38690515

NetMotion, Inc.
~ Your Design Solutions Provider

Competitive Pricing, Friendly Service, On-Time Delivery
Solutions/ Products Page Contact Us
Motion Control
AC Servo Motor & Amplifier 3-4 If you are outside US/Canada, call 510 440-8040
DC Servo Motor & Amplifier 5-6 For Customer Service, Call Monday through Friday
Stepper Motor 7 8:00am - 5:00pm (Pacific Time)
More on Motion Control 8-9
Stepper Motor Driver 10 PHONE 800 790-7837
Stepper Motor Controller 11
Actuator & Slide 12 FAX 510 440-8043
Sensors 13
Fluid Handling MAIL: NetMotion, Inc.

4160 Technology Drive
Fluorocarbon & PEEK Tubing 14-15 Fremont, CA 94538
Fluorocarbon Fittings 16 U.S.A.
Turbine Flow Meter 17
PFA Pressure Sensor 18 E-Mail: [email protected]
Liquid Leak Sensor 19
Handling Tools for On-Line: www.netmotion.com
Wafer, Die, Mask, Credit Cards Accepted!
Precision Parts
Manual Wand 20 About NetMotion, Inc.
Vacuum Wand for Wafer and die 21
Vacuum Wand for Precision Parts 22 NetMotion, Inc. was established in December 1995 to create a
Vacuum Wand Kits 23 distinct market identity in the industrial control industry for its
Vacuum Wand Accessories 32 line of motion control products. In 1998, the company expanded
its product line to capital equipment components, becoming a
Custom Parts & value-added resource to equipment manufacturers and owners
in any industry.
Lab Supplies
Lint-Free Wipers & Masks 24 As industries continue in technological advancements and new
Custom Engineered Parts 25 designs, issues such as quality, contamination and efficiency have
Vacuum Wands and Tips 26 become important concerns. Therefore, component distribu-
Vacuum Pumps and Accessories 27 tors must also meet and maintain the same criteria to cater to
the industries. Understanding the need, NetMotion has positioned
itself to be the preferred resource for these important compo-
Other Products nents. In our selection of products, we do extensive market re-
Ceramic End-Effector 28 search to understand the market demands of the product and
PEEK Metric Screws 29 choose only the highest quality components. Our goal is to help
Ruby Capillaries for Wire Bonding 30 equipment manufacturers and owners of various industries to
Test Wafers 31 eliminate steps in component sourcing and find the best product
selections at one resource...NetMotion.
Look for these symbols throughout the catalog:
New Items We have Application Notes More information is Technical Advisor Service & Support
added to this catalog available on our Web Site
2
Motion Control
AC Servo Motors & Amplifiers

AC Servo Motors AC Servo Amplifier
PV Model
• Device Net
• Fast Response • Multi-Function
• Compact • Position, Speed, Torque Control
• High Torque PY Model
• 30W ~ 1kW • Output 30W ~ 1.5kW
• Ultra Compact Servo Motors • Easy Connection
• Washdown • Position, Speed, Torque Control
• CE & TUV Marked • Dynamic Brake Function
• Electronic Gear Function
Please turn to page 4 for models and Specifications
Labelling Machine
Application Type: Following Motion: Linear
Application Description: Machine Requirements:

Bottles on a conveyor run through a labelling mechanism that applies • Accurately apply labels to bottles in motion
a label to the bottle. The spacing of the bottles on the conveyor is not • Allow for variable conveyor speed
regulated and the conveyor can slow down, speed up, or stop at any • Allow for inconsistent distance between bottles
time. • Pull label web through dispenser
Start Photocell Motion Control Requirement:

• Synchronization to conveyor axis
• Electronic gearbox function
• Registration control
• Open-loop stepper if possible
• High torque to overcome high friction
• High resolution
Application Solution:
A motion controller that can accept input from an en-
coder mounted to the conveyor and reference all of the
AC Servo speeds and distances of the label roll to the encoder is
Motors required for this application. A servo system is also
required to provide the torque and speed to overcome
the friction of the dispensing head and the inertia of
Encoder the large roll of labels. A photosensor connected to a
programmable input on the controller monitors the
bottles’ positions on the conveyor . The controller com-
mands the label motor to accelerate to line speed by
the time the first edge of the label contacts the bottle.
The label motor moves at line speed until the complete
label is applied, and then decelerates to a stop and
waits for the next bottle.
Drive/Controller
Please turn to page 4 for models and Specifications
3
Motion Control
AC Servo Motors and Amplifiers Selection Chart

Standard Specifications
Motor model (wiring-saving INC, w/o brake); < >Dimensions of flange angle
Sq. flange size in <> Symbol Unit P30B04010DXS P30B06020DXS P50B04010DXS P50B05020DXS
<40> <60> <42> <54>
Rated Output PR W 100 200 100 200
Rated rotating speed NR min-¹ 3,000 3,000 3,000 3,000
Maximum rotating speed Nmax min-¹ 4,500 4,500 4,500 4,500
Rated torque TR N·m 0.32 0.637 0.319 0.637
Continuous stall torque TS N·m 0.353 0.686 0.353 0.686
Instantaneous maxm stall torque Tp N·m 0.98 1.96 0.98 1.96
Rated armature current IR Arms 1.1 2.2 1.0 1.6
Continuous stall armature current IS Arms 1.3 2.3 1.2 1.7
Instant. maxm stall armature current IP Arms 4.1 7.5 3.6 3.7
Torque constant KT N · m/Arms 0.292 0.316 0.333 0.436
Induced voltage constant KEø mV/min-¹ 10.2±10% 11.0±10% 11.6±10% 15.2±10%
Phase armature resistance Rø Ω 4.3 1.5 7.0 3.4
Rated power rate QR kW/S 22.0 29.0 13.8 24.2
Electric time constant te ms 1.4 3.8 1.5 2.9
Mechanical time constant (w/o sensor)tm ms 0.7 0.63 1.4 0.9
Rotor inertia (INC) JM kg·m² (GD²/4) 0.051X10-4 0.144 X10-4 0.079 X10-4 0.173 X10-4
Rotor inertia (ABS-RII/RIII) JM kg·m² (GD²/4) 0.048 X10-4 0.141 X10-4 0.076 X10-4 0.17 X10-4
Brake holding torque TB N·m 0.32 0.637 0.319 0.353
Brake excitation voltage VB V 90 (24) 90 (24) 90 (24) 90(24)
Brake excitation current IB A 0.07 (0.26) 0.07 (0.31) 0.07 (0.26) 0.11 (0.4)
Motor operating temp. and humidity Temperature: 0 to 40°C, humidity: 90% or less (non-condensing)
Applicable amplifier model PY2A015 PY2A015 PY2A015 PY2A015

Amplifier power supply 200 to 230V AC +10% -15% 50/60Hz 1ø 200 to 230V AC +10% -15% 50/60Hz ±3Hz 3-
Amplifier operating temp. and humidity Temperature: 0 to 55°C, humidity: 90% or less (non-condensing)
Power capacity (at rating) kVA 0.3 0.5 0.4 0.8
Motor model (wiring-saving INC, w/o brake); < >Dimensions of flange angle
Sq. flange size in <> Symbol Unit P50B07020DXS P50B07040DXS P50B08075DXS
<76> <76> <86>
Rated Output PR W 200 400 750
Rated rotating speed NR min-¹ 3,000 3,000 3,000
Maximum rotating speed Nmax min-¹ 4,500 4,500 4,500
Rated torque TR N·m 0.637 1.274 2.381
Continuous stall torque TS N·m 0.686 1.372 2.94
Instantaneous maxm stall torque Tp N·m 1.96 3.92 8.82
Rated armature current IR Arms 2.2 3.0 6.0
Continuous stall armature current IS Arms 2.3 3.1 7.1
Instant. maxm stall armature current IP Arms 7.4 10.0 23.7
Torque constant KT N · m/Arms 0.348 0.481 0.447
Induced voltage constant KEø mV/min-¹ 12.15±10% 16.8±10% 15.6±10%
Phase armature resistance Rø Ω 2.5 1.65 0.43
Rated power rate QR kW/S 10.6 22.1 29.5
Electric time constant te ms 3.6 4.0 5.8
Mechanical time constant (w/o sensor)tm ms 2.4 1.6 1.2
Rotor inertia (INC) JM kg·m² (GD²/4) 0.386 X10-4 0.74 X10-4 1.926 X10-4
Rotor inertia (ABS-RII/RIII) JM kg·m² (GD²/4) 0.398 X10-4 0.752 X10-4 1.938 X10-4
Brake holding torque TB N·m 0.69 0.98 2.94
Brake excitation voltage VB V 90 (24) 90 (24) 90 (24)
Brake excitation current IB A 0.08 (3) 0.08 (0.33) 0.08 (0.33)
Motor operating temp. and humidity Temperature: 0 to 40°C, humidity: 90% or less (non-condensing)
Applicable amplifier model PY2A15, PY2A030

Amplifier power supply 200 to 230V AC +10% -15% 50/60Hz ±3Hz 3-phase
Amplifier operating temp. and humidity Temperature: 0 to 55°C, humidity: 90% or less (non-condensing)
Power capacity (at rating) kVA 0.8 1.3 2.0
For more information and other models specifications, please contact our Motion Control Experts at
1-800-790-7837 or E-Mail: [email protected]
4
Motion Control
DC Servo Motors & Amplifiers

A system combining stepping motor operability and servo motor reliability
DC Servo Motors DC Servo Amplifiers
PB Model
• Low DC Motor Inertia • Low Cost Servo
• Maximum Torque • Accepts Pulse & Direction
• Minimum Torque Ripples • Device Net
• Low Electrical & Time Constant • RS 485
• CE & TUV Marked • High Resolution
• CE, UL, & TUV Marked
• Multi-Function
Features of DC Servo Motors: • Speed 0~4500 rpm
1. Clears all 2. Space-Saving! 3. A rich variety 4. Excellent 5. Compatible
European Safety Has no protrusion of models. Nine Rotation Design.
Standards for a brush holder. Models Available Performance. Compatible with
CE-Marked from 23 to 500W. Small torque Other DC Servo
ripples and Motors
smooth rotation.
Please turn to Page 6 for models and specifications
DC Servo Motor Application:

Drive Train (Complete Synchronization)
Synchronization!
DC Motor (Slave)
Slave Master Axis

Axis
DC Motor
(Master)
In distributed, multi-axis applications that require electronic

gearing and cam profiles, synchronus, high-speed updates
of position command are essential. NetMotion offers sys-
tems which will ensure complete synchronization between
the controllers and all slaves at a high communication rate.
Our product offers a set of drivetrain objects that can be
used to electronically link axes together in geared or mapped
relationships.
5
Motion Control
DC Servo Motors and Amplifiers Selection Chart
Amplifier Specifications
Amplifier Part No. PB1D00P100 PB1D002P100 PB1D003P100
Control System PWM control
Environment Power
Supply
Single Power Source DC24~48V±10% DC24~48V±10% DC24~48V±10%

2.2A RMS 2.7A RMS 3.7A RMS
Ambient Temp. When Operating 0~+55°C
When Stored -20~+70°C
Operation, Conservation, Humidity Not more than 90% R/H (no condensation)
Vibration Resistance 0.5G (Tested under the following conditions, frequency range: 10 to 55Hz, direction:
along the X.Y, and axes, for 2 hours)
Structure Open frame structure
Weight About 0.3 kg (0.66 lbs)
Outer Dimension(mm) W120 x H36 x D70
Rotation Speed 0~4500min-1
Resolution(PPS/Rev) 200,800,1600,3200,6400,12800
Regenerative Process Built-in
Function
Operator WR(Writing) Deviation clearance, Power limit, Excessive location deviation setting, In-Position width,
RD(Reading) Location counter, Amplifier status, Communication Status, I/0 port status, Optional
setting value, etc.
Protection Functions Power voltage error, Regenerated voltage error, Over speed, Encoder wire break Reset
operation error, CPU error, Overload stoppage
LED Indication Power status, Alarm, Channel C indication
Operation Function Normal drive, Origin return drive
Monitor Function Speed monitor, Current command monitor
SW Setting Function Pulse input system selection, Origin return system selection, etc.
I/O Signals
Input Signals CW/CCW pulse, Alarm clearance. STOP, SDN, Origin return activated, General input
Out Signals Alarm output, In-Position, Command permission, Encoder output signal, General output
Operator I/F In accordance with RS-485
Start-stop synchronization system, half-duplex
Standard Applicable Motors

Supported Maximum Stall Rotor Inertia
Motor Part Bearable Thrust Bearable Radial
Amplifier Part Torque [N·m] [X10-4Kg m2] Weight [Kg] (lb.)
Number Load[N] (lbf) Load[N] (lbf)
Number (oz-in)
PB1D001P100 PBM282D *60 0.044 (6.23) 0.008 0.16 (0.35) 9.8 (2.203) 33 (7.42)
PBM423D *60 0.39 (55.23) 0.056 0.35 (0.77) 9.8 (2.203) 49 (11.02)
PB1D002P100
PBM503D *60 0.57 (80.72) 0.12 0.59 (1.30) 14.7 (3.30) 96 (21.58)
PBM565D *60 1.05 (148.69) 0.36 1.05 (2.32) 14.7 (3.30) 167 (37.54)
PB1D003P100
PBM603D *60 1.3 (184.09) 0.4 0.85 (1.87) 14.7 (3.30) 167 (37.54)
6
Motion Control
2, 3 & 5ph Stepper Motors

• 2, 3 & 5-phase • High Resolution
• General and Specialty Motors • High Torque
• Size 8 through 42 • Resonance -Free Operation
• High Performance • Custom Designs Available
15°°, 7.5°° Miniature Motors

• Designed with Quality and Precision
• High Holding Torque
• High Start Up Speed
Specialty / Slim-Line Motors

• 0.36° ~ 1.8° • Low Inertia / Light Weight
• Ultra Thin • High Speed Applications
• Compact • Custom Designs Available
Standard & High Torque 2-Phase Motors

• High Performance, High Resolution
• High Torque
• Resonance-free Operation
• Custom Designs Available
2, 3 & 5-phase Stepper Motors

• Full/Half Step/ Microstepping Drivers
• High Resolution
• High Torque
• Smooth Operation
• CE Marked Stepper Motors
Stepper Motors & Drivers Selection Chart
Torque oz-in Step-angle 2ph Drivers Part No. Motor Part No. Torque oz-in Step-angle 2ph Drivers Part No. Motor Part No.
6.0 0.9° RD021M8 4160504 84 1.8° RD023MS 5618M06
7.5 1.8° CMTD5015 2131004 111 1.8° RM2690S
8.0 0.9° 4109X51 140 1.45° 5703M02
8.0 0.9° 4160705 180 1.8° RM26A3S
188 0.9° 5709L03
12 0.9° RD021M8 4141018 210 1.8° 5718L03
15 1.8° CMTD5015 4018X07
15 1.8° 4018S18 350 1.8° RD026MSA 8618M11
15 0.9° 4109V51 500 1.8° 8618L03
20 0.9° 4109R05 615 1.8° 8718M04
920 1.8° 8718L08
16 0.9° RD021M8 4141014
27 1.8° CMTD5015 4218S04
29 1.8° RM2621S
30 1.8° 4018M04 Torque oz-in Step-angle 5ph Drivers Part No. Motor Part No.
19 0.36° RD053MS RM5414SM

30 0.9° 4171512 55 0.72° RM5640S
33 1.8° RD023MS RM2424S 111 0.72° RM5685S
45 1.8° 4218M03 305 0.72° RM59B2S
55 1.8° 4218L25 556 0.72° RM59D0S
60 1.8° 5618S10
70 0.9° 5709X15
75 0.45° 5704X15
For more information, please visit our web site at
http://www.netmotion.com/ or contact us at 1-800-790-7837
7
Motion Control
More on Motion Control

Sample Stepper Motor Applications
X-Y Table Constant Flow Pump Index Table
Ball Screw
Dovetail
Worm
Stepping
Stepping Motor Roller
Worm Gear
Tube
Stepping Motor Stepping Motor
Printer Photo Typesetting Wire Cutter

Lens Bobbin
Mirror Printing Feed Roller
Mirror
bon Character Font

Stepping Motor Ink rib Lens
Pla nte Stepping Motor
Print Cutter
Wire
Y-Scale
AC Motor
Lamp Drive Motor Cam
X-Scale Stepping Motor
Stepper Motors Selection Procedure

1. Determining the drive mechanism component First, determine certain features of the design, such as mechanism,
Determine the mechanism and required specifications rough dimensions, distance moved, and positioning period.
2. Calculate the required resolution From the required resolution, determine whether a motor only is to be
Find the step angle resolution for the motor used or whether a geared motor is to be used.
3. Determine the operating pattern Find the acceleration (deceleration) period and operating pulse speed
Determine the operating pattern that fulfills the required specifications in order to calculate the acceleration torque.
4. Calculate the required torque

Calculate load torque Calculate the load torque and acceleration torque and find the
Calculate acceleration torque required torque demanded by the motor.
Calculate required torque
5. Select motor
Make a provisional selection of a motor based on required torque. Select a motor whose speed-torque characteristics satisfy the
Determine the motor to be used from the speed-torque characteristics. requirement.
6. Check the selected motor Check the acceleration/deceleration rate and inertia ratio in order to
Confirm the acceleration/deceleration rate and inertia ratio. determine the suitability of the selection
Selection Complete * If you have trouble selecting the right motor, please contact NetMotion for
further assistance [email protected] or call 1-800-790-7837
Where are step motors being used?

Step motors can be found almost anywhere. Most of us use them every day: they power “analog” wristwatches (which are actually
digital), disc drives, printers, robots, cash points, machine tools, CD players, profile cutters, plotters and much more. Unlike other electric
motors they do not simply rotate smoothly when switched on. Every revolution is divided into a number of steps (typically 200) and the
motor must be sent a separate signal for each step. It can only take one step at a time and each step is the same size, thus step motors
may be considered a digital device.
8
Motion Control
More on Motion Control

Motion Characteristics Servo Motors Stepper Motors
Servo -vs- Stepper
High Torque, Can be considered if Continuous duty
Stepper motors are permanent magnet motors that 'Step' Low Speed cost/complexity is not aplicattions requiring
one increment each time the computer gives its control an issue. high torque and low
electronics one pulse. They don't require position feed back
if run within their limits. When stopped they inherently hold speed.
their position. High Torque and High Continuous duty If speeds are less than
Speed (>2000 rpm) applications requiring 2000 rpm stepper may
Servomotors are standard DC or Brushless motors with high torque and high be economical.
an encoder feedback loop. The computer reads the posi- speed. A DC Stepper becomes
tion of the motor and controls the power applied to the servomotor can deliver bulky at higher torque.
motor. greater continuous
Stepper motors generally are just as accurate as Servos shaft power at high
and are simpler and more reliable and maintenance free speeds compared to
in harsh dusty applications. The Servomotor's encoder is steppers. High speed
susceptible to dirt and vibration causing problems. up to 12000 rpm is
possible. AC servo-
Servo's are faster moving point to point and are better at motors can handle
accelerating very heavy machinery, but their higher main- higher current surges
tenance should be a factor in deciding which to go with.
Our Stepper motor system can be just as fast or faster compared to DC
than many servo systems because of the control software's Servos. You can get lot
algorithms. stronger AC servo
compared to either DC
Many companies that sell servo controls try to run step- servo or DC stepper.
pers down. They don't know how good a properly made Short, Rapid Use servo if you need Stepper will offer more
stepper motor system can be! Our Stepper systems never Repetitive Moves high dynamic economic solution
loose steps and can run for days with perfect repeatability.
A Servo system with dust on the encoder will loose steps! requirements. when requirements are
more modest.
Positioning Servo can handle Use Stepper motor if
Other Examples of Servo Motor Applications: Applications effectively when load is torque is lower than
mostly inertia instead 500 oz-in, less 2000
of friction. The ability to rpm, low to medium
overdrive servomotor acceleration rates.
in intermittent duty
allows a smaller motor
to be used. If
positioning is critical in
micron level use servo.
Applications in Use Brushless servo Use step motor.
Hazardous motor.
Environments.
Low Speed, High Use DC servo. Use microstepping.
Smoothness
Forming Machines Servo-Press Machines Control Method Closed loop. Preferred to be used in
open loop applications.
Example of a Linear and Rotary Automation Module
NetMotion provides solutions for your motion control de-

signs. We carry linear and rotary automation modules that
can be found in all phases of manufacturing, assembly, and
handling processes. We offer a wide range of solutions from
compact linear modules to rotary modules with the capabil-
ity of withstanding very high axial and radial loads. Call us
at 1-800-790-7837 or (510)440-8040.
9
Motion Control
Stepper Motor Drivers

Ultra Compact Drivers CMT Stepper Motor Driver
Compact Package!
• Ultra-Compact
• Extremely Compact
• High Quality
• Selectable Microstep, Full step,
• Active Midrange Stabilization
Half step,
• High Voltage Input
Microstep: (1/4 step, 1/8 step)
• Thermal Protection
• Isolated Inputs (photo-coupler)
• Selectable: Full, Half, Microstep
• Selectable Clock, 1 Clock or 2
• Selectable Clock Input
Clock Inputs
• Selectable Current Setting
• Selectable Current Setting with
• 100mA~12amp
External Resistance
PLC , Joystick, Multiaxis, Open or Closed Loop Control

Examples:
PC Drivers Step Motors Joystick Drivers Step Motors
• Engraving • X-Y Stage

• Dispensing for Inspection
Equipment
• Contouring • Measurement
Up to 6 axes Equipment
Drivers and Motors Selection Chart

Torque oz-in Step-angle 2ph Drivers Part No. Motor Part No. Torque oz-in Step-angle 2ph Drivers Part No. Motor Part No.
6.0 0.9° RD021M8 4160504 84 1.8° RD023MS 5618M06

7.5 1.8° CMTD5015 2131004 111 1.8° RM2690S
12 0.9° RD021M8 4141018 140 1.45° 5703M02
15 1.8° CMTD5015 4018X07 180 1.8° RM26A3S
20 0.9° 4109R05
188 0.9° 5709L03
16 0.9° RD021M8 4141014
27 1.8° CMTD5015 4218S04 210 1.8° 5718L03
30 1.8° 4018M04 350 1.8° RD026MSA 8618M11
30 0.9° 4171512 500 1.8° 8618L03
33 1.8° RD023MS RM2424S 615 1.8° 8718M04
45 0.9° 4218M03 920 1.8° 8718L08
70 0.9° 5709X15
75 0.45° 5704X15 Torque oz-in Step-angle 5ph Drivers Part No. Motor Part No.
19 0.36° RD053MS RM5414SM

55 0.72° RM5640S
111 0.72° RM5685S
305 0.72° RM59B2S
556 0.72° RM59D0S
How To Select A Stepper Motor Driver
A stepper motor driver provides precisely controllable speed and positioning. The motor spins at precise increments with each control
pulse, easily converting digital information to exact incremental rotation without the need for feedback devices such as tachometers or
encoders. Because the system is open loop, the problems of feedback loop phase shift and resultant instability common with servo drives,
are eliminated.
Load characteristics, performance requirements, and mechanical design, including coupling techniques, must be thoroughly considered
before the designer can effectively select the most suitable motor and driver combination for an application. For more information, please
visit our web site at:
http://www.netmotion.com/htm_files/advisor_driver.htm
10
Motion Control
Stepper Motor Controllers

95mm/
44mm/ 1.75 • 4 Axes/Axis Controller Available

• Open & Close-Loop
• Programmable Speed
108mm/ 4.25
• Programmable Counter
27.5mm • Programmable Timer
• High Speed Counting
• S-Curve Acceleration Control
• Stand-Alone Available
56mm
105mm
Example of Stand-Alone Open or Closed Loop Control for: Multiaxis, Open Loop or
• Assembly Equipment
Closed Loop Control for:
For Programming • Polishing/Clean Equipment
•Semiconductor Equipment
LINKMASTER • Elevator Systems
•Packaging Equipment
(RC-002)
Current Adapter Stand-Alone Drivers
(RS-232C) Controller
Step Motor
(w/Encoder) LinkMaster Driver Step Motor
Controllers
Current w/o Oscillator ( w/ Encoder)
Step Motor
(RC-002)
LinkMaster RC-002 is used in a NetMotion control system to convert the computer’s
RS-232C signal to current loop type for the I/O Master counter/ controllers. Driver Step
(RC-202) w/ Oscillator Motor
What is a Stepper Motor Controller? Full/Half Step
Amount, speed, and direction of rotation of a step motor are determined by appropriate
configurations of digital control devices. Major types of digital control devices are: Microstep Step
Motor Drivers, Control Links, and Controllers. These devices are employed as shown Motor
(RC-204/207) Driver
on the right.
Microstep
The Driver accepts clock pulses and direction signals and translates these signals
into appropriate phase currents in the motor. The Indexer creates the clock pulses and Up to 20 axes Joystick
direction signals. The computer or PLC (programmable logic controller) sends
commands to the indexer. For more information, visit our site at:
http://www.netmotion.com/htm_files/advisor.htm
Open Loop Control System Package Closed Loop Control System Package
Controller Part No. Description Controller Part No. Description
RC002 Link Master RC002 Link Master
RC207 I/O Master Controller RC233 Generate Master
RD1XX or RD3XX Drivers RD0XX Drivers
(*Please call NetMotion for exact selection of motors and drivers) (*Please call NetMotion for exact selection of motors and drivers)
Multi-Axis Control
Computer Step
Controller Driver Many motion applications have more than one motor to control. In
or PLC Motor
such cases a multi-axis control system is available. A PC Bus step
motor controller card for example, may have up to four indexers
mounted on it; each one connected to a separate driver and motor. In
Inputs/ Outputs Clock & Directional Signals a serial communication mode, up to 32 axes can be controlled from a
single communication port and/or I/O channel.
Some applications require a high degree of synchronization, such as

LinkMaster RC-002 is used in a NetMotion control circular or linear interpolation. Here, it may be necessary to
system to convert the computer’s RS-232C signal to coordinate the movement with a central processor. NetMotion
current loop type for the I/O Master counter/ controllers. provides a variety of single board or modular level controllers for
these types of operations.
11
Motion Control
Linear Actuator/ Slides

• Antifriction Operation and Low Noise
• Low installed Cost / Easy Installation
• Good Corrosion Resistance
• Smooth Running
• High Speed Capacity
• Unlimited Travel Lengths
• High Load Capacity
• High Temperature
• Cleanroom Compatible
• Compact Design
* Thomson Slides • Impervious to Contamination * Bishop-Wisecarver Slides
Actuators
The major components of linear motion systems can be categorized as: Actuators, Support systems (bearings),
Control Systems and Components Example of a Cam-and-Screw Mechanism
Common linear actuation devices for single axis Ball spline
Right-angle cam
motion included, but are not limited to: Programmable rotates with ball
• Various complex linkages such as a walking beam or motor and spline
slider crank mechanism. geared reducer
• Gear rack and pinion set. Spline bushing
• Plate or disc-cam drive with fixed-axis follower.
• Cylindrical-cam drive with fixed-axis follower.
• Chain, belt, or cable drive in the linear part of its path,
with or without special attachments.
• Plastic drive tape. Carriage housing
• Sliding-action leadscrew (usually acme screw), with nut. Carriage housing
• Ball-bearing leadscrew (ball-screw) with nut.
The balls recirculate into and out of the load zone. linear bearing system
Reducer output Row of fixed-axis
turns ball spline cam followers
Example: Circuit Board Scanning

X-Y Point to Point / Motion: Linear Application Description: X-Ray Scanning equipment used in
the quality control of printed circuit boards and water chips.
Motor Drive System is an automated PC-based system that efficiently

increases throughput and eliminates operator error. The host
Drive
computer will interact with the motion control card using a “C”
language program. The operator will have the option to
manually override the system using a joystick.
Machine Requirements:
• 2-Axis analog Joystick • Travel Limits
• Joystick button • Encoder Feedback on both axes
X-Y Table Display Requirements:
Motor • X and Y position coordinates
Operator Adjustable Parameters:
• Dimensions of sample under test
• (0,0) position - starting point
Motion Control Requirement:
• Motors with accurate and automated positioning
Joystick • Manual Joystick Control
Indexer • Continuous display of X & Y axis position
• User-friendly operations
12
Motion Control
Ultra-Compact Sensors
Photomicrosensor
Part Numbers: EE-SX770(A)/ 870(A) EE-SPX-W E3T
Compact, Thin Model ensures Ease of Use With Built-in Amplifier and Attached Compact Built-in Amplifier Sensor
Cable Reduces External Light Interference
• Compact model with a sensing slot identi- • Easy-to-use photomicrosensor with • Able to sense minute object by “pin-
cal in size to the previous sensing slot cable attached. point” beam.
• Allows M-3 screw mounting • Light modulation effectively reduces • Immune to background and colour
• Twelve models with different shapes (i.e., external light interference. • Saves wiring effort with compact body.
standard, L-shaped, and T-shaped models) • Wide operating voltage range: 5 to • Detection Method/ Sensing Distance:
are available 24 VDC. through-beam: 500m; retro-reflective:
• Approved by UL and EMC standards, bears • Optical axis monitoring with a 5 to 15m; diffuse reflective: 5 to 30cm.
CE markings. LIGHT-ON indicator • Supply voltage: 12 to 24 VCD.
• Each model equipped with a retractable • Incorporates a dust-proof slit. • Current/ power consumption: 12mA;
cord. • Supply voltage: 5 to 24 VDC± 10%, 20mA.
• Compact, thin, and allows high-density ripple (p-p): 5% max. • Response time:1ms for both operation
mounting. • Sensing distance: 3.6mm or 5mm and release.
• Indicators are visible from both sides. (channel width). • Control output: open collector: 50mA,
• Easy-to-see workpiece insertion mark. • Differential distance: 0.05mm max. 24 VCD (NPN/PNP output selectable).
• Allows fine-tuning of sensing position. • Control Output: At 5 to 24VDC. • Weight: 20 to 40g.
• Optical axis monitoring with a LIGHT-ON • Many models available. • Enclosure rating: IEC: IP67.
indicator. • Many models available.
• Many models available.
Proximity Sensor
Part Numbers: E2EL E2C-T
Compact, Thin Model ensures Ease of Use Inductive Type Proximity Sensor
• DC 3 wire connection. • With separate amplifier unit that is

• Standard CELENEC body. compoBus/S compatible.
• Operation mode NO. • Teaching function allows fine sensitivity
• Current consumption: < 15mA max. adjustment.
• Power supply voltage: 10 - 35 VDC. • Supply voltage:12 to 24 VDC.
• Enclosure rating: IP67. • Current/ power consumption: 50 mA.
• Ambient temperature: -25 to 70°C. • Response frequency: 1.0 kHz.
• Many models available. • Enclosure rating: Sensor head: IEC IP64/
67; Amplifier: approx. 70g.
• Many models available.
Miniature Enclosed Switch
SHL D4MC
Subminiature Enclosed Switch Economical General-Purpose, Enclosed Switch
• Coil-spring switch housed in rigid zinc diecast alloy boasts long • High precision and long life (10,000,000 mechanical opera-
life and high precision. tions).
• Requires nearly the same operating force as a conventional • Gasket diaphragm seal provides high environmental resistance.
precision switch (0.53 to 0.88 lbf). Suitable for applications demanding higher mechanical
• Molded terminal model is available. strength. Dustproof and drip-proof properties.
• UL, CSA and/or EN (IEC) approvals. • Pre-wired types with molded terminals are available on special
• Operation-indicator models are available. request.
• Operation-indicator models are available.
13
Fluid Handling
Precision Polymer Tubing

PTFE - Polytetrafluoroethylene PFA - Perfluoroalkoxy Bendable
•Maximum working temperature 500F •Maximum working temperature 500°F (260°C)
(260°C) and as low as -454°F (-270°C) •Excellent solvent resistance
•Chemical inertness: Only alkaline metals in the •Low gas permeability
molten state or in solution, fluorine at high •Smoother surface texture than FEP and PTFE
temperatures and certain halogenated •High continuous service temperature
compounds such as chlorine trifluoride, are •Superior high purity properties
capable of attacking PTFE •Combines attributes of PTFE and FEP Coiled
•Flame rating: UL 94 VO •Maintains a mechanical strength at high
•Does not support combustion temperatures
•Easy to clean •Chemical Properties: It is not attacked by
•FDA approved raw material inorganic acids, bases, halogens, metal salt
•USP Class VI approval solutions, organic acids, or anhydrides.
•Low extractables Aromatic and aliphatic hydrocarbons, alcohols,
•Biocompatability aldehydes, ketones, ethers, amines, esters, Fabricated
•Good dielectric chlorinated compounds, and other polymer
•Lowest coefficient of friction solvents have little effect.
•Exceptional resistance to degeneration of •Flame Rating: UL 94 VO (VW-1)
mechanical properties under severe conditions •Limiting oxygen index greater than 95
•Limiting oxygen index greater than 95 •Humidity has no measurable effect on the
•Can be extruded with fillers to enhance dielectric constant of PFA Pliable
abrasion resistance properties or radiopacity •Gamma, ETO, e-bearn and autoclave
•ETO and autoclave sterilizable sterilizable
•RO Fillers •Static soak testing in ultra-pure water and high
•Tight tolerances purity chemicals show extremely low levels of
•Available in tubing, special profile, heat shrink metallic and organic extractables
and other configurations •High purity resins available
•Etching available PTFE
PEEK - Polyetheretherketone
•High continuous use temperature - 480°F (249°C)
Polyimide Tubing Available •Melting point of 621°F (327°C)
•Biocompatible
•Chemically inert
•Withstand pressures up to 5,000 psi (345 Bar)
•Performs well in high temperature applications
•Very smooth inner surface
•Excellent concentricity
•Excellent hydrolysis resistance
•Resistant to gamma radiation
•Better weight to strength ratio than steel
•Available in amorphous and crystalline grades
•Compatible with metal sensitive compounds
•Thermoformable
•Exceptional torsional stability
•Sizes quoted on request
PEEK™ Tubing Available PEEK Tubing (Inches) Tubing Application

PEEK™ polymer, a PFA tubing is widely used in the semi-
I.D. O.D. Pressure
polyetheretherketone Rating* conductor, laboratory, environmental
resin, is the material of 0.003 0.020 2000 psi and pharmaceutical industries where
choice for various 0.005 0.020 2000 psi ultrapure chemicals (including water)
applications due to their outstand- 0.010 0.020 2000 psi require precise quality control. Other
ing combination of physical 0.003 0.062 5000 psi areas of utilization are automotive,
properties. Contact us for more in- 0.005 0.062 5000 psi electrical and appliance markets.
formation! 0.007 0.062 5000 psi
0.010 0.062 5000 psi PFA tubing can be used in general
0.020 0.062 5000 psi chemical application activities such as
0.030 0.062 5000 psi
delivery of natural gas and mineral
0.040 0.062 5000 psi
0.055 0.062 5000 psi oils, toxic gas monitoring and paint,
0.062 0.125 5000 psi varnish or adhesive delivery lines.
0.080 0.125 3000 psi
14
Fluid Handling
Precision Polymer Tubing

• Smooth Inner Bore
• Reduction of Particles & Liquid Entrapment
• Lower Liquid & Gas Permeation
• Lower Elution of Metallic Ions
• Increased Clarity
PFA
PFA-HG Tube allows clearer red line
viewing due to its smoother surface area. PFA-HG
Sample Dimensions (Inches) for PTFE, FEP, PFA, ETFE

INSIDE DIAMETER WALL DIMENSIONS
AWG Standard Wall Thin Wall Lightweight Wall PTFE, PFA AND PEEK TUBING IMPROVE
Size Nom. Nom. Nom. Nom Packaging
32 0.010 0.005 0.005 1000' Spools PURITY IN CRITICAL PROCESSES
30 0.012 0.009 0.009 0.006 1000' Spools
28 0.015 0.009 0.009 0.006 1000' Spools In the transfer of corrosive and ultra-pure
26 0.018 0.009 0.009 0.006 1000' Spools liquids, PTFE, PFA and PEEK tubing have become
24 0.022 0.012 0.010 0.006 1000' Spools
23 0.026 0.012 0.010 0.006 1000' Spools the tubing materials of choice. Chemical, pharma-
22 0.028 0.012 0.010 0.006 1000' Spools ceutical and semiconductor processors cannot risk
21 0.032 0.012 0.010 0.006 1000' Spools the use of materials that could contribute
20 0.034 0.016 0.012 0.006 1000' Spools
19 0.038 0.016 0.012 0.006 1000' Spools impurities into process fluids.
18 0.042 0.016 0.012 0.006 1000' Spools In chemical processing systems, PTFE tubing
17 0.047 0.016 0.012 0.006 1000' Spools is used throughout because of its inertness to al-
16 0.053 0.016 0.012 0.006 1000' Spools
15 0.059 0.016 0.012 0.006 1000' Spools most all chemicals including nitric, sulfuric and
14 0.066 0.016 0.012 0.008 500' Spools phosphoric acids, even at high temperatures and
13 0.076 0.016 0.012 0.008 500' Spools high concentrations.
12 0.085 0.016 0.012 0.008 500' Spools
11 0.095 0.016 0.012 0.008 500' Spools In pharmaceutical processing systems, PTFE
10 0.106 0.016 0.012 0.008 500' Spools and PFA are FDA-approved materials offering
9 0.118 0.020 0.015 0.008 250' Spools inertness and high-purity properties.
8 0.133 0.020 0.015 0.008
7 0.148 0.020 0.015 0.008 Solvents, acids, photoresist and ultra-pure wa-
6 0.166 0.020 0.015 0.010 ter are essential in the production of microelectronic
5 0.186 0.020 0.015 0.010 devices. Even trace amounts of non-volatile or ionic
4 0.208 0.020 0.015 0.010
3 0.234 0.020 0.015 0.010 extractables measured in parts-per-billion can
2 0.263 0.020 0.015 0.010 create unacceptable yield levels in semiconductor
1 0.294 0.020 0.015 0.010 processing. PFA (perfluoroalkoxyalkane) tubing has
0 0.330 0.020 0.015 0.012
emerged as the tubing material of choice in the
INSIDE DIAMETER WALL DIMENSIONS
semiconductor processing field because of its
Standard Wall Thin Wall Lightweight Wall excellent chemical resistance and extremely low extractables.
For the most demanding cleanliness applications, PFA-HG is
Size Nom. Nom. Nom. Nom. gaining wide acceptance.
1/8 0.130 0.020 0.015 0.008 Where a rigid plastic fluid transfer tube is needed, more and
3/16 0.192 0.020 0.015 0.010
1/4 0.255 0.020 0.015 0.010
more designers are specifying PEEK (polyetherether ketone) in
5/16 0.321 0.020 0.015 0.012 their systems. For example, PEEK tubing is now replacing PFA
3/8 0.387 0.025 0.015 0.015 tubing in the pumping of reagent and chemicals from storage
7/16 0.451 0.025 0.018 0.018 bottles. Because they are rigid and can reach the bottom of the
1/2 0.515 0.025 0.018 0.018
5/8 0.643 0.025 0.020 0.020
bottle or tank, the processor is assured that they are using the
3/4 0.772 0.030 0.025 0.020 entire chemical available to them.
7/8 0.902 0.035 - -
1 1.030 0.035 - -
1-1/4 1.287 0.040 - -
1-1/2 1.550 0.045 - -
Zeus Industrial Products, Inc.
15
Fluid Handling
Fluoroplastic Tube Fittings

• High purity PFA & PTFE.
• Excellent holding strength.
• High sealing reliability.
• Minimal fluid entrapment and turbulence.
• For 1/8” to 1inch (3 to 25mm) tube sizes.
• Temperature 0° ~ 200°C (32° to 392°F)
Compression-Type Fittings (30-Series)

60 series fitting
Welded Surface
· Easy assembly taper swaging system
· Compact design
· Maximum working temperature : 100°C (212°F)
· Maximum working pressure: 125psi (9kg/cm2)
Flare-Type Fittings (60-Series)
· Added holding reliability

· Minimal dead volume Machined & Welded
· Maximum working temperature: 100°C (212°F)
· Maximum working pressure: 175 psi (12kg/cm2)
Reinforced High-Temperature, High-Pressure

Fittings (20-Series)
· Inner support ring for higher holding force

· Ideal for repeated use
· Maximum working temperature : 200°C (392°F) Welded Surface
· Maximum working pressure: 175psi (12kg/cm2) Welded Surface
High Performance, Temperature Flare Fittings

(11-Series)
· Gripper welded directly on the flared tube
· Superior holding strength & smooth liquid flow
Welded PFA Welded PFA
· Maximum working temperature: 200°C (392°F) 60-series fitting Flowmeter 60-series fitting
· Maximum working pressure:155psi (11kg/cm2)
Advantages of Fluoroplastic Tube fittings

FLOWELL fluoroplastic tube fittings offer reliable sealing and excellent holding strength at tubing interconnections
handling high-purity fluids and corrosive or caustic chemicals. Applications include the handling of processing chemi-
cals and DI wafer in semiconductor processing equipment, high-purity fluids in analytical systems in biotechnology and
other research areas, as well as medical devices, chemical processing and food processing.
Several patented design features are responsible for reducing dead-volume, which reduces fluid
entrapment (especially with viscous media) and fluid turbelence. Several design types are available
for general duty to high-pressure and high-temperature applications. Call us or visit our web site for
details specific to your application.
16
Fluid Handling
Ultimate Cyclone Flowmeters

High accuracy and reliability independent of fluid temperature
changes and pressure fluctuation
High purity, low particle.
Wide flow range (0.3~300 l/m), up to 135°C, dual turbine.
Below 1% reading of full flow range, ±0.1% repeatability guaranteed.
Netmotion offers the following: Definition of Turbine Flowmeter:

Many designs exist for turbine flowmeters.
Flowmeter for DI Water As fluid flows through the meter, a turbine rotates
(Part#: SCTF-PF) at a speed that is proportional to the flowrate.
• Uses no particle generating materials Signal generators, usually located within the rotor
• Extremely high electric resistivity materials itself, provide magnetic pulses that are electroni-
• Superior resistance to chemicals cally sensed through a pickup coil and calibrated to
read flow units. In some designs, an integral dis-
Flowmeter for CC Level DI Water play may show both the flowrate and the total flow
(Part#: SCTPF-PF) since power-up. Turbine meters are available for
• Uses no particle generating materials both gas and liquid flow.
• Extremely high electric resistivity materials
• Superior resistance to chemicals
Flowmeter for Solvent, High Temp. Flow Controller

(Part#s: SCTF-SL/ SCTSF-S6) Pump
• High resistance to acids and alkalis
• High durability under high pressure and temp.
• Corrosion resistance and easy to assemble
Flow Tank
Flow Meters
Flowmeter for Cooling Water Control
(Part#s: SCTF-AL/ SCTF-PC) Valve
• High performance at low cost
• Applicable to extreme low temperature fluids Typical Flowmeter Applications:
• Easy operation and light weight
Flowmeters are well suited for a wide variety of
Flowmeter for Chemical liquid and gas applications, including the following:
(Part#: SCTF-PE)
• High resistance to acids and alkalis · Measuring water and gas flow in plants or
• Excellent resistance to pressure fluctuation of labs
fluids with abrasive material · Monitoring chemical lines
• Superior accuracy against temperature · Purging instrument air lines (i.e., lines that
fluctuations use a valved meter)
· Monitoring filtration loading
· Monitoring flow in material-blending
Totalizer applications (i.e., lines that use a valved
Momentary flow indicator
(Part#s: SCTF-DI1/ SCTF-DI2) meter)
· Monitoring hydraulic oils (although this may
require special calibration)
· Monitor makeup water for food & beverage
Instant Display
Instantaneous Flow Quantity Indicator plants
(Part#s: SCTF-DL1/ SCTF-DL2) · Metering natural-gas consumption
· Monitoring such fluids as syrups, oils,
suspensions and pharmaceuticals
17
Fluid Handling
Contamination-Free Pressure Sensor

All-PFA Wetted Parts for Ultra-High Purity and Aggressive Fluids
Single-piece PFA internal fluid cavity
O-ring isolated from fluid contact
Measures differential pressures to 150 psig
Accuracy and reliability to ±1% FS (LHR)
1/4, 3/8 and 1/2-inch tube or flare fitting connection
4-20mA, 0-5v, 0-10v or 1-5v output signal
Integrated leak detector
High-purity pressure sensors use PFA fittings and non-metallic dia- patibility and virtually no particle and ionic contamination.
phragms for DI water and chemical handling applications. The PFA
fluoropolymer is compatible with virtually all fluids, and produces mini- Wafer cleaning systems use fluids such as hydrofluoric, hydro-
mal particulate and minimal ion elution. Many other "high-purity" pres- chloric, ammonia hydroxide, ultra-pure water and hydrogen per-
sure sensors use o-rings and diaphragms of materials that can add oxide. Not all are compatible with all pressure sensors because of
particulate and ionic extractables into the system. ion contamination.
The TEM-TECH SE3200 and SE3300 pressure sensors are all-PFA In wafer processing and cleaning tools, the process fluid sup-
wetted, seal-less pressure sensors. Being constructed from a single ply pressure is monitored to assure that an adequate fluid supply
piece of high-purity PFA, they eliminate fluid contact with the o-ring is being delivered to the tool.
and eliminate any potential leak path that could allow outside con-
taminants into the pure fluid. In CMP (chemical mechanical polishing), monitoring system
pressure can determine if a filter is clogged or flowing efficiently.
APPLICATIONS
The TEM-TECH pressure sensors are used wherever there is a re- In chemical storage, the hydrostatic head pressure can be mea-
quirement for accurate pressure measurements, chemical com- sured to determine the volume of liquid present.
Physical Movement
Electrical Output
What are Pressure Sensors?
Pressure Sensing P Sensing Transduction Signal V.
Pressure is sensed by mechanical elements such as plates, shells, Element Element Condition Output
and tubes that are designed and constructed to deflect when pres-
sure is applied. This is the basic mechanism converting pressure The typical pressure sensor has three functional blocks
to physical movement. Next, this movement must be transduced
A C E
to obtain an electrical or other output. Motion Motion
Motion
Pressure Pressure
Sensing Elements Pressure
The main types of sensing elements are Bourdon tubes, diaphragms, Motion Motion
capsules, and bellows . The Bourdon tube is a sealed tube that B D F
Motion
deflects in response to applied pressure. All except diaphragms pro- Pressure
vide a fairly large displacement that is useful in mechanical gauges Pressure
Pressure
and for electrical sensors that require a significant movement.
The basic pressure sensing element can be configured as a C-
shaped Bourdon tube (A); a helical Bourdon tube (B); flat dia-
phragm (C); a convoluted diaphragm (D); a capsule (E); or a
How Do Pressure Sensors Work? set of bellows (F).
The Pressure Sensor can be used to monitor pressure changes in experi-

ments. It can also be used to monitor reaction rates as a gas is produced in
Pressure Display
a chemical reaction. Vapor pressure of various liquids and solutions can be
monitored to show the relationship between vapor pressure and absolute
temperature. Pressure Sensor can also be used to monitor changes in the
partial pressure of oxygen or carbon dioxide gases in an enclosed atmo-
Fitting sphere.
Pipe line Pressure Sensor Figure on the left illustrates one example of how the pressure sensor is set
up. Many pressure sensors are set up for absolute pressure measurement,
so one side of the membrane is a vacuum. The sensor produces an output
voltage which varies in a linear way with absolute pressure. It includes spe-
cial circuitry to minimize errors caused by changes in temperature.
18
Fluid Handling
Compact Liquid Leak Sensor

85.5mm
8mm • Monitors resistance between two sensing bands

• Detects leakage of water to chemical liquids with
low conductivity
12.8mm
• Low-voltage AC signal to the sensing band to
prevent electrical corrosion
• Polypropylene sensing band may be cleaned and
Ultra Compact! reused after leak detection
Coolant Tank
Application: To detect water contamination in the coolant tank in the chiller
device (To detect leakage from heat exchanger).
Reason for Detection: To prevent changing the properties of or causing deterioration
Leak Sensor of the coolant.
Output to
Alarm or PLC To prevent corrosion of the tank pipes.
High-Pressure
Advantages: Sometimes the contaminant is pure water, so it is necessary to
Pump Outlet be able to consistently detect liquid with a higher resistance.
To cope with space-saving for panel mounting.
Metal Plate Cleaning Device
Application: To detect the pure water level in the cleaning tank during the plating
tank cleaning
Reason for Detection: To prevent product defects caused by too much or too little cleaning
fluid resulting in inadequate cleaning and to prevent damage or
short-circuiting of the cleaning device.
Advantages: To consistently detect the pure water used for cleaning.
Leak Sensor
Beverage Production Equip.

Application: To detect leakage and spillage in and outside devices that fill soda
and alcohol containers.
Reason for Detection: To prevent damage and short-circuiting of equipment and to prevent
product defects.
Advantages: To cope with the space-saving for panel mounting. As part of the
beverage leakage prevention program.
Leak Sensor
Ordering information
Description Item No. Specifications
OMRON Liquid Spill Sensor F0316PE10 Ambient Temperature Operating: -10ºC to 55ºC
Storage: -25ºC to 65ºC
Sensing Band,1-meter F0316PE1
(with no icing or condensation)
Sensing Band,2-meter F0316PE2 Ambient Humidity Operating: 45% to 85%
Sensing Band,5-meter F0316PE5 Storage: 25% to 85%
Sensing Band,25-meter F0316PE25 (with no icing or condensation)
Insulation Resistance 10MΩ at 100VDC between case and current-carrying parts
Terminal Block F0320
Dielectric Strength 1,000 VAC at 50/60 Hz for 1 min between case and current carrying parts
Band Stickers w/Adhesive F0326PE Power Consumption 1VA max.
Sensor Amplifier K7LAT50 Response Time Operate: 800ms max.
DIN Rail Socket P2RF08E Release: 800ms max.
Weight Approx. 14g.
19
Wafer and Mask Handling Tools
Non-Metallic Tweezers
Manual Tweezers for Semiconductor Wafer, Mask and Square-Substrate Handling
M100-150L (6”) • Unique patent pending design ensures handling of delicate semicon-
ductor wafer and mask securely without excessive force
• The surfaces of a wafer/mask are made of non-metallic material and
won’t scratch like the conventional metal tweezers.
• Area that contacts wafer/mask surfaces is optically-polished to reduce
surface particle counts.
M100-100 (4”) M100-200L (8”) M100-300L (12”)

(with lockable lever)
Mask and Square Substrate Handling Tool
• Handles 4” x 4” and 6” x 6” square Alumna substrate and

lithography mask substrates
• Lockable mechanism adds security
• Optically polished to reduce surface paticles
• Withstand up to 130°C
• Low particle emission and chemical compatibility
Item Description and Pricing.

Please call for quantity discount ~ 1-800-790-7837 (510)440-8040
Description PartNo. Quantity 1-9 Best Wands for your Wafers & Masks!
ESD PEEK Manual Wand for 4” E100-100 $68.94
PEEK Manual Wand for 4” M100-100 $68.94
Lockable PEEK Manual Wand 6” M100-150L $159.09
Lockable PEEK Manual Wand for 8” M100-200L $159.09
Lockable PEEK Manual Wand for 12” M100-300L $212.12
PPS Manual Wand for 4” M110-100 $63.64 Our unique patent-pending wand with lock-
PPS Manual Wand for 5” M110-125 $68.94 able lever is safe, durable and convenient to
PPS Manual Wand for 6” M110-150 $74.24 use. NetMotion offers wands for high tem-
PPS Manual Wand for 8” M110-200 $79.55 perature and/or ESD Safe applications. Good
Vespel + SUS Wand for 6” M800-200N $233.33 for 4” through 12” wafers and 4”x4” and 6”x6”
Vespel + SUS Wand for 6” M800-200S $233.33 masks/ square substrates.
PEEK Wand for Masks M100-4x4L Call Us
PEEK Wands for Masks M100-6x6L Call Us
20
Wafer Handling Tools
Vacuum Wands For Wafers

• Our unique valve ensures reliable suction and release of a semicon-
ductor wafer.
• The well polished inner wall of the valve minimizes particle generation.
• The optically polished wafer tip provides excellent adhesion to a wafer.
• The wand body can be easily detached from the tubing.
Tip Part# 92-CP

Tip Part# 90-CP
Conductive-PEEK
Conductive-PEEK
C-Series Wand
F Series Wand with
Tip Part#05-3F with Conductive PEEK
PCTFE PEEKTM Wafer Tip Wafer Tip
Vacuum Wand Parts & Accessories 1. Wand Body
2. Wand Tips
3. Wand Stand (Desk or Wall Mount)
4. Vacuum Pump with HEPA filter
5. Portable Leak Detector
6. ESD Safe Grounding Cable
7. ESD Safe Tubing
1. 2. 3. 4. 5. 6. 7.
For more information on parts/accessories, please refer to pages 27 & 32
Call for quantity discounts 1-800-790-7837
Item Description & Pricing
Description Connection(Metal Tube) Wand Body Price Per Unit
(more info~ page 34) Part No. (Q’ty 1-9)
ESD Safe Vacuum Wand Body With 100/106 C001-X $106.06
ESD Safe Vacuum Wand Body C001-Y $84.85
ESD Safe Vacuum Wand Body C001 $106.06
Teflon Vacuum Wand Body F001 $106.06
Teflon Vacuum Wand Body Connected to 100/105/106 F001-X $127.27
Teflon Vacuum Wand Body F001-Y $88.03
Teflon Vacuum Wand Body With 110/111 F002-Z $106.06
Teflon Vacuum Wand Body With 100/105/106 F002-X $106.06
Teflon Vacuum Wand Body F003-X $116.67
For more information on parts or pricing, please contact NetMotion at

1-800-790-7837 or [email protected]
21
Small Parts, Die Handling Tools
Vacuum Wands For Precision Parts

• ESD Safe Wand Available
• Interchangeable Tips
• Won’t Scratch like Metal Tweezers
• Picks Up All Shapes and Sizes
We have a wide selection of high quality vacuum wands and attachments/

tips available to choose from.
Nozzle: PCTFE, PEEK, Vespel, conductive PEEK, conductive nylon, stainless steel
Cup: Silicone rubber, viton rubber, conductive silicon rubber, Teflon
Slit-Tip: PCTFE, conductive nylon

For more information on parts/accessories, please refer to pages 21 & 27
Call for quantity discounts 1-800-790-7837
Description Width of the Tips (mm.) Tips Part No. Price (1-9pcs)
PCTFE Nozzle X = 0.3, 0.5, 0.7, 1.0, 1.2, 1.5, 2.0, 2.5, 3.0 21-X $10.61
PCTFE Nozzle X = 0.1, 0.2 22-X $15.91
PEEK Nozzle X = 0.3, 0.5, 0.7, 1.0, 1.2, 1.5, 2.0, 2.5, 3.0 23-X $10.61
Vespel Nozzle X = 0.3, 0.5, 0.7, 1.0, 1.2, 1.5, 2.0, 2.5, 3.0 24-X $21.21
Conductive PEEK Nozzle X = 0.1, 0.2 25-X $21.21
Conductive PEEK Nozzle X = 0.3, 0.5, 0.7, 1.0, 1.2, 1.5, 2.0, 2.5, 3.0 26-X $15.91
Conductive Nylon Nozzle X = 0.3, 0.5, 0.7, 1.0, 1.2, 1.5, 2.0, 2.5, 3.0 27-X $10.61
Stainless Steel Nozzle X = 0.3, 0.5, 0.7, 1.0, 1.2, 1.5, 2.0, 2.5, 3.0 31-X $10.61
Silicone Rubber Cup X = 2.5, 3.0, 3.5, 5.0, 8.0, 11.0, 15.0 41-X $10.61
Viton Rubber Cup X = 2.5, 3.0, 3.5, 5.0, 8.0, 11.0, 15.0 42-X $10.61
Conductive Silicone Rubber Cup X = 2.5, 3.0, 3.5, 5.0, 8.0, 11.0, 15.0 43-X $10.61
Teflon Cup X = 2.5, 3.0, 3.5, 5.0, 8.0, 11.0, 15.0 45-X $10.61
Teflon Cup X = 20.0, 25.0, 30.0 46-X $26.52
PCTFE Slit Tip X = 3.0, 4.5, 6.0 51-X $21.21
Conductive Nylon Slit Tip X = 3.0, 4.5, 6.0 54-X $26.52
Vacuum Wand Kit & Accessories
• Small Die • Fiber Optics • Electronics - Multipurpose • Electronics - (FLAT)
• Large Die • Fine Wire • Electronics - (SMD) • Flat Panels
• Lenses • Contact Lenses • Jewelry • Watch and Camera
1. Wand Body
2. Wand Tips (See Below)
1. 2. 3. 4. 5. 6. 7. 7. ESD Safe Tubing
Small Semicondcutor Die Kit Fiber-Optic or Fine Wire Handling Kit

For die approximately 500 micron or smaller; ESD safe. Smaller tips are available ESD Safe
Kit PartNo. Description Kit Part No. Description
C002 Conductive nylon die/small parts handling vac wand body, NO C002 Conductive nylon die/small parts handling vac wand body, NO
25-0.1 ESD safe conductive PEEK nozzle, 0.1mm 54-4.5 ESD safe slit-tip, 4.5mm
26-0.3 ESD safe conductive PEEK nozzle, 0.3mm 851-L Coiled ESD safe tubing, 4mm ID, 2 meters extended
851-L Coiled ESD safe tubing, 4mm ID, 2 meters extended 858 Static dissipative grounding kit for FV10/30/60 pumps
858 Static dissipative grounding kit for FV10/30/60 pumps 659 Horizontal desktop stand for NO* wands, with vac shut-off
659 Horizontal desktop stand for NO* wands, with vac shut-off FV-60 Clean room vacuum pump, 600mmHg, 2.5 l/min, HEPA
FV-30 Clean room vacuum pump, 300mmHg, 2.5 l/min, HEPA
NO* - Normally open valve
22
Precision Parts Handling Tools
Vacuum Wands For Precision Parts

Large Semiconductor Die Kit Glass Lens Kit
For die 500 micron or larger; ESD safe. For very large die, consider suction cups and/or Suitable for a wide range of lens sizes.
small wafer wands. Kit PartNo. Description
Kit Part No. Description F002 PTFE small parts handling vac wand body, NO
C002 Conductive nylon die/small parts handling vac wand body, NO 41-2.5 Silicone rubber cup, 2.5mm
26-0.3 ESD Safe conductive PEEK nozzle, 0.3mm 41-5.0 Silicone rubber cup, 5.0mm
26-0.5 ESD safe conductive PEEK nozzle, 0.5mm 41-11.0 Silicone rubber cup, 11.0mm
26-0.7 ESD safe conductive PEEK nozzle, 0.7mm 41-15.0 Silicone rubber cup, 15.0mm
851-L Coiled ESD safe tubing, 4mm ID, 2 meters extended 851-L Coiled ESD safe tubing, 4mm ID, 2 meters extended
Multi-purpose Electronic Kit - ESD Safe Contact Lens Kit

Includes our higher pressure vacuum pump and wide variety of tips for most applications. Great for picking up contact lenses.
Kit Part No. Description Kit Part No. Description
C002 Conductive nylon die/small parts handling vac wand body, NO F002 PTFE small parts handling vac wand body, NO
26-0.3 ESD Safe conductive PEEK nozzle, 0.3mm 41-2.5 Silicon rubber cup, 2.5mm
26-1.0 ESD safe conductive PEEK nozzle, 1.0mm 41-5.0 Silicon rubber cup, 5.0mm
43-2.5 ESD safe conductive silicone rubber cup, 2.5mm 851-L Coiled ESD safe tubing, 4mm ID, 2 meters extended
43-5.0 ESD safe conductive silicone rubber cup, 5.0mm 659 Horizontal desktop stand for NO* wands, with vac shut-off
43-11.0 ESD safe conductive silicone rubber cup, 11.0mm FV-10 Clean room vacuum pump, 3 to 15 kPa, 2.7 l/min
43-15.0 ESD safe conductive silicone rubber cup, 15.0mm
54-6.0 ESD safe slit-tip, 6.0mm wide
851-L Coiled ESD safe tubing, 4mm ID, 2 meters extended
858 Static dissipative grounding kit for FV10/30/60 pumps
659 Horizontal desktop stand for NO* wands, with vac shut-off
Surface Mount Electronics Kit Jewelry Kit

For all SMD packages; ESD safe. Smaller and larger tips available. For jewelers, goldsmiths, and users with similar applications; ESD safe.
26-0.3 ESD Safe conductive PEEK nozzle, 0.3mm 31-0.1 Stainless steel nozzle, 0.1mm
26-1.0 ESD safe conductive PEEK nozzle, 1.0mm 23-0.5 PEEK nozzle, 0.5mm
43-2.5 ESD safe conductive silicone rubber cup, 2.5mm 23-1.0 PEEK nozzle, 1.0mm
43-5.0 ESD safe conductive silicone rubber cup, 5.0mm 41-2.5 Silicone rubber cup, 2.5mm
851-L Coiled ESD safe tubing, 4mm ID, 2 meters extended 41-5.0 Silicone rubber cup, 5.0mm
858 Static dissipative grounding kit for FV10/30/60 pumps 851-L Coiled ESD safe tubing, 4mm ID, 2 meters extended
659 Horizontal desktop stand for NO* wands, with vac shut-off 858 Static dissipative grounding kit for NO wands, with vac shut-off
FV-30 Clean room vacuum pump, 300mmHg, 2.5 l/min, HEPA 659 Horizontal desktop stand for NO* wands, with vac shut-off
FV-10 Clean room vacuum pump, 3 to 15 kPa, 2.7 l/min
Flat Packaged Electronic Component Handling Kit Watch and Camera Kit
For most semiconductor packages, ESD safe. For jewelers, goldsmiths, and users with similar applications; ESD safe.
KitPart No. Description Kit Part No. Description
43-15.0 ESD safe conductive silicone rubber cup, 15.0mm 31-0.1 Stainless steel nozzle, 0.1mm
851-L Coiled ESD safe tubing, 4mm ID, 2 meters extended 851-L Coiled ESD safe tubing, 4mm ID, 2 meters extended
858 Static dissipative grounding kit for FV10/30/60 pumps 858 Static dissipative grounding kit for NO wands, with vac shut-off
659 Horizontal desktop stand for NO* wands, with vac shut-off 659 Horizontal desktop stand for NO* wands, with vac shut-off
FV-30 Clean room vacuum pump, 300mmHg, 2.5 l/min, HEPA FV-30 Clean room vacuum pump, 300 mmHg, 2.5 l/min, HEPA
Flat Panel Kit Micro, Miniature, and Mechanical Assembly Kit

For lightweight flat-panel displays, etc., ESD safe. For jewelers, goldsmiths, and users with similar applications; ESD safe.
43-5.0 ESD safe conductive silicone rubber cup, 5.0mm 31-0.1 Stainless steel nozzle, 0.1mm
43-15.0 ESD safe conductive silicone rubber cup, 15.0mm 41-2.5 Silicone rubber cup, 2.5mm
851-L Coiled ESD safe tubing, 4mm ID, 2 meters extended 41-5.0 Silicone rubber cup, 5.0mm
858 Static dissipative grounding kit for FV10/30/60 pumps 851-L Coiled ESD safe tubing, 4mm ID, 2 meters extended
659 Horizontal desktop stand for NO* wands, with vac shut-off 858 Static dissipative grounding kit for NO* wands, with vac shut-off
FV-60 Clean room vacuum pump, 600mmHg, 2.5 l/min, HEPA 659 Horizontal desktop stand for NO* wands, with vac shut-off
FV-30 Clean room vacuum pump, 300 mmHg, 2.5 l/min, HEPA
23
Custom Parts & Lab Supplies
Bemcot Lint-Free Wipers

For wiping down
Why Bemcot Wipers? surfaces
• High Liquid Absorption

• High Liquid Preservation
• Antistatic For cleaning
• Excellent Heat Resistance screens
• Ecologically Safe
For cleaning
lab supplies
We offer masks too!
Bemcot wipers can be used in various industries: For wiping

Semiconductor, optical, medical, cosmetics, food & beverage, printed cir- spills
cuit boards, building maintenance, automobile, aircraft, LCD, magnetic tapes,
magnetic disks, nuclear, etc. They are excellent for wiping water, solvent,
oil, tools, equipment, PCB, glass, optics, etc.
Type Part No. Descrip

Fine Class Super CN For silicon wafer conveyer belt, vacuum instruments, splashed sensitizers, spilled
TR-7F
BM-Wiper water & chemicals, polarizing boards, print screens of liquid crystal sealant, etc.
PS-2
Regular Class M-3 IC, LSI, LCD, PCB, resistor, capacitor, coil, opt-electronic parts, ceramics, light
M-1 emitting diode, micro batteries, magnetic disk, magnetic tape, magnetic head,
S-2, Clean
Lint- Free
assembly, print, automobile, etc.
Labs & Assembly Clean-Wipe P For wiping magnetic heads, production marks, etc.
Roll Wipers Soldering machines, screen for screen printing, acrylic rolls of scanner printing,
Roll Wiper
surface before printing, etc.
Heavy Duty Bemlinen Larger and stronger than wipers for clean room use. As with a M-3, their
long-fiber composition provides reduced fiber fall-off making them a suitable
substitute for dustcloth and cotton.
Masks Hepaliese Mask Low-particle generating face mask for clean room use.
Ordering Information
Material Size Sheet/Bag Part No. Cost for 1-3 Cost in Clean Room
cases in US$ Cents Class
Cellulose 12.5x12.5cm 100/30 M3 191.67 6.4 100
Cellulose 7.5x7.5cm 150/40 M1 183.33 3 100
Cellulose 12.5x12.5cm 150/30 S2 208.33 4.6 100
Cellu/Polyproplene blend 12x7.5cm 50/20 Super CN 225 22 10-100
Cellu/Polyproplene blend 12x7.5cm 80/30 QT-8 258.33 11 10-100
Cellu/Polyproplene blend 12x7.5cm 80/30 NT 286.67 12 10-100
Cellulose 12x7.5cm 100/30 CT-8 300 10 10-100
Cellulose 12x7.5cm 80/30 EA-8 258.33 8.6 10-100
Cellulose 12x7.5cm 80/30 Super clean 225 9 10-100
Cellulose 12.5x12.5cm 150/20 TR-7 208.33 10 10-100
Cellulose 30x30cm 50/20 BM Wipe 366.67 37 1000
Cellulose 10x21cm 300/48 PS2 300 2 100
24
Custom Engineered Plastic Parts

NetMotion Inc. has partnered with Yohwa Company of Japan to supply custom machined and
fabricated components for prototype, low-volume and high-volume runs. Yohwa Company is one of
Japan’s largest, state-of-the-art manufacturers of precision-engineered plastic products.
Industries served: Why PEEK?

Semiconductor processing
Chemical processing PEEK (polyetherether ketone) is a high-strength polymer with excellent chemical resistance, low
particle and ion emission, and excellent machine-ability.
Telecommunications
Biomedical In chemical nozzles and manifolds, PEEK allows a system to be chemically compatible with a
Aerospace greater variety of chemical solvents. A PEEK vacuum chuck offers low backside contamination
Food processing and greater holding force in a compact package.
Materials:
PTFE
PFA
FEP
PEEK
UHMW polyethylene
VESPEL polyimide
PTFE
PTFE
(Valve Manifold)
(Diaphragm) PEEK
(Pump Assembly)
PFA- Perfluoroalkoxy PTFE - Polytetrafluoroethylene
• Elasticity of rubber combined with toughness & durability of metal • Inert to virtually all chemicals
• Abrasion resistance • Superior non-stick properties
• Reduce plant maintenance and cost • Soil and stain repellant for fabric and textile products
• Oil and solvent resistant • Commonly found in aerospace, communications,
Polyimides electronics, industrial, process, and architecture
• Heat and chemical resistance Vespel Polyimide
• Resistant to oils and greases PTFE
(Valve Body Assembly) • Heat and wear resistance
• Outstanding radiation resistance
• Low coefficient of friction
• Commonly found in circuit boards, insulation,
• Excellent dimensional stability and good toughness
fibers for protective clothing, composites, and adhesives
• Superior cleanliness
• Outstanding radiation resistance
• Good mechanical strength
• High dielectric strength
PTFE • High compressive strength
(Bellows) PEEK
• Low outgassing
(Assembly)
25
Vacuum Wands for Precision Parts

• ESD Safe Wand Available
• Interchangeable Tips
• Won’t Scratch like Metal Tweezers
• Picks Up All Shapes and Sizes
We have a wide selection of high quality vacuum wands and attachments/

tips available to choose from.
Nozzle: PCTFE, PEEK, Vespel, conductive PEEK, conductive nylon, stainless steel
Cup: Silicone rubber, viton rubber, conductive silicon rubber, Teflon
Slit-Tip: PCTFE, conductive nylon
Please refer to Page 21 and 27 for wand body and accessories. Call for Price Discount! 1-800-790-7837.
Description Width of the Tips (mm.) Tips Part No. Price (1-9pcs)
PCTFE Nozzle X = 0.3, 0.5, 0.7, 1.0, 1.2, 1.5, 2.0, 2.5, 3.0 21-X $10.61
PCTFE Nozzle X = 0.1, 0.2 22-X $15.91
PEEK Nozzle X = 0.3, 0.5, 0.7, 1.0, 1.2, 1.5, 2.0, 2.5, 3.0 23-X $10.61
Vespel Nozzle X = 0.3, 0.5, 0.7, 1.0, 1.2, 1.5, 2.0, 2.5, 3.0 24-X $21.21
Conductive PEEK Nozzle X = 0.1, 0.2 25-X $21.21
Conductive PEEK Nozzle X = 0.3, 0.5, 0.7, 1.0, 1.2, 1.5, 2.0, 2.5, 3.0 26-X $15.91
Conductive Nylon Nozzle X = 0.3, 0.5, 0.7, 1.0, 1.2, 1.5, 2.0, 2.5, 3.0 27-X $10.61
Stainless Steel Nozzle X = 0.3, 0.5, 0.7, 1.0, 1.2, 1.5, 2.0, 2.5, 3.0 31-X $10.61
Silicone Rubber Cup X = 2.5, 3.0, 3.5, 5.0, 8.0, 11.0, 15.0 41-X $10.61
Viton Rubber Cup X = 2.5, 3.0, 3.5, 5.0, 8.0, 11.0, 15.0 42-X $10.61
Conductive Silicone Rubber Cup X = 2.5, 3.0, 3.5, 5.0, 8.0, 11.0, 15.0 43-X $10.61
Teflon Cup X = 2.5, 3.0, 3.5, 5.0, 8.0, 11.0, 15.0 45-X $10.61
Teflon Cup X = 20.0, 25.0, 30.0 46-X $26.52
PCTFE Slit Tip X = 3.0, 4.5, 6.0 51-X $21.21
Conductive Nylon Slit Tip X = 3.0, 4.5, 6.0 54-X $26.52
Vacuum Wand Kit & Accessories
• Small Die • Fiber Optics • Electronics - Multipurpose • Electronics - (FLAT)
• Large Die • Fine Wire • Electronics - (SMD) • Flat Panels
• Lenses • Contact Lenses • Jewelry • Watch and Camera
1. Wand Body
2. Wand Tips (See Below)
1. 2. 3. 4. 5. 6. 7. 7. ESD Safe Tubing
Small Semicondcutor Die Kit Fiber-Optic or Fine Wire Handling Kit

For die approximately 500 micron or smaller; ESD safe. Smaller tips are available ESD Safe
Part No. Description Part No. Description
C002 Conductive nylon die/small parts handling vac wand body, NO C002 Conductive nylon die/small parts handling vac wand body, NO
26-0.3 ESD safe conductive PEEK nozzle, 0.3mm 851-L Coiled ESD safe tubing, 4mm ID, 2 meters extended
851-L Coiled ESD safe tubing, 4mm ID, 2 meters extended 858 Static dissipative grounding kit for FV10/30/60 pumps
More vacuum wand kits available - Please refer to page 23 for more!
26
Vacuum Pump & Wand Accessories

• Built-in inlet and outlet HEPA filters
• Oil-free for cleanroom & lab envionments
• High reliability
• Designed to minimize noise generation
• Nylon body for static protection
• Compact design
FV-30 FV-60
Part No. FV-10 FV-30 FV-60

Pumping Power 2.8 l/min 2.5 l/ min 2.5 l/ min
Ultimate Pressure -3kPa to -15kPa -300 mmHg -600 mmHg
Power Requirement 100-120 VAC 100-200VAC 100-200VAC
Consumption Power 5.0 W 5.0 W 10.0 W
Dimensions(D x W x H)mm 155 x 72 x 54 mm 136 x 86 x 81 mm 136 x 88x 129mm
Weight of Pump 600 g 800 g 1250 g
Wafer Size Precision parts Up to 6” 8” & 12”
Price (Call for Q’ty discounts) $85.85/ea. $169.70/ea. $339.39/ea.
Wand Stands: Wall Mounted Wand Stands: Desktop
Part No. Material Body

NC NO NO+SW
651 Conductive
652 Nylon +
658* Acrylic
659* Resin
651 658 652 659
Replacement Parts Stands: Wall Mounted

100 101 Description Part No. Price/ea. 658*/659*
Vertical Position Wand Stand 651 $37.12
Horizontal Position Wand Stand 652 $42.42
110 HEPA Filter Kit for FV-30/60 808 $21.21
Inlet Filter for FV-10 809 $21.21
PFA Connector 812 $5.30
Conductive Nylon Connector 816 $5.30
111 131 PVC Double tubing for DuoVac 820 $63.64
ESD Safe Straight Tubing 100m 850-L $371.21
ESD Safe Straight Tubing 100m 850-M $371.21
ESD Safe Tubing 851-L $63.64
ESD Safe Tubing 851-M $63.64
130 200 812 Static Dissipative Grounding 858 $21.21
Leak Detector 901 $212.12 Leak Detector 901
901
• Leaks are detected by measuring the vacuum
level. The surface area where a wand tip is placed is
Accessories & Replacement Parts made of PPS (Polyphenylenesulphide)
• D:120 W:60 H:45(mm), Weight:350(g)
851-L 858
ESD Safe Tubing Static Dissipative
Grounding Cable
For more information, please see page 21

27
Other Products
Industry-Standard Ceramic End-Effectors

• Paddle and Fork Designs
• For 4”, 5”, 6”, 8” and 12” Wafers
• Vacuum and Non-vacuum
• High Temperature Resistance
• Chemical Resistance
• Durable and Reliable
• Integrated Vacuum Channel
Industry Standard Fork Design Sizes 4” ~ 8” Industry Standard Paddle Design Sizes 4” ~ 12”
Fork Design Paddle Design
Size Part Number
4” CEFV04FK
6” CEFV06FK
8” CEFV08FK
Why Use Ceramic?
Ceramics have superior
Type of Ceramic Purity Color Vacuum Non-Vacuum
mechanical, electrical, and
Alumina 99.5% White Yes Yes thermal properties ideal for
quality components. The
Alimina 99.6% Cream Yes Yes
durability of fine ceramics
Alumina 99.9% Dark Ivory No Yes makes it ideal for mechani-
cal and thermal loads that
Silicon
Carbide(SiC)
98.0% Black Yes Yes are abrasive and in chemi-
cally harsh environments.
Ceramic End Effector Properties
Properties Alumina Silicon Carbide(SiC)
Purity 99.9% 99.6% 99.5% 98.0%
Chemical Composition A1203 A1203 A1203 SiC
Color Dark Ivory Ivory White Black
Density(g/cm3) 3.95 3.94 3.94 3.14
Flexural Strength(kg/mm2) 40 38 45 51
Vicker Hardness HV 1,800 1,500 1,500 3,100
Young Ratio (10 x kg/mm )

4 2
3.9 4 3.9 4.2
Fracture Toughness mPa√m 3.5 4 4 3
Coefficient of Thermal
7.9 8 8 3.4
Expansion (10-6 °C)
Thermal Conductivity
(Cal/Sec/cm)
0.07 0.07 0.07 0.33 In robotics, an end effector is a device or
tool connected to the end of a robot arm.
Volume Resistivity (Ω x CM) >10-14 >10-14 >10-14 106 The structure of an end effector(see figure
Dielectric Constant 10.5 11 11.5 --
above), and the nature of the programming
and hardware that drives it, depends on the
Dissipation Factor
-- 8.0 4.8 -- intended task.
(10-4MHz)
Breakdown Voltage (Kv/mm) 15 13 15 --
28
Other Products
Non-Metallic PEEKTM Metric Screws

PEEK TM (polyetheretherketone) screws are ex-
tremely stable, chemical, wear and fatigue resistant.
NetMotion offers a full range of screws, nuts and
bolts for all your applications.
Excellent chemical resistance

Excellent heat & water resistance
Thermal-Shock Resistance
Wear and fatigue resistant
Excellent replacement for nylon, teflon, fiber,
and ceramic screws
WHY USE PEEKTM SCREWS?

If you need a fastener that is virtually non-corrosive, PEEK (Polyetheretherketone) Screws may be a superior
substitute for metal components and screws made from other plastics. This highly crystalline thermopIastic
maintains its properties under an extreme range of conditions, and it offers good wear resistance, low moisture
absorption, and excellent hydrolysis resistance. It withstands high temperature levels, even under sustained
pressure, and with a continuous use temperature rating of 482°F (250°C), it can be sterilized repeatedly without
damage to the material. It is also known for its excellent chemical resistance (organic, inorganic solvents, aque-
ous reagents) and high mechanical strength, including good flexural, tensile, impact and fatigue properties.
If you are looking for injection molded, non-metallic screws. These “off-the-shelf,” fasteners are made with PEEKTM
polymer, a high performance thermoplastic. The screws are ideal for assembling semiconductor production equip-
ment, and in applications where stainless steel corrodes or other plastics lack sufficient strength.
Available in PEEKTM - Flat Head, Pan Head, Hex Bolts, Socket Head, Nuts & Washers
Flat Head Pan Head Hex-Slotted Hex Head & Nut Hex Head
Type Size
Flat Head Screw (Philip) M2, M2.6, M3, M4, M5, M6, M8
Pan Head Screw (Philip) M1.7, M2, M2.6, M3, M4, M5, M6, M8
Hex Head Screw (slotted or none) M4, M5, M6, M8, M10, M12
Socket Head Screw M3, M4, M5, M6, M8
Nut M2, M2.6, M3, M4, M5, M6, M8, M10, M12
Washer M3, M4, M5,M6, M8, M10, M12
29
Other Products
Ruby Capillaries
For Ultra-Smooth Wire Bonding
The technology of the semiconductor component integration is rapidly
advancing to a degree not previosly believed possible. High integration
demands both existing manufacturing precision and high product relability
at low cost.
Ruby capillaries offers the best solution for high endurance, cost-effec-
tive, highly stabilized bonding. Compring to ceramic capillary nozzles,
ruby capillaries are smoother on surface than ceramic capillaries. Along
with lower friction coefficient, the ruby capillaries can withstand higher
temperature than other materials available on the market.
German Degussa
Characteristics Ruby Ceramic
Sintered Al2O3
Chemical Composition Al2O399.0%Cr2O31.0% Al2O3 99.8% Al2O3 99.9%
Color Red White White
Crystal Size Single Crystal Polycrystal 3µm Polycrystal 3µm
Specific Gravity 3.99 3.95 3.96
Water Absorption Rate 0.000% 0.001% 0.001%
Melting Point 2050°C 2000°C 2050°C
Specific Heat 25°C 0.18Cal/g 0.20Cal/g 0.206Cal/g
Inches Hardness Mohs 9 Mohs 9 Mohs 9
Expansion Coefficient 4.4 x 106 kg/cm2 4.4 x 106 kg/cm2 3.67 x 106 kg/cm2
Lapped Surface <0.1µm <25µm <25µm
Thermal Conductivity 25°C 0.065Cal/sec cm°C

.
0.05Cal/sec cm°C
.
0.049Cal/sec.cm°C
Electric Resistance at 500°C 1.3x1010 at 500°C 1.3x1010 at 500°C 1.3x1010
Thermosonic Capillaries Thermocompression Capillaries
30
Other Products
Semiconductor Test Wafers

High grade semiconductor test wafers
NetMotion provides high quality test wafers

(single layer, multilayer, and multiple thin lay-
ers) to the semiconductor industry. We offer
wafer size ranging from 1” ~12”. Customized
process readily available.
Flexibility: Completely flexible with customer designs. Available for any quantity at any delivery schedule.
Quality: Highly uniform wafer. Complete information in data sheet. Test and trial wafers available.
Reliability: Stringent production control.
Delivery: Guaranteed on-time delivery.
Dopant: N Type - Phosphorous, Antimony, Arsenic
P Type - Boron
Other dopants available
Orientation: <100>, <111>, <110>, Others
Diameters: 25.4mm (1 inch) 125mm (5 inch)
50mm (2 inch) 150mm (6 inch)
Partial Availability List
Item Description Grade
2" ANY< I 00> Any res., 20-22 mils Test
2" N<100> 1-20 ohm-cm., 10- 12mils Test
2" P<100> 1-20 ohm-cm., 10-12mils Prime
3" P<100> Any res., 23-25 mils Test
3" N<100> 1-10 ohm-cm., 13-17 mils Test
3" N<100> I-10 ohm-cm., 14-16 mils Prime
3" P<100> 1-10 ohm-cm., 13-17 mils
3" P<111> 1-10 ohm-cm., 13-17 mils
Test
Test
Basic Wafer Process
4" N<100> .005-.02 ohm-cm., 475-575µm Test Sorting Polishing
4" N<100> 10-20 ohm-cm., 475-575µm Test
4" N<100> 1-5 ohm-cm., 475-575µm Test Separated by flats 100% inspection for
Type & Resistivity
4" N<100> 5-10 ohm-cm., 500-550µm Prime
4" N<100> 5-10 ohm-cm., 475-575µm Test Type Verified
Thickness separated
Type gauges are tested before every sort
4" N<111> .005-.02 ohm-cm., 475-575µm Test (Typical sort is 1,000sl.) for polishing
4" P<100> 10-20 ohm-cm., 500-550µm Prime
4" P<100> 10-20 ohm-cm., 475-575µm Test Orientation Verified First Stage Polishing
4" P<100> 1-10 ohm-cm., 500-550µm Prime
4" P<100> 1-5 ohm-cm., 475-575µm Test Thickness Sort
4" P<100> 5-10 ohm-cm., 500-550µm Prime Thickness gauges are Final Polish
calibrated every 200 wafers
4" P<111> 1-10 ohm-cm., 475-575µm Test
5" N<100> 10-20 ohm-cm., 575-675µm Test Resistivity Sort
5" N<100> 1-5 ohm-cm., 575-675µm Test Resistivity gauges are calibrated RCA Clean
every time the specification changes
5" N<100> 5-10 ohm-cm., 575-675µm Test
5" P<100> 10-20 ohm-cm., 575-675µm Test
5" P<100> 5-10 ohm-cm., 575-675µm Test Production Lot# Scrub
Assigned
5" P<100> 5-10 ohm-cm., 575-675µm/2 FT Test
6" N<100> 20-30 ohm-cm., 625-725µm Test
To Polish Cassetted
6" N<100> 5-10 ohm-cm., 625-725µm Test
6" P<100> 10-20 ohm-cm., 625-725µm Test
6" P<100> 20-30 ohm-cm., 625-725µm Test Cleanliness Inspection
100%
6" P<100> 3-10 ohm-cm., 625-725µm Test
8" P<100> 10-20 ohm-cm., 675-775µm Test For more information, please
4% AQL Inspection
8" P<100> 10-20 ohm-cm., 700-750µm Prime contact us at 1-800-790-7837 or for all Specifications
8" P<100> 1-10 ohm-cm., 675-775pm Test e-mail [email protected]
Cassettes bagged
12" P<100> 1-100 ohm-cm., 750-800µm Mechanical and labeled
12" P<100> 1-100 ohm-cm., 750-800µm Particle
31
Vacuum Wand Accessories
Wand Stands: Wall Mounted Wand Stands: Desktop
Part No. Material Body

NC NO NO+SW
651 Conductive
652 Nylon +
658* Acrylic
659* Resin
651 658 652 659
Accessories Stands: 658*/659*

Description Part No. Price Wall Mounted
HEPA Filter Kit for FV-30/60 808 $21.21 FV-60
Inlet Filter for FV-10 809 $21.21
PFA Connector 812 $5.30 FV-60
Conductive Nylon Connector 816 $5.30
PVC Double tubing for DuoVac 820 $63.64 Vacuum Pump (see pg 27)
Metal Tube Connection
ESD Safe Straight Tubing 100m 850-L $371.21 Mode Connection Type
ESD Safe Straight Tubing 100m 850-M $371.21
100 X Screw
ESD Safe Tubing 851-L $63.64
ESD Safe Tubing 851-M $63.64 106 X Push-in
Static Dissipative Grounding 858 $21.21 110 Z Push-in
Leak Detector 901 $212.12 111 Z Screw
Tip Description Connection (see above) Wand Tip Price Per Unit
for wafer inch sizes Part No. (Q’ty 1-9)
PCTFE Tip for 6" Connected to 106/110 01-3F $31.86
PEEK Tip for 6" Connected to 106/110 01-PK $37.12
Wafer Wand Tips
Vespel Tip for 6" Connected to 106/110 01-VP $90.15
PCTFE Tip for 8" Connected to 100/111 05-3F $53.03 901
PEEK Tip for 8" Connected to 100/111 05-PK $58.33 Leak Detector
PCTFE Tip for 6" 11-3F $47.73
PEEK Tip for 6" 11-PK $58.33
Stainless Steel Tip for 5" Connected to 105 13-SS $106.06 858
PCTFE Tip for 8" 14-3F $79.55
PEEK tip for 8" 14-PK $90.15 Static Dissipative
PCTFE Tip for 12" 15-3F $185.61 Grounding Cable
PEEK Tip for 12" 15-PK $196.21
Vespel Tip for 12" 15-VP $318.18
PCTFE Right Angled Tip for 8" Connected to 100/111 3-3F $127.27
Conductive PEEK Tip for 5" 90-CP $42.42
Conductive PEEK Tip for 5" Connected to 106 95-CP $37.12
Conductive PEEK Tip for 8" 98-CP $79.55 851-L
Conductive PEEK Tip for 12" 99-CP $137.88 ESD Safe Tubing
32
INDEX PAGE
NetMotion, Inc. Table of Contents 2
MOTION CONTROL
Your Design Solutions Provider! AC Servo Motor & Amplifier

DC Servo Motor & Amplifier
Stepper Motor
3-4
5-6
7
More on Motion Control 8-9
Stepper Motor Driver 10
Call 1-800-179-7837 or Stepper Motor Controller 11
Click on www.NetMotion.com today! Actuator & Slide 12
Sensor 13
FLUID HANDLING
Contact Us Fluorocarbon & PEEK Tubing 14-15
Fluorocarbon Fittings 16
Turbine Flow Meter 17
If you are outside US/Canada, call 510 440-8040 PFA Pressure Sensor 18
For Customer Service, Call Monday through Friday Liquid Leak Sensor 19
8:00am - 5:00pm (Pacific Time) WAFER, MASK, & PRECISION-
PARTS HANDLING
Manual Wand 20
PHONE 800 790-7837
Vacuum Wand for Wafer and die 21
Vacuum Wand for Precision Parts 22
FAX 510 440-8043 Vacuum Wand Kits 23
Vacuum Wand Accessories 32
MAIL: NetMotion, Inc. CUSTOM & LAB SUPPLIES
4160 Technology Drive Bemcot Lint-Free Wipers 24
Fremont, CA 94538 Custom Engineered Parts 25
U.S.A. Vacuum Wands and Tips 26
Vacuum Pumps and Accessories 27
E-Mail: [email protected] OTHERS
Ceramic End-Effector 28
PEEK Metric Screws 29
On-Line: www.netmotion.com Ruby Capillaries for Wire Bonding 30
Semiconductor Test Wafers 31
Index 33
Credit Cards Accepted!
Back Cover 34
General Terms & Conditions

WARRANTIES AND DISCLAIMERS: NETMOTION warrants the Products to be free of defects in material and workmanship for
a period of thirty (30) days from the date of shipment. If any models or samples were shown to Buyer, such models or samples were
used merely to illustrate the general type and quality of the Products and not to represent that the Products would necessarily conform
to said models or samples. Any products found to be defective must be shipped to NETMOTION with all shipping cost paid by Buyer
or offered to NETMOTION for inspection and examination. NETMOTION reserves the right to refuse returns for non-stocking parts
unless they are found to be defective. As for restockable parts, upon examination by NETMOTION, NETMOTION will refund the
purchase price less 20% restocking fee(if the item was found to be in perfect working condition and is within the 30 days from the date
item was shipped) of, or repair, or replace at no charge any products found to be defective. The warranty does not apply to any defects
resulting from the action of the Buyer, including but not limited to improper installation, improper interfacing, improper repair, unautho-
rized modification, misapplication, and mishandling, such as exposure to excessive current, heat, coldness, moisture, vibration or
outdoor air. Components which were are not warranted.
NETMOTION is pleased to offer suggestions on the use of its various products. They are only suggestions, and it is Buyer’s
responsibility to ascertain the fitness of the products for Buyer’s intended use. NETMOTION will not be responsible for any damages
that result from the use of the products. OTHER THAN AS STATED HEREIN, THE PRODUCTS AND SAMPLES (“PRODUCTS/SAMPLES”)
ARE PROVIDED WITH NO OTHER WARRANTIES WHATSOEVER. ALL EXPRESS, IMPLIED, AND STATUTORY WARRANTIES, IN-
CLUDING, WITHOUT LIMITATION, THE WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE, AND NON-
INFRINGEMENT OF PROPRIETARY RIGHTS, ARE EXPRESSLY DISCLAIMED. IN NO EVENT SHALL NETMOTION AND ITS AFFILI-
ATED ENTITIES BE LIABLE TO ANY PERSON OR ENTITY FOR ANY DIRECT, INDIRECT, INCIDENTAL, PUNITIVE, SPECIAL OR
CONSEQUENTIAL DAMAGES (INCLUDING, WITHOUT LIMITATION, ANY DAMAGES RESULTING FROM LOSS OF USE, BUSINESS
INTERRUPTION, LOSS OF INFORMATION, LOSS OR INACCURACY OF DATA, LOSS OF PROFITS, LOSS OF SAVINGS, THE COST OF
PROCUREMENT OF SUBSTITUTED GOODS, SERVICES OR TECHNOLOGIES, OR FOR ANY MATTER ARISING OUT OF OR IN
CONNECTION WITH THE USE OR INABILITY TO USE THE PRODUCTS, EVEN IF NETMOTION OR ONE OF ITS AFFILIATED ENTI-
TIES WAS ADVISED OF A POSSIBLE THIRD PARTY’S CLAIM FOR DAMAGES OR ANY OTHER CLAIM AGAINST BUYER. In some
jurisdictions, some ofthe foregoing warranty disclaimer or damage limitations may not apply.
33
NetMotion is Your Design Solutions Provider
Look for Application Notes Throughout the Catalog
Vaccum Wands Systems
Pass this catalog on to a colleague.
for Wafers, Masks, and
Please route to: Precision Parts Handling
Purchasing/ Procurement
• Reliable suction and release of objects
• Minimized particle generation
Engineering • Polished tips providing excellent adhesion
• Pump and other accesories available
• Easy to use
Manager:
_______________________ (See pages 21-23)
Others:
_______________________
AC/DC Servo Motor and
If you would like additional copies, Amplifiers ~ Wide
please call: 1-800-790-7837 or Selection Available!
e-mail: [email protected] • Fast Response
• Compact Design
• High Torque
• Washdown
•CE & TUV Marked
Call us today! 1-800-790-7837
(See pages 3-6)

U.S.A.
Fremont, CA 94538
4160 Technology Drive
NetMotion, Inc.
Lint-Free Wipers and

Masks for your everyday
needs!
• Superb Liquid Absorption
• Superb Liquid Preservation
• Antistatic
• Excellent Heat Resistance
•Ecologically Safe
(See page 24)
High-Grade
Semiconductor Test Wafers
NetMotion provides high quality test

wafers ( single layer, multilayer, and
multiple thin layers) to the semicon-
ductor industry. We offer wafer size
ranging from 1” ~12”. Different Grades
being offered. Customized process
readily available.
PRESORTED
NETMOTION
STANDARD
U.S.POSTAGE
(See page 33)

PAID
www.netmotion.com

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NetMotion, Inc.

~ Your Design Solutions Provider

Fluid Handling MAIL: NetMotion, Inc.

Handling Tools for On-Line: www.netmotion.com

Wafer, Die, Mask, Credit Cards Accepted!

Look for these symbols throughout the catalog:

AC Servo Motors & Amplifiers

Please turn to page 4 for models and Specifications

Application Description: Machine Requirements:

Start Photocell Motion Control Requirement:

Please turn to page 4 for models and Specifications

AC Servo Motors and Amplifiers Selection Chart

Applicable amplifier model PY2A015 PY2A015 PY2A015 PY2A015

Applicable amplifier model PY2A15, PY2A030

DC Servo Motors & Amplifiers

Please turn to Page 6 for models and specifications

DC Servo Motor Application:

Slave Master Axis

In distributed, multi-axis applications that require electronic

DC Servo Motors and Amplifiers Selection Chart

Single Power Source DC24~48V±10% DC24~48V±10% DC24~48V±10%

Standard Applicable Motors

2, 3 & 5ph Stepper Motors

15°°, 7.5°° Miniature Motors

Specialty / Slim-Line Motors

Standard & High Torque 2-Phase Motors

2, 3 & 5-phase Stepper Motors

19 0.36° RD053MS RM5414SM

More on Motion Control

Printer Photo Typesetting Wire Cutter

bon Character Font

Stepper Motors Selection Procedure

4. Calculate the required torque

Where are step motors being used?

More on Motion Control

Example of a Linear and Rotary Automation Module

NetMotion provides solutions for your motion control de-

Stepper Motor Drivers

PLC , Joystick, Multiaxis, Open or Closed Loop Control

• Engraving • X-Y Stage

Drivers and Motors Selection Chart

6.0 0.9° RD021M8 4160504 84 1.8° RD023MS 5618M06

19 0.36° RD053MS RM5414SM

Stepper Motor Controllers

44mm/ 1.75 • 4 Axes/Axis Controller Available

Some applications require a high degree of synchronization, such as

Linear Actuator/ Slides

Example: Circuit Board Scanning

Motor Drive System is an automated PC-based system that efficiently

• DC 3 wire connection. • With separate amplifier unit that is

Miniature Enclosed Switch

Precision Polymer Tubing

PEEK™ Tubing Available PEEK Tubing (Inches) Tubing Application

Precision Polymer Tubing

Sample Dimensions (Inches) for PTFE, FEP, PFA, ETFE

Fluoroplastic Tube Fittings

Compression-Type Fittings (30-Series)

Flare-Type Fittings (60-Series)

· Added holding reliability