alkaline in nature. The
workpiece material required to be machined is immersed in the electrolyte and
placed adjacent to the cathode (tool). A constant direct current voltage supply is
applied between the auxiliary electrode (anode) and the electrode (cathode). The
auxiliary electrode used usually is a flat plate has larger surface as compared to wire
surface i.e. about 100 times larger. When voltage applied is below 25 V (i.e. critical
voltage) then electrolysis occurs. H2 gas bubbles are formed at cathode (tool
electrode) and O2 gas bubbles at anode (counter electrode). It has been witnessed
that if the two electrodes (cathode and anode) both are of different sizes then after
certain applied voltage, electric sparks appear on the smaller electrode at the
electrode-electrolyte interface and the cell current drops. As voltage increases,
current density also rapidly increases. The mean radius and number of the bubbles
increases, and finally bubbles are merging in form of a gas film around the
tool-electrode.
However, the main principle of material removal in TWECSM process is electro
chemical dissolution of the workpiece and it is due to the collective effects of
electro chemical reaction and electrical spark discharge action. This collective
action takes place when applying enough direct current (DC) supply voltage to the
electrolytic cell in appropriate polarity; i.e. auxiliary electrode (anode) with positive
terminal and travelling wire (cathode) with negative terminal. When voltage applied
to tool-electrode interface reaches beyond a certain value then dissociation of
electrolyte take places and formation of H2 gas bubbles at wire tool surface (i.e.
cathode) and generates electrolytic gas film around electrode surface. There is also
11 Travelling Wire Electrochemical Spark Machining: An Overview 395
O2 gas evolution and formation of oxide films on auxiliary electrode (i.e. anode)
surface during machining of non-conducting materials. When number of H2 gas
bubbles formed at the cathode becomes larger thereby resistance at tool-electrolyte
interface becomes very high, it is due to the restriction caused by the gas bubbles
insulating effect. Because of the above actions there is an increase in the Joule
heating around the wire electrode which turned electrolyte in form of vapours. So,
there is a formation of a spark in the wire-electrolyte circuit because of the
inductance similar to an electrical circuit.
11.2 Literature Review
Some of the researchers already worked on electro chemical spark machining and
travelling wire electro chemical spark machining. They published their research
outcome as well. Basak and Ghosh [2] investigated the electro chemical discharge
machining and concluded that material removal rate can be substantial increased by
introducing an additional inductance. Gautam and Jain [3] investigated on elec-
trochemical spark discharge machining using various tool kinematics for
enhancement of process capabilities. Jain et al. [4] concluded that electro chemical
spark machining along with abrasive cutting tools improved the machining per-
formance of electrically non-conducting materials, borosilicate glass and alumina.
Kulkarni et al. [5] studied the discharge mechanism in electro chemical discharge
machining and identified the basic mechanism of rise in temperature and material
removal with the help of experimental observations for time-varying current in the
circuit. Mediliyegedara et al. [6] studied the electro chemical discharge machining
process and concluded that the ECDM process has different advantages over ECM
and EDM because of higher machining performance. Manna and Bhattacharyya [7]
studied a dual response approach for parametric optimization of CNC wire cut
EDM during machining of particulate reinforced aluminium silicon carbide metal
matrix composite. They used Taguchi method of experimental design and the
significant factors were identified for machining performance characteristics during
WEDM of Al/SiC-MMC. Mohen and Shan [8] reviewed the electro chemical
micro-to-micro-hole drilling process and concluded that advanced hole-drilling
process like jet-electrochemical drilling can be accepted in producing large number
of quality holes in difficult to machined materials. Different authors such as
Kulkarni and Jain [9], Hwa and Ling [10], Singh et al. [11], Manna and Khas [12],
Manna and Narang [13] carried out experimental investigation on micro EDM and
electrochemical spark machining processes; they explained the effects of various
parameters on response characteristics. Theory proposed by Jain et al. [4] applied to
ECM process that H2 gas liberated and accumulated at the cathode (i.e. travelling
wire). The density of bubbles at tool increases with increase in supply voltage, and
when it becomes sufficiently high, substantial constriction of the current path takes
place at the interface of the tool and electrolyte. The constriction cause an increase
in the resistance of the machining region and ohmic heating of electrolyte solution
becomes significant. This leads to the onset of vapour bubble nucleation on the
electrode surface in addition to the presence of hydrogen bubbles and it increases
very rapidly with the applied voltage. It is hypothesized that as the density of
nucleation reaches a critical value, vapour blanketing of the electrode occurs. The
point of contact between the electrolyte and tool is known as ‘Bubble Bridge’,
which blow-off instantly due to intense heating. Consequently, the current through
the circuit, within a very short time span, drops to zero.
Jain et al. [14] experimentally investigated the electro chemical spark machining
(ECSM) process and described that SEM photograph of the machined piece showed
micro-cracks when machining operation were performed at high applied voltages
i.e. 70 V and above. It was due to the high thermal energy input per spark which
consequently leads to thermal cracking in the glass-epoxy composite workpiece.
Authors also claimed the visibility of globules on the protruding fibres of glass fibre
epoxy composite (Fig. 11.1) when machined at 85 V supply voltage.
The evolution of heat because of sparking melts and evaporates workpiece
material. That’s seen by the existence of globules (i.e., resolidified material) on
protruding fibres (Fig. 11.1) as explained by Jain et al. [14]. Bhuyan and Yadava
[15] experimentally investigated the performance of the TWECSM through
examined the surface finished and machined kerfs width of machined samples by
SEM (Fig. 11.2). They claimed that the shape is irregular and also large heat
affected zone (HAZ) produced on the bottom side of sliced workpiece. They also
claimed that it may be due to the high applied voltage and low wire tension, which
are responsible for formation of this kind of unusual shape. Authors also claimed
Fig. 11.1 Globules visible on the protruding fibres of glass-epoxy composites at 85 V, 25%
concentration, magnification = 100 [14]
Fig. 11.2 SEM micrographs of a kerf width and b surface finish at 55 V applied voltage, 300 µs
pulse-on time, 250 µs pulse-off time, 250 g/l electrolyte concentration and 1.8 m/min wire feed
velocity [15]
Fig. 11.3 Response surface

plot of Ra with voltage and
wire feed velocity [16]
the formation of small craters and shallow cracks on the machined surface because
of higher concentration of electrolyte.
Bhuyan and Yadav [16] optimized the travelling wire electrochemical process
parameters based on response surface methodology and claimed that the effect of
wire feed velocity and voltage on Ra keeping constant value of electrolyte con-
centration (i.e. 250 g/l) and workpiece thickness (i.e. 4 mm) respectively, authors
noticed that at the beginning decreases Ra and then gradually increase in curvilinear
pattern with change in wire feed velocity as well as change in supply voltage
(Fig. 11.3). This is because of high wire feed velocity, which is not helping for
formation of bubbles at sidewall of the tool, hence formation of low crater taking
place on the machined workpiece surface. They also explained the effect of
workpiece thickness and voltage on MRR at constant value of electrolyte con-
centration (i.e. 250 g/l) and wire feed velocity (i.e. 1.8 m/min) respectively. The
variation of MRR with voltage and workpiece thickness is quite similar in nature
Fig. 11.4 Response surface

plot of MRR with voltage and
workpiece thickness [16]
Fig. 11.5 Micro slits by wire electrochemical cutting [17]
(Fig. 11.4). The MRR increases with increase in supply voltage between electrodes.
It is due to the fact that at high voltage, the generation and accumulation of gas
bubbles at the tool sidewall are very large, which leads to generate large numbers of
sparks in the sparking zone and enhances MRR (Fig. 11.4). As workpiece thickness
increases MRR also increases the reason behind this is the shifting of discharging
zone in the vicinity of the wire to the top of the workpiece and more bubble
concentration take place on the wire passing through groove resulting in higher
discharge energy per spark and thus enhances MRR as claimed by Bhuyan and
Yadav [16].
Zhu et al. [17] used micro tungsten wire of 5 µm diameter as a tool (i.e. cathode)
for the wire electro chemical micro machining. Micro slits were machined of 15 µm
width (Fig. 11.5). They also generated several complex structures with the slit
width (20 µm) by wire electrochemical micro machining process (Fig. 11.6) at
0.125 µm/s feed rate. A small workpiece vibration of 5 Hz frequency was used for
successfully circulating electrolyte in the machining zone. The nanosecond pulses
(ns) with 4.2 V pulse amplitude, 50 ns on-time and 1 µs off-time was used for
machining of complex micro structures.
Fig. 11.6 Micro structure cutting by micro wire electrochemical cutting [17]
Manna and Kundal [18] experimentally investigated on slicing of Al2O3 ceramic

materials by TWECSM process and claimed that at the beginning micro slice width
is slightly more than the diameter of wire but after some minutes of continuous
cutting the micro slice width increases along the depth of cut. They also claimed
that there is an irregular micro slice surface and generated circular shape of large
gap at the end of cutting when machining operation carried out with 200 µm wire
diameter and at 60 V D.C. supply voltage, 240 mm gap between auxiliary anode
and wire cathode, 90 g/l concentration of electrolyte and 0.15 m/min cutting wire
speed for 70 min of continuous machining (Fig. 11.7a). Author also explained the
condition of sliced workpiece by different SEM photographs. One of such SEM
(Fig. 11.7b) machined with wire electrode (diameter 250 lm) at 0.20 m/min cut-
ting wire speed. At the beginning micro slice width is more than the diameter of
wire but after some minutes of cutting the width decreases along the depth of cut.
They also concluded that micro slicing surface is irregular with poor surface finish.
Fig. 11.7 SEM of micro slice work-piece [18]
Jain et al. [14] concluded that travelling wire electrochemical spark machining
(TW-ECSM) of composites using NaOH as electrolyte has been found to be a
feasible and effective process. Higher machining accuracy is obtained at lower
values of voltage and electrolyte concentration. Thermo mechanical phenomenon
has been identified as the main mechanism responsible for material removal in
TW-ECSM. There is an increase in MRR at higher voltage along with the presence
of thermal cracks, large heat affected zone and irregular machined surfaces. For
higher machining efficiency, the distance between the anode and the cathode, and
the distance between the tool and the work needs to be optimized. Also, a minimum
distance between the point of power supply and the point of contact of wire with the
workpiece is expected to improve the process performance.
Bhuyan and Yadav [16] concluded that the parameters, electrolyte concentration,
workpiece thickness, and interaction effect of parameter workpiece thickness and
wire feed velocity have significant factors for Ra. Material removal rate also
affected by wire feed velocity, voltage and interaction effect of electrolyte con-
centration and workpiece thickness and square effect of workpiece thickness.
Manna and Kundal [18] concluded that the machining characteristics gradually
declines with increase in tool depth and formed micro cracks on the sliced surface
because of thermal shocks at high voltage. Three most influential parameters are
identified i.e. DC supply voltage, electrolyte concentration and gap between cath-
ode and anode. According to the authors, experimentally acquired results revealed
that moderate DC supply voltage has reduced the tendency of cracking, and at low
gap between cathode and anode generated debris during micro slicing of Al2O3
ceramics. They claimed that the sparking starts when the travel wire touches the
work-piece immersed under the electrolyte in the machining chamber. Fins and
burrs along the sliced surfaces were witnessed by the authors this is due to the
adhering of particles dispersed from the workpiece surface during machining,
which was not flash out by the flow of di-electric fluid. They explained that it’s may
be due to low flashing pressure of electrolyte; again at high flashing pressure of
electrolyte may vibrate the wire during traveling and generates poor surface.
Scattered and fins along the sliced surfaces were formed because of the adhering of
small particles dispersed from the work surface during slicing operation, this is due
to improper flashing of di-electric fluid in machining zone.
11.3 Experimental Investigation
A travel wire electro chemical spark discharge machine (TWECSM) has been
designed, fabricated and used for experimental investigation.
11.3.1 Designed and Fabrication of TWECSM
The developed TWECSM has main four units such as (i) power supply unit,
(ii) wire feed unit and (iii) electrolyte flow control unit and (iv) workpiece motion
control unit. A voltage rectifier (i.e. converter cum regulator) is used to convert
single phase 220 V A.C. supply into D.C. supply voltage range of 20–200 V.
Auxiliary copper plate is connected with the positive terminal of the converter cum
regulator, which is functioning as an auxiliary anode (i.e. auxiliary electrode). Tool
(i.e. wire electrode) is connected with the negative terminal of the converter cum
regulator, which is functioning as a cathode. A step down transformer with regu-
lator is used to step down the voltage; this step down voltage is used to operate a
stepper motor which runs the wire take up unit. A Direct Current supply power of
12 V is used to operate another stepper motor which rolls the used wire around the
pulley mount on the main frame. Figure 11.8 shows the schematic diagram of
indigenously developed TWECSM.
11.3.2 Experimental Planning
Utilized fabricated TWECSM machine different micro slicing experiments have

been carried out for cutting of electrically non-conductive e-glass fibre composite; it
is a light weight and highly corrosive resistant material. Table 11.1 represents the
detail of fabricated wire electro chemical spark machine (TWECSM), tool electrode
(travelling wire), workpiece and type of electrolyte used during experiments.
Material removal (MR) is calculated with the difference of workpiece weights
before and after each slicing operation. An electronic Balance having resolution of
0.01 mg is used to calculate the weight of work-pieces before and after each slicing
operation. Scanning electron microscopic images are used to analyze the surface
texture of the sliced surface. The machining time is recorded with the help of digital
stop watch of accuracy 0.1 s.
Fig. 11.8 Schematic diagram of TWECSM setup
Table 11.1 Details of experimental conditions

Machine used Indigenously developed travel wire electrochemical spark
machine (TWECSM)
Electrolyte used Sodium hydroxide (NaOH)
NaOH and natural water (i) 40 g/l (ii) 80 g/l (iii) 120 g/l (iv) 160 g/l
concentration
Work-piece material e-glass fibre composite
Work-piece thickness 2 mm
Tool used Brass wire of 200 µm diameter
Table 11.2 represents the different input parameters of the developed TWECSM
and their parameter levels used during experiments. Taguchi method based design
of experiment L16(45) orthogonal array is employed to carry out the experiment for
cutting of e-glass fibre epoxy composite on developed machine.
Table 11.2 Developed TWECSM parameters and their levels

Parameters (symbols) Units Parametric levels
1 2 3 4
A DC supply voltage (X1) Volt 40 50 60 70
B Electrolyte concentration (X2) gm/l 40 80 120 160
C Wire speed (X3) m/min 0.15 0.20 0.25 0.30
D Gap between tool and anode (X4) mm 40 80 120 160
E Supply current (X5) amp 1 1.5 2 2.5
Fig. 11.9 Effect of supply voltage on material removal (MR, mg)
11.3.3 Results and Discussions
A series of experiments has been carried out with variation of different parametric
setting value and the results are utilized for further analysis. Different graphs have
been drawn to examine the various parametric effects on the different machining
characteristics of fabricated TWECSM. Different SEM photographs demonstrate
the machining characteristics (i.e. surface texture and spark gap width) during
TWECSM operation. Figure 11.9 represents a curve showing the investigated
results obtained during slicing of e-glass fibre epoxy composite, which is electri-
cally non-conductive high corrosive resistant, less weight, high strength and high
temperature resistant material on developed TWECSM. Figure 11.9 shows that
material removal (MR, mg) increases with increase of supply DC voltage. It may be
due to the increase of potential difference between the tool (i.e. cathode) and anode
(i.e. auxiliary anode) which may discharge or liberates more numbers of electrons
per unit area of cathode and simultaneously act for making crater with dissolution
of non-conductive anode i.e. work-piece. Maximum material removal is observed at
80 V DC supply voltage. Figure 11.9 is drawn on the basis of results obtained by
slicing of workpiece (i.e. e-glass fibre epoxy composite) for continuously 60 min of
machining at constant electrolyte concentration (80 gm/l), wire speed (0.15 m/min),
Fig. 11.10 Effect of wire speed on material removal
gap between tool (i.e. cathode) and auxiliary anode (120 mm), supply current
(1.5 amp) with supply voltage variation from 40 to 80 V.
Figure 11.10 represents a curve showing the investigated results obtained during
slicing of e-glass fibre epoxy composite on developed TWECSM. Figure 11.10
shows that there is increase in material removal (MR, mg) with increase in wire
speed. Effect of wire speed is smaller on material removal. Material removal is
increases with increase in wire speed because as wire speed increases fresh wire
comes quickly in the machining zone and this may cause higher number of spark
discharge which helps to form more crater per unit time. Maximum material
removal is found at 0.35 m/min wire speed. Figure 11.10 shows effect of wire
speed based on acquired results from continuously 60 min of machining at constant
supply voltage (40 V), electrolyte concentration (80 gm/l), gap between tool (i.e.
cathode) and auxiliary anode (120 mm), supply current (1.5 amp) with variation of
wire speed from 0.15 to 0.35 m/min.
Figure 11.11 shows the effect of electrolyte concentration on spark gap width.
This is drawn on the basis of investigated results acquired during slicing of e-glass
fibre epoxy composite on developed TWECSM. Figure 11.11 shows that there is
increase in spark gap width (Wg, lm) with increase in electrolyte concentration.
Effect of electrolyte concentration on spark gap width is significantly high. It may
be due to the increase of charge carriers in the electrolytic solution due to increase
in electrolyte concentration which may discharge or liberates more numbers of ions
per unit area of cathode and simultaneously act for making crater with dissolution
of non-conductive anode i.e. work-piece. Maximum material removal is observed at
electrolyte concentration (200 gm/l). Figure 11.11 is drawn based on the results
acquired during slicing of workpiece for continuously 60 min of machining at
constant supply voltage (40 V), wire speed (0.15 m/min), gap between tool (i.e.
cathode) and auxiliary anode (120 mm), supply current (2 amp) with electrolyte
concentration variation from 40 to 200 gm/l.
Taguchi method based L16(45) orthogonal array is employed and detail experi-
ments are carried out. The acquired results are utilized for optimization of
Fig. 11.11 Effect of Electrolyte conc. on spark gap width
-0.5
S/N ratio (dB) graph
Grand mean of S/N ratio (dB)
-1
Average S/N ratio (dB )
-1.5
-2
-2.5
-3
-3.5
A1 A2 A3 A4 B1 B2 B3 B4 C1 C2 C3 C4 D1 D2 D3 D4 E1 E2 E3 E4
Machining parameters and their levels
Fig. 11.12 S/N ratio by their factor level for material removal (MR, mg)
developed TWECSM process parameters. Figure 11.12 demonstrates the average

signal to noise (S/N) ratio and grand mean of S/N ratio (dB) graphs for MR.
Figure 11.12 clearly shows that the optimal combination of parameters for maxi-
mum material removal (MR, mg) is A4B4C4D1E3 (Table 11.2).
11.3.4 Scanning Electron Micrographs
Figure 11.13 shows Scanning Electron Micrograph (SEM) of a micro sliced section
of e-glass fibre epoxy composite workpiece using travelling wire electro chemical
Fig. 11.13 SEM of micro sliced workpiece utilized developed TWECSM
spark machine (TWECSM). The SEM graph demonstrates the real condition of the
micro sliced surface machined at supply voltage (40 V), electrolyte concentration
(40 gm/l), wire speed (0.15 m/min), gap between tool and anode (40 mm) and
supply current (1.5 amp). Figure 11.13 shows SEM photographs sliced workpiece
for continuous 60 min machining with brass 200 lm diameter wire. From SEM
graph, it is observed that micro slicing mainly proceeds in the conical manner. From
Fig. 11.13, it is clear that there are continuous burrs and fins on the surface of the
micro sliced workpiece. Over all slicing surface finish is not good when seen at
micron level. At entry level the slicing width is 296 lm but after continuous cutting
for 60 min it is found to be only 167 lm, measured just at the end of slicing. Hence
it is proved that slicing is about conical in nature. Some fins and burs are also found
during cutting in both sides of micro sliced surface. That’s due to the irregular and
insufficient electrolyte flow. During micro slicing it is also witnessed that there is
formation of foam and gas bubbles which causes a barrier for electron’s flow and
decreases electrolyte dissolution strength.
Figure 11.14 shows SEM image of a micro sliced section of e-glass fibre epoxy
composite machined on developed TWECSM. The SEM image demonstrates the
real condition of the micro cutting surface. This machining operation was carried
out at supply voltage (40 V), electrolyte concentration (120 gm/l), wire speed
(0.25 m/min), gap between tool and anode (120 mm) and supply current (2 amp).
Figure 11.14 shows SEM photographs sliced workpiece for continuous 40 min
machining with brass wire of 200 lm diameter. It is also found that there is some
Fig. 11.14 SEM of another micro sliced
presence of continuous burrs and fins on the surface of the micro slicing. Over all
slicing surface finish is not good when seen at micron level. At entry, the slicing
width is 238 lm but after continuous cutting for 40 min it is found that this size is
being 127 lm only, measured just at the end of slicing. It’s proved that slicing is
about conical. Some fins and burs are also found during cutting in both sides of
micro sliced surface. That’s due to the irregular and insufficient electrolyte flow.
During micro slicing it is also witnessed that there is formation of foam and gas
bubbles which causes a barrier for electron’s flow and thereby decreases the
electrolyte dissolution strength.
11.3.5 Mathematical Modelling
By taking the parameters such as supply voltage (X1), electrolyte concentration

(X2), wire speed (X3), gap between tool and auxiliary anode (X4), and supply
current (X5) developed mathematical models for different response characteristics
e.g. material removal (MR, mg) and spark gap width (Wg, lm). The developed
mathematical models can be used for selection of parameters setting in advance for
effective machining on developed TWECSM.
YMR ¼ 0:0002648 þ 0:0204605 X1 þ 0:0042091 X2 þ 0:000105 X3

þ 0:0041159 X4 þ 0:0000121 X5 0:00011627 X1 X2 0:0941467 X1 X3
0:0001587 X1 X4 0:022536 X1 X5 þ 0:029705 X2 X3 0:0000461 X2 X4
þ 0:0017518 X2 X5 þ 0:0000101 X3 X4 þ 0:0000112 X3 X5 þ 0:009647 X4 X5
þ 0:000756 X21 0:0000138 X22 þ 0:0000104 X23 0:0000451 X24
0:076381 X25 ð11:1Þ
R2 = 0.9915
where X1 = Supply voltage (Volt)
X2 = Electrolyte conc. (gm/l)
X3 = Wire speed (m/min)
X4 = Gap between anode and cathode (mm)
X5 = Supply current (amp).
Figure 11.15 demonstrates the supply voltage (Volt) and electrolyte conc. (gm/l)
effect on material removal (MR, mg). Figure 11.15 clearly shows the effect of
parameters when machining operation was carried out at high electrolyte concen-
tration (i.e. 200 gm/l) and high supply voltage (i.e. 70 V) which reflected high
material removal. It is also observed that MR is high when the electrolyte con-
centration is 50 g/l and voltage is 40 V. There is increase in material removal with
increase in electrolyte concentration and supply voltage. This is due to generation of
higher potential difference between tool and anode at higher supply voltage, which
may discharges more number of electrons per unit area and at the same time
increases electrolyte concentration thereby increases rate of dissolution of ions from
the anode. This is because of higher current density and thereby strong dissolution
effect.
The developed mathematical model for spark gap width is
YWg ¼ 0:330621 1:653169 X1 þ 0:039677 X2 þ 0:01279 X3 þ 1:682246 X4

þ 0:16910 X5 0:006801 X1 X2 þ 0:398961 X1 X3 þ 0:0061927 X1 X4
þ 0:916407 X1 X5 0:118467 X2 X3 þ 0:0000355 X2 X4 þ 0:124377 X2 X5
þ 0:001284 X3 X4 þ 0:01496 X3 X5 0:9502047 X4 X5 0:0041215 X21
þ 0:001516 X22 þ 0:14036 X23 0:002237 X24 þ 7:046385 X25 ð11:2Þ
R2 = 0.9984.
Figure 11.16 shows the electrolyte conc. (gm/l) and wire speed (m/min) effect on
spark gap width (Wg, lm). Figure 11.16 clearly shows that at higher electrolyte
concentration (i.e. 200 gm/l) and at higher wire speed (i.e. 0.30 m/min) the spark
gap width is high. This is also noticed that spark gap width is low when the
2
Material removal, mg
1.5
0.5
200 80
150 70
60
100 50
Electrolyte concentration, g/l 50 40
30 DC supply voltage, Volts
Fig. 11.15 Effect of supply voltage and electrolyte conc. on (MR, mg)
100
Spark gap width, micro meter
80
60
40
20
0.5
0.4 250
0.3 200
150
0.2 100
50
0.1 0
Wire speed, m/min Electrolyte concentration, g/l
Fig. 11.16 Effect of electrolyte conc. and wire speed on spark gap width
electrolyte concentration (i.e. 50 gm/l) and wire speed (i.e. 0.15 m/min). There is
increase in spark gap width with increase in electrolyte concentration and wire
speed.
11.4 Conclusions and Future Scope
Glass fibre epoxy composites, ceramics etc. are non-conductive materials which are
difficult to machine by any known unconventional machining methods like ECM,
EDM and WEDM etc. These non-conductive materials can be machined with the
help of conventional machining processes but compromise with surface texture. But
conventional machining methods are not suitable even not possible to micro slicing
as well. But a new hybrid machining process which is combination of both ECM
(i.e. electro chemical machining) and WEDM (i.e. wire electric discharge
machining) can be effectively used to machine such materials. This chapter presents
some investigated published results during machining of composites and ceramics
which proved that this hybrid machining technique can effectively use for
machining of non-conductive materials. This chapter also presents the brief about
the design and development of the particular hybrid travelling wire electro chemical
spark machine. This developed machine is utilized for slicing of non-conductive
workpiece (i.e. e-glass fibre epoxy composite). By studying different experimental
results during machining (i.e. slicing) of workpiece (i.e. e-glass fibre epoxy com-
posite) on developed TWECSM, it is believe that the developed travel wire electro
chemical spark machine can be effectively use to machine non-conductive work-
piece (i.e. e-glass fibre epoxy composite). However, it is identified that during
starting of micro cutting the micro slice width is slightly more than wire diameter
(i.e. 200 µm) but after some minutes of continuous slicing the micro slice width
decreases along the depth of cut. The micro sliced surface is irregular and poor if
experiments are carried out without proper plan and optimization of parameters.
Fins and scattered along the cutting edges of the sliced workpiece are observed
because of the adhering of small particles dispersed from the workpiece surface
during slicing of the workpiece. This is due to insufficient or improper electrolyte
flow during machining. Some burrs are noticed along the edge of micro sliced
workpiece after cutting. However, experimental results also revealed that the very
good micro slicing is possible. By optimizing machining parameters generation of
high surface texture can be possible. This hybrid machining technique can be used
for machining of PSZ, zirconia, YBa2Cu3O7−x, Si3N4, PZT etc. difficult to machine
nonconductive materials.
References
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various tool kinematics; Int. J. of Mach Tool Manuf, Vol. 38, pp. 15–27.
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Int. J. of Mach Tool Manuf, Vol. 42, pp. 1269–1276.
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(PZT) ceramics using an electrochemical spark machining (ECSM) process, J. Mater Process
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12. Manna Alakesh. and Khas Kanwaljit; (2009), Micro machining of electrically non-conductive
Al2O3 ceramic, Journal of Machining and Forming Technology, 1(1–2): 101–112.
13. Manna Alakesh; and Narang, Vivek; (2012), A study on micro machining of
glass-fibre-epoxy composite by ECSM process, Int. J. Adv. Manuf. Technol, 61: 1191–1197.
14. Jain V. K., Rao P. Sreenivasa, Choudhary S. K., Rajurkar K. P. (1991) “Experimental
investigations into travelling wire electrochemical spark machining (TW-ECSM) of
composites”, Journal of Engineering for Industry, Vol. 113/75.
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spark machining of borosilicate glass”, Journal of Materials and Manufacturing, Vol. 29,
pp. 298–304.
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Technol, 76: 29–37.
Index
A Aqueous solution, 348

Abrasive assisted Micromachining (AM), 43 Arcing state, 115
Abrasive Flow Finishing (AFF), 8, 46 Aspect ratio, 183
Abrasive flow rate, 44 Assist air pressure, 192
Abrasive grains, 11, 17 Atomic weight, 290
Abrasive grit size, 10 Attenuation for minimizing, 24
Abrasive Jet Machining (AJM), 4 Automotive, 111
Abrasive particle, 81 Auxiliary electrode, 369, 384, 395
Abrasive slurry, 15, 44, 69, 89 Axial feed, 180
Abrasive Slurry Jet Micro-machining (ASJM), Axial feed rate, 187
43
Abrasive Water Jet Machining (AWJM), 371 B
Absorptivity, 24 Beam gun, 32
Accumulation of sludge, 351 Beam polarization, 263
Accuracy, 41 Beam scanning speed, 186
Acidic electrolyte, 284 Beer-Lambert law, 256
Actuation, 5 Bi-metal, 33
Adaptive control, 159 Biocompatibility, 363
Adequate laser energy, 214 Biomedical, 94
Adequate surface finish, 62 Bio-medical applications, 232
Adhesion of carbon, 117 Biomedical implants, 186, 332
Advanced ceramics, 181 Biomedicine, 327
Aerospace, 111 Black sand, 340
AFM, 30 Bond energy, 263
Aggressive anions, 37 Boron carbide, 15, 79, 117
Aircraft floors, 342 Borosilicate glass, 18, 21
Al/Al2O3-MMC, 245 Brazing or soft soldering, 17
Alkaline chemical reagent, 34 Breakdown of oxide film, 349
Alkaline electrolyte, 284 Breakdown strength of the dielectric and IEG,
Alloy steel, 7 99
Altered Material Zones (AMZ), 172 Breakdown voltage (Vb), 147, 155
Alumina, 15 Brittle fracture, 9, 74
Aluminium oxide, 9, 79 Brittleness properties, 185
Amorphous oxide, 349 Building block, 255
Amplitude, 115 Burrs free surfaces, 280
Analysis of variance, 197
Anode and shaped tool, 277 C
Anodic dissolution, 4, 279 Capability, 48
Anodic workpiece, 38 Capillary electrophoresis, 43

DOI 10.1007/978-3-319-52009-4
414 Index
Capillary tube, 28 Cooling blade, 6

Carbide, 7, 15 Cooling holes, 183
Carbon Fiber Reinforced Polymer (CFRP), 240 Corner radius, 169
Cathode, 12 Corrosion resistant, 62, 111
Cations, 282 Corrosive electrolyte, 13
Cavitation, 18, 89, 111 Counter electrode, 394
Cavitations effect, 316 Coupler, 78
Ceramic bearing ring, 180 Coupling laser beam, 234
Ceramics, 7, 51 Crevice, 111
Ceramic spikes, 180 Crosstalk, 151
Changing polarity, 136 Crystallographic, 356
Charge Couple Device Camera (CCD), 237 Crystallographic damage, 49
Charging loop, 155 Current distribution, 291
Chemical Dissolution (CD), 4 Current efficiency, 290, 297
Chemical Machining (CHM), 4 Cutting front, 182
Chemical reaction, 18 Cycloid, 168
Chipping, 71 Cylindrical microtools, 311
Chirped Pulse Amplification (CPA), 231
Circumferential direction, 201 D
Circumferential Overlap (COp), 186 Damp proof structure, 303
Cladding, 228 3D cavities, 16
Cleaning and descaling, 9 Debri particles, 95
Close tolerances, 276 Debris, 175
CMM, 12 Debris formation, 246
CMP process, 47 Decarburized, 35
CNC EBM, 33 Decreasing load, 71
CO and CH4, 117 Deep cut, 263
Coatings, 4 Deep ultraviolet, 261
CO2 lasers, 227 Defect, 75
Cold emission, 148 Defocusing, 211
Collet, 189 Defocusing positions, 191
Collimator, 237 Degree of dissociation, 300
Colloidal suspension, 148 De-ionized water, 117, 121, 149
Commercially Pure, 111 Density, 101
Complex features, 3 Deposition, 29
Complex micro structures, 398 Depth deviation, 199
Complex part geometries, 276 Desirability Function (D), 271
Composite materials, 39 Desired precision, 25
Composites, 51 Deteriorate, 36
Composition, 13 Detrimental thermal effect, 32
Compressive pressure wave, 148 Diameteral difference, 104
Computer Numerical Controlled (CNC), 307 Diameteral variance, 126
Concentration, 16 Diameteral variance at entry and exit hole, 104
Conical microtool, 311, 317, 318 Diamond, 7
Conjugate image, 64 Dielectric, 22
Consecutive laser scanned widths, 208 Dielectric chamber, 126
Contour grinding, 4 Dielectric circulating unit, 97
Controllability, 50 Dielectric fluid, 96, 97
Controlled anodic dissolution, 276 Dielectric fluid circulation, 107
Controlled dissolution, 4 Dielectric flushing pressure, 96
Controlled fracture technique, 258 Dielectric jet, 109
Control unit, 97 Dielectric medium, 149
Conventional turning, 65 Dielectric pumping, 117
Cooling ability, 149 Dielectric strength, 101
Index 415
Die-sinking tool, 106 Electrochemical cell, 282, 290

Difficult-to-cut, 11 Electrochemical Discharge Machining
Difficult-to-cut materials, 7 (ECDM), 14, 41
Diffusion and convection, 354 Electrochemical Grinding (ECG), 14, 40
Diffusion layer, 316 Electrochemical Machining (ECM), 3, 276
Diffusion layer thickness, 291 Electrochemical Micromachining (EMM), 13,
Digital storage oscilloscope, 307 38, 280
Dimensional accuracy, 13, 168 Electrochemical reaction, 290
Dipping, 34 Electrochemical Slurry Jet Machining (ESJM),
Direct Current (DC), 41, 394 43
Discharge current, 98 Electrode-electrolyte combination, 304
Discharge energy, 96, 99, 130 Electro deposition, 276
Discharge gap, 11 Electrodes, 94
Discharge loop, 155 Electro Discharge Machining (EDM), 3
Discharge phenomenon, 369 Electrodynamic, 149
Displacement function, 163 Electrolysis corrosion, 149
Displacement sensitivity, 152 Electrolyte, 277, 299
Disposable wire, 146 Electrolyte circulation, 315
Disposal, 340 Electrolyte circulation system, 299
Dissipate, 77 Electrolyte concentration, 42, 302, 385
Dissolution, 40 Electrolyte flow, 303
Dissolution-diffusion, 344 Electrolyte properties, 301
Dissolution machining, 43 Electrolyte temperature, 296
3D microfeatures, 294 Electromagnetic actuators, 21
2D microstructures, 281 Electromagnetic brake gear, 170
3D microstructures, 311, 327, 389 Electromechanical systems, 88
Downward defocus, 213 Electron Beam Machining (EBM), 3, 4
Dressing of micro-grinding tools, 43 Electron–phonon interaction, 256
Drilling, 3 Electrostatic, 28, 149
Dross formation, 259 Electrostatic induction feeding, 177
Dross free cut, 262 Elevated elastic modulus, 181
Dross inclusion, 240 Erbium (Eb3+), 229
Dry micro-EDM, 107 Erosion, 9, 43
Duty cycle, 103 Erosion effect, 146
Duty factor (t), 100, 136 Erosion front, 182
Duty ratio, 111 Erosion mechanism, 161
Dynamic polishing, 48 Etchant, 34
Ethylene glycol and sodium bromide, 348
E Excellent corrosion, 111
EDM wire, 7 Excessive burrs, 322
E-glass fibre composite, 402 Exothermic reaction, 260
E-glass fibre epoxy composite, 384, 403 Explosive pressure, 147
Electrical and thermal conductivity, 101 Extraction electrode, 28
Electrical circuits, 153 Extrusion pressure, 47
Electrical conductivity, 148
Electrical discharge grinding, 146 F
Electrical double layer, 286 Fabricate 3D micro tools, 15
Electrical potential gradient, 291 Fabricating, 13
Electrical pulse, 96 Fabricating precise, 27
Electrical Spark Discharge (ESD), 368 Fabrication, 2, 88, 94
Electric Discharge Machining (EDM), 66, 94 Fabrication of micro features, 341
Electric motors, 7 Fabrication of micro-grooves, 388
416 Index
Fabrication of micropatterns, 355 Heat effected zone, 26

Faraday’s law, 350 Heat energy, 136
Faraday’s law of electrolysis, 282 Heating and melting, 183
Feedback control, 152 Height of micro-peaks, 211
Feeding mechanism, 383 Helix angle, 112
Feeding spool, 146 H2 gas bubbles, 394
Feed rate, 299 High aspect ratio, 110, 146, 183, 329
Femtosecond ablation, 234 High aspect ratio holes, 12
Femtosecond pulses, 248 High discharge voltage, 103
Ferromagnetic, 11 High-energy electrons, 4
FIB, 12 Higher refractive index, 228
Fiber laser, 227 High focusability, 254
Ficrobiological Induced Corrosion (MIC), 341 High precision, 94
Field-assisted, 50 High-precision ultrafine machining, 276
Filter, 117, 126 High Reflector (HR), 231
Fine-grained Ni, 30 High-speed impact printers, 322
Finishing processes, 50 High-strength alloys, 277
Fish-bone diagram, 98 High Strength and Temperature Resistive
Flash point, 101 (HSTR), 149
f-h lens, 238 Horn, 78
Flexibility, 13 Horn and tool assembly, 64
Flow rate of slurry, 16 Hot spot, 344
Fluoropolymers, 26 Hybrid micromachining technique, 44
Flushing pressure (Pr), 104, 111, 112, 136, 150 Hybrid technology, 374
Focus spot size, 233 Hydraulic, 149
Fragile materials, 65 Hydraulic accumulator, 9
Fundamental mode, 249 Hydrocarbon oils, 149
Hydrodynamic transport, 291
G Hydrogen bubbles, 41, 396
Gallium, 10, 28 Hydrogen film, 386
Gap voltage, 98, 102 Hysteresis loss, 77
Gas bubbles, 316
Gas turbine impeller, 6 I
Gaussian beam, 263 IC fabrication, 33
Gaussian energy distribution, 188 IC-patterns, 27
Gaussian mode (TEM00), 189 Ignition delay period, 151
Geometric accuracy, 17 Ignition delay time, 159
Geometrical features, 111 Implantation, 28, 29
Glass-based micro-fluidic systems, 375 Improper flushing, 309
Glass substrates, 389 Inconel, 41
Gouy-Chapman layer, 287 Inconel 625 superalloy, 272
Gravity-feed, 387 Indentation, 75
Grinding, 14 Indenter geometry, 73
Grooves, 14 Industrial applications, 111
Industrial chemicals, 111
H Infrared Region (IR), 234
Hall current sensor, 303 Inject nozzle, 22
Hammering, 74 Inorganic glasses, 63
Hard coated plastic, 235 Inorganic salt, 344
Hardest abrasive, 79 In situ fabrication, 21
Hard-to-cut materials, 180 Instantaneous current, 155
Harmonic wavelength, 234 Integrated Circuit (IC), 13
Hastelloy, 41 Integrated circuit boards, 45
Heat Affected Zone (HAZ), 12, 14, 257 Integrity, 87
Index 417
Intensifiers, 9 Magnetostrictively, 63
Inter Electrode Gap (IEG), 37, 96, 99, 278, Magnetostrive, 77
282, 296, 304, 339 Manufacture, 94
Internal cylindrical surfaces, 11 Manufacturer engineers, 117
Ion Beam Machining (IBM), 3, 27 Marking process, 247
Irregular micro-peaks, 211 Maskants, 34
Irregular topographies, 49 Maskless EMM, 294
Ishikawa diagram, 295 Mass transfer, 291, 299
Iso-frequency, 160 Mass transport, 329
Isolation transformer, 236 Material evaporation, 198
Material removal, 48
J Material Removal Rate (MRR), 3, 65, 99, 240
Jet-ECM, 14 Mechanical failure, 173
Jet-EMM, 324 Median crack, 72
Medical fields, 5
K Melt film, 259
Kerf width, 164, 270 Melt pool, 270
Kerosene, 94 Metal Anisotropic Reactive Ion etching with
Kerosene dielectric, 116 Oxidation (MARIO), 360
Kinetic energy, 30, 82 Metal hydroxides, 284
Metallic salt, 34
L Metallurgical damage, 40
Lack-of-fit test, 268 Metallurgical property, 32
Lamp current, 270 Metal oxide semiconductor field effect
Laser Beam Machining (LBM), 3, 4, 62 transistor, 151
Laser energy, 12 Methanol sulfuric acid, 348
Laser fusion cutting, 259 Mettler Toledo, 119
Laser irradiance, 257 Microcantilever, 326
Laser irradiated zone, 206 Microchannel, 43, 228, 318
Laser irradiation, 180 Microcontact, 327
Laser micro-turning, 180 Microdimple, 323
Laser peak fluence, 241 Microdrilling process, 182
Laser polarization, 25 Micro-ECDM process, 367
Laser scan passes, 211 Micro-ECM (lECM), 6, 62
Lateral cracks, 71 Micro-EDG, 108, 109
Letter H blind, 113 Microelectrodes, 185
LIGA process, 281 Micro-Electro-Mechanical-Systems (MEMS),
Limiting current density, 291 5, 10, 43
Lithography, 27, 28 Microelectrical Discharge Machining
Localization of dissolution, 362 (µ-EDM), 6, 10, 94, 107, 118
Localized current density, 346 Microelectrochemical discharge machining, 43
Localized deformation, 71 Microfabrication, 146
Localized joule heating, 150 Microfeature, 2, 12, 43, 66, 180
Localized temperature, 95 Microfixtures, 276
Lost wax method, 6 Microfluidic channels, 243
Low-frequency tool vibration, 315 Microfluidics, 17
Lubrication film, 48 Microfuel cells, 5
Microgear, 39
M Microgear dies, 176
Machine controller unit, 307 Micrographs, 140
Machine spindle, 68 Microgroove, 5, 45, 184
Machining accuracy, 309, 316 Microhemisphere, 319
Machining efficiency, 101, 134 Microhole, 5, 119
Machining zone, 49, 82, 115, 131, 146 Microhole generation, 141
418 Index
Microhole geometry, 105 Multi-channel discharges, 174

Microhole walls, 105 Multilevel microstructure, 326
Microjoule, 248 Multi objective optimization, 202
Micromachining, 8, 40 Multipass cuts, 152
Micromachining process, 94 Multipass micro-turning, 190
Micro-meso machining, 7 Multiple reflections, 259
Micrometal parts, 327 Multipoint cutting tool, 10
Micromilling, 281
Micronozzles, 317 N
Micron sized peaks, 210 NaBr electrolytes, 357
Microparts, 62 Nanocomposte materials, 257
Micropeaks, 208, 211, 223 Nanofabrication, 325
Micropins, 320 Nanosecond, 232
Microproducts, 5, 111 Nanosecond pulses, 327
Microreactor, 39, 278 Narrow IEG, 304
Microregime, 4 Nd:YAG laser, 180
Microscope (SEM) micrographs, 117 Near Infrared (NIR), 263
Microsensors, 5 Neodymium (Nd3+), 229
Microshapes, 7 Neurosurgical instruments, 22
Microslice width, 399 Nickel alloys, 15
Microslots, 5, 14, 309 Non-conductive materials, 3, 10
Microsmooth surfaces, 322 Non-conducting medium, 147
Microspark, 11 Non-conventional machining, 3
Microstructure, 141 Non-conventional technologies, 6
Microstructured glass, 88 Non-linear effects, 231
Microsurgery, 5 Non-reactive gas, 258
Microtexturing, 26 Non-traditional machining, 62
Microthree-dimensional complex features, 6 Non-traditional processes, 2
Microtool, 10, 16, 22, 96, 297 Number of passes, 191
Microtool fabrication, 280
Microtool feeding movement, 310 O
Microtool geometry, 109 Open circuit voltage, 158
Microtool insulation, 299 Open pulses, 159
Microtool material, 298 Optical micrographs, 134, 139
Microtool movement, 309 Optical microscope, 122
Microtool vibration, 308, 354 Optimum efficiency, 76
Microtungsten wire, 330 Opto-electro-mechanical, 181
Microturning, 186 Opto-electronics, 9
Microturning depth deviation, 194 Orthogonal array, 404
Microvalves, 5 Oscillating system, 76
Micro WEDM, 146 Oscillator-amplifier system, 240
Microwire, 170 Outer Helmholtz Plane (OHP), 286
Microwire EDM, 105 Overcut (OC), 113, 118, 121
Microwire electrode, 328 Overload indicator, 76
Millijoule, 248 Oxidation potential, 283
Miniaturization, 21, 94 Oxide Film Laser Lithography, 45
Miniaturization technologies, 5 Oxide layer, 40, 46
Miniaturized, 51, 62
Minimizing machining time, 17 P
Mobility, 302 Painless surgery, 320
Modulation frequency, 246 Paraffin oil, 94
Molybdenum wire, 149 Parameter, 82
Monochromaticity, 254 Parametric combination, 203
MRUM, 67 Passivating effect, 345
Index 419
Passivation, 300, 345 Pulse direct current, 296

Passivation phenomenon, 346 Pulsed laser, 24
Patterned photoresists, 357 Pulsed mode, 228
Peak current (Ip), 111, 112, 121, 137 Pulsed Nd:YAG laser, 188
Performance criteria, 119, 193 Pulsed Nd:YAG laser-based, 266
pH, 283, 300 Pulse duration, 100, 103, 186, 297
Phenanthrene, 29 Pulse energy, 147, 169
Photochemical, 36 Pulse frequency, 100, 112, 320
Photo-chemical process, 234 Pulse generator, 98, 177, 307
Photolithography, 360 Pulse interval, 159
Photon energy, 261 Pulse-on-time, 111, 121, 169, 297
Photoreactive, 45 Pulse repetition rate, 186
Photoresist, 34, 326, 355 Pulse width, 268
Photoresist mask, 356 Pump energy, 230
Photothermal ablation, 262 Pure de-ionized, 117
Physical phenomena, 254 Pure de-ionized water, 130
Picosecond, 232 Pure kerosene, 117
Piezoelectric, 15, 151
Piezoelectric effect, 77 Q
Piezoelectric oscillators, 45 Q-switching, 262
Piezoelectric Transducer (PZT), 38 Q-switch mode, 180
Plasma, 98 Quartz, 15
Plasma channel, 95, 96
Plasma formation, 184 R
Plastically, 74 Random ionic migration, 160
Plastics, 51 R–C relaxation circuit, 155
Pneumatic sensors, 45 Recast layer, 115, 184, 240
Polarity, 100 Reciprocating (to-and-fro) mechanism, 388
Polarity techniques, 140 Recirculation pump, 63
Polarization, 263 Redeposition, 28
Polymethyl methacrylate (PMMA), 9, 244, 249 Reflective surfaces, 3
Polynomial regression model, 194 Regular pattern, 324
Porous anodization, 348 Re-ionization, 159
Positional accuracy, 20 Relaxation circuit, 157
Powder mixed dielectrics, 127 Reliability, 13, 38
Precise disc shape, 320 Renewing electrolyte, 361
Precise machining, 5 Repetitive and discrete spark, 146
Precision, 20 Residual stresses, 65
Precision engineering, 111 Resistance capacitance, 19
Precision industries, 39 Resistivity of electrolyte, 289
Precursor, 29 Resolidified material, 223
Preheated condition, 262 Response Surface Methodology (RSM), 112,
Pre-magnetizing, 77 208
Pressure flushing, 102 Reverse microtool, 311
Pressure-regulating, 117 Rhenium, 25
Print bands, 322 Rheological, 47
Process parameters, 83, 295 R-L-C circuit, 157
Prototyping, 26 Rotary electrodes, 38
Pulsating current, 297 Rotatable Central Composite Design (RCCD),
Pulsating DC power, 4 194
Pulse burst, 248 Rotating electrodes, 132
Pulsed DC, 41, 381 Rotating micro-tool, 134
420 Index
Rotating tool electrode, 134 Spot Overlap (SOp), 186

Rotational effect, 133 Spot overlapping, 242
Rotational speed of electrode, 112 Sprayed coatings, 247
Roundness error, 385 Spring feeding mechanisms, 373
RUM, 65 Sputtering, 29
Square holes, 10
S Stabilized zirconium oxide, 181
S/N ratio, 405 Stagnant electrolyte, 290, 316, 380
Scaling down, 4 Static deflection, 165
Scanning Electron Microscope (SEM), 116, Static load, 83
219, 405 Static pressure, 78
Schematic diagram, 50 Step down transformer, 401
Secondary acoustic horn, 78 Stepper motor, 21
Secondary sparking, 129 Stochastic behaviour, 150
Second order, 234 Strain hardening, 17
Sensitiveness, 66 Stress corrosion, 111
Sensitivity analysis, 244 Striation, 261, 265
Servo feed control system, 101 Structural ceramics, 181
Servo feed mechanism, 97 SU-8, 358
Shank height, 320 Subsurface cracking, 12
Sharp cutting tools, 3 Subsurface damages, 75
Sharp edges, 41 Successive laser scanning, 207
Shielding effect, 257 Super alloy, 6
Short circuit, 304 Surface energy, 28
Short duration impulses, 153 Surface finish, 3, 11, 99, 180
Short wavelength, 263 Surface oxide film, 346
Sidewall insulated microtool, 327 Surface plot, 201
Sidewall insulation, 313 Surface quality, 175
Silicon carbide, 79 Surface roughness (Rt), 11, 113, 217
Simulated emission, 253 Surface structuring, 324
Single blind hole, 113 Surface texture, 403
Sintered Diamond (SD), 81 Surface topography, 117
Sludge and gas bubbles, 354 Surgical equipments, 44
Sludge and precipitates, 381 Synchrotron radiation optics, 49
Sludge formation, 317
Sodium nitrite (NaNO2), 348 T
Solid-state EMM, 325 Taguchi method, 402
Space shuttle, 342 Take-up spool, 146
Spark, 148 Tantalum cathode filament, 31
Spark Assisted Chemical Engraving (SACE), Taper cutting, 105
43, 368 Tapered, 32, 33
Spark discharge time, 127 Temperature, 13
Spark gap, 19, 95, 148 Temperature of electrolyte, 302
Spark gap width, 403 Temperature variation, 49
Sparking, 109, 121, 136 Thermal barrier coated super alloy, 241
Sparking phenomena, 309 Thermal conductivity, 101, 125
Sparking points, 138 Thermal damage, 87
Spark radius, 20, 113 Thermal diffusivity, 256
Spark resistance, 156 Thermal effects, 38
Spatial confinement, 330 Thermal energy density, 133
Specific external load, 162 Thermal failure, 151
Specific heat, 101 Thermal load, 152
Specific scavenger, 360 Thermal stress, 24, 36
SPM, 30 Thermoelectric power, 125
Index 421
Thermo-mechanical analysis, 171 Ultrasonic wave, 16

Thermo-mechanical stress, 259 Ultraviolet-patterned, 326
Thin-foil devices, 363 Uncharged gap width, 160
Threshold voltage, 102 Uniform transpassive dissolution, 349
Through-mask EMM, 292, 293 Unit Removal (UR), 5, 96
Ti6Al4V, 138, 243, 324 Upper wire guide, 105
Tight-tolerance, 88 Upward defocus conditions, 213
Time domain, 134 Upward defocusing position, 213
Tissue stabilizer, 10
Titanium, 15 V
Titanium and its alloys, 343 Vacuum job fixture, 238
Titanium and their alloys, 325 Vaporization, 24
Titanium dioxide, TiO2, 341 Vaporization point, 258
Titanium gains, 345 Vapour-liquid interface, 256
Titanium oxide, 120 Verification experiment, 203
Tolerance, 3 Vibration amplitude, 164
Tolerance limit, 35 Vibration frequency, 175
Tool feed rate, 299 Viscosity, 101
Tool holder, 17, 305 Voltage and current waveforms, 156
Tool-holding unit, 378 Voltage gradient, 369
Tool material, 20
Tool movement strategy, 316 W
Tool-surface bonding, 387 Warburg Impedance (Rw), 288
Tool wear, 4, 146 Water Jet Cutting (WJC), 4
Tool Wear Rate (TWR), 103, 118 Water pressure, 44
Tool wear ratio, 99 Waveguides, 26
Topography, 29 WC–Co, 22
Toxic acidic base electrolytes, 362 Wear & tear, 254
Toxic and reactive electrolytes, 350 Wear compensation, 108
Traditional manufacturing techniques, 2 Wear resistance, 108
Transducer, 21, 77 Wedge-shape, 38
Transistors, 26 WEDM, 15
Transverse speed, 44 Weight per unit volume, 302
Travelling Wire Electrochemical Discharge Wider crater formation, 200
Machining (TW-ECDM), 368, 393 Width of groove, 183
Trepanning, 25 Wire electrode, 175
Trim cut, 153 Wire electrode supply spool, 170
Tungsten, 298 Wire Electro-Discharge Grinding (WEDG), 15,
Tungsten carbide (WC), 19, 81, 298 66, 80, 379
Tungsten micro tool, 17 Wire-electrolyte, 395
Tungsten tool, 83 Wire feed, 151
Tungsten tool tip, 330 Wire guides, 161
Two consecutive pulses, 206 Wire lag, 169
Type of media, 10 Wire lagging, 165
Wire rupture, 150, 151
U Wire tension, 165
Ultra-precision, 7, 48 Wire tension error, 171
Ultra-short pulsed laser, 261 Wire-tool vibration, 148
Ultrasonic Machining (USM), 3, 8, 15, 65 Wire transportation system, 170
Ultrasonic micro machining, 81, 88 Wire transport system, 171
Ultrasonic vibration, 114 Wire traveling, 329
422 Index
Withstand pitting, 111 Y feed rate, 199

Work medium, 3 Ytterbium (Yb3+), 229
Workpiece, 109
Workpiece rotational speed, 191 Z
Zirconate, 77
Y Zirconate Titanate, 18
Yb: YAG fiber laser, 246

Non-Traditional Micromachining Processes: Golam Kibria B. Bhattacharyya J. Paulo Davim Editors

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Materials Forming, Machining and Tribology

ISSN 2195-0911 ISSN 2195-092X (electronic)

© Springer International Publishing AG 2017

Printed on acid-free paper

This Springer imprint is published by Springer Nature

micro-cutting, etc) were discussed. Further, electrochemical micromachining pro-

Kolkata, India Golam Kibria

Kolkata, India Golam Kibria

1 Non-traditional Micromachining Processes: Opportunities

10 Electrochemical Discharge Micro-machining of Engineering

About the Editors

B. Bhattacharyya is a professor and ex-head of the Production Engineering Department and

V. Rathod Department of Mechanical Engineering, Government Polytechnic

S. Debnath, S. Kunar, S.S. Anasane and B. Bhattacharyya

S. Debnath S. Kunar B. Bhattacharyya (&)

© Springer International Publishing AG 2017 1

investigated considering various practical applications in different micro engi-

Recent advancement in technology has created a distinctive opportunity in the

1.1.1 Overview of Non-traditional Machining Processes

Non-traditional machining (NTM) processes can be deﬁned as a group of processes

obtained, depth of machined surface, etc. Economics of the processes is another

1.1.2 Need of Micromachining

The demand of miniaturized parts is increasing day by day in modern world.

demonstrated [3], industrial application of micromachining has been hindered by

1.1.2.1 Condition of Micromachining

1.1.2.2 Application Opportunities

In recent years, manufacturing industries have observed the rapid increase in

1.1.3 Importance of Non-traditional Machining

The development of miniaturized products in large number has inevitably intended

1.2 Classiﬁcation of Non-traditional Micromachining

Fig. 1.1 Classiﬁcation of non-traditional micromachining processes

1.2.1 Mechanical Micromachining

Mechanical Micromachining process includes abrasive jet machining (AJM), water

USM is another process especially for fabricating micro structures of both

operations. AFF is more economical, offers better efﬁciency, flexibility as well as

1.2.2 Thermal Micromachining

Various micromachining processes involve the application of intense localized

increasing the sparking frequency and maintaining as well as controlling other

1.2.3 Chemical and Electrochemical Micromachining

Chemical micro machining (CMM) includes chemical reactions required to oxidize

1.2.4 Hybrid Micromachining

Hybrid micromachining denotes combination and application of two micro

production time. As an example, conventional grinding offers better surface quality,

1.3 Introduction to Different Non-traditional

Now-a-days non-traditional micromachining techniques are being used for the

1.3.1 Micro Ultrasonic Machining (USM)

Micro ultrasonic machining (USM) is one of the important micromachining tech-

1.3.1.1 Mechanism of Material Removal

The process of micro USM combines consecutive application of processes for

Fig. 1.2 Schematic of micro USM system

Micro USM is well established and promising micromachining technique for

machining products by enhancing flushing of slurry and produces better stirring

1.3.1.4 Micro Engineering Applications

1.3.2 Micro Electro-Discharge Machining (EDM)

Micro electro-discharge machining (EDM) is one of the promising and

Fig. 1.3 Basic arrangements

1.3.2.1 Mechanism of Material Removal

As discussed earlier, micro electro-discharge machining is a thermoelectric process

More recent advancements in the ﬁeld of sophistication and miniaturization lead to