Metrology Extension MTX

Adding measurement
accuracy to X-ray
microscopy.
Metrology Extension
for ZEISS Xradia Versa
www.zeiss.com/xray
Reveal smallest
dimensions.
Measure them most
accurately.
Miniaturization and integration of components

drive growing demand for high-resolution
metrology. ZEISS introduced an entirely new realm
of non-destructive insights into submicron details
with Xradia Versa X-ray microscopes. Now, with
Metrology Extension for your ZEISS Xradia
620/520 Versa, you can add measurement with
an accuracy far beyond the limits of conventional
CT technology.
Benefit from high-resolution X-ray imaging

combined with high-precision metrology.
Get verified measurement accuracy of small
dimensions in reconstructed volumes of less
than 125 mm3.
Small volumes at high resolution Simple calibration workflow Leading CT metrology accuracy
Unlike conventional Micro-CT solutions, The MTX package provides an integra- Calibrated with MTX, ZEISS Xradia
ZEISS Xradia Versa provides high-resoluti- ted user-guided calibration workflow, Versa systems provide a market-leading
on imaging of small volumes inside larger turning the resolution capability of your maximum permissible error (MPE) value of
samples, even when performing in-situ Versa system into verified measurement MPESD = (1.9 + L/100) μm for measure-
and 4D investigations. The MTX package accuracy. Once the calibration routine has ments in small-scale volumes, where L
compliments this offering by enabling been executed, you can perform precise is the measured length in mm, opening
measurements at high dimensional accu- measurements and make the data availa- new fields of application with the need for
racy within small reconstructed volumes ble to standard metrology software for high-precision metrology performance in
of 125 mm .3
further processing. manufacturing and research.
• Now add high accuracy to your high
resolution, high precision Versa systems.
• Perform high-resolution CT metrology with

the best MPE specifications offered.
• Enhance confidence in your measurements

needed for quality assurance.
• XRM Check phantom enables seamless

calibration and accuracy verification.
• XRM Check developed in accordance with

the VDI/VDE 2630-1.3 guideline.
XRM Check: ZEISS has developed a (multi-sphere) length

standard for verifying the accuracy of the CT measurements
of small-scale dimensions.
Move the limits of Smartphone camera lens assembly Tip of a fuel injector nozzle Plastic injection-molded connector
your applications. In the assembled state of smartphone camera lens modules,
Since geometric features of injector nozzles influence Dimensional measurements of both internal and external
Deliver traceable results. the assessment of geometrical properties requires a non-contact
and non-destructive measurement method to quantify relational
engine performance, deviations from nominal nozzle structures of small plastic injection-molded parts or easy-
design are typically measured for quality control. to-deform components help to determine deviations from
parameters. Metrology Extension for ZEISS Xradia Versa allows
X-ray CT is uniquely suited for non- the nominal geometries specified in the computer-aided
the accuracy-verified measurement of properties like
destructive dimensional measurement. design (CAD).
• thickness of annular wedges,

• centration interlock diameters,
• gaps between wedges,
• lens-to-lens tilt,
• apex heights and centration,
which are important for functional inspection and the

enhancement of manufacturing designs and processes, to
enable the production of versatile cameras with improved
cell phone image quality.
4 5
Specifications
ZEISS Metrology Extension for
ZEISS Xradia 620/520 Versa
Accuracy (MPE complies with VDI/VDE part 1.3)

SD (TS) in μm 1.9 + L/100 (1,2)
Measuring range Max measuring length: 4.8 mm (3)
Software
Operating Software Scout-and-Scan Control System for ZEISS Xradia Versa
Operating System Microsoft Windows 10
Further data processing ZEISS CALYPSO
XRM Check
Subject to change in design and scope of delivery and as a result of ongoing technical development.
Calibration standard XRM Check used for determining sphere-center-distance
(SD) errors as per VDI/VDE 2630 -1.3 guideline
Spheres 22 ruby spheres (grade 5) with 300 µm diameter
Sphere distances Total of 35 different sphere distances measured along
5 different lengths in 7 different planes;
Largest distance measurement of 3.6 mm
Supporting structure Made of fused silica
(coefficient of thermal expansion ≈ 0.55 x 10 -6 /K)
Calibration uncertainty Reference calibration data with an uncertainty of
U (k=2) < 0,150 µm.
EN_60_020_0044I Printed in Germany CZ-VIII/2020

Availability
New system compatibility ZEISS Xradia 620 Versa
Field upgrade compatibility ZEISS Xradia 620 Versa
ZEISS Xradia 520 Versa
1
L is the measured length in mm
2
A ccuracy specifications valid for measurement in a single field of view on the 4X optical magnification
3
S amples could be longer than 4.8 mm as long as region of interest for CT reconstruction fits inside the field of view
Carl Zeiss Microscopy GmbH

07745 Jena, Germany
[email protected]

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Adding measurement

Miniaturization and integration of components

Benefit from high-resolution X-ray imaging

• Perform high-resolution CT metrology with

• Enhance confidence in your measurements

• XRM Check phantom enables seamless

• XRM Check developed in accordance with

XRM Check: ZEISS has developed a (multi-sphere) length

• thickness of annular wedges,

which are important for functional inspection and the

Accuracy (MPE complies with VDI/VDE part 1.3)

Measuring range Max measuring length: 4.8 mm (3)

EN_60_020_0044I Printed in Germany CZ-VIII/2020

Carl Zeiss Microscopy GmbH

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