Gas Flow Controller Manual

Precision Gas Mass Flow Controllers
The Fastest Flow Controller Company in the World!

Operating Manual
MC-Series MCS-Series
MCR-Series
WHISPER
MCV-Series
06/04/2014 Rev.34 DOC-ALIMAN16C
RECALIBRATION
Your Alicat instrument is a precision device and Alicat strongly
recommends that you send it to us on a yearly basis for recalibration.
A yearly recalibration does a few things:
It insures that your unit is functioning according to specifcation.
Contamination may cause the instrument to measure fow
improperly. Recalibration insures the instrument is clean and free
from debris.
Recalibration maintains your LIFETIME WARRANTY!
Sending your unit for recalibration is easy and inexpensive. Recalibrations
are usually shipped within fve days of receipt, so its fast too.
Please keep the original box to return your Alicat instrument for recalibration.
For more information regarding recalibration see page 42.
ACCESSORIES
Now that you have your Alicat instrument are you sure youve got
everything you need? Alicat accessories can make your job easier.
Many of our customers also order:
Power Supplies A universal wall power supply that makes it easy
to power your Alicat unit just about anywhere in the world.
BB9 Alicats multi-drop box that allows easy connection of up to
nine Alicat instruments to a single USB, RS-232 or RS-485 port.
MD8DB9 An RS-232 to 8 pin Mini-DIN cable to connect your
Alicat instrument to a computer. A variety of other cables are also
available.
Flow Vision SC A GUI based Windowsprogram that allows easy
computer access and control for one or multiple Alicat instruments.
Fittings and flters Keep your instrument properly connected to
your process and free from harmful contamination.
See pages 46- 49 for a complete description and list of Alicat accessories.
FULL TECHNICAL SUPPORT | LIFETIME WARRANTY
3
Thank you for purchasing an Alicat Gas Flow Controller.
Please take the tme to read the informaton contained in this manual. This will
help to ensure that you get the best possible service from your instrument. This
manual covers the following Alicat Scientfc instruments:
MC-Series Mass Gas Flow Controllers
MCR-Series Mass Gas Flow Controllers
WHISPER Low Pressure Drop Mass Flow Controllers
MCS-Series Mass Gas Flow Controllers
MCRS-Series Mass Gas Flow Controllers
MCS and MCRS-Series Flow Controllers are for use with certain aggressive gases
(see page 65)
This includes MC and MCR-Series devices labeled as approved for CSA Class 1
Div 2 and ATEX Class 1 Zone 2 hazardous environments. See pages 85 and 86 for
Special Conditons regarding the use of CSA/ATEX labeled devices.
MCV-Series Mass Gas Flow Controllers
MCV-Series Flow Controllers have an integrated shut-of valve and are built for
use with applicatons that require tght shut-of (see pages 27 and 59).
MCP-Series Mass Gas Flow Controllers
MCP-Series Flow Controllers are built with a high performance control valve for
use with certain lower pressure applicatons (see page 61)
MCD-Series Dual Valve Mass Gas Flow Controllers (see pages 28 and 63)
Unless otherwise noted, the instructons in this manual are applicable to all of
the above instruments.
Full specifcatons for each device can be found on pages 50 through 70.
Please contact Alicat at 1-888-290-6060 or [email protected] if you have
any questons regarding the use or operaton of this device.
Many Alicat instruments are built for specifc applicatons. Two
instruments with the same fow range and part number may look and
act quite diferently depending upon the applicaton the instrument
was built for. Care should be taken when moving an instrument from
one applicaton to another.
You can fnd a number of instructonal
videos related to the operaton of this
device by visitng the Alicat web site or
scanning the QR code.
htp://www.alicat.com/support/instructonal-videos/
4
TABLE OF CONTENTS Page
GETTING STARTED 6
MOUNTING 6
PLUMBING 7
POWER AND SIGNAL CONNECTIONS 8
INPUT SIGNALS 9
Analog Input Signal 9
RS-232 / RS-485 Digital Input Signal 10
OUTPUT SIGNALS 11
RS-232 / RS-485 Digital Output Signal 11
Standard Voltage (0-5 Vdc) Output Signal 11
Optonal 0-10 Vdc Output Signal 11
Optonal Current (4-20 mA) Output Signal 11
Optonal 2nd Analog Output Signal 11
Informaton for Alicat TFT (Color Display) Instruments 13
DISPLAYS AND MENUS 14
MAIN 15
Gas Absolute Pressure 15
Gas Temperature 15
Set-Pt. 15
Volumetric Flow Rate 15
Mass Flow Rate 16
Flashing Error Message 16
SELECT MENU 17
CONTROL SETUP 18
Set-Point Source 18
Loop Variable 19
On / Of Auto-tare 19
PID Tuning 20
GAS SELECT 22
COMMUNICATION SELECT 23
Unit ID 23
Baud 23
MISCELLANEOUS 24
MISC1 24
Zero Band 24
Pressure Averaging 24
Flow Averaging 24
LCD Contrast 24
MISC2 25
STP 25
DIAG TEST 26
MANUFACTURER DATA 26
MCV Controller Operatng Notes 27
MCD Controller Operatng Notes 28
5
TABLE OF CONTENTS Page
RS-232 or RS-485 Output and Input 30
Confguring HyperTerminal 30
Streaming Mode 30
Changing from Streaming to Polling Mode 30
Sending a Set-Point via RS-232 or RS-485 31
To adjust the P & D terms via RS-232 or RS-485 32
Gas Select 33
Collectng Data 34
Data Format 35
Sending a Simple Script File to HyperTerminal 36
Operatng Principle 37
Standard Gas Data Tables 37
Gas Viscosites, Densites and Compressibilites at 25
o
C 38
Gas Viscosites, Densites and Compressibilites at 0
o
C 39
Troubleshootng 40
Maintenance and Recalibraton 42
Opton: Totalizing Mode 43
Opton: Remote Electronics 45
Opton: Remote Panel Display 45
Accessory: BB9 Mult-Drop Box 46
Accessory: Flow Vision SC 47
Accessory: Flow Vision MX 47
Accessories 48
MC and MCR Technical Specifcatons 50
WHISPER Technical Specifcatons 55
MCV & MCVS Technical Specifcatons 59
MCP Technical Specifcatons 61
MCD and MCRD Technical Specifcatons 63
MCS and MCRS Technical Specifcatons 65
PROFIBUS Technical Specifcatons and Pin-outs 70
Eight Pin Mini-DIN Pin-Out 71
Locking Industrial Connector Pin-Out 72
DB9 Pin-Out Diagram 73
DB15 Pin-Out Diagrams 79
Informaton for CSA and ATEX Labeled Devices 85
6
GETTING STARTED
Small Valve Mass Flow Controller shown with an upstream valve confguraton and
connecton port ftngs
Large Valve Mass Flow Controller shown with a downstream valve confguraton and
connecton port ftngs
MOUNTING
MC-Series Gas Flow Controllers have holes on the botom for mountng to fat
panels. See pages 50- 70.
Small valve controllers (MC-Series) can usually be mounted in any positon.
Large valve controllers (MCR-Series) should be mounted so that the valve
cylinder is vertcal and upright. Mountng a large valve controller in another
positon increases the risk of leakage when the controller is being held closed
by the spring force.
No straight runs of pipe are required upstream or downstream of the controller.
Inlet Connecton Port
Outlet Connecton Port
Control Valve 8 Pin MiniDIN
Display Screen
Inlet Connecton Port
Flow Directon Arrow
Outlet Connecton Port
Power Jack
7
PLUMBING
Your controller is shipped with plastc plugs fted in the port openings.
To lessen the chance of contaminatng the fow stream do not remove
these plugs untl you are ready to install the device.
Make sure that the gas will fow in the directon indicated by the fow arrow.
Standard MC-Series Gas Flow Controllers have female inlet and outlet port
connectons. Welded VCR and other specialty ft ngs may have male ports.
The inlet and outlet port sizes (process connectons) for diferent fow ranges
are shown on pages 50 - 70.
Controllers with M5 (10-32) ports have O-ring face seals and require no sealant
or tape. Do not use tape with welded or o-ring ft ngs.
For non M5 (10-32) ports use thread sealing Tefon tape to prevent leakage
around the port threads.
Do not wrap the frst two threads. This will minimize the possibility of get ng
tape into the fow stream and fow body.
Do not use pipe dopes or sealants on the process connectons as these
compounds can cause permanent damage to the controller should they get
into the fow stream.
When changing ft ngs, carefully clean any tape or debris from the port threads.
We recommend the use of in-line sintered flters to prevent large partculates
from entering the measurement head of the instrument. Suggested maximum
partculate sizes are as follows:
5 microns for units with FS fow ranges of 0-1 sccm or less.
20 microns for units with FS fow ranges between 0-2 sccm and 0-1 slpm.
50 microns for units with FS fow ranges of 0-1 slpm or more.
Connectng Fit ngs and Filters
PRESSURE
Maximum operatng line pressure is 145 psig (1 MPa).
If the line pressure is higher than 145 psig (1 MPa), use a pressure regulator upstream
from the fow controller to reduce the pressure to 145 psig (1 MPa) or less.
Alicat MCP mass fow controllers are fted with a high performance
valve for low pressure applicatons. MCP mass fow controllers have a
maximum operatng line pressure of 80 psig. See page 61.
CAUTION! E
-
.
8
POWER AND SIGNAL CONNECTIONS
Power can be supplied to your controller through either the power jack (power jack
not available on CSA/ATEX approved devices) or the 8 pin Mini-DIN connector.
An AC to DC adapter which converts line AC power to DC voltage and current as
specifed below is required to use the power jack.
Small Valve controllers require a 12-30Vdc power supply with a 2.1 mm female
positve center plug capable of supplying 250 mA. NOTE: 4-20mA analog output
requires at least 15 Vdc.
Large Valve controllers require a 24-30 Vdc power supply with a 2.1 mm female
positve center plug capable of supplying at least 750mA.
Standard 8 Pin Mini-DIN Pin-Out
Pin Functon
Mini-DIN
cable color
1 Not Connected (or optonal 4-20mA Primary Output Signal) Black
2
Statc 5.12 Vdc [or optonal Secondary Analog Output (4-20mA,
5Vdc, 10Vdc) or Basic Alarm]
Brown
3 Serial RS-232RX (receive) Input Signal Red
4
Meters/Gauges = Remote Tare (Ground to Tare)
Controllers = Analog Set-Point Input
Orange
5 Serial RS-232TX (send) Output Signal Yellow
6 0-5 Vdc (or optonal 0-10 Vdc) Output Signal Green
7 Power In (as described above) Blue
8 Ground (common for power, communicatons and analog signals) Purple
Note: The above pin-out is applicable to all the fow meters and controllers with the
Mini-DIN connector. The availability of diferent output signals depends on the optons
ordered. Optonal confguratons are noted on the units calibraton sheet.
CAUTION! D 1 6
!
It is common to mistake Pin 2 (labeled 5.12 Vdc Output) as the standard 0-5 Vdc
analog output signal. In fact Pin 2 is normally a constant 5.12 Vdc that refects
the system bus voltage and can be used as a source for the set-point signal.
For 6 Pin Locking Industrial Connector, DB9 and DB15 pin-outs see pages 72
to 84. For PROFIBUS pin-outs see page 70.
1 2
3 4 5
6 7 8
9
INPUT SIGNALS
Analog Input Signal
Apply analog input to Pin 4 as shown on page 8.
For 6 Pin Locking Industrial Connector, DB9 and DB15 pin-outs see pages 72 to 84.
For PROFIBUS pin-outs see page 70.
Standard 0-5 Vdc is the standard analog input signal. Apply the 0-5 Vdc input
signal to pin 4, with common ground on pin 8. The 5.12 Vdc output on pin 2 can
be wired through a 50K ohm potentometer and back to the analog input on pin
4 to create an adjustable 0-5 Vdc input signal source as shown below.

7
6
5
4
3
2
1
8
5.12 Vdc
50 KOhm
Potentiometer
0-5 Vdc
Simple method for providing set-point to controllers
Optonal 0-10 Vdc: If specifed at tme of order, a 0-10 Vdc input signal can be
applied to pin 4, with common ground on pin 8.
Optonal 4-20 mA: If specifed at tme of order, a 4-20 mA input signal can be
applied to pin 4, with common ground on pin 8.
NOTE: This is a current sinking device. The receiving circuit is essentally a 250
ohm resistor to ground.
NOTE: 4-20mA output requires at least 15 Vdc power input.
CAUTION! D
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Electrical Connectons and Basic Wiring
10
RS-232 / RS-485 Digital Input Signal
To use the RS-232 or RS-485 input signal, connect the RS-232 / RS-485 Output
Signal (Pin 5), the RS-232 / RS-485 Input Signal (Pin 3), and Ground (Pin 8) to
your computer serial port as shown below. (See page 30 for details on accessing
RS-232 / RS-485 input.)
DB9 to Mini-DIN Connecton for RS-232 / RS-485 Signals
Electrical Connectons and Basic Wiring
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1
8
7
6
5
4
3
2
8 Pin MiniDIN Cable End 8 Pin MiniDIN Connector
9 Pin Serial Connecton 8 Pin MiniDIN Connecton
Pin Functon Functon Pin
5 Ground Ground 8
3 Transmit Receive 3
2 Receive Transmit 5
11
OUTPUT SIGNALS
RS-232 / RS-485 Digital Output Signal
To use the RS-232 or RS-485 output signal, it is necessary to connect the RS-232
/ RS-485 Output Signal (Pin5), the RS-232 / RS-485 Input Signal (Pin 3), and
Ground (Pin 8) to your computer serial port as shown on page 8. (See page 30
for details on accessing RS-232 / RS-485 output.)
Standard Voltage (0-5 Vdc) Output Signal
MC-Series fow controllers equipped with a 0-5 Vdc (optonal 0-10 Vdc) will
have this output signal available on Pin 6. This output is generally available in
additon to other optonally ordered outputs. This voltage is usually in the range
of 0.010 Vdc for zero fow and 5.0 Vdc for full-scale fow. The output voltage is
linear over the entre range. Ground for this signal is common on Pin 8.
Optonal 0-10 Vdc Output Signal
If your controller was ordered with a 0-10 Vdc output signal, it will be available
on Pin 6. (See the Calibraton Data Sheet that shipped with your controller to
determine which output signals were ordered.) This voltage is usually in the range
of 0.010 Vdc for zero fow and 10.0 Vdc for full-scale fow. The output voltage is
linear over the entre range. Ground for this signal is common on Pin 8.
Optonal Current (4-20 mA) Output Signal
If your controller was ordered with a 4-20 mA current output signal, it will
be available on Pin 1. (See the Calibraton Data Sheet that shipped with your
controller to determine which output signals were ordered.) The current signal
is 4 mA at 0 fow and 20 mA at the controllers full scale fow. The output
current is linear over the entre range. Ground for this signal is common on Pin
8. (Current output units require 15-30Vdc power.)
Optonal 2nd Analog Output Signal
You may specify an optonal 2nd analog output on Pin 2 at tme of order. (See
the Calibraton Data Sheet that shipped with your controller to determine
which output signals were ordered.) This output may be a 0-5 Vdc, 0-10 Vdc, or
4-20 mA analog signal that can represent any measured parameter. With this
optonal output, a controller could output the mass fow rate (0-5Vdc on pin 6)
and the absolute pressure (0-5 Vdc on pin 2).
If your device is CSA/ATEX approved or equipped with the optonal six pin
industrial connector, please contact Alicat.
CAUTION! D
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12
Typical Multple Device (Addressable) Wiring Confguraton
The easiest way to connect multple devices is with a Mult-Drop Box
(see page 46).
CAUTION! D
,
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, .
5
3
2
Purple
Red
Yellow
Purple
Red
Yellow
5
4
3 2
1
9
8
7
6
Unit C
Unit B
Unit A
Female Serial Cable Front
Purple (Ground)
Red
Yellow
13
Informaton for Alicat TFT (Color Display) Instruments
Alicat TFT (color display) instruments have a high contrast back-lit LCD display.
TFT instruments operate in accordance with Alicat standard operatng instructons
for our monochrome menus and displays with the following diferences.
Mult-Color Display Color Codes:
GREEN: Green labels identfy the parameters and/or adjustments
associated with the buton directly above or below the label.
WHITE: The color of each parameter is displayed in white while operatng
under normal conditons.
RED: The color of a parameter is displayed in red when operatng
conditons for that parameter exceed 128% of the devices specifcatons.
YELLOW: Yellow is the equivalent of the selecton arrow on the
monochrome display.
LCD Contrast:
LCD contrast is ranged from 1 to 11 on color displays with 11 being the greatest
contrast.
Display On/Of:
Pushing the buton under the Alicat name will turn the device display on or of.
This feature is not available on monochrome displays.
Technical Data for TFT (Color Display) Meters, Gauges and Controllers
The following specifcatons are applicable to Alicat TFT (color display) meters,
gauges and controllers only. All other operatng specifcatons are shown in the
Technical Data page for standard Alicat instruments. All standard device features
and functons are available and operate in accordance with the Alicat operatng
manual provided with the device.
Specifcaton Meter or
Gauge
Small Valve
Controller
Large Valve
Controller
Supply Voltage 7 to 30 Vdc 12 to 30 Vdc 24 to 30 Vdc
Supply Current 80 mA @ 12Vdc
70 mA @ 24Vdc
290 mA @ 12Vdc
200 mA @ 24Vdc
780 mA @
24Vdc
14
#C
+21.50
+0.00
CCM MENU
SETPT
0.000
SCCM
Air
PSIA
+13.60
+0.00
SCCM
Main
+0.00
SETPT
0123.4
MENU
SLPM
+123.4
TOTAL/
TIMER
BATCH RESET
0000:09:59 SCC
00123.45
00123.45 Batch Done
The Main display shows pressure,
temperature, set-point, volumetric fow
and mass fow.
Pressing the buton adjacent to a
parameter will make that parameter
the primary display unit.
By hitng the MENU buton at the
botom right of the screen you will
enter the Select Menu display.
If your controller was ordered with the
Totalizer opton (page 43), pushing the
TOTAL buton once will bring up the
Totalizing Mode display. Pushing MENU
will bring up the Select Menu display.
DISPLAYS AND MENUS
The device screen defaults to Main display as soon as power is applied to the controller.
Select Menu
From Select Menu you can change
the selected gas, interact with your
RS-232/RS-485 settings, read
manufacturers data or access the
control set-up display.
Push MAIN to return to the Main display.
Totalizer (opton only)
CONTROL
SETUP
RS232
COMM
MFG
DATA
MAIN
MI SC
GAS
SELECT
Select Menu
15
MAIN
This mode defaults on power up, with
mass fow as the primary displayed
parameter.
The following parameters are displayed in
the Main mode.
Gas Absolute Pressure: This sensor
references hard vacuum and reads
incoming pressure both above and below
local atmospheric pressure. This parameter
is moved to the primary display by pushing
the buton above PSIA.
The engineering unit associated with
absolute pressure is pounds per square
inch absolute (psia). This can be converted
to gage pressure (psig) by subtractng local atmospheric pressure from the
absolute pressure reading:
PSIG = PSIA (Local Atmospheric Pressure)
Gas Temperature: MC-Series fow
controllers measure the incoming
temperature of the gas fow. The
temperature is displayed in degrees Celsius
(C). This parameter is moved to the primary
display by pushing the buton above C.
Pushing the buton again allows you to
select 0C (Celsius), 0K (Kelvin), 0F (Fahrenheit)
or 0R (Rankine) for the temperature scale.
To select a temperature scale, use the LN-UP
and LN-DN butons to positon the arrow in
front of the desired scale.
Press SET to record your selecton and
return to the MAIN display. The selected
temperature scale will be displayed on the screen.
Set Point: The set-point (SETPT)is shown in the upper right of the display.
For informaton on changing the set-point see SETPT SOURCE, page 18.
Volumetric Flow Rate: This parameter is located in the lower lef of the display.
It is moved to the primary display by pushing the buton below CCM in this
example. Your display may show a diferent unit of measure.
#C
+21.50
+0.00
CCM MENU
SETPT
+0.00
SCCM
Air
PSIA
+13.60
+0.00
SCCM
LN-DN
CANCEL SET
MODE
>#C
#K
#F
#R

LN-UP
+0.00
W
,
( + 28%) . T
.
I ,
. P
- .
16
Mass Flow Rate: The mass fow rate is the volumetric fow rate corrected to a
standard temperature and pressure (typically 14.696 psia and 25 C).
This parameter is located in the lower middle of the display. It can be moved to
the primary display by pushing the buton below SCCM in this example. Your
display may show a diferent unit of measure preceded by the leter S.
To get an accurate volumetric or mass fow rate, the gas being measured
must be selected. See Gas Select, page 21.
MENU: Pressing MENU switches the screen to the Select Menu display.
Flashing Error Message: An error message (MOV = mass overrange, VOV
= volumetric overrange, POV = pressure overrange, TOV = temperature
overrange) fashes when a measured parameter exceeds the range of the
sensor. When any item fashes, neither the fashing parameter nor the
mass fow measurement is accurate. Reducing the value of the fashing parameter
to within specifed limits will return the unit to normal operaton and accuracy.
If the unit does not return to normal operaton contact Alicat.
17
SELECT MENU
From Select Menu you can change the selected gas, interact with your
RS-232/RS-485 setngs, read manufacturers data and access the control
setup and miscellaneous screens.
Press the buton next to the desired operaton to bring that functon to the screen.
Miscellaneous
Communicatons Select
Control Setup
Main
Manufacturer Data
An explanaton for each screen can be found on the following pages.
#C
+21.50
+0.00
CCM MAIN
SETPT
0.000
SCCM
Air
PSIA
+13.60
+0.00
SCCM
Gas Select
MODEL
INFO
BACK MAIN
ALI CAT SCI ENTI FI C
Ph 520-290-6060
Fax 520-290-0109
LOOP
VAR
ON
AUTO PID MAIN
SETPT
SOURCE
MISC2
BACK MAIN
MISC1
LN-DN
CANCEL SET
MODE
C2H6 Ethane
H2 Hydrogen
He Helium
>N2 Nitrogen
N2O Nitrous Oxide
Ne Neon
LN-UP
BACK MAIN
UNIT ID
A
BAUD
19200
SETPT
+0.00
CONTROL
SETUP
RS232
COMM
MFG
DATA
MAIN
MISC
GAS
SELECT
Select Menu
+ 0.00
18
CONTROL SETUP
Control Setup is accessed by pressing the buton below Control Setup on the
Select Menu display. From this screen you can select your set-point source,
choose a loop variable and adjust the PID terms.
Press BACK to return to the Select Menu
display.
Press MAIN to return to the MAIN display
SETPT SOURCE Pressing the buton
above SETPT SOURCE will allow you to
select how the set point will be conveyed
to your controller.
Use the line-up and line-down butons
to move the arrow in front of the desired
opton. Then press SET.
Press CANCEL to return to the previous
display.
The controller will ignore any set-point
except that of the selected set-point source and it will remember which input is
selected even if the power is disconnected.
RS-232 (or RS-485) refers to a remote
digital RS-232 / RS-485 set-point applied
via a serial connecton to a computer or
PLC as described in the installaton and
RS-232 / RS-485 sectons of this manual.
Front Panel refers to a set-point applied
directly at the controller.
Front Panel input must be selected
prior to changing the set-point at
the device.
Analog refers to a remote analog set-
point applied to Pin 4 of the Mini-DIN
connector as described in the installaton
secton of this manual. The standard analog input is 0-5 Vdc.
To determine what type of analog set-point your controller has, refer to
the Calibraton Data Sheet that was included with your controller.
If nothing is connected to Pin 4, and the controller is set for analog control, the
device will generate random set-point values.
NOTE: If your controller has the IPC (Integrated Potentometer Control) opton,
the IPC dial will operate with the ANALOG set-point source selected.
SETPT refers to the set-point. This parameter may be changed using the display
only if FRONT PANEL is selected as the Input. Press SETPT. Then use SELECT to
choose the decimal with the arrow and the UP and DOWN butons to change
the value. Press SET to record your value. Press CLEAR to return to zero.
LN-DN
CANCEL SET
LN-UP
>RS232
FRONT PANEL
ANALOG
LOOP
VAR
ON
AUTO PID MAIN
SETPT
SOURCE
SETPT
+0.0
19
CAUTION! N C - -
. T
-.
W , HOT!
CONTROL SETUP (contnued)
LOOP VARThe selecton of what variable
to close the loop on is a feature unique to
Alicat mass fow controllers.
Pressing the LOOP VAR buton on the
Control Setup screen will allow you to
change what variable is controlled.
Use the line-up and line-down butons
to move the arrow in front of the desired
opton.
When the mass fow controller is supplied
with the control valve upstream of the
electronics porton of the system, the unit
can be set to control on outlet pressure
(absolute pressures only) or volumetric
fow rate, instead of mass fow rate.
The change from mass to volume can
usually be accomplished without much, if
any, change in the P and D set ngs.
When you change from controlling
fow to controlling pressure,
sometmes fairly radical changes
must be made to the P & D variables. See
page 20 PID TUNING.
Contact Alicat if you are having di cultes
with this procedure.
ON AUTO / OFF AUTOrefers to the standard auto-tare or auto-zero feature.
The auto-tare feature automatcally tares (takes the detected signal as zero) the
unit when it receives a zero set-point for more than two seconds.
A zero set-point results in the closing of the valve and a known no fow
conditon. This feature makes the device more accurate by periodically
removing any cumulatve errors associated with drif.
It is recommended that the controller be lef in the default auto-tare ON
mode unless your specifc applicaton requires that it be turned of.
LN-DN
CANCEL SET
LN-UP
>Mass Flow
Volumetric Flow
Pressure
LOOP
VAR
ON
AUTO PID MAIN
SETPT
SOURCE
SETPT
+0.0
20
PID TUNING
PID Values determine the performance
and operaton of your proportonal control
valve. These terms dictate control speed,
control stability, overshoot and oscillaton.
All units leave the factory with a generic
tuning designed to handle most applicatons.
If you encounter issues with valve stability,
oscillaton or speed, fne tuning these
parameters may resolve the problem.
Alicat controllers allow you to adjust the
Proportonal, Integral and Diferental
terms of the PID control loop.
To change the PID loop parameters, push
the buton below PID.
Press LOOP TYPE. Then use the LN-UP and
LN-DN butons to select the appropriate
PID control algorithm. Press SET.
See the following page for descriptons
of the PID Loop Types (PID Control
Algorithms).
P refers to the Proportonal term of the
PID loop.
I refers to the Integral term of the PID loop.
D refers to the Diferental term of the PID
loop.
Press P, I or D. Then use SELECT to choose
the digit with the arrow and the UP and
DOWN butons to change the value. Press
SET to record your value. Press CLEAR to
return to zero.
Before changing the P, I or D
parameter, please record the inital
value so that it can be returned to
the factory setng if necessary.
Valve tuning can be complex. If you
would like assistance, please contact
Alicat for technical support.
I
00000
BACK
LOOP
TYPE MAIN
P
00100
D
02501
LN-DN
CANCEL SET
LN-UP
> PD PID
PD2I PID
LOOP
VAR
ON
AUTO PID MAIN
SETPT
SOURCE
SETPT
+0.0
Overview of PID Adjustment on Alicat MFCs and Pressure Controllers
21
The PD algorithm is the PID algorithm used on most Alicat controllers.
It is divided into two segments:
The frst compares the process value to the set-point to generate a proportonal
error. The proportonal error is multplied by the P gain, with the result added
to the output drive register.
The second operates on the present process value minus the process value during
the immediately previous evaluaton cycle. This velocity term in multplied by
the D gain, with the result subtracted from the output drive register.
The above additons to and subtractons from the output drive register
are carried over from process cycle to process cycle, thus performing the
integraton functon automatcally.
Increasing the P gain will promote the tendency of the system to overshoot,
ring, or oscillate.
Increasing the D gain will reduce the tendency of the system to overshoot.
The PD2I algorithm is a PID algorithm used primarily for high performance
pressure and fow control applicatons.
It exhibits two basic diferences from the PD algorithm that most controllers utlize.
1. Instead of applying a damping functon based upon the rate of change of the
process value, it applies a damping functon based upon the square of the rate of
change of the process value.
2. The damping functon is applied directly to the proportonal error term
before that term is used in the proportonal and integral functons of the
algorithm. This provides a certain amount of look ahead capability in the
control loop.
Because of these diferences, you will note the following:
1. Increasing P gain can be used to damp out overshoot and slow oscillatons
in pressure controllers. You will know that P gain is too high, when the
controller breaks into fast oscillatons on step changes in set-point. On fow
controllers, too high a P gain results in slower response tmes. Too low a P
gain results in overshoot and/or slow oscillaton. A good startng value for P
gain is 200.
2. If the unit was originally shipped with the PD2I algorithm selected, the
D gain value should be lef at or near the factory setng because it relates
primarily to the system phase lags. If you are changing from the default
algorithm to the PD2I algorithm, you should start with a D gain value of 20.
3. The I gain is used to control the rate at which the process converges
to the set-point, afer the inital step change. Too low a value for I gain
shows up as a process value that jumps to near the set-point and then takes
awhile to converge the rest of the way. Too high a value for I gain results in
oscillaton. A good startng value for the I gain is 200.
22
GAS SELECT
Gas Select is accessed by pressing the
buton below GAS SELECT on the Select
Menu display.
To select a gas, use the LN-UP and
LN-DN butons to positon the arrow in
front of the desired gas.
Press MODE and then PG-UP or PG-DN
to view a new page in the gas list.
Press SET to record your selecton and
return to the MAIN display. The selected
gas will be displayed on the screen.
Note: Gas Select may not be available on
units ordered with a custom gas or blend.
See page 65 for MCS-Series Gas Select List.
Alicat Standard Gas Select List
Air Air
Ar Argon
CH4 Methane
CO Carbon Monoxide
CO2 Carbon Dioxide
C2H6 Ethane
H2 Hydrogen
He Helium
N2 Nitrogen
N2O Nitrous Oxide
Ne Neon
O2 Oxygen
C3H8 Propane
n-C4H10 normal-Butane
C2H2 Acetylene
C2H4 Ethylene
i-C2H10 iso-Butane
Kr Krypton
Xe Xenon
SF6 Sulfur Hexafuoride
C-25 75% Argon / 25% CO2
C-10 90% Argon / 10% CO2
C-8 92% Argon / 8% CO2
C-2 98% Argon / 2% CO2
C-75 75% CO2 / 25% Argon
A-75 75% Argon / 25% Helium
A-25 75% Helium / 25% Argon
A1025 90% Helium / 7.5% Argon / 2.5% CO2
(Praxair - Helistar A1025)
Star29 90% Argon / 8% CO2 / 2% Oxygen
(Praxair - Stargon CS)
P-5 95% Argon / 5% Methane
LN-DN
CANCEL SET
MODE
C2H6 Ethane
H2 Hydrogen
He Helium
>N2 Nitrogen
N2O Nitrous Oxide
Ne Neon
LN-UP
23
COMMUNICATION SELECT
Access Communicaton Select by pressing
the buton above RS232 COMM or RS485
COMM on the Select Menu display.
Unit ID Valid unit identfers are the
leters A-Z and @. The identfer allows
you to assign a unique address to each
device so that multple units can be
connected to a single RS-232 or RS-485
computer port.
Press UNIT ID. Use the UP and DOWN
butons to change the Unit ID. Press SET to
record the ID. Press Reset to return to the
previously recorded Unit ID.
Any Unit ID change will take efect when
Communicaton Select is exited.
If the symbol @ is selected as the Unit
ID, the device will enter streaming mode
when Communicaton Select is exited.
See RS-232 Communicatons (page 26) for
informaton about the streaming mode.
Baud Both this instrument and your
computer must send/receive data at the
same baud rate. The default baud rate for
this device is 19200 baud.
Press BAUD. Use the UP and DOWN
butons

to select the baud rate that
matches your computer. The choices are
38400, 19200, 9600, or 2400 baud. Press
SET to record the baud rate.
Any baud rate change will not take efect
untl power to the unit is cycled.
UP
BACK RESET A SET
UNIT ID
C
DN
DN
BACK SET
BAUD UP
19200
BACK MAIN
UNIT ID
A
BAUD
19200
C
24
MISCELLANEOUS
Miscellaneous is accessed by pressing the MISC buton on the Select Menu display.
Next select either MISC1 or MISC2.
MISC1 will display as shown at lef.
ZERO BAND refers to Display Zero Deadband.
Zero deadband is a value below which the display
jumps to zero. This deadband is ofen desired to
prevent electrical noise from showing up on the
display as minor fows or pressures that do not
exist. Display Zero Deadband does not afect the
analog or digital signal outputs.
ZERO BAND can be adjusted between 0 and
3.2% of the sensors FullScale(FS).
Press ZERO BAND. Then use SELECT to choose
the digit with the arrow and the UP and DOWN
butons to change the value. Press SET to record
your value. Press CLEAR to return to zero.
Pressure Averaging and Flow Averaging may
be useful to make it easier to read and interpret
rapidly fuctuatng pressures and fows. Pressure
and fow averaging can be adjusted between 1
(no averaging) and 256 (maximum averaging).
These are geometric running averages where
the number between 1 and 256 can be
considered roughly equivalent to the response
tme constant in milliseconds.
This can be efectve at smoothing high frequency process oscillatons such as
those caused by diaphragm pumps.
Press PRESS AVG. Then use SELECT to choose the digit with the arrow and the UP and
DOWN butons to change the value. Press SET to record your value. Press CLEAR to
return to zero.
Press FLOW AVG. Then use SELECT to choose the
digit with the arrow and the UP and DOWN butons
to change the value. Press SET to record your value.
Press CLEAR to return to zero.
Setng a higher number will equal a smoother
display.
LCD CONTRAST: The display contrast can be
adjusted between 0 and 30, with zero being the
lightest and 30 being the darkest. Use the UP
and DOWN butons to adjust the contrast. Press
SET when you are satsfed. Press CANCEL to
return to the MISC display.
PRESS
AVG
BACK
LCD
CONTRAST MAIN
ZERO
BAND
FLOW
AVG
DOWN
CANCEL CLEAR SET
UP SELECT
0.0
>
DOWN
CANCEL RESET SET
UP
11
25
MISC2 will display as shown at lef.
STP refers to the functons that allow your
selecton of standard temperature and
pressure conditons. This feature is generally
useful for comparison purposes to other
devices or systems using diferent STP
parameters.
The STP menu is comprised of the STP TEMP
and STP PRESS screens.
STP TEMP allows you to select from seven
standard temperature protocols. The arrow
positon will automatcally default to the
currently stored value.
Once a selecton has been made and recorded
using the SET buton, a change acknowledgement
message will be displayed on screen.
Selectng RETURN will revert screen to the
Main display. If the SET selecton is already
the currently stored value, a message
indicatng that fact will appear.
STP PRESS enables you to select from one of
two standard pressure setngs.
The arrow positon will automatcally default
to the currently stored value.
Once a selecton has been made and recorded using the SET buton, a change
acknowledgement message will be displayed on screen.
Selectng RETURN will revert screen to the Main display. If the SET selecton is
already the currently stored value, a message indicatng that fact will appear.
DIAG
TEST
BACK MAIN
STP
STP
PRESS
BACK MAIN
STP
TEMP
LN-DN
RETURN
0 C
15 C
15.56 C 60F
20 C
21. 11 C 70F
25 C
37 C
STP CHANGED 21. 11 C
SET
LN-UP
>
LN-DN
RETURN
1 atm 14.696 PSIA
1 bar 100KPa 14.50P
--- STP ALREADY SET ---
SET
LN-UP
>
STP TEMP Display STP PRESS Display
26
BACK MAIN
SCROLL
R8: AP Sig 7871
R9: Temp Sig 39071
R10: DP Side 9986
R11: DP Brdg 36673
R13: AP Brdg 36673
R16: Meter Fun 199
R18: Power Up 32768
DIAG TEST: This diagnostc screen displays
the inital register values confgured by the
factory, which is useful for notng factory
setngs prior to making any changes. It is
also helpful for troubleshootng with Alicat
customer service personnel.
Select the DIAG TEST buton from the MISC2
screen to view a list of select register values.
Pressing the SCROLL buton will cycle the
display through the register screens. An
example screen is shown at lef.
MANUFACTURER DATA
Manufacturer Data is accessed by pressing
the MFG DATA buton on the Select Menu
display.
The inital display shows the name and
telephone number of the manufacturer.
Press MODEL INFO to show important
informaton about your fow device
including the model number, serial
number, and date of manufacture.
Press BACK to return to the MFG DATA
display.
Push MAIN to return to the Main display.
MODEL
INFO
BACK MAIN
ALI CAT SCI ENTI FI C
Ph 520-290-6060
Fax 520-290-0109
BACK MAIN
MODEL: MC-10SLPM-D
SERIAL NO: 80003
DATE MFG: 10/7/2012
DATE CAL: 10/9/2012
CAL BY: DL
SW REV: 2V62
27
MCV Controller Operatng Notes
Alicats MCV mass fow controller is equipped with an integrated Swagelok
positve shutof valve.
The normally closed valve is air actuated and will remain closed untl it is
connected to an air source supplying between 60 and 120 psig of air pressure.
Once the appropriate amount of air pressure is supplied to the shutof valve,
it will open, allowing fow through the mass controller. Air pressure must be
removed from the shutof valve in order for the valve to close.
A common method for actuatng the shutof valve incorporates a three-way
solenoid valve (below).
Air pressure is applied to one side of the solenoid valve while the other side of
the solenoid is lef open to atmosphere.
When the solenoid is energized, air pressure is delivered to the shutof valve,
allowing it to open.
When the solenoid is returned to a relaxed state, air pressure is removed from
the shutof valve, allowing it to close. The air pressure is vented to atmosphere.
Solenoid valves for use with the MCV mass fow controller can be ordered from Alicat.
Note: All standard MC-Series device features and functons are available on the MCV-
Series and operate in accordance with the standard MC-Series operatng instructons.
Three-way Solenoid Valve
MCV Controller
Vent
Air Supply
MCV controller and three-way solenoid valve.
28
MCD Dual Valve Mass Controller Operatng Notes
The MCD is a versatle Dual-Valve Mass Flow and Pressure Controller. It can be used to:
Measure mass fow and volumetric fow in both directons, plus absolute
pressure and temperature;
Control mass or volumetric fow from a pressurized source or to vacuum;
Control absolute pressure or back-pressure in a fowing process;
Control absolute pressure in a closed volume with automatc ventng.
Applicaton examples are shown below and on the following page. Please contact
Alicat if you have any questons regarding MCD use.
FLOW
Process Gas Source
Mass Flow (or Volumetric Flow) Control
MCD top view
Process Connecton
Inlet Valve
Outlet Valve
MCD front view
Process Connecton
Inlet Valve
Outlet Valve
MCD rear view
29
FLOW
Process
Vacuum Source
Inverse Mass Flow (or Volumetric Flow)Control with Vacuum
Process Gas Source
Vacuum Source
Flowing Absolute Pressure Control
Back-Pressure Control
Positve Pressure Control
FLOW
Process Gas Source
Vacuum Source
Bidirectonal Mass Flow (or Volumetric Flow)Control
FLOW
FLOW
Closed Process
Gas Source
Atmosphere or Vacuum
Dead-Ended Absolute Pressure Control
FLOW
30
RS-232 / RS-485 Output and Input
Confguring HyperTerminal:
1. Open your HyperTerminal RS-232 / RS-485 terminal program (installed under
the Accessories menu on all Microsof Windows operatng systems).
2. Select Propertes from the fle menu.
3. Click on the Confgure buton under the Connect To tab. Be sure the
program is set for: 19,200 baud (or matches the baud rate selected in the
RS-232 / RS-485 communicatons menu on the meter) and an 8-N-1-None (8
Data Bits, No Parity, 1 Stop Bit, and no Flow Control) protocol.
4. Under the Setngs tab, make sure the Terminal Emulaton is set to ANSI
or Auto Detect.
5. Click on the ASCII Setup buton and be sure the Send Line Ends with Line
Feeds box is not checked and the Echo Typed Characters Locally box and
the Append Line Feeds to Incoming Lines boxes are checked. Those setngs
not mentoned here are normally okay in the default positon.
6. Save the setngs, close HyperTerminal and reopen it.
Streaming Mode (RS-485 units do not have a streaming mode)
In the default Polling Mode, the screen should be blank except the blinking cursor. In
order to get the data streaming to the screen, hit the Enter key several tmes to clear
any extraneous informaton. Type *@=@ followed by Enter (or using the RS-232 /
RS-485 communicaton select menu, select @ as identfer and exit the screen). If data
stll does not appear, check all the connectons and COM port assignments.
Streaming Mode Advanced
The streaming data rate is controlled by register 91. The recommended default rate
of data provision is once every 50 milliseconds and this is suitable for most purposes.
If a slower or faster streaming data rate is desired, register 91 can be changed to a
value from 1 millisecond to 65535 milliseconds, or slightly over once every minute.
Below approximately 40 milliseconds, data provision will be dependent upon
how many parameters are selected. Fewer data parameters can be streamed
more quickly than more. It is lef to the user to balance streaming speed with
number of parameters streamed.
To read register 91, type *r91 followed by Enter.
To modify register 91, type *w91=X, where X is a positve integer from 1 to
65535, followed by Enter.
To return to the recommended factory default streaming speed, type *w91= 50.
Changing From Streaming to Polling Mode:
When the meter is in the Streaming Mode (RS-485 units do not have a streaming
mode), the screen is updated approximately 10-60 tmes per second (depending
on the amount of data on each line) so that the user sees the data essentally in
real tme. It is sometmes desirable, and necessary when using more than one
unit on a single RS-232 line, to be able to poll the unit.
In Polling Mode the unit measures the fow normally, but only sends a line of data
when it is polled. Each unit can be given its own unique identfer or address.
31
Unless otherwise specifed each unit is shipped with a default address of capital A.
Other valid addresses are B thru Z.
Once you have established communicaton with the unit and have a stream of
informaton flling your screen:
1. Type *@=A followed by Enter (or using the RS-232 / RS-485 communicaton
select menu, select A as identfer and exit the screen) to stop the streaming
mode of informaton. Note that the fow of informaton will not stop while
you are typing and you will not be able to read what you have typed. Also,
the unit does not accept a backspace or delete in the line so it must be typed
correctly. If in doubt, simply hit enter and start again. If the unit does not
get exactly what it is expectng, it will ignore it. If the line has been typed
correctly, the data will stop.
2. You may now poll the unit by typing A followed by Enter. This does an
instantaneous poll of unit A and returns the values once. You may type A
Enter as many tmes as you like. Alternately you could resume streaming
mode by typing *@=@ followed by Enter. Repeat step 1 to remove the
unit from the streaming mode.
3. To assign the unit a new address, type *@=New Address, e.g. *@=B. Care
should be taken not to assign an address to a unit if more than one unit is on
the RS-232 / RS-485 line as all of the addresses will be reassigned. Instead,
each should be individually atached to the RS-232 / RS-485 line, given an
address, and taken of. Afer each unit has been given a unique address, they
can all be put back on the same line and polled individually.
Sending a Set-point via RS-232 / RS-485: To send a set-point via RS-232 / RS-485,
Serial must be selected under the Input list in the control set up mode.
Method 1: Set-point may be set in foatng point in serial communicaton using
serial command (UnitID)SX.YZ
Example: AS4.54 results in Unit ID A changing set-point to 4.54.
Method 2: Type in a number between 0 and 65535 (2% over range), where 64000
denotes full-scale fow rate, and hit Enter.
The set-point column and fow rates should change accordingly. If they do not,
try hitng Enter a couple of tmes and repeatng your command. The formula
for performing a linear interpolaton is as follows:
Value = (Desired Set-point X 64000) / Full Scale Flow Range
For example, if your device is a 100 slpm full-scale unit and you wish to apply a
set-point of 35 slpm you would enter the following value:
22400 = (35 slpm X 64000) / 100 slpm
If the controller is in polling mode as described in Changing from Streaming
Mode to Polling Mode, the set-point must be preceded by the address of the
controller. For example, if your controller has been given an address of D, the
set-point above would be sent by typing:
D22400 followed by Enter
32
To adjust the Proportonal and Diferental (P&D) terms via RS-232 / RS-485:
Type *@=A followed by Enter to stop the streaming mode of informaton.
To adjust the P or proportonal term of the PID controller, type *R21 followed
by Enter.
The computer will respond by reading the current value for register 21 between
0-65535. It is good practce to write this value down so you can return to the
factory setngs if necessary. Enter the value you wish to try by writng the new
value to register 21. For example, if you wished to try a P term of 220, you
would type *W21=220 followed by Enter where the bold number denotes the
new value.
The computer will respond to the new value by confrming that 21=220. To
see the efect of the change you may now poll the unit by typing A followed
by Enter. This does an instantaneous poll and returns the values once. You
may type A Enter as many tmes as you like. Alternately you could resume
streaming mode by typing *@=@ followed by Enter. Repeat step 3 to remove
the unit from the streaming mode.
To adjust the D or proportonal term of the PID controller, type *R22 followed
by Enter.
The computer will respond by reading the current value for register 22 between
0-65535. It is good practce to write this value down so you can return to the
factory setngs if necessary. Enter the value you wish to try by writng the new
value to register 22. For example, if you wished to try a D term of 25, you
would type *W22=25 followed by Enter where the bold number denotes the
new value.
The computer will respond to the new value by confrming that 22=25. To see the
efect of the change you may now poll the unit by typing A followed by Enter.
This does an instantaneous poll and returns the values once. You may type A
Enter as many tmes as you like. Alternately you could resume streaming mode
by typing *@=@ followed by Enter. Repeat.
You may test your setngs for a step change by changing the set-point. To do this
type A32000 (A is the default single unit address, if you have multple addressed
units on your RS-232 / RS-485 line the leter preceding the value would change
accordingly.) followed by Enter to give the unit a full scale set-point. Monitor
the units response to the step change to ensure it is satsfactory for your needs.
Recall that the P term controls how quickly the unit goes from one set-point to
the next, and the D term controls how quickly the signal begins to decelerate
as it approaches the new set-point (controls the overshoot).
33
Gas Select The selected gas can be changed via RS-232 / RS-485 input. To
change the selected gas, enter the following commands:
In Polling Mode: Address$$#<Enter> (e.g. B$$#<Enter>)
Where # is the number of the gas selected from the table below. Note that this
also corresponds to the gas select menu on the fow controller screen:
# GAS
0 Air Air
1 Argon Ar
2 Methane CH4
3 Carbon Monoxide CO
4 Carbon Dioxide CO2
5 Ethane C2H6
6 Hydrogen H2
7 Helium He
8 Nitrogen N2
9 Nitrous Oxide N2O
10 Neon Ne
11 Oxygen O2
12 Propane C3H8
13 normal-Butane n-C4H10
14 Acetylene C2H2
15 Ethylene C2H4
16 iso-Butane i-C2H10
17 Krypton Kr
18 Xenon Xe
19 Sulfur Hexafuoride SF6
20 75% Argon / 25% CO2 C-25
21 90% Argon / 10% CO2 C-10
22 92% Argon / 8% CO2 C-8
23 98% Argon / 2% CO2 C-2
24 75% CO2 / 25% Argon C-75
25 75% Argon / 25% Helium A-75
26 75% Helium / 25% Argon A-25
27
90% Helium / 7.5% Argon / 2.5% CO2
A1025
28
90% Argon / 8% CO2 / 2% Oxygen
Star29
29 95% Argon / 5% Methane P-5
For example, to select Propane, enter: $$12<Enter>
34
Collectng Data:
The RS-232 / RS-485 output updates to the screen many tmes per second.
Very short-term events can be captured simply by disconnectng (there are
two telephone symbol icons at the top of the HyperTerminal screen for
disconnectng and connectng) immediately afer the event in queston. The scroll
bar can be driven up to the event and all of the data associated with the event
can be selected, copied, and pasted into Microsof Excel or other spreadsheet
program as described below.
For longer term data, it is useful to capture the data in a text fle. With the desired
data streaming to the screen, select Capture Text from the Transfer Menu.
Type in the path and fle name you wish to use. Push the start buton. When the
data collecton period is complete, simply select Capture Text from the Transfer
Menu and select Stop from the sub-menu that appears.
Data that is selected and copied, either directly from HyperTerminal or from
a text fle can be pasted directly into Excel. When the data is pasted it will all
be in the selected column. Select Text to Columns... under the Data menu in
Excel and a Text to Columns Wizard (dialog box) will appear. Make sure that
Fixed Width is selected under Original Data Type in the frst dialog box and
click Next. In the second dialog box, set the column widths as desired, but the
default is usually acceptable. Click on Next again. In the third dialog box, make
sure the column data format is set to General, and click Finish. This separates
the data into columns for manipulaton and removes symbols such as the plus
signs from the numbers. Once the data is in this format, it can be graphed or
manipulated as desired.
For extended term data capture see: Sending a Simple Script to HyperTerminal
on page 36.
35
Data Format:
The data stream on the screen represents the fow parameters of the main mode
in the units shown on the display.
For mass fow controllers, there are six columns of data representng pressure,
temperature, volumetric fow, mass fow, set-point, and the selected gas
The frst column is absolute pressure (normally in psia), the second column is
temperature (normally in C), the third column is volumetric fow rate (in the
units specifed at tme of order and shown on the display), the fourth column is
mass fow (also in the units specifed at tme of order and shown on the display),
the ffh column is the currently selected set-point value, the sixth column
designates the currently selected gas. For instance, if the controller was ordered
in units of scfm, the display on the controller would read 2.004 scfm and the last
two columns of the output below would represent volumetric fow and mass
fow in cfm and scfm respectvely.
+014.70 +025.00 +02.004 +02.004 2.004 Air
+014.70 +025.00 +02.004 +02.004 2.004 Air
+014.70 +025.00 +02.004 +02.004 2.004 Air
+014.70 +025.00 +02.004 +02.004 2.004 Air
+014.70 +025.00 +02.004 +02.004 2.004 Air
+014.70 +025.00 +02.004 +02.004 2.004 Air
MC-Series Mass Flow Controller Data Format
Note: On units with the totalizer functon, the sixth column will be the totalizer
value, with gas select moving to a seventh column.
36
Sending a Simple Script File to HyperTerminal
It is sometmes desirable to capture data for an extended period of tme. Standard
streaming mode informaton is useful for short term events, however, when
capturing data for an extended period of tme, the amount of data and thus the
fle size can become too large very quickly. Without any special programming
skills, the user can use HyperTerminal and a text editng program such as
Microsof Word to capture text at user defned intervals.
1. Open your text editng program, MS Word for example.
2. Set the cap lock on so that you are typing in capital leters.
3. Beginning at the top of the page, type A<Enter> repeatedly. If youre using MS
Word, you can tell how many lines you have by the line count at the botom of the
screen. The number of lines will correspond to the total number of tmes the fow
device will be polled, and thus the total number of lines of data it will produce.
For example: A
A
A
A
A
A
will get a total of six lines of data from the fow meter, but you can
enter as many as you like.
The tme between each line will be set in HyperTerminal.
4. When you have as many lines as you wish, go to the File menu and select save.
In the save dialog box, enter a path and fle name as desired and in the Save as
Type box, select the plain text (.txt) opton. It is important that it be saved as a
generic text fle for HyperTerminal to work with it.
5. Click Save.
6. A fle conversion box will appear. In the End Lines With drop down box, select
CR Only. Everything else can be lef as default.
7. Click O.K.
8. You have now created a script fle to send to HyperTerminal. Close the fle
and exit the text editng program.
9. Open HyperTerminal and establish communicaton with your fow device as
outlined in the manual.
10. Set the fow device to Polling Mode as described in the manual. Each tme you
type A<Enter>, the meter should return one line of data to the screen.
11. Go to the File menu in HyperTerminal and select Propertes.
12. Select the Setngs tab.
13. Click on the ASCII Setup buton.
14. The Line Delay box is defaulted to 0 milliseconds. This is where you will tell
the program how ofen to read a line from the script fle youve created. 1000
milliseconds is one second, so if you want a line of data every 30 seconds, you
37
would enter 30000 into the box. If you want a line every 5 minutes, you would
enter 300000 into the box.
15. When you have entered the value you want, click on OK and OK in the
Propertes dialog box.
16. Go the Transfer menu and select Send Text File (NOT Send File).
17. Browse and select the text script fle you created.
18. Click Open.
19. The program will begin executng your script fle, reading one line at a tme
with the line delay you specifed and the fow device will respond by sending one
line of data for each poll it receives, when it receives it.
You can also capture the data to another fle as described in the manual under
Collectng Data. You will be simultaneously sending it a script fle and capturing
the output to a separate fle for analysis.
Operatng Principle
All M-Series Gas Flow Meters (and MC-Series Gas Flow Controllers) are based on the
accurate measurement of volumetric fow. The volumetric fow rate is determined
by creatng a pressure drop across a unique internal restricton, known as a Laminar
Flow Element (LFE), and measuring diferental pressure across it. The restricton is
designed so that the gas molecules are forced to move in parallel paths along the
entre length of the passage; hence laminar (streamline) fow is established for the
entre range of operaton of the device. Unlike other fow measuring devices, in
laminar fow meters the relatonship between pressure drop and fow is linear.
Please visit the Alicat web site for a detailed explanaton this principle.
htp://www.alicat.com/technical-informaton/theory-of-operaton/
STANDARD GAS DATA TABLES: Those of you who have older Alicat products
(manufactured before October 2005) may notce small discrepancies between
the gas property tables of your old and new units. Alicat Scientfc, Inc. has
incorporated the latest data sets from NIST (including their REFPROP 7 data)
in our products built-in gas property models. Be aware that the calibrators
that you may be using may be checking against older data sets such as the
widely distributed Air Liquide data. This may generate apparent calibraton
discrepancies of up to 0.6% of reading on well behaved gases and as much as 3%
of reading on some gases such as propane and butane, unless the standard was
directly calibrated on the gas in queston.
As the older standards are phased out, this diference in readings will cease
to be a problem. If you see a diference between the Alicat meter and your in-
house standard, in additon to calling Alicat Scientfc at (520) 290-6060, call the
manufacturer of your standard for clarifcaton as to which data set they used in
their calibraton. This comparison will in all likelihood resolve the problem.
38
Gas
Number
Short
Form
Long Form
Viscosity*
25 deg C
14.696 psia
Density**
25 deg C
14.696 psia
Compressibility
25 deg C
14.696 psia
0 Air Air 184.918 1.1840 0.9997
1 Ar Argon 225.593 1.6339 0.9994
2 CH4 Methane 111.852 0.6569 0.9982
3 CO Carbon Monoxide 176.473 1.1453 0.9997
4 CO2 Carbon Dioxide 149.332 1.8080 0.9949
5 C2H6 Ethane 93.540 1.2385 0.9924
6 H2 Hydrogen 89.153 0.08235 1.0006
7 He Helium 198.457 0.16353 1.0005
8 N2 Nitrogen 178.120 1.1453 0.9998
9 N2O Nitrous Oxide 148.456 1.8088 0.9946
10 Ne Neon 311.149 0.8246 1.0005
11 O2 Oxygen 204.591 1.3088 0.9994
12 C3H8 Propane 81.458 1.8316 0.9841
13 n-C4H10 normal-Butane 74.052 2.4494 0.9699
14 C2H2 Acetylene 104.448 1.0720 0.9928
15 C2H4 Ethylene 103.177 1.1533 0.9943
16 i-C4H10 iso-Butane 74.988 2.4403 0.9728
17 Kr Krypton 251.342 3.4274 0.9994
18 Xe Xenon 229.785 5.3954 0.9947
19 SF6 Sulfur Hexafuoride 153.532 6.0380 0.9887
20 C-25 75% Argon / 25% CO2 205.615 1.6766 0.9987
21 C-10 90% Argon / 10% CO2 217.529 1.6509 0.9991
22 C-8 92% Argon / 8% CO2 219.134 1.6475 0.9992
23 C-2 98% Argon / 2% CO2 223.973 1.6373 0.9993
24 C-75 75% CO2 / 25% Argon 167.451 1.7634 0.9966
25 A-75 75% Argon / 25% Helium 230.998 1.2660 0.9997
26 A-25 75% Helium / 25% Argon 234.306 0.5306 1.0002
27 A1025
90% Helium / 7.5% Argon /
2.5% CO2
214.840 0.3146 1.0003
28 Star29
90% Argon / 8% CO2
/ 2% Oxygen
218.817 1.6410 0.9992
29 P-5 95% Argon / 5% Methane 223.483 1.5850 0.9993
*in micropoise (1 Poise = gram / (cm) (sec)) ** Grams/Liter (NIST REFPROP 7 database)
Gas Viscosities, Densities and Compressibilities at 25 C
39
Gas
Number
Short
Form
Long Form
Viscosity*
0 deg C
14.696 psia
Density**
0 deg C
14.696 psia
Compressibility
0 deg C
14.696 psia
0 Air Air 172.588 1.2927 0.9994
1 Ar Argon 209.566 1.7840 0.9991
2 CH4 Methane 103.657 0.7175 0.9976
3 CO Carbon Monoxide 165.130 1.2505 0.9994
4 CO2 Carbon Dioxide 137.129 1.9768 0.9933
5 C2H6 Ethane 86.127 1.3551 0.9900
6 H2 Hydrogen 83.970 0.08988 1.0007
7 He Helium 186.945 0.17849 1.0005
8 N2 Nitrogen 166.371 1.2504 0.9995
9 N2O Nitrous Oxide 136.350 1.9778 0.9928
10 Ne Neon 293.825 0.8999 1.0005
11 O2 Oxygen 190.555 1.4290 0.9990
12 C3H8 Propane 74.687 2.0101 0.9787
13 n-C4H10 normal-Butane 67.691 2.7048 0.9587
14 C2H2 Acetylene 97.374 1.1728 0.9905
15 C2H4 Ethylene 94.690 1.2611 0.9925
16 i-C4H10 iso-Butane 68.759 2.6893 0.9627
17 Kr Krypton 232.175 3.7422 0.9991
18 Xe Xenon 212.085 5.8988 0.9931
19 SF6 Sulfur Hexafuoride 140.890 6.6154 0.9850
20 C-25 75% Argon / 25% CO2 190.579 1.8309 0.9982
21 C-10 90% Argon / 10% CO2 201.897 1.8027 0.9987
22 C-8 92% Argon / 8% CO2 203.423 1.7989 0.9988
23 C-2 98% Argon / 2% CO2 208.022 1.7877 0.9990
24 C-75 75% CO2 / 25% Argon 154.328 1.9270 0.9954
25 A-75 75% Argon / 25% Helium 214.808 1.3821 0.9995
26 A-25 75% Helium / 25% Argon 218.962 0.5794 1.0002
27 A1025
90% Helium / 7.5% Argon
/ 2.5% CO2
(Praxair - Helistar
A1025)
201.284 0.3434 1.0002
28 Star29
90% Argon / 8% CO2
/ 2% Oxygen
203.139 1.7918 0.9988
29 P-5 95% Argon / 5% Methane 207.633 1.7307 0.9990
*in micropoise (1 Poise = gram / (cm) (sec)) ** Grams/Liter (NIST REFPROP 7 database)
Gas Viscosities, Densities and Compressibilities at 0 C
40
TROUBLESHOOTING
Display does not come on or is weak.
Check power and ground connectons. Please reference the technical specifcatons
(pages 50 - 70) to assure you have the proper power for your model.
Flow reading is approximately fxed either near zero or near full scale
regardless of actual line fow.
Diferental pressure sensor may be damaged. A common cause of this problem
is instantaneous applicaton of high-pressure gas as from a snap actng solenoid
valve upstream of the meter. If you suspect that your pressure sensor is
damaged please discontnue use of the controller and contact Alicat.
Displayed mass fow, volumetric fow, pressure or temperature is fashing and
message MOV, VOV, POV or TOV is displayed:
Our fow meters and controllers display an error message (MOV = mass
overrange, VOV = volumetric overrange, POV = pressure overrange, TOV =
temperature overrange) when a measured parameter exceeds the range of the
sensors in the device. When any item fashes on the display, neither the fashing
parameter nor the mass fow measurement is accurate. Reducing the value of
the fashing parameter to within specifed limits will return the unit to normal
operaton and accuracy. If the unit does not return to normal contact Alicat.
Afer installaton, there is no fow.
Alicat MC controllers incorporate normally closed valves and require a set-point
to operate. Check that your set-point signal is present and supplied to the correct
pin and that the correct set-point source is selected under the SETPT SOURCE list
in the control set up display. Also check that the unit is properly grounded.
The fow lags below the set-point.
Be sure there is enough pressure available to make the desired fow rate. If
either the set-point signal line and/or the output signal line is relatvely long, it
may be necessary to provide heavier wires (especially ground wiring) to negate
voltage drops due to line wire length. An inappropriate PID tuning can also
cause this symptom if the D term is too large relatve to the P term. See pages
20 and 21 for more informaton on PID tuning.
Controller is slow to react to a set-point change or imparts an oscillaton to the fow.
An inappropriate PID tuning can cause these symptoms. Use at conditons
considerably diferent than those at which the device was originally set up
can necessitate a re-tuning of the PID loop. See pages 20 and 21 for more
informaton on PID tuning.
The output signal is lower than the reading at the display.
This can occur if the output signal is measured some distance from the meter,
as voltage drops in the wires increase with distance. Using heavier gauge wires,
especially in the ground wire, can reduce this efect.
41
Meter does not agree with another meter I have in line.
Volumetric meters are afected by pressure drops. Volumetric fow meters
should not be compared to mass fow meters. Mass fow meters can be
compared against one another provided there are no leaks between the two
meters and they are set to the same standard temperature and pressure. Both
meters must also be calibrated (or set) for the gas being measured. M Series
mass fow meters are normally set to Standard Temperature and Pressure
conditons of 25 C and 14.696 psia. Note: it is possible to special order meters
with a customer specifed set of standard conditons. The calibraton sheet
provided with each meter lists its standard conditons.
When performing this comparison it is best to use the smallest transiton
possible between the two devices. Using small transitons will minimize lag and
dead volume.
RS-232 / RS-485 Serial Communicatons is not responding.
Check that your meter is powered and connected properly. Be sure that the
port on the computer to which the meter is connected is actve. Confrm that
the port setngs are correct per the RS-232 instructons in this manual (Check
the RS-232 / RS-485 communicatons select screen for current meter readings).
Close Hyperterminal and reopen it. Reboot your PC. See pages 10, 11 and 30
for more informaton on RS-232 / RS-485 signals and communicatons.
Slower response than specifed.
MC-Series Controllers feature a programmable Geometric Running Average
(GRA). Depending on the full scale range of the meter, it may have the GRA
set to enhance the stability/readability of the display, which would result in
slower perceived response tme. Please see Pressure Averaging and Flow
Averaging on page 24.
Jumps to zero at low fow.
MC-Series Controllers feature a programmable zero deadband. The factory
setng is usually 0.5% of full scale. This can be adjusted between NONE and
3.2% of full scale. See page 24.
Discrepancies between old and new units.
Please see Standard Gas Data Tables explanaton on page 37.
42
Maintenance and Recalibraton
General: MC-Series Flow Controllers require minimal maintenance. They
have no moving parts. The single most important thing that afects the life
and accuracy of these devices is the quality of the gas being measured. The
controller is designed to measure CLEAN, DRY, NON-CORROSIVE gases.
Moisture, oil and other contaminants can afect the laminar fow elements.
We recommend the use of in-line sintered flters to prevent large partculates
from entering the measurement head of the instrument. Suggested maximum
partculate sizes are as follows:
5 microns for units with FS fow ranges of 0-1 sccm or less.
20 microns for units with FS fow ranges between 0-2 sccm and 0-1 slpm.
50 microns for units with FS fow ranges of 0-1 slpm or more.
Recalibraton: The recommended period for recalibraton is once every year. A
label located on the back of the controller lists the most recent calibraton date.
The controller should be returned to the factory for recalibraton within one
year from the listed date. Before calling to schedule a recalibraton, please note
the serial number on the back of the instrument. The Serial Number, Model
Number, and Date of Manufacture are also available on the Model Info display
(page 26).
Cleaning: MC-Series Flow Controllers require no periodic cleaning. If necessary,
the outside of the controller can be cleaned with a sof dry cloth. Avoid excess
moisture or solvents.
For repair, recalibraton or recycling of this product contact:
Alicat Scientfc, Inc.
7641 N Business Park Drive
Tucson, Arizona 85743
USA
Ph. 520-290-6060
Fax 520-290-0109
e-mail: [email protected]
Web site: www.alicat.com
43
Opton: Totalizing Mode - Controllers
Controllers can be purchased with the Totalizing Mode opton. This opton adds
an additonal mode screen that displays the total fow (normally in the units of
the main fow screen) that has passed through the device since the last tme the
totalizer was cleared. The Totalizing Mode screen is accessed by pushing the
TOTAL buton on the MAIN display.
TOTAL/TIMER: Pushing the TOTAL/TIMER buton
will cycle the large numbers on the display
between total mass and tme elapsed.
Rollover The customer can also specify at the
tme of order what the totalizer is to do when
the maximum count is reached. The following
optons may be specifed:
No Rollover When the counter reaches the
maximum count it stops countng untl the
counter is cleared.
Rollover When the counter reaches the
maximum count it automatcally rolls over to
zero and contnues countng untl the counter is cleared.
Rollover with Notfcaton When the counter reaches the maximum count
it automatcally rolls over to zero, displays an overfow error, and contnues
countng untl the counter is cleared.
TOTAL MASS: The counter can have as many as seven digits. At the tme of order,
the customer must specify the range. This directly afects the maximum count. For
instance, if a range of 1/100ths of a liter is specifed on a meter which is totalizing in
liters, the maximum count would be 99999.99 liters. If the same unit were specifed
with a 1 liter range, the maximum count would be 9999999 liters.
ELAPSED TIME: The small numbers below the mass total show the elapsed tme
since the last reset in hours, minutes and seconds. The maximum measurable
elapsed tme is 9999 hours 59 minutes 59 seconds. The hours count resets when
RESET is pushed, an RS-232 or RS-485 clear is executed or on loss of power. Press
ELAPSED TIME to show this as the primary display.
SETPT: Pushing SETPT will allow you to change the controller's set-point.
RESET The counter can be reset to zero at any tme by pushing the RESET
buton. To clear the counter via RS-232 or RS-485, establish serial communicaton
with the meter or controller as described in the RS-232 or RS-485 secton of the
manual. To reset the counter, enter the following commands:
In Polling (addressable) Mode: Address$$T <Enter> (e.g. B$$T <Enter>)
SETPT
+123.4
MENU
SCCM
+123.4
TOTAL/
TIMER
BATCH RESET
0000:09:59 SCC
00123.45
00123.45 Batch Done
W ,

( + 28%) . T
.
I ,
. P - .
44
BATCH PROCESSING MODE CONTROLLERS ONLY
Batch mode is a functon within the optonal Totalizing mode. Batch mode is
designed to provide repeatable, fnite fow quanttes.
To actvate Batch Mode: Press BATCH. Then use
SELECT DIGIT to move the arrow to the desired digit,
and the UP and DOWN butons to change the value.
Press CLEAR to return to zero. Press SET to record
your value. If the controller has a non-zero Set-Point,
fow will start immediately. If not, press SETPT to
select a Set-Point.
Batch values can also be established via RS-232/RS-485
communicaton using Register 92. (See RS-232/RS-485
Secton of this manual for serial communicaton methods.)
Note: While the Totalizer counter will stll reset across
power cycles, the Batch process value is stored in EEPROM and will remain valid
untl updated by the user.
While the Batch is processing, the desired Batch value is displayed above the
totalizing counter on the Totalizer screen. Time elapsed during the Batch
processing is displayed below the totalizing counter. Press TOTAL/TIMER to
toggle these values.
When the actve Totalizer reaches the preset Batch value, fow ceases, and the
display updates to Batch Done. The Totalizer tmer also pauses.
- To start a new batch of the same size, simply press
RESET. The Totalizer can reproduce any number of
fxed Batches in this manner.
- To start a smaller batch, decrease the Batch value.
The new batch begins when you press RESET.
- To contnue the existng batch to a larger total
volume, increase the Batch value. Flow resumes as
soon as you press OK in the Batch Value screen.
- To start a larger batch from scratch, frst clear the
fow Set-Point to zero to prevent unwanted fow.
Then increase the Batch value, and select a fow Set-Point. Flow will begin when
you press SET in the Set-Point screen.
- To cancel a batch in progress, clear the Set-Point and press SET.
Note: Batch mode operates independently of the desired fow rate, but requires
a non-zero fow rate to run. The rate of fow is determined by the controller
Set-Point value, which is established by the user via analog, front panel or serial
communicaton methods. Batches can be produced more slowly or more rapidly
as determined by the user-selected Set-Point fow rate.
To turn of Batch Mode: Set the Batch value to zero (0.0) via the front panel or
RS-232/RS-485 communicaton using Register 92. If there is a non-zero fow Set-
Point, fow will immediately resume, and the Totalizer counter will contnue per
the user established Set-Point fow rate.
DOWN
SET
SELECT
DIGIT
UP
BACK/
CANCEL CLEAR
00123.45
SETPT
123.4
MENU
SCCM
+123.4
TOTAL/
TIMER
BATCH RESET
0000:09:59 SCC
00123.45 Batch Done
00123.45
45
Opton: Remote Electronics for High Line or Gas Temperatures
Some applicatons involve operatng
temperatures outside the standard Alicat
device specifcatons. A soluton using
remote electronics is available. (This opton is
not applicable for liquid devices.)
The fow bodys components are minimized
to only the required sensors. The fow data is
sent to the microprocessor electronics up to
6 feet away from the sensor package.
Relocatng the sensitve electronics allows
for installaton of the fow body in ambient
temperatures as high as 85 Celsius with gas temperatures under 100Celsius.
In these applicatons we recommend our custom gauge calibraton at a
gas temperature of up to 70Celsius. This will reduce zero shif errors that
occur when actual gas fow temperatures deviate substantally from the gas
calibraton temperature.
This confguraton is also used in integratons that require a compact fow
package at the installaton point.
Opton: Remote Panel Display
Our Remote Display opton ofers the fexibility of using
Alicats display with units that are embedded inside
processes or instrument enclosures.
The Remote Display retains all of the same features as our
standard display.
The Remote Display is ideal for:
OEMs Remote Panel Mountng Embedded Systems
Gas Panels Fuel Cell Test Statons
Leak Detecton Systems Artfcial Environments
46
Accessory: BB9 Mult-Drop Box
The BB9 Mult-Drop Box makes it convenient to wire
multple fow and/or pressure devices to a single RS-232 or
RS-485 port. Now available with a USB interface!
The Mult-Drop Box has nine 8 pin mini-DIN ports available.
The ports are to be used with a standard double ended 8 pin
mini-DIN (DC-62) style cable going from the box to each fow
or pressure device.
A single DB9 D-SUB type connector (COM PORT) connects, using the included
cable, to the serial connector on a PC or laptop.
All of the fow and/or pressure devices are powered via a terminal block on the
front of the box.
If more than nine devices will be required, additonal Mult-Drop Boxes can be
daisy chained together with a double ended 8 pin mini-DIN cable plugged into
any receptacle on both boxes.
BB9 Power Supply for Large Valve Controllers: The PS24VHC (Power Supply
24Vdc High Current) is a 6.5Amp 24Vdc power supply designed for running
multple large controllers on a BB9.
The 6.5Amp power supply can run as many as 8 large valve controllers, which
makes it ideal for the BB9 and multple large valve (or small valve / large valve
combinaton) controllers on a BB9.
BB-9 Multi-Drop
Box
.156 Thru 4 Places
1.75
.340 Thru 2 PL
3.46
6.75
1.55
5.06
BB9 Multi-Drop Box
.156 Thru 4 Places
1.75
.340 Thru 2 PL
.175 Thru 2 PL
3.46
6.75
1.55
5.06
6.75
7.56
47
Accessory: Flow Vision SC Sofware
Flow Vision SC is an intuitve sofware interface to help your test
cycles run smoother and shorten your engineering tme!
Flow Vision SC lets you connect to and communicate with multple Alicat
units simultaneously. Now you can view virtual displays, control tabs, charts
and data lines from every connected Alicat device on the same screen.
Flow Vision SC supports all RS-232 and RS-485 Serial communicaton
functons, including: gas selecton, tareing, set-point control, valve tuning
and fow averaging.
Session Saving: Save and reload your confguraton data with confdence.
Script Building: Create scripts to adjust a controllers set-point value at
variable specifed tme intervals.
Chartng: Chart as many parameters as you want of as many devices as you
want, with color coding, zooming, and printng functonality.
Alarms: Create sofware alarms that will notfy you of given parameter conditons.
Data Capture & Logging: Capture and log data to either a .csv fle or a .txt fle.
Improved Data Logging and Data Log File Splitng for easy to manage data.
Accessory: Flow Vision MX Sofware
Alicats New Flow Vision MX sofware gives you an easy way to do
GAS BLENDING using Alicat Mass Flow Controllers and your own PC.
Flow Vision MX sofware is a simple way to connect up to six Alicat
mass fow controllers and create your own gas mix concentratons.
Using our inexpensive BB9-USB and a single USB connecton you can:
Create your own gas blends
Adjust fow rates
Save your specifc blend formulas.
All the controllers can be powered through the BB9-USB with a single
power supply.
Just connect your unique gases to each controller, select the gas type either
locally on the controller or through Flow Vision MX, manifold the fow
outputs and create your gas mix.
48
Accessories
Part Number Descripton
FLOWVISIONSC Flow Vision SC sofware for interface with all Alicat instruments
FLOWVISIONMX Flow Vision MX sofware for gas blending
BB9 9 positon Mult-Drop Box
BB9-I 9 positon Mult-Drop Box, Industrial connectors
PVPS24U Universal 100-240 VAC to 24 Volt DC Power Supply Adapter
PS24VHC High current power supply for BB9 use with Large Valve Controllers
PCASE Industrial carry and storage case for portable meters/gauges
DC-61 8 Pin Male Mini-DIN connector cable, single ended, 6 foot length
DC-6RT 8 Pin Male Right Angle Mini-Din Cable, single ended, 6 foot length
DC-62 8 Pin Male Mini-DIN connector cable, double ended, 6 foot length
MD8DB9 8 Pin Male Mini-DIN to DB9 Female Adapter, 6 foot length
DBC-251 DB15 cable, single ended, 25 foot length
510199 DB9 cable, double-ended female, 3 meter length
IC10 Industrial cable, 6 Pin, single ended, 10 foot length
IC10-18G 18 gauge industrial cable, 6 Pin, single ended, 10 foot length
IC24-18G 18 gauge industrial cable, 6 Pin, single ended, 24 foot length
IC-102 Industrial cable, 6 pin double ended, 10 foot length
USB-RS232 RS-232 to USB Converter
49
MNPT to Compression Fitngs
10-32 - 1/8 SS-200-1-0157
10-32 - 1/4 SS-400-1-0256
1/8 - 1/8 SS-200-1-2
1/8 - 1/4 SS-400-1-2
1/8 - 3/8 SS-600-1-2
1/8 - 1/2 SS-810-1-2
1/8 - 3mm SS-3M0-1-2
1/8 - 4mm SS-4M0-1-2
1/8 - 6mm SS-6M0-1-2
1/8 - 8mm SS-8M0-1-2
1/8 - 12mm SS-12M0-1-2
1/4 - 1/8 SS-200-1-4
1/4 - 1/4 SS-400-1-4
1/4 - 3/8 SS-600-1-4
1/4 - 1/2 SS-810-1-4
1/4 - 3mm SS-3M0-1-4
1/4 - 4mm SS-4M0-1-4
1/4 - 6mm SS-6M0-1-4
1/4 - 8mm SS-8M0-1-4
1/4 - 12mm SS-12M0-1-4
1/2 - 1/8 SS-200-1-8
1/2 - 1/4 SS-400-1-8
1/2 - 3/8 SS-600-1-8
1/2 - 1/2 SS-810-1-8
1/2 - 3/4 SS-1210-1-8
1/2 - 6mm SS-6M0-1-8
1/2 - 8mm SS-8M0-1-8
1/2 - 12mm SS-12M0-1-8
1/2 - 16mm SS-16M0-1-8
3/4 - 1/4 SS-400-1-12
3/4 - 1/2 SS-810-1-12
3/4 - 3/4 SS-1210-1-12
3/4 - 12mm SS-12M0-1-12
3/4 - 16mm SS-16M0-1-12
Filters & Elements FNPT-MNPT
10-32 5 510053
10-32 20 510054
1/8 20 ILF-1/8-20
1/4 40 ILF-1/4-40
1/2 40 ILF-1/2-40*
3/4 40 ILF-3/4-40*
20 element ILFE20
40 element ILFE40
40 element ILFE40L*
Filters & Elements FNPT-FNPT*
10-32 5 CF-303-20-316
*requires MNPT to MNPT coupler to
interface with Alicat fow bodies
10-32 Male UNF to 1/8 FNPT Adapter
410133
Male M5 (10-32) Buna-N O-ring face seal
to 1/8Female NPT
Accessories
50
Technical Data for Alicat MC and MCR Mass Flow Controllers
0 to 0.5 sccm Full Scale through 0 to 3000 slpm Full Scale
Standard Operating Specifcations (Contact Alicat for available options)
Performance MC & MCR Mass Flow Controller
Accuracy at calibration
conditions after tare
(0.8% of Reading + 0.2% of Full Scale)
High Accuracy at calibration
High Accuracy option not available for units ranged under 5 sccm or over 500 slpm.
Repeatability 0.2% Full Scale
Zero Shift and Span Shift 0.02% Full Scale / Celsius / Atm
Operating Range / Turndown
Ratio
0.5% to 100% Full Scale / 200:1 Turndown
Maximum Controllable Flow
Rate
102.4% Full Scale
Typical Response Time 100 ms (Adjustable)
Warm-up Time < 1 Second
Communications / Power MC & MCR Mass Flow Controller
Monochrome LCD or Color TFT
Display with integrated touchpad
Simultaneously displays Mass Flow, Volumetric Flow, Pressure and Temperature
Digital Input/Output Signal
1
Options RS-232 Serial / RS-485 Serial / PROFIBUS
3

Analog Input/Output Signal
2
Options 0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Optional Secondary Analog
Input/Output Signal
2
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Electrical Connection Options 8 Pin Mini-DIN / 9-pin D-sub (DB9) / 15-pin D-sub (DB15) / 6 pin locking
Supply Voltage MC: 12 to 30 Vdc (15-30 Vdc for 4-20 mA outputs) MCR: 24 to 30 Vdc
Supply Current MC: 0.250 Amp MCR: 0.750 Amp
1. The Digital Output Signal communicates Mass Flow, Volumetric Flow, Pressure and Temperature
2. The Analog Output Signal and Optional Secondary Analog Output Signal communicate your choice of Mass
Flow, Volumetric Flow, Pressure or Temperature
3. If selecting PROFIBUS, no analog signal is available. PROFIBUS units do not have the display. See PROFIBUS
specifcations for PROFIBUS supply voltages and currents. (www.alicat.com/profbus)
Operating Conditions MC & MCR Mass Flow Controller
Mass Reference Conditions (STP) 25C & 14.696 psia (standard others available on request)
Operating Temperature 10 to +50 Celsius
Humidity Range
(NonCondensing)
0 to 100%
Maximum Pressure 145 psig
Mounting Attitude Sensitivity MC: None MCR: Mount with valve cylinder vertical & upright
Valve Type Normally Closed
Ingress Protection IP40
Wetted Materials
MC: 303 & 302 Stainless Steel, Viton, Silicone RTV (Rubber), Glass Reinforced
Nylon, Aluminum, Brass, 430FR Stainless Steel, Silicon, Glass.
MCR: 303 & 302 Stainless Steel, Viton, Silicone RTV (Rubber), Glass Reinforced
Nylon, Aluminum, 416 Stainless Steel, Nickel, Silicon, Glass.
If your application demands a different material, please contact Alicat.
Range Specifc Specifcations
Full Scale Flow Mass
Controller
Pressure Drop
1
at FS Flow

(psid) venting to atmosphere
Mechanical
Dimensions
Process Connections
2
MC 0.5 sccm to 50 sccm 1.0 3.9H x 3.4W x 1.1D M-5 (10-32) Female Thread
3

MC 100 sccm to 500 sccm 1.0
4.1H x 3.6W x 1.1D 1/8 NPT Female
MC 1 slpm 1.5
MC 2 slpm 3.0
MC 5 slpm 2.0
MC 10 slpm 5.5
MC 20 slpm 20.0
MCR 50 slpm 2.0
MCR 100 slpm 3.2
MCR 250 slpm 2.4 5.5H x 7.7W x 2.3D 1/2 NPT Female
MCR 500 slpm 6.5
5.5H x 7.4W x 2.3D
3/4 NPT Female
(A 1-1/4 NPT Female process
connection is available for
2000 slpm controllers.)
MCR 1000 slpm 14.0
MCR 1500 slpm 17.0
MCR 2000 slpm 28.6 5.5H x 8.1 W x 2.9 D
MCR 3000 slpm 16.8 5.5H x 8.9 W x 2.9 D 1-1/4 NPT Female
1. Lower Pressure Drops Available, please see our WHISPER-Series mass fow controllers at www.alicat.com/whisper.
2. Compatible with Beswick, Swagelok tube, Parker, face seal, push connect and compression adapter fttings. VCR and
SAE connections upon request.
3. Shipped with M-5 (10-32) Male Buna-N O-ring face seal to 1/8 Female NPT fttings.
51
1.050
--
- H M5X0.8
8CIH SlDES
.33
.525
.25
.125
2.225
.150
8-32 UNC .175
3.87
3.338
.33
.525
MC-Series:
0 - 100 sccm
0 - 200 sccm
0 - 500 sccm
0 - 1 slpm
0 - 2 slpm
0 - 3 slpm
0 - 5 slpm
0 - 10 slpm
0 - 20 slpm
MC-Series:
0 - 0.5 sccm
0 - 1 sccm
0 - 2 sccm
0 - 5 sccm
0 - 10 sccm
0 - 20 sccm
0 - 50 sccm
MC-20SLFM-D-MSFEC
.525
.350
8cIh Sice:
1/8 NFI
--
.25
2.225
.125 .150
2X 8-32 UNC .350
.525
.350
3.588
4.07
1.050
0.5 sccm to 50 sccm approximate shipping weight: 1.1 lb.
100 sccm to 20 slpm approximate weight: 1.2lb
52
2.250 1.00
5.45
.20
7.50
.375
4X 8-32 UNC
.175
.375 .375
.200
2.700
1.875
4X 8-32 UNC
3.250
.750
1.425
1.325 FEF
.800
.500
1.125
1.120
8cIh Sice:
1/4 NFI
MCk-100SLFM-D-MSFEC
J14J11
FEV.
0
D/IE
MCR-Series:
0 - 50 slpm
0 - 100 slpm
1/2
8CIH SlDES
NFI
1.120
1.125
.800
.800
1.00 2.250
5.45
.320
7.50
12J22J11
D/IE
MCk-250SLFM-D-MSFEC 1
FEV.
3.075
.575
3.250
.750
.375 4X 8-32 UNC 4X 8-32 UNC
1.325
.328
.175
FEF
1.425
.375
1.875
MCR-Series:
0 - 250 slpm
MCR 50 slpm to 100 slpm approximate weight: 9.0 lb.
MCR 250 slpm approximate weight: 9.0 lb.
53
8-32 UNC X
.375
4
3.250
.750
1.425
1.875
.200
.175
2.700
.328
.375
4X 8-32 UNC
1.325 FEF
1.125
1.120
8cIh Sice:
3/4 NFI
.800
.800
2.250
1.00
5.45
.320
7.275
MCk-500-SLFMD-MSFEC
MCR-Series:
0 - 500 slpm
0 - 1000 slpm
0 - 1500 slpm
3/4
8CIH SlDES
NFI
1.120
1.450
1.120
1.125
5.45
8.100
2.00 2.250
MCk-2000SLFM-D-MSFEC
--
4.250
4 8-32 UNC X
1.875
.200 2.700
.200

.750
2.700
.375
.330 4X 8-32 UNC .328
MCR-Series:
0 - 2000 slpm
54
5.45
8.00
.328 .330
1.550 FEF
3.850
1.350
4X 8-32 UNC
.375
1.875
3.500
.200
2.700
4X 8-32 UNC
1.000
2.00 2.250
MCk-3000SLFM-D-MSFEC 0
1-27-12
D/IE
FEV.
.0
1.125
8cIh Sice:
1.450
1-1/4 NFI
.0
MCR-Series:
0 - 3000 slpm
55
Technical Data for Whisper Low Pressure Drop Mass Flow Controllers
Performance Whisper MCW & MCRW Mass Flow Controller
Accuracy at calibration
High Accuracy at calibration
High Accuracy option not available for units ranged under 5 sccm or over 500 slpm.
Operating Range / Turndown Ratio 0.5% to 100% Full Scale / 200:1 Turndown
Maximum Controllable Flow Rate 102.4% Full Scale
Standard Specifcations (Contact Alicat for available options.)
Communications / Power Whisper MCW & MCRW Mass Flow Controller
1
3

2
Options
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Input/Output Signal
2
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Supply Voltage MCW: 12 to 30 Vdc (15-30 Vdc for 4-20 mA outputs) MCRW: 24 to 30 Vdc
Supply Current MCW: 0.250 Amp MCRW: 0.750 Amp
Operating Conditions Whisper MCW & MCRW Mass Flow Controller
Humidity Range
(NonCondensing)
0 to 100%
Maximum Pressure 50 psig Higher line pressures available, please contact Alicat.
Mounting Attitude Sensitivity MCW: None MCRW: Mount with valve cylinder vertical & upright
Wetted Materials
MCW: 303 & 302 Stainless Steel, Viton, Silicone RTV (Rubber), Glass Reinforced
MCRW: 303 & 302 Stainless Steel, Viton, Silicone RTV (Rubber), Glass Reinforced
Controller
Pressure Drop at FS Flow
Mechanical
Dimensions
Process Connections
1
MCW 0.5 sccm to 2 sccm 0.06
3.9H x 3.4W x 1.1D
M-5 (10-32) Female
Thread
2
MCW 5 sccm to 10 sccm 0.08
MCW 20 sccm 0.07
MCW 50 sccm to 200 sccm 0.07
MCW 500 sccm 0.08
MCW 1 slpm 0.10
MCW 2 slpm 0.18
MCRW 5 slpm 0.10
5.5H x 7.7W x 2.3D 1/4 NPT Female MCRW 10 slpm 0.12
MCRW 20 slpm 0.26
MCRW 40 slpm 0.14 5.5H x 7.7W x 2.3D 1/2 NPT Female
MCRW 50 slpm 0.17
5.5H x 7.3W x 2.3D 3/4 NPT Female MCRW 100 slpm 0.30
MCRW 250 slpm 0.69
MCRW 500 slpm 0.69 5.5H x 8.1W x 2.7D 3/4 NPT Female
56
WHISPER MCW:
0 - 0.5 sccm
0 - 1 sccm
0 - 2 sccm
0 - 5 sccm
0 - 10 sccm
0 - 20 sccm
MCW 0.5 sccm to 20 sccm approximate shipping weight: 1.1 lb.
WHISPER MCW:
0 - 50 sccm
0 - 100 sccm
0 - 200 sccm
0 - 500 sccm
0 - 1 slpm
0 - 2 slpm
1.050
{10-32 UNF)
8CIH SlDES
M5X0.8
.33
.525
3.87
3.338
D/IE
0 MCW-20SCCM-D-MSFEC
4J18J13
FEV.
.33
.525
.125
2.225
.25
.150
8-32 UNC .175
1.050
3.588
4.07
D/IE
0 MCW-2SLFM-D-MSFEC
4J18J13
FEV.
.525
.350
8cIh Sice:
1/8 NFI
.25
2.225
.125 .150
2X 8-32 UNC .350
.525
.350
MCW 50 sccm to 2 slpm approximate weight: 1.2lb
57
5.45
.20
7.50
4X 8-32 UNC .375
.175
.375 4X 8-32 UNC
2.700
.200
3.250
.375
.750
1.425 1.875
1.325 FEF
.800
.500
1.125
1.120
8cIh Sice:
1/4 NFI
2.250 1.00
4J18J13
FEV.
0 MCkW-20SLFM-D-MSFEC
D/IE
WHISPER MCRW:
0 - 5 slpm
0 - 10 slpm
0 - 20 slpm
MCRW 5 slpm to 20 slpm approximate weight: 6.4 lb.
MCRW 40 slpm approximate weight: 9.0 lb.
5.45
.320
7.50
D/IE
MCkW-40SLFM-D-MSFEC 1
4J22J13
FEV.
.800
.800
1.00 2.250
.328 4X 8-32 UNC 4X 8-32 UNC .375
3.075
.575
3.250
1.425
.750
.175
.375
1.875
1.120
1.125
1/2 NFI
8cIh Sice:
WHISPER MCRW:
0 - 40 slpm
58
.375
3.250
.750
1.425
.175
1.875
.200
2.700
.375
8-32 UNC X .328 4
4X 8-32 UNC
1.325 FEF
.800
.800
1.125
1.120
8cIh Sice:
3/4 NFI
2.250
1.00
5.45
.320
7.275
D/IE
J20J13
FEV.
MCRW 50 slpm to 250 slpm approximate weight: 9.0 lb.
8CIH SlDES
NFI 3/4
1.120
1.450
1.120
1.125
5.45
8.100
D/IE
-1-10
FEV.
2.00 2.250
4.250
2.700
.200 .375
.750
.200
1.875 2.700
X 8-32 UNC 4 .330 4X 8-32 UNC .328
MCRW 500 slpm approximate weight: 11.0 lb.
WHISPER MCRW:
0 - 500 slpm
WHISPER MCRW:
0 - 50 slpm
0 - 100 slpm
0 - 250 slpm
59
Technical Data for MCV & MCVS Mass Flow Controllers
The Alicat MCV mass flow controller is designed for applications that require tight shut-off such as vacuum
coating and sputtering processes. An integrated pneumatic shut-off valve is normally closed and provides
positive shut-off of 1 x 10
-9
atm scc/sec Helium max.
MCVS controllers are for use with aggressive gases.
Performance MCV Mass Flow Controller MCVS Mass Flow Controller
Accuracy at calibration conditions
after tare
High Accuracy at calibration conditions
after tare
High Accuracy option not available for units ranged under 5 sccm.
Operating Range / Turndown Ratio 0.5% to 100% Full Scale / 200:1 Turndown 1% to 100% Full Scale / 100:1 Turndown
Integrated Valve Leak Integrity 1 x 10
-9
atm scc/sec Helium max
Standard Specifcations (Contact Alicat for available options.)
Operating Conditions MCV Mass Flow Controller MCVS Mass Flow Controller
Humidity Range (NonCondensing) 0 to 100%
Mounting Attitude Sensitivity None
Wetted Materials
MCV: 316L,303 & 302 Stainless Steel, Viton, Silicone RTV (Rubber), Glass Reinforced
Nylon, Aluminum, Brass, 430FR Stainless Steel, Silicon, Glass, PCTFE.
MCVS: 316LSS, 303SS, 430FRSS, FFKM (Kalrez) standard, Viton, EPDM, Buna, Neo-
prene as needed for some gases.
Communications / Power Whisper MCV & MCVS Mass Flow Controller
1
3

2
Options
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Input/Output Signal
2
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Supply Voltage 12 to 30 Vdc (15-30 Vdc for 4-20 mA outputs)
Supply Current 0.250 Amp
Full Scale Mass Flow Controller Mechanical Dimensions Process Connections
MCV 0.5SCCM to 20SLPM 4.8H x 6.8W x 1.5D 1/4 VCR Male
MCVS 0.5SCCM to 20SLPM 5.5H x 6.8W x 1.5D 1/4 VCR Male
Welded VCR process connections are recommended for MCV and MCVS applications. Please contact Alicat.
60
.721
.330
.188
4.755
--
MCV-0.5SCCM-D-MSFEC
1.125 IHFU .240
5.580
4X
.375
1.500
.28
.750
.28
.750
MCV-Series
All ranges
MCV approximate weight: 3.0 lb.
MCSV-0.5SCCM-D-MSFEC
1.125 IHFU .240
5.580
4X
.375
.330
.721
.188
5.455
.28
.750
1.500
.28
.750
MCVS-Series
All ranges
MCVS approximate weight: 3.2 lb.
61
Technical Data for MCP Moderate Flow Mass Flow Controllers
0 to 50 slpm Full Scale through 0 to 250 slpm Full Scale
Alicat MCP mass fow controllers are ftted with a high performance valve for low pressure applications.
The following specifcations are applicable to Alicat MCP-Series Mass Flow Controllers only.
Please Note Maximum Pressure of 80 psig.
Performance MCP Mass Flow Controller
Accuracy at calibration conditions
after tare
High Accuracy at calibration conditions
after tare
Communications / Power MCP Mass Flow Controller
1
3

2
Options
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Input/Output Signal
2
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Supply Voltage 12 to 30 Vdc (15-30 Vdc for 4-20 mA outputs)
Supply Current 0.250 Amp
Operating Conditions MCP Mass Flow Controller
Humidity Range
(NonCondensing)
0 to 100%
Mounting Attitude Sensitivity None
Wetted Materials
303 & 302 Stainless Steel, Viton, Silicone RTV (Rubber), Glass Reinforced Nylon,
Aluminum, Brass, 410 &416 Stainless Steel.
Controller
Pressure Drop
1
at FS Flow

Mechanical
Dimensions
Process Connections
2
MCP 50 slpm 7
MCP 100 slpm 20
MCP 250 slpm 60 5.0H x 6.3W x 1.6D 1/2 NPT Female
62
4.7
.283
.175
1.425
1.125
.531
8-32 UNC .375
4X .13
3.25
.800
.500
8cIh Sice:
1/4 NFI
.800
.800
1.00
D/IE
1 MCF-250SLFM-D-MSFEC
2J7J12
FEV.
.175
3.250
.750
1.425
4X 8-32 UNC .375
1.00
MCF-50SLFM-D-MSFEC
1/4 NFI
8cIh :ice:
.800
.500 .500
.800
--
4.37
5.408
MCP-Series:
50 slpm
100 slpm
MCP-Series:
250 slpm
10 slpm to 50 slpm approximate shipping weight: 3.0 lb.
100 slpm to 250 slpm approximate shipping weight: 4.4 lb.
63
Technical Data for Alicat MCD and MCRD Dual Valve Mass Flow Controllers
Performance MCD Mass Flow Controller MCRD Mass Flow Controller
Accuracy for Bidirectional Controllers
at calibration conditions after tare
(0.8% of reading + 0.2% of total span from positive full scale to negative full scale)
Communications / Power MCD Mass Flow Controller MCRD Mass Flow Controller
1
3

2
Options 0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Input/Output Signal
2
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Supply Voltage 12 to 30 Vdc (15-30 Vdc for 4-20 mA outputs) 24 to 30 Vdc
Supply Current 0.250 Amp 0.750 Amp
Operating Conditions MCD Mass Flow Controller MCRD Mass Flow Controller
Humidity Range
(NonCondensing)
0 to 100%
Mounting Attitude Sensitivity None Mount with valve cylinder vertical & upright
Wetted Materials
MCD: 303 & 302 Stainless Steel, Viton, Silicone RTV (Rubber), Glass Reinforced
MCRD: 303 & 302 Stainless Steel, Viton, Silicone RTV (Rubber), Glass Reinforced
Controller
Pressure Drop
1
at FS Flow

Mechanical
Dimensions
Process Connections
2
MCD 0.5 sccm to 50 sccm 1.0
Dimensions will vary
with valve choice.
M-5 (10-32) Female Thread
3

MCD 100 sccm to 500 sccm 1.0
1/8 NPT Female
MCD 1 slpm 1.5
MCD 2 slpm 3.0
MCD 5 slpm 2.0
MCD 10 slpm 5.5
MCD 20 slpm 20.0
MCRD 50 slpm 2.0
1/4 NPT Female
MCRD 100 slpm 3.2
MCRD 250 slpm 2.4 1/2 NPT Female
MCRD 500 slpm 6.5
3/4 NPT Female
(A 1-1/4 NPT Female process
connection is available for
2000 slpm controllers.)
MCRD 1000 slpm 14.0
MCRD 1500 slpm 17.0
MCRD 2000 slpm 28.6
MCRD 3000 slpm 16.8 1-1/4 NPT Female
64
MCD-Series
0 - 20 slpm shown
2.43
.525
.350
8cIh Sice:
1/8 NFI
.525
.350
1.050
2.225
.25
.125
.150
2X 8-32 UNC .350
D/IE
0 MCD-2SLFM-D-MSFEC
11J13J13
FEV.
.525
1.050
.350
1/8 NFI
4.38
4.07
MCkD-2000SLFM-D
8.00
5.45
2.575
.550
4.075
1.450
1.120
3/4 NFI
1.120
1.125
3/4 NFI
.375
3.850
1.350
.375
1.875
.200
.200
.200
1.875
2.700
2.700
2.700
4X .13 .420
8-32 UNC .330
MCRD-Series
0 - 2000 slpm shown
65
Technical Data for Alicat MCS and MCRS-Series Mass Flow Controllers
Alicat MCS and MCRS instruments are built for use with aggressive gases. For
the most part, these instruments maintain the specifcatons of equivalently
ranged MC and MCR-Series devices.
Please refer to Alicats Technical Data and Specifcatons for the equivalently
ranged MC and MCR-Series instrument for all operatng specifcatons except:
Operatng Range 1% to 100% Full Scale
Turndown Rato 100 : 1
Weted Materials
316LSS, 303SS, 430FRSS, FFKM (Kalrez) standard,
Viton, EPDM as needed for some gases.
The dimensions of MCS and MCRS instruments may vary from their standard
MC and MCR-Series counterparts. Dimensional drawings for MCS and MCRS
instruments are shown on pages 66 -69
Standard Compatble Gas List for MCS and MCRS Controllers
0 Air Air
1 Argon Ar
2 Methane CH4
3 Carbon Monoxide CO
4 Carbon Dioxide CO2
5 Ethane C2H6
6 Hydrogen H2
7 Helium He
8 Nitrogen N2
9 Nitrous Oxide N2O
10 Neon Ne
11 Oxygen O2
12 Propane C3H8
13 normal-Butane n-C4H10
14 Acetylene C2H2
15 Ethylene C2H4
16 iso-Butane i-C4H10
17 Krypton Kr
18 Xenon Xe
19 Sulfur Hexafuoride SF6
20 75%Ar / 25% CO2 C-25
21 90% Ar / 10% CO2 C-10
22 92% Ar / 8% CO2 C-8
23 98% Ar / 2% CO2 C-2
24 75% CO2 / 25% Ar C-75
25 75% Ar / 25% He A-75
26 75% He / 25% Ar A-25
27
90% He / 7.5% Ar /
2.5% CO2
Helistar A1025
A1025
28
90% Ar / 8% CO2 /
2% O2
Stargon CS
Star29
29 95% Ar / 5% CH4 P-5
30 Nitric Oxide NO
31 Nitrogen Trifouride NF3
32 Ammonia NH3
34 Hydrogen Sulfde H2S
36 Propylene C3H6
In additon, the following gases are
available upon request:
Nitrogen Dioxide to 0.5%
in an inert carrier
NO2
Refrigerant gases to 100%
Other gases to 1000 ppm in an inert
carrier
If your applicaton requires another gas or gas mixture, please contact
[email protected] or call 888-290-6060.
66
MCS-Series:
0 0.5 sccm
0 1 sccm
0 2 sccm
0 5 sccm
0 10 sccm
0 20 sccm
0 50 sccm
MCS-Series:
0 100 sccm
0 200 sccm
0 500 sccm
0 1 slpm
0 2 slpm
0 5 slpm
0 10 slpm
0 20 slpm
0.5 sccm to 50 sccm approximate shipping weight: 1.1 lb.
100 sccm to 20 slpm approximate weight: 1.2 lb
67
5.87 5.45
7.275
.20
7.50
1.425
.375 4X 8-32 UNC
.200
2.700
1.875
.375
3.250
.750 .175
4X 8-32 UNC .375
.800
.500
1.125
1.120
8cIh Sice:
1/4 NFI
J14J11
1
FEV.
D/IE
MCkS-100SLFM-D-MSFEC
2.250 1.00
MCRS-Series:
0 50 slpm
0 100 slpm
MCRS 50 slpm to 100 slpm approximate weight: 9.0 lb.
1.425
3.250
4X 8-32 UNC .328
1.875
1.00
4X 8-32 UNC .375
.175
.750
.575
.375
3.075
1.00
2.250
1
FEV.
D/IE
12J22J11
MCkS-250SLFM-D-MSFEC
5.87
5.45
.320
7.50
8cIh Sice:
NFI 1/2
1.120
1.125
.800
.800
MCRS-Series:
0 250 slpm
MCRS 250 slpm approximate weight: 9.0 lb.
68
MCRS-Series:
0 500 slpm
0 1000 slpm
0 1500 slpm
MCRS-Series:
0 2000 slpm
MCRS 500 slpm to 1500 slpm approximate weight: 9.0 lb.
69
8.00
5.87
2-27-12
D/IE
MCkS-3000SLFM-D-MSFEC 0
FEV.
.0
1.125
1-1/4 NFI
1.450
8cIh Sice:
.0
2.00 2.250
1.550 FEF
3.500
2.700
.375
3.850
.330
.200
1.875
4X 8-32 UNC .328
1.350
4X 8-32 UNC
1.000
MCRS-Series:
0 3000 slpm
70
Specifcation
Meter or
Gauge
Small Valve
Controller
Large Valve
Controller
Description
Input /Output Signal Digital PROFIBUS DP
Electrical Connections DB9
Supply Voltage: 7 to 30 Vdc 12 to 30 Vdc 24 to 30 Vdc
Supply Current
80mA @ 12Vdc
65mA @ 24Vdc
295mA @ 12Vdc
280mA @ 24Vdc
780mA @ 24Vdc
Technical Data for PROFIBUS Meters, Gauges and Controllers
NOTICE: The following specifcations are applicable to Alicat PROFIBUS enabled meters,
gauges and controllers only.
All other operating specifcations are shown in the Technical Data page for standard Alicat
instruments.
All standard device features and functions are available and operate in accordance with the
standard Alicat Scientifc device operating manual provided with the device.
Power and Signal Connections:
Connect to the device using two DB9 connectors.
The female top connection is PROFIBUS.
The male connection on the side is power and
RS-232 or RS-485.
Pin out diagrams for all PROFIBUS enabled
Alicat devices are shown:
PROFIBUS MC1SLPM shown to provide PROFIBUS connector dimensions only. Flow body and valve
dimensions will vary with range. Please see Alicats device specifcations for complete dimensions.
PROFIBUS units do not have a display screen.
2 x 8-32 UNC
v
.350
.525
.35
4.26
4.08
3.76
3.59
1/8 NPT
Both Sides
1.05
.525
.35
2.225
.150
.125
.925
MC-1SLPM-PROFIBUS
1. NC
2. OPT GND
3. DP
4. RTS
5. DGD
6. VP
7. OPT 7 to 30VDC
8. DN
9. NC
5 1
9 6
TOP
1. NC
2. RS232RX
3. RS232TX
4. NC
5. GND
6. NC
7. 7 to 30VDC
8. GND
9. NC
1
6
5
9
SIDE
71
Eight Pin Mini-DIN Connector Pin-Outs
If your Alicat Instrument was ordered with the standard Eight Pin Mini-DIN
connection, please be sure to reference the following pin-out diagram.
Standard 8 Pin Mini-DIN Pin-Out
1 2
3 4 5
6 7 8
Pin Functon
Mini-DIN
cable color
1 Inactve (or optonal 4-20mA Primary Output Signal) Black
2
Statc 5.12 Vdc [or optonal Secondary Analog Output (4-20mA,
5Vdc, 10Vdc) or Basic Alarm]
Brown
3 Serial RS-232RX (receive) Input Signal Red
4
Meters/Gauges = Remote Tare (Ground to Tare)
Orange
5 Serial RS-232TX (send) Output Signal Yellow
6 0-5 Vdc (or optonal 0-10 Vdc) Output Signal Green
7 Power In (as described above) Blue
8
Ground (common for power, digital communicatons, analog signals
and alarms)
Purple
Note: The above pin-out is applicable to all the fow meters and controllers with the
Mini-DIN connector. The availability of diferent output signals depends on the optons
ordered. Optonal confguratons are noted on the units calibraton sheet.
72
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2
The above pin-out is applicable to all the fow meters and controllers ordered with the
industrial connector. The availability of different output signals depends on the fow
meter options ordered.
The locking industrial connector is standard on all CSA/ATEX approved devices.
RS-485 is not available on CSA/ATEX approved devices.
Locking Industrial Connector Pin-Outs
If your Alicat Instrument was ordered with a Six Pin Locking Industrial
connection, please be sure to reference the following pin-out diagram.
Pin Function
1 Power In ( + )
2 RS-232TX / RS-485(+)
3 RS-232RX / RS-485(-)
4 Meters/Gauges = Remote Tare (Ground to Tare)
5 Ground (common for power, communications and signals)
6 Signal Out (Voltage or Current as ordered)
Male Connector: Cable Female Connector: Device
73
Pin Functon
1 Not Connected (4-20mA analog output signal optonal)
2
5.12 Vdc or (secondary analog output (4-20mA, 5Vdc, 10Vdc or
alarm optonal)
3 Serial RS-232RX or RS-485(-)
4
Analog Input Signal [4-20mA, 5Vdc, or 10Vdc] (short to ground
for remote tare functon on non-controllers)
5 Serial RS-232TX or RS-485(+)
6 0-5 Vdc Output Signal (or 0-10 Vdc optonal)
7 Power In (+Vdc)
8
Ground (common for power, digital communicatons, analog
signals and alarms)
9
signals and alarms)
Note: The above pin-out is applicable to all the fow meters and controllers
with the DB9 connector. The availability of diferent output signals depends
on the optons ordered. Optonal confguratons are noted on the units
calibraton sheet.
Do not connect RS-485 to RS-232 units or cables. Damage will
occur! Check part number or contact factory to verify RS-485
functonality.
Due to variance in cable manufacturing, please identfy proper
wiring/pins via contnuity check & color when using blunt cut
mult-strand cables.
Standard DB9 Pin-out
The following pin-out chart describes the safest and generally compatble
arrangement when connectng a non-Alicat DB9 wire to a DB9 equipped Alicat.
Not all features may be available between brands, but the common denominators
are featured in our DB9 oferings, along with some optons for customizaton.
\\/|iccI-:erver2\FuL|ic\Drcwing:\Sc|icWcrk: Drcwing:\Wcrk\Mi:ce||cnecu:\LcycuI:\Spec SheeI: Drcwing:\
520-290-6060 Ph. 520-290-0109 Fax
520-290-6060 Ph. 520-290-0109 Fax
Female Connector Front View
9 9
Male Connector Front View
6
1
6
1 5
5
If your instrument was ordered with a DB9 connecton, be sure to check the
Calibraton Label on the device and reference the appropriate pin-out diagram.
74
functonality.
mult-strand cables.
DB9A Pin-out
arrangement when connectng a non-Alicat DB9 wire to a DB9A equipped Alicat.
are featured in our DB9N oferings, along with some optons for customizaton.
520-290-6060 Ph. 520-290-0109 Fax
520-290-6060 Ph. 520-290-0109 Fax
9 9
6
1
6
1 5
5
Pin Functon
1 Not Connected
3 Power In (+Vdc)
4
signals and alarms)
5 Serial RS-232TX or RS-485 (+)
6
7
signals and alarms)
8
signals and alarms)
9 Serial RS-232RX or RS-485 (-)
with the DB9A connector. The availability of diferent output signals
depends on the optons ordered. Optonal confguratons are noted on the
units calibraton sheet.
75
functonality.
mult-strand cables.
DB9N Pin-out
arrangement when connectng a non-Alicat DB9 wire to a DB9N equipped Alicat.
are featured in our DB9N oferings, along with some optons for customizaton.
520-290-6060 Ph. 520-290-0109 Fax
520-290-6060 Ph. 520-290-0109 Fax
9 9
6
1
6
1 5
5
Pin Functon
1 Power In (+Vdc)
2
4 Not Connected
5
signals and alarms)
6
signals and alarms)
9 Not Connected
with the DB9N connector. The availability of diferent output signals
76
functonality.
mult-strand cables.
DB9R Pin-out
arrangement when connectng a non-Alicat DB9 wire to a DB9R equipped Alicat.
are featured in our DB9R oferings, along with some optons for customizaton.
520-290-6060 Ph. 520-290-0109 Fax
520-290-6060 Ph. 520-290-0109 Fax
9 9
6
1
6
1 5
5
Pin Functon
3
4
signals and alarms)
5 Not Connected
7 Power In (+Vdc)
8
signals and alarms)
9
signals and alarms)
with the DB9R connector. The availability of diferent output signals
77
functonality.
mult-strand cables.
DB9T Pin-out
arrangement when connectng a non-Alicat DB9 wire to a DB9T equipped Alicat.
are featured in our DB9T oferings, along with some optons for customizaton.
520-290-6060 Ph. 520-290-0109 Fax
520-290-6060 Ph. 520-290-0109 Fax
9 9
6
1
6
1 5
5
Pin Functon
3 Power In (+Vdc)
4
signals and alarms)
5 Not Connected
6
7
signals and alarms)
8
signals and alarms)
with the DB9T connector. The availability of diferent output signals
78
functonality.
mult-strand cables.
DB9U Pin-out
arrangement when connectng a non-Alicat DB9 wire to a DB9U equipped Alicat.
are featured in our DB9U oferings, along with some optons for customizaton.
520-290-6060 Ph. 520-290-0109 Fax
520-290-6060 Ph. 520-290-0109 Fax
9 9
6
1
6
1 5
5
Pin Functon
1 Serial RS-232RX or RS-485(-)
3 Power In (+Vdc)
4
signals and alarms)
5 Not Connected
6
7
signals and alarms)
8
signals and alarms)
9 Serial RS-232TX or RS-485(+)
with the DB9U connector. The availability of diferent output signals
79
DB15 Pin-Out Alicat Style
Pin Number Function
1 Ground
2 Primary Analog Signal Output
3 Ground
4 N/C
5 Power Supply (+Vdc)
6 N/C
7 N/C
8
Analog Tare (meters when grounded)
Analog Set-Point Input (controllers)
9 Power Supply Common
10 Ground
11 Secondary Analog Signal Output / fxed 5.12Vdc
12 N/C
13 RS-232 RX (receive) or RS-485
14 Ground
15 RS-232 TX (send) or RS-485 +
Check your devices calibration certifcate and user manual for the actual electrical input/
output requirements, as all instruments are custom confgured to some extent.
NOTE: Pins 1, 3, 9, 10, and 14 are connected together inside of the device and are
common grounding points.
N/C = Not Connected/Open (can be used for custom pin assignments please consult factory).
The following pin-out chart describes the safest and generally compatible arrangement
when connecting a non-Alicat DB15 wire to a DB15 equipped Alicat. Not all features may be
available between brands, but the common denominators are featured in our DB15 offerings,
along with some options for customization.
DB15 Pin-Outs
If your instrument was ordered with a DB15 connection,
be sure to check the Calibration Label on the device and
reference the appropriate pin-out diagram.
Male Connector Front View Female Connector Front View
8
15 13
11 9
2 5
8
15 13
11 9
2 5
80
Pin Number Function
1 Ground
3
Analog Tare (meters when grounded)*
Analog Set-Point Input (controllers)*
4 Ground
6 Ground
8 RS-232 Tx (send) / RS-485, A (-) [receive]
9 Ground
10 N/C
11 N/C
12 Secondary Analog Signal Output / fxed 5.12Vdc*
13 N/C
14 N/C
15 RS-232 Rx (receive) / RS-485, A (+) [send]
* Added to allow for full use of features on Alicat devices, may not be present on host wiring
NOTE: Pins 1, 4, 5, 6, and 9 are connected together inside of the device and are common
grounding points.
DB15A Pin-Out Aalborg XFM Style
The following pin-out chart describes the safest and generally compatible arrangement when
connecting a non-Alicat DB15 wire to a DB15A equipped Alicat. Not all features may be
DB15 Pin-Outs
8
15
12
9
2 5
8
15
12 9
2 5
3
3
7
7
81
DB15B Pin-Out Brooks Style
Pin Number Function
1 Ground
3 N/C
4 N/C
6 N/C
7 N/C
8
10 Ground
11 Secondary Analog Signal Output / fxed 5.12Vdc
12 N/C
13 N/C
14 RS-232 RX (receive) or RS-485
15 RS-232 TX (send) or RS-485 +
NOTE: Pins 1, 9, and 10 are connected together inside of the device and are common
grounding points.
connecting a non-Alicat DB15 wire to a DB15B equipped Alicat. Not all features may be
DB15 Pin-Outs
9
5
14
15
8
8
15 14
11 9
2 5
11
2
82
DB15K Pin-Out MKS Style
connecting a non-Alicat DB15 wire to a DB15K equipped Alicat. Not all features may be
DB15 Pin-Outs
Pin Number Function
1 N/C
3 N/C
4 N/C
6 N/C
8
9 Secondary Analog Signal Output / fxed 5.12Vdc *
10 N/C
11 Ground
12 Ground
13 RS-232 RX (receive) or RS-485 *
14 RS-232 TX (send) or RS-485 + *
15 Ground
NOTE: Pins 5, 11, 12 and 15 are connected together inside of the device and are common
grounding points.
* Added to allow for full use of features on Alicat devices, may not be present on host wiring.
8
13 14 9
2 5
8
13 14 9
2 5
7
7
83
DB15H Pin-Out Hastings H Style
Pin Number Function
1 N/C
3 N/C
4 N/C
5 Ground
8 N/C
9 N/C
12 Ground
13 N/C
14
15 RS-232 TX (send) or RS-485 + *
NOTE: Pins 5, 7 and 12 are connected together inside of the device and are common
grounding points.
11
15 14
10
2
6
11
15
14
10
2 6
7
7
connecting a non-Alicat DB15 wire to a DB15H equipped Alicat. Not all features may be
DB15 Pin-Outs
84
DB15S Pin-Out Sierra Style
Pin Number Function
1 Ground
3 N/C
4 N/C
5 Ground
6 N/C
7 N/C
8
10 Ground
14 RS-232 TX (send) or RS-485 + *
15 Ground
NOTE: Pins 1, 5, 9, 10 and 15 are connected together inside of the device and are common
grounding points.
11
14 13
12
2
9
11
14
13
9
2
8
8
12
connecting a non-Alicat DB15 wire to a DB15S equipped Alicat. Not all features may be
DB15 Pin-Outs
85
Additional Information for Alicat CSA and ATEX Approved Devices
See the following page for Special Conditions regarding the use of these units!
EEx nA IIC T4
Class I, Div. 2 Group A, B, C and D T4
24 Vdc, 0.800A max
Class I, Zone 2 AEx nA IIC T4
WARNINGS:
EXPLOSION HAZARD DO NOT DISCONNECT WHILE CIRCUIT IS
LIVE UNLESS AREA IS KNOWN TO BE NON-HAZARDOUS.
EXPLOSION HAZARD SUBSTITUTION OF COMPONENTS MAY
IMPAIR SUITABILITY FOR CLASS I, DIVISION 2.
II 3 G
Industrial Connector Overall Clearance
M
i
n
i
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u
m

R
e
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e
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r
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2.537
1.817
1.602
All Alicat CSA / ATEX approved devices are equipped with a locking 6 pin industrial
connector. The power and signal connections are shown below.
Clearance Requirements for
Industrial Connector
Pin Function
1 Power In ( + )
2 RS-232TX
3 RS-232RX
4 Remote Tare Meters (Ground to Tare)
Analog Set-Point Input (Controllers)
5 Ground (common for power,
communications and signals)
6 Signal Out (Voltage or Current as
ordered)
D
C
8
/ /
8
C
D
1 2 3 4 5 7 8
8 7 5 4 3 2 1
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Male Connector: Cable Female Connector: Device
86
USE of Alicat instruments (M, MW, MS, MC, MCW, MCS, MCR, MCRW, MCRS, P, PS, PC,
PCS, PCR and PCRS product families only) in Class 1 Division 2 applications.
CSA certifes the use of this product for general use as well as use in hazardous
locations as defned by Class 1 Division 2 Group A, B, C and D T4.
CSA certifcation is indicated by the product label as shown below and
not by the statements in this, or any accompanying documentation.
Special Conditions:
To comply with CSA certifcation the following information is included in the product literature:
When equipment is properly labeled, it is suitable in Class I, Division 2, Group A, B,
C and D, T4
o Tamb. -40C to +50C
Electrical Rating 24Vdc, 0.800A max
Instruments shall be powered by a CSA certifed, UL listed, Class II external power
supply suitable for the application
Instruments shall be housed in an enclosure with a minimum IP54 rating or location
providing equivalent protection
Instruments fnal approval shall be provided by the local authority having jurisdiction
EEx nA IIC T4
Class I, Div. 2 Group A, B, C and D T4
24 Vdc, 0.800A max
Class I, Zone 2 AEx nA IIC T4
X See manual for special conditions
WARNINGS:
EXPLOSION HAZARD DO NOT
DISCONNECT WHILE CIRCUIT IS LIVE
UNLESS AREA IS KNOWN TO BE NON-
HAZARDOUS.
EXPLOSION HAZARD SUBSTITUTION
OF COMPONENTS MAY IMPAIR
SUITABILITY FOR CLASS I, DIVISION 2.
www.AlicatScientifc.com
Alicat Scientifc, Inc.
Tucson, AZ USA
Tel: 520-290-6060
II 3 G
USE of Alicat instruments (M, MW, MS, MC, MCW, MCS, MCR, MCRW, MCRS, P, PS, PC,
PCS, PCR and PCRS product families only) in applications requiring ATEX Certifcation.
Properly labeled Alicat instruments comply to the following ATEX standard:
II 3 G EEx nA IIC T4 (-40C Ta +50C)
The examination certifcate was issued by the CSA in accordance with
accepted practices and procedures. This confrms compliance with the
European ATEX Directive or Group II Category 3G equipment.
ATEX certifcation is indicated by the product label as shown above and not by the
statements in this, or any accompanying documentation.
Special Conditions:
Properly labeled equipment is only certifed for use in ambient temperatures in the
range of -40C to +50C only
Electrical Rating 24Vdc, 0.800A max
Instruments shall be powered by a CSA certifed, UL listed, Class II external power
supply suitable for the application
Instruments shall be housed in an enclosure with a minimum IP54 rating or location
providing equivalent protection
Instruments fnal approval shall be provided by the local authority having jurisdiction
Serial Number: ______________________
Model Number: _________________________
Notice: Alicat Scientifc, Inc. reserves the right to make any changes and improvements to the products
described in this manual at any time and without notice. This manual is copyrighted. This document may
not, in whole or in part, be copied, reproduced, translated, or converted to any electronic medium or
machine readable form, for commercial purposes, without prior written consent from the copyright holder.
Note: Although we provide assistance on Alicat Scientifc products both personally and through our
literature, it is the complete responsibility of the user to determine the suitability of any product to their
application.
Limited Lifetime Warranty
Alicat Scientifc, Inc. warrants to the original purchaser (hereinafter referred to as Buyer) that
instruments manufactured by Alicat Scientifc (hereinafter referred to as Product) shall be free from
defects in materials and workmanship for the life of the Products.
Under this warranty, the Products will be repaired or replaced at manufacturers option, without charge for
parts or labor when the Product is carried or shipped prepaid to the factory together with proof of purchase.
The foregoing shall constitute the exclusive and sole remedy in lieu of other remedies of the Buyer for
any breach by Alicat Scientifc of this warranty to the maximum extent permitted by law.
This warranty does not apply to any Product which has not been installed or used in accordance with
the Product operation and installation specifcations provided to Buyer verbally or in writing by Alicat
Scientifc for the proper and normal use of the Product.
Buyer agrees hereunder that Alicat reserves the right to void any warranty, written or implied, if upon
Alicats examination of Product shall disclose to Alicats satisfaction that the Product failure was due
solely, or in part, to accident, misuse, neglect, abuse, alteration, improper installation, unauthorized
repair or improper testing by Buyer or agent of Buyer.
Alicat Scientifc shall not be liable under any circumstances for indirect, special, consequential, or
incidental damages in connection with, or arising out of, the sale, performance, or use of the Products
covered by this warranty.
Alicat Scientifc does not recommend, warrant or assume responsibility for the use of the Products in life
support applications or systems.
Alicats warranties as herein above set forth shall not be enlarged, diminished or affected by, and no
obligation or liability shall arise or grow out of Alicats rendering of technical advice in connection with
Buyers order of the Products furnished hereunder.
If Product becomes obsolete, Alicat Scientifc, at its own discretion, reserves the right to repair the
Product with available replacement parts or upgrade the Product to a current, commercially available
version of the original Product. Should upgrading the Product be deemed necessary by Alicat, Buyer
hereby agrees to pay an upgrade fee equal to seventy percent of the retail value of the replacement
Product. Alicat Scientifc hereunder makes no claim that replacement Products will look, function or
operate in the same or similar manner as the original product.
When a Product is returned to Alicat Scientifc for recalibration this service is considered normal
preventative maintenance. Recalibration of Product shall not be treated as a warranty service unless
recalibration of Product is required as the result of repairs to Product pursuant to this Warranty. Failure
of Buyer to send Product to Alicat Scientifc for recalibration on a yearly basis after a period of 36 months
from date of manufacture will remove any and all obligations regarding repair or replacement of Product
as outlined by this Warranty to Buyer from Alicat Scientifc.
This Warranty is in lieu of all other relevant warranties, expressed or implied, including the implied
warranty of merchantability and the implied warranty of ftness for a particular purpose, and any warranty
against infringement of any patent.
Continued use or possession of Products after expiration of the applicable warranty period stated above
shall be conclusive evidence that the warranty is fulflled to the full satisfaction of Buyer.
Alicat makes no warranty as to experimental, non-standard or developmental Products.
Accessories purchased from Alicat are not covered by this warranty.
Conformity / Supplemental Information:
The product complies with the requirements of the Low Voltage Directive 2006/95/EC and the EMC Directive
2004/108/EC and carries the CE Marking accordingly. Contact the manufacturer for more information.
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9

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