Ipex PLD Series
Ipex PLD Series
Ipex PLD Series
8068
™
IPEX 840 / 860 PLD Series
Excimer Lasers for Pulsed Laser Deposition
Specifications Facilities
Wavelength (nm) 248 (KrF) 193 (ArF) Electrical Power
Stabilised Pulse Energy (mJ) Ipex-840 Series 400 150 Single-phase, 200 – 240 V
at all repetition rates Ipex-860 Series 600 200 20 A, 50 / 60 Hz
Maximum Repetition Rate (pps) Ipex-844 50 40
Ipex-842 25 20 Cooling
Ipex-864 30 25 Water, 5 litres / minute
o
5-20 C, 40-60 psig
Ipex-862 15 12
Stabilised Average Power (W) Ipex-844 20 6.0
Ipex-842 10 3.0 Laser Gas
Ipex-864 18 5.0 Consult LightMachinery
Can be operated on pre-mix gas
Ipex-862 9.0 2.5
Pulse Duration (ns) (FWHM, nominal) 12 – 20 ns
Beam Dimensions (mm) (V x H, nominal) Ipex-840 Series 12 x 26 Weight
Ipex-860 Series 12 x 28 210 kg / 460 lbs
Beam Divergence (mrad) (V x H, nominal)* Ipex-840 Series 1x3
Ipex-860 Series 1.5 x 4
*With standard resonator optics. Can be reduced to ~250 µradian with High Brightness Unstable Resonator Optics
Specifications subject to change. Please consult LightMachinery for latest information
www.lightmachinery.com
For further technical and sales information,
please visit our website or contact:
[email protected]
Lumonics, LaserMark, Index, Ipex, PulseMaster, (613) 749-4895
Impact, Icon, TMC are trademarks of LightMachinery LightMachinery Inc.
80 Colonnade Road
Printed in Canada. January 2011
Ottawa, Ontario, Canada, K2E 7L2